JPH10185996A - Contact position determination mechanism for ic chip of tab handler - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a contact position determination mechanism capable of protecting probe and TAB and shortening adjusting time in positioning the IC chip and the probe in the initial setting of TAB handier. SOLUTION: A position judgment means 9A memorizes the elevating position of pusher 5 elevating on a TAB tape 1. A selection means 9B holds motion input by a direction switch 63, elevates the TAB tape 1, moves the probe card 88 and after the termination of movement of the probe card 8, it lowers the TAB tape 1. Thus, the probe 8A and the TAB in initial setting are protected. Besides, the pusher 5 is not necessary to be manually elevated, and so adjustment time can be shortened.

Description

DETAILED DESCRIPTION OF THE INVENTION

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contact positioning mechanism for an IC chip of a TAB handler. In particular, TAB (Tape Automated B)
The present invention relates to a contact positioning mechanism between an IC chip mounted on a tape and a probe.

[0002]

2. Description of the Related Art Next, the configuration of a TAB handler according to the prior art will be described with reference to FIG. 3 is a TAB tape,
2A is a supply reel, 2B is a storage reel, 3 is a winding mechanism,
4A to 4D are sprockets. 5 and 6 in FIG.
Is a pusher, 7A to 7D are sensors, 8 is a probe card, 10 is a mounting tape, and 11A and 11B are inclined guides.

In FIG. 3, a TA before measurement is supplied to a supply reel 2A.
The B tape 1 is wound. The storage reel 2B winds up the TAB tape 1 after the measurement. Sprockets 4A-4D
Transports the TAB tape 1. The pusher 5 presses the TAB tape 1 against the probe 8A of the probe card 8.

[0004] The inclined guides 11A and 11B guide the TAB tape 1 at the entrance of the reel. Sensors 7A to 7
D detects the presence or absence of the hanging TAB tape 1. The mounting tape 10 is superposed on the TAB tape 1 and supplied on the supply reel 1A.
Alternatively, it is possible to prevent the TAB tapes 1 from contacting or being damaged while being wound on the storage reel 1B.

The tension mechanism 3 is composed of pulleys 3A and 3B for fixing the center of rotation and a tension pulley 3C for pressing the mounting tape 10 by its own weight. The tensioning mechanism 3 prevents the TAB tape 1 from being loosely wound around the reel by applying a load to the mounting tape 10.

In FIG. 3, the supply reel 2A rotates to rotate TA
The B tape 1 is supplied to the pusher 5 side. Sprocket 4
B and the sprocket 4C rotate synchronously to run the TAB tape, and the pusher 5 presses down the TAB tape 1 to release the TAB tape.
The IC chips on the tape 1 are brought into contact with the probe 8A to test the IC chips sequentially. After the measurement, the TAB tape 1 is conveyed to the storage reel 2B side and stored in the storage reel 2B.

In FIG. 3, in order to operate the TAB handler, it is necessary to adjust the contact position between the IC chip and the probe in advance. FIG. 4 is a partially enlarged view of the TAB tape. In FIG. 4, 1A is an IC chip, 1B is a lead, 1C is a test pad, and 1D is a resist.

In FIG. 4, an IC is attached to a tape-like film.
A chip IA is mounted. Leads 1B of conductors serving as terminals of the IC chip 1A are joined on a TAB tape, and terminals of the leads 1B are arranged on the TAB tape as test pads 1C. The lead 1B is covered with a resist 1D around the IC chip 1A.

As described above, the TAB in which the resist 1D is integrated with the IC chip 1A is repeatedly formed on the TAB tape at a constant pitch. Then, the probe 8A having the arrangement of the test pads 1C is aligned with the test pads 1C.

Next, the structure of the pusher will be described with reference to FIG. FIG. 5 is an enlarged perspective view of the pusher. 5A and 6A in FIG. 5 are motors.

In FIG. 5, the motor 4E is a sprocket 4B
, And the motor 4F rotates the sprocket 4C.
The rotation center of the sprocket 4B is held by the arm 4G,
The arm 4G is attached to the first side surface of the block 5B. The rotation center of the sprocket 4C is held by an arm 4H, and the arm 4H is attached to the second side surface of the block 5B.

