JPH10200023A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH10200023A
JPH10200023A JP9001104A JP110497A JPH10200023A JP H10200023 A JPH10200023 A JP H10200023A JP 9001104 A JP9001104 A JP 9001104A JP 110497 A JP110497 A JP 110497A JP H10200023 A JPH10200023 A JP H10200023A
Authority
JP
Japan
Prior art keywords
chip
lead frame
die pad
solder
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9001104A
Other languages
Japanese (ja)
Other versions
JP3519229B2 (en
Inventor
Toshihiro Arai
利浩 新井
Tadanori Yamada
忠則 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP00110497A priority Critical patent/JP3519229B2/en
Publication of JPH10200023A publication Critical patent/JPH10200023A/en
Application granted granted Critical
Publication of JP3519229B2 publication Critical patent/JP3519229B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/013Manufacture or treatment of die-attach connectors
    • H10W72/01308Manufacture or treatment of die-attach connectors using permanent auxiliary members, e.g. using alignment marks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/381Auxiliary members
    • H10W72/387Flow barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/541Dispositions of bond wires
    • H10W72/547Dispositions of multiple bond wires
    • H10W72/5475Dispositions of multiple bond wires multiple bond wires connected to common bond pads at both ends of the wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/931Shapes of bond pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Punching Or Piercing (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

(57)【要約】 【課題】リードフレームを用いて組立てたデュアル素子
のSOPモールド型半導体装置を実施対象に、チップを
半田マウントする際の半田ブリッジ発生を防ぎ、併せて
チップの発生熱に対する放熱性の改善を図る。 【解決手段】リードフレーム1に2素子のパワー半導体
素子2を搭載して組立てた樹脂封止型の半導体装置で、
左右に並べてリードフレームに形成した一対のダイパッ
ド1aにそれぞれパワー半導体素子2のチップを半田マ
ウントしたものにおいて、前記ダイパッドの対向側縁に
沿ってチップマウント側に向けて起立する側壁部1a-1
を形成し、チップを半田マウントする際に溶融半田が側
方に広がるのを阻止してダイパッド間の半田ブリッジ発
生を防止するとともに、各ダイパッドごとにダイパッド
とその外部リード1bを一体に連結し、該外部リードを
伝熱経路としてチップの発生熱に対する放熱性を高め
る。
(57) [Problem] To prevent the occurrence of solder bridges when mounting a chip by soldering, and to dissipate heat generated by the chip in a dual element SOP molded semiconductor device assembled using a lead frame. Improve the performance. A resin-sealed semiconductor device in which two power semiconductor elements are mounted on a lead frame and assembled.
In a device in which a chip of the power semiconductor element 2 is solder-mounted on a pair of die pads 1a formed on a lead frame side by side, a side wall portion 1a-1 rising toward the chip mount side along the opposing side edge of the die pad.
To prevent the molten solder from spreading to the side when mounting the chip by soldering to prevent the occurrence of a solder bridge between the die pads, and to integrally connect the die pad and its external lead 1b for each die pad, The external lead is used as a heat transfer path to enhance the heat radiation of the heat generated by the chip.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、スイッチング電源
用のパワーデバイスなどの用途に用いる半導体装置とし
て、リードフレームに2素子のパワー半導体素子を搭載
し、その周域を樹脂封止して組立てたデュアル素子のS
OP(Small Outline Package)モールド型半導体装置に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device used for a power device for a switching power supply or the like, in which two power semiconductor elements are mounted on a lead frame and the periphery thereof is sealed with a resin. Dual element S
The present invention relates to an OP (Small Outline Package) molded semiconductor device.

