JPH10199846A - 紫外線処理方法 - Google Patents

紫外線処理方法

Info

Publication number
JPH10199846A
JPH10199846A JP1452297A JP1452297A JPH10199846A JP H10199846 A JPH10199846 A JP H10199846A JP 1452297 A JP1452297 A JP 1452297A JP 1452297 A JP1452297 A JP 1452297A JP H10199846 A JPH10199846 A JP H10199846A
Authority
JP
Japan
Prior art keywords
substrate
ozone
oxidation
ultraviolet
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1452297A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10199846A5 (2
Inventor
Katsuyasu Hanasaka
勝康 花阪
Koji Hosoya
細谷　　浩二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Storage Battery Co Ltd
Original Assignee
Japan Storage Battery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Storage Battery Co Ltd filed Critical Japan Storage Battery Co Ltd
Priority to JP1452297A priority Critical patent/JPH10199846A/ja
Publication of JPH10199846A publication Critical patent/JPH10199846A/ja
Publication of JPH10199846A5 publication Critical patent/JPH10199846A5/ja
Pending legal-status Critical Current

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Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP1452297A 1997-01-09 1997-01-09 紫外線処理方法 Pending JPH10199846A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1452297A JPH10199846A (ja) 1997-01-09 1997-01-09 紫外線処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1452297A JPH10199846A (ja) 1997-01-09 1997-01-09 紫外線処理方法

Publications (2)

Publication Number Publication Date
JPH10199846A true JPH10199846A (ja) 1998-07-31
JPH10199846A5 JPH10199846A5 (2) 2004-10-21

Family

ID=11863446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1452297A Pending JPH10199846A (ja) 1997-01-09 1997-01-09 紫外線処理方法

Country Status (1)

Country Link
JP (1) JPH10199846A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244227A (ja) * 2000-02-25 2001-09-07 Natl Inst Of Advanced Industrial Science & Technology Meti 半導体基板表面の気相洗浄法
KR20040001993A (ko) * 2002-06-29 2004-01-07 주식회사 하이닉스반도체 구리 금속 배선 형성방법 및 이를 이용한 반도체 소자의다층 배선 형성방법
SG115381A1 (en) * 2001-06-20 2005-10-28 Univ Singapore Removal of organic layers from organic electronic devices

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244227A (ja) * 2000-02-25 2001-09-07 Natl Inst Of Advanced Industrial Science & Technology Meti 半導体基板表面の気相洗浄法
SG115381A1 (en) * 2001-06-20 2005-10-28 Univ Singapore Removal of organic layers from organic electronic devices
KR20040001993A (ko) * 2002-06-29 2004-01-07 주식회사 하이닉스반도체 구리 금속 배선 형성방법 및 이를 이용한 반도체 소자의다층 배선 형성방법

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JPH10199846A5 (2)

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