The motor 5A is mounted on the upper surface of the block 5B. The rotation shaft of the motor 5A is connected to a ball screw 5D, and the ball screw 5D is connected to a ball nut held by the pusher 5. When the motor 5A rotates, the pusher 5
Is guided up and down by the guide 5C.

The motor 6A is mounted on the upper surface of the front stage of the X table 16A.
A is connected to a ball screw built in A, and the ball screw is connected to a ball nut held in the block 5B. When the motor 6A rotates, the block 5B moves up and down guided by the guide 6C. That is, the pusher 6 moves up and down integrally with the sprockets 4B and 4C, the tape clamp (not shown) and the pusher 5. In FIG. 5, TAB is performed by motor 6A.
1 is roughly adjusted, and the motor 5A finely adjusts the elevation position of the TAB 1 by the pusher 5.

In FIG. 5, the motor 6A is connected to a motor drive circuit 61. The motor drive circuit 61 is provided with a push button switch 62 (hereinafter referred to as SW6) disposed on the operation panel.
2). When the SW 62 is turned on, the motor 6A is driven and the pusher 5 is lowered. SW
When 62 is turned off, the motor 6A is driven to raise the pusher 6. That is, the SW 62 is pressed, the TAB tape 1 is brought into contact with the probe 8A, and the contact position is confirmed on a monitor television described later.

FIG. 6 is a layout view near the pusher. FIG. 6A is a plan view of the probe card, and FIG. 6A is a front view of the pusher. In FIG. 6A, the probe card 8 is mounted on a connection ring 8B fixed on the XY stage 80. When the knob 8X is rotated, the probe card 8
Is moved in the X direction, and when the knob 8Y is rotated, the probe card 8 is moved in the Y direction.

In FIG. 6A, a monitor camera 12 serving as an image pickup means is arranged below the XY stage 80, and picks up an image of the probe 8A and the surface of the TAB tape 1. And
The image of the monitor camera 12 is displayed on the monitor television 13 serving as a display means, and the contact state between the probe 8A and the IC chip 1A can be confirmed.

Next, the procedure for initial alignment of the test pad and the probe will be described. First, the TAB handler is switched to the manual mode, and the head device of the TAB tape 1 is moved to the position above the probe card 8. Subsequent work is an initial adjustment procedure. First, the pusher 5 is lowered to bring the leading TAB into contact with the probe 8A. Next, the contact state is confirmed on the monitor television 13, and once the pusher 6 is raised, the contact is released. Then, by rotating the knob 8X or the knob 8Y, the coordinates of the probe card 8 are adjusted, and the contact shift amount is corrected. Next, the pusher 5 is lowered, and the contact state is checked again. This adjustment operation is repeated until the test pad 1C and the probe 8A can be aligned.

[0018]

The conventional position adjusting mechanism is used until the test pad and the probe can be aligned.
There is a problem that the pusher has to be raised and lowered several times. Furthermore, when the test pad and the probe are in contact,
The probe may be moved by mistake.

According to the present invention, when positioning the IC chip and the probe, when the probe card is commanded to move, the pusher raises the TAB tape and then moves the probe card, and after the probe card stops moving,
An object of the present invention is to provide a mechanism in which the pusher lowers the TAB tape, thereby reducing the time for initial adjustment and preventing erroneous operation.

[0020]

In order to achieve this object, the present invention provides a sprocket 4B and a sprocket 4C.
Rotates synchronously to run the TAB tape 1 and pusher 5
Is a TAB handler that presses down the TAB tape 1 to bring the IC chip 1A of the TAB tape 1 into contact with the probe 8A and sequentially tests the IC chip 1A. Elevating output generating means 61, position detecting means 6F for detecting the elevating position of the pusher 5, and moving means 8MX for moving the probe card 8 on which the probe 8A is mounted in the X direction on the plane.
X output generating means 6X for driving the moving means 8MX,
A moving unit 8MY for moving the probe card 8 in the Y direction on a plane orthogonal to the X direction, a Y output generating unit 6Y for driving the moving unit 8MY, and a moving direction of the probe card 8 in the X direction or the Y direction , A position determination unit 9A for storing the elevation position of the pusher 5 by the position detection unit 6F, and an output command to one of the elevation output generation unit 61, the X output generation unit 6X, and the Y output generation unit 6Y. When a movement output is generated in the direction switch 63, the selection means 9B stops the movement output and reads the elevation position of the pusher 5 from the position determination means 9; 9
B instructs the pusher 5 to move up and releases the movement output stop after confirming that the pusher 5 has stopped moving up.