【0002】[0002]

【従来の技術】まず、頭記した半導体装置として、パワ
ー半導体素子にIGBT(絶縁ゲート型バイポーラトラ
ンジスタ)を用いたデュアル素子SOPモールド型半導
体装置の従来における組立構造を図2に示す。図におい
て、1はリードフレーム、2はリードフレーム1に搭載
したパワー半導体素子、3は内部配線用のボンディング
ワイヤ、4は樹脂パッケージである。ここで、リードフ
レーム1には、僅かな裁断間隙を隔てて左右に並ぶ一対
のダイパッド1aと、左右に並ぶダイパッド1aを挟ん
でその両側に配列した外部リード1b(コレクタ端
子),1c(エミッタ端子),1d(ゲート端子)が形
成されている。なお、周知のように、リードフレームは
図示されていないタイバー,ガイドレールと組み合わせ
て前記したパターンをプレス加工により帯状の金属製リ
ボンに打ち抜いて形成される。
2. Description of the Related Art First, as a semiconductor device described above, FIG. 2 shows a conventional assembly structure of a dual element SOP mold type semiconductor device using an IGBT (insulated gate bipolar transistor) as a power semiconductor element. In the figure, 1 is a lead frame, 2 is a power semiconductor element mounted on the lead frame 1, 3 is a bonding wire for internal wiring, and 4 is a resin package. Here, the lead frame 1 has a pair of die pads 1a arranged on the left and right with a slight cutting gap therebetween, and external leads 1b (collector terminals) and 1c (emitter terminals) arranged on both sides of the die pads 1a arranged on the left and right. ), 1d (gate terminal). As is well known, the lead frame is formed by stamping the above-described pattern into a band-shaped metal ribbon by press working in combination with a tie bar and a guide rail (not shown).

【0003】そして、半導体装置を組立てるには、まず
リードフレーム1に形成した左右のダイパッド1aの上
にコレクタ電極面を重ね合わせてパワー半導体素子2の
チップを1個ずつ振り分けて半田マウントし、続いてダ
イパッド1aとコレクタ端子の外部リード1bとの間,
およびパワー半導体素子2とエミッタ端子の外部リード
1c,ゲート端子の外部リード1dとの間にワイヤ3を
ボンディングし、さらにトランスファモールド法により
樹脂パッケージ4を成形した後、リードフレームをタイ
バーカットして製品が完成する。
In order to assemble the semiconductor device, first, the collector electrode surfaces are superimposed on the left and right die pads 1a formed on the lead frame 1, the chips of the power semiconductor elements 2 are sorted and solder mounted one by one. Between the die pad 1a and the external lead 1b of the collector terminal,
A wire 3 is bonded between the power semiconductor element 2 and the external lead 1c of the emitter terminal and the external lead 1d of the gate terminal, and further, a resin package 4 is formed by a transfer molding method. Is completed.

【0004】[0004]

【発明が解決しようとする課題】ところで、前記した従
来のパワー半導体装置では、ICパッケージ用のリード
フレームと同様なリードフレームを採用しており、その
リードフレームは全面域が平坦面で、かつダイパッドと
各外部リードとの間が切り離されており、パワー素子の
チップ搭載したダイパッドとコレクタ外部リードとの間
をボンディングワイヤ接続している。そのために、組立
性,および放熱性の面で次記のような問題点がある。
By the way, in the above-mentioned conventional power semiconductor device, a lead frame similar to a lead frame for an IC package is employed, and the lead frame has a flat surface over its entire surface and a die pad. And each external lead is separated, and a bonding wire connection is made between the die pad on which the power element chip is mounted and the collector external lead. Therefore, there are the following problems in terms of assemblability and heat dissipation.

