JPH10195635A5 - - Google Patents

Info

Publication number
JPH10195635A5
JPH10195635A5 JP1997002567A JP256797A JPH10195635A5 JP H10195635 A5 JPH10195635 A5 JP H10195635A5 JP 1997002567 A JP1997002567 A JP 1997002567A JP 256797 A JP256797 A JP 256797A JP H10195635 A5 JPH10195635 A5 JP H10195635A5
Authority
JP
Japan
Prior art keywords
cylindrical member
auxiliary electrode
power supply
vacuum chamber
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997002567A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10195635A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP256797A priority Critical patent/JPH10195635A/ja
Priority claimed from JP256797A external-priority patent/JPH10195635A/ja
Publication of JPH10195635A publication Critical patent/JPH10195635A/ja
Publication of JPH10195635A5 publication Critical patent/JPH10195635A5/ja
Pending legal-status Critical Current

Links

JP256797A 1997-01-10 1997-01-10 円筒状部材の内周面への硬質カーボン膜形成方法 Pending JPH10195635A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP256797A JPH10195635A (ja) 1997-01-10 1997-01-10 円筒状部材の内周面への硬質カーボン膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP256797A JPH10195635A (ja) 1997-01-10 1997-01-10 円筒状部材の内周面への硬質カーボン膜形成方法

Publications (2)

Publication Number Publication Date
JPH10195635A JPH10195635A (ja) 1998-07-28
JPH10195635A5 true JPH10195635A5 (2) 2004-11-25

Family

ID=11532956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP256797A Pending JPH10195635A (ja) 1997-01-10 1997-01-10 円筒状部材の内周面への硬質カーボン膜形成方法

Country Status (1)

Country Link
JP (1) JPH10195635A (2)

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