Further, when the movement output of the direction switch 63 stops, the selection means 9B reads the elevation position of the pusher 5 from the position determination means 9A, and the selection means 9B instructs the pusher 5 to descend.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing an embodiment of a contact positioning mechanism according to the present invention, and FIG.
Corresponding to The components corresponding to those in FIG. 5 are denoted by the same reference numerals, and the description of the components having the same reference numerals will be omitted unless otherwise required.

In FIG. 1, 6X and 6Y are motor drive circuits, 8MX and 8MY are pulse motors, 9 is a control unit composed of position determining means 9A and selecting means 9B, and 63 is a direction switch.

In FIG. 1, a motor drive circuit 6X serving as an X output generating means sends a drive output to a motor 8MX. The motor drive circuit 6Y serving as the Y output generation means sends a drive output to the motor 8MY. When the motor 8MX as the first moving means is driven, the probe card 8 is moved in the X direction on the plane. Motor 8 serving as second moving means
When the MY is driven, the probe card 8 is moved in the Y direction on a plane orthogonal to the X direction.

A rotation detecting plate 6E is attached to the end of the rotating shaft of a motor 6A that moves the sprockets 4B and 4C and the pusher 5 up and down integrally. The detector 6F detects the number of rotations of the motor 6A based on the presence or absence of a slit in the rotation detection plate 6E. The detection signal of the detector 6F is sent to the position judging means 9A, and the elevation position of the pusher 5 is stored. In the embodiment, the number of rotations of the motor 6A is replaced with the number of counts and stored.

The selection means 9B is connected to the direction switch 63 on the operation panel. The direction switch 63 is, for example,
It is a jog switch, and may be a combination of four direction keys. When the direction of movement of the probe card 8 is switched to the positive or negative direction in the X direction or the Y direction by the direction switch 63, the selection means 9B selects the designated direction and issues an output command to the motor drive circuit 6X or the motor drive circuit 6Y. .

The selecting means 9B reads the elevation position of the pusher 5 from the position judging means 9A.
Select whether to output the command to 1. Note that the position determining means 9A and the selecting means 9B in the control section 9 are provided with a C (not shown).
Operated by PU command.

FIG. 2 is a plan view of the probe card according to the present invention, and corresponds to FIG. In FIG. 2, XY
The stage 81 is composed of an X stage 81X and a Y stage 81Y
It consists of. Y stage 81 on X stage 81X
Y is connected by a linear guide (not shown). The connection ring 8B is fixed on the Y stage 81Y, and the probe card 8 is mounted on the connection ring 8B.

The rotation shaft 8CY of the pulse motor 8MY is connected to the ball screw 8BY. Ball screw 8BY is Y
It is screw-coupled to a ball nut incorporated in the connecting member 8AX for connecting to the stage 81Y. When the pulse motor 8MY is driven, the Y stage 81Y is screwed.

The rotation shaft 8CX of the pulse motor 8MX is connected to the ball screw 8BX. Ball screw 8BX is X
It is screw-coupled to a ball nut incorporated in the connecting member 8AX for connecting to the stage 81X. When the pulse motor 8MX is driven, the X stage 81X is screwed.

A monitor camera 12 serving as an image pickup means shown in FIG. 6A is arranged below the XY stage 81 shown in FIG. 2 to image the probe 8A and the surface of the TAB tape 1. Then, the image of the monitor camera 12 is displayed on the monitor television 13 serving as a display means, and the probe 8A
And the contact state of the IC chip 1A can be confirmed.

Next, the procedure of the initial alignment of the test pad and the probe according to the present invention will be described. Switching the TAB handler to the manual mode and moving the head device of the TAB tape 1 to the position above the probe card 8 is the same as in the related art. Next, the push button switch 62 is pressed, the pusher 5 is lowered, and the leading TAB is brought into contact with the probe 8A. Next, the contact state is checked on the monitor TV 13,
The direction card 63 is operated to move the probe card 8.