【0005】1)図3で示すように、左右のダイパッド
1aに振り分けてパワー半導体素子2のチップを半田マ
ウントする際に、溶融半田がダイパッドの面上を流動し
て左右広がり、このために半田がダイパッド1aの側縁
からはみ出して、左右に並ぶダイパッド1aの間が半田
5でブリッジしてしまう欠陥が生じ易い。そこで、従来
ではチップを半田マウントする際に、半田量を少な目に
調整してダイパッド相互間での半田ブリッジの発生を防
ぐようにしているが、半田量を減らすとダイパッド/チ
ップ間の接合強度が弱くなり、ヒートサイクルなどで熱
応力が繰り返し加わると、チップの半田接合面が剥離す
るなどして製品の信頼性が低下する。
1) As shown in FIG. 3, when the power semiconductor element 2 chip is solder-mounted while being distributed to the left and right die pads 1a, the molten solder flows on the surface of the die pad and spreads right and left. Is protruded from the side edge of the die pad 1a, and a defect in which the solder 5 bridges between the die pads 1a arranged on the left and right easily occurs. Therefore, in the past, when soldering a chip, the amount of solder was adjusted to a small amount to prevent the occurrence of solder bridges between the die pads. However, when the amount of solder is reduced, the bonding strength between the die pad and the chip is reduced. When the thermal stress is repeatedly applied in a heat cycle or the like, the reliability of the product is reduced due to the peeling of the solder joint surface of the chip.

【0006】2)パワー半導体装置では、パワーチップ
の発生熱を効率よく放熱する必要があるが、従来のリー
ドフレーム1では、ダイパッド1aと各外部リード1b
との間が切り離されていて、両者間がボンディングワイ
ヤ3で相互接続されているだけであり、かつダイパッド
1aの周域は樹脂パッケージ4で封止されているため
に、外部リード1bを通じての外部への放熱が殆ど期待
できない。
2) In the power semiconductor device, it is necessary to efficiently radiate the heat generated from the power chip. In the conventional lead frame 1, the die pad 1a and each external lead 1b are required.
Are separated from each other, only the two are interconnected with the bonding wire 3, and the peripheral area of the die pad 1 a is sealed with the resin package 4. Heat can hardly be expected.

【0007】本発明は上記の点にかんがみなされたもの
であり、リードフレームを用いて組立てた頭記したデュ
アル素子のSOPモールド型半導体装置を実施対象に、
前記課題を解決して組立性,および放熱性の改善を図っ
た半導体装置を提供することを目的とする。
The present invention has been made in view of the above points, and is intended to be applied to a dual element SOP molded semiconductor device described above assembled using a lead frame.
It is an object of the present invention to provide a semiconductor device which solves the above-mentioned problems and improves assemblability and heat dissipation.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、本発明によれば、リードフレームに2素子のパワー
半導体素子を搭載して組立てた樹脂封止型の半導体装置
で、左右に並べてリードフレームに形成した一対のダイ
パッドにそれぞれパワー半導体素子のチップを半田マウ
ントしたものにおいて、次記のように構成するものとす
る。
According to the present invention, there is provided a resin-encapsulated semiconductor device in which two power semiconductor elements are mounted on a lead frame and assembled. A power semiconductor element chip is solder-mounted on a pair of die pads formed on a lead frame, respectively, and has the following configuration.

【0009】1)左右に並ぶ一対のダイパッドについ
て、各ダイパッドの対向側縁に沿ってチップマウント側
に向けて起立する側壁部を形成するものとし、その側壁
部を、リードフレームをプレス加工で打ち抜き形成する
際に同時形成する。上記構成のリードフレームを採用す
ることにより、リードフレームのダイパッドにチップを
半田マウントする際に、ダイパッドごとにその側縁に起
立形成した側壁部が溶融半田の広がりを阻止する仕切り
壁の役目を果たし、半田量を少な目に調整する必要なし
に、ダイパッド相互間で半田ブリッジが生じるのを確実
に防止することができる。
1) With respect to a pair of die pads arranged on the left and right sides, side walls which stand toward the chip mount side are formed along opposing side edges of each die pad, and the side walls are punched by a lead frame by press working. Simultaneously formed when forming. By adopting the lead frame of the above configuration, when the chip is solder-mounted on the die pad of the lead frame, the side wall portion formed on the side edge of each die pad serves as a partition wall for preventing the spread of the molten solder. In addition, it is possible to reliably prevent the occurrence of a solder bridge between the die pads without having to adjust the amount of solder to a small amount.