At this time, the input of the direction switch 63 is held by the selection means 9B, and the selection means 9B is switched to the position determination means 9A.
Confirm the position of the pusher 5 from. When the position determining means 9A is at the lowered position, the selecting means 9B
Instruct 1 to pusher 5 to ascend. After confirming that the pusher 5 has risen, the selection means 9B releases the hold input of the direction switch 63, and moves the probe 8A in the movement direction according to the input of the direction switch 63.

When the input of the direction switch 63 is released, the selecting means 9B instructs the motor drive circuit 61 to lower the pusher 5. Thus, in the present invention, when the XY stage 81 is moving, the pusher 5 is always at the raised position.

[0034]

According to the present invention, there is provided a position determining means for storing a vertical position of a pusher for raising and lowering a TAB tape, holding a movement input by a direction switch, moving the probe card after raising the TAB tape, and moving the probe card. Is provided with a selection means for lowering the TAB tape after stopping the movement, so that the probe and the TAB can be protected when the IC chip and the probe are aligned in the initial adjustment.
In addition, the adjustment time can be shortened because the pusher does not have to be raised and lowered manually.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of a contact positioning mechanism according to the present invention.

FIG. 2 is a plan view of a probe card according to the present invention.

FIG. 3 is a configuration diagram of a TAB handler according to the related art.

FIG. 4 is a partially enlarged view of a TAB tape.

FIG. 5 is a configuration diagram of a pusher according to the related art.

FIG. 6 is a layout view near the pusher of FIG. 5;

[Explanation of symbols]

 Reference Signs List 1 TAB tape 1A IC chip 1B lead 1C Test pad 4A sprocket 4B sprocket 5 Pusher 6 Pusher 6X Motor drive circuit (X output generation means) 6Y Motor drive circuit (Y output generation means) 8 Probe card 8A Probe 8MX Pulse motor 8MY Pulse motor Reference Signs List 9 control unit 9A position determination means 9B selection means 61 motor drive circuit (elevation output generation means) 62 push button switch 63 direction switch

Claims (4)

[Claims] 1. A first sprocket and a second sprocket rotate synchronously to run a TAB tape, and a pusher presses down the TAB tape to bring the IC chip of the TAB tape into contact with a probe to push the IC chip. A TAB handler for sequentially testing, wherein when the IC chip and the probe are aligned, when a probe card is commanded to move, the pusher raises the TAB tape and then moves the probe card, and the probe card Wherein the pusher lowers the TAB tape after the TAB stops moving.
A contact positioning mechanism for the IC chip of the handler. 2. A lifting / lowering means for raising / lowering the pusher, a lifting / lowering output generating means for driving the lifting / lowering means, a position detecting means for detecting a lifting / lowering position of the pusher, and a probe card on which the probe is mounted on a plane. First moving means for moving the probe card in the X direction, X output generating means for driving the first moving means, and second moving means for moving the probe card in the Y direction on a plane orthogonal to the X direction. A Y output generating means for driving the second moving means; a direction switch for switching the direction of movement of the probe card between the positive and negative directions in the X direction or the Y direction; and a push-up / down position of the pusher by the position detecting means. A control unit comprising: a position determination unit; and a selection unit that issues an output command to one of the elevation output generation unit, the X output generation unit, and the Y output generation unit. When a movement output is generated in the direction switch, the selection means stops the movement output and reads the ascending / descending position of the pusher from the position determination means. 2. The contact positioning mechanism for an IC chip of a TAB handler according to claim 1, wherein said movement output stop is released after confirming the ascent stop. 3. The apparatus according to claim 1, wherein when the movement output of the direction switch is stopped, the selecting means reads the elevating position of the pusher from the position determining means, and the selecting means instructs the pusher to descend. 3. A contact positioning mechanism for an IC chip of a TAB handler according to claim 2. 4. A switch for switching a direction of raising and lowering the pusher; an imaging unit for imaging a contact state between the IC chip and the probe; and a display unit for monitoring an image of the imaging unit. 4. A contact positioning mechanism for an IC chip of a TAB handler according to claim 1, wherein a pusher is lowered to check a contact position between the IC chip and the probe on the monitor.