【0010】2)左右に並ぶ各ダイパッドごとにダイパ
ッドとその外部リードを一体に連結してリードフレーム
に形成する。この構成により、ダイパッド,およびダイ
パッドに連ねて樹脂パッケージから外方に引出した外部
リードを伝熱経路として、パワー半導体素子の発生熱を
外部へ効率よく放熱させることができる。
2) For each die pad arranged on the left and right, the die pad and its external lead are integrally connected to each other to form a lead frame. With this configuration, the heat generated by the power semiconductor element can be efficiently radiated to the outside by using the die pad and the external lead drawn out of the resin package in connection with the die pad as a heat transfer path.

【0011】[0011]

【発明の実施の形態】以下、本発明の実施例を図1(a),
(b) に基づいて説明する。なお、実施例の図中で図2に
対応する同一部材には同じ符号が付してある。すなわ
ち、図1の実施例では、リードフレーム1のダイパッド
1aとその外部リード1b(パワー半導体素子2がIG
BTである場合にはコレクタ端子の外部リード、MOS
FETである場合にはドレイン端子の外部リード)とが
一体に連結されており、かつ各ダイパッド1aごとに、
互いに向かい合う側縁に沿ってチップマウント側に向け
て立ち上がる側壁部1a-1が形成されている。この側壁
部1a-1は、金属リボンからリードフレーム1を打ち抜
くプレス加工の際に、同時にプレス金型による剪断,押
し曲げ加工でダイパッド1aの対向側縁に沿って形成す
るものとする。なお、側壁部1a-1の起立角度は、プレ
ス金型の打ち抜き角度に合わせて直角,ないし直角に近
い鋭角に形成される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will now be described with reference to FIGS.
Explanation will be made based on (b). In the drawings of the embodiment, the same members corresponding to FIG. 2 are denoted by the same reference numerals. That is, in the embodiment of FIG. 1, the die pad 1a of the lead frame 1 and its external leads 1b (the power semiconductor element 2 is IG
If BT, external lead of collector terminal, MOS
In the case of an FET, an external lead of a drain terminal) is integrally connected, and for each die pad 1a,
Sidewall portions 1a-1 are formed along the side edges facing each other to rise toward the chip mount side. The side wall portion 1a-1 is formed along the opposing side edge of the die pad 1a by shearing and pressing with a press die at the same time when the lead frame 1 is punched from a metal ribbon. The upright angle of the side wall 1a-1 is formed at a right angle or an acute angle close to the right angle in accordance with the punching angle of the press die.

【0012】かかる構成のリードフレーム1を採用する
ことにより、リードフレーム1のダイパッド1aにパワ
ー半導体素子2のチップを半田マウントする際に、半田
5が前記した側壁部1a-1で側方への広がりが阻止され
る。これにより、図3で述べたようなダイパッド相互間
の半田ブリッジの発生が確実に防げる。また、半導体装
置の通電に伴う半導体チップの発生熱はダイパッド1
a,およびダイパッド1aと一体に連なった外部リード
1bを伝熱して効率よく外部に熱放散される。
By employing the lead frame 1 having such a configuration, when the chip of the power semiconductor element 2 is mounted on the die pad 1a of the lead frame 1 by solder, the solder 5 is directed laterally at the side wall 1a-1. Spread is prevented. Thereby, the occurrence of the solder bridge between the die pads as described with reference to FIG. 3 can be surely prevented. The heat generated by the semiconductor chip due to the energization of the semiconductor device is controlled by the die pad
a, and the external leads 1b integrated with the die pad 1a are transferred to the outside and heat is efficiently radiated to the outside.

【0013】[0013]

【発明の効果】以上述べたように、本発明の構成によれ
ば、リードフレームにおける左右一対のダイパッドに対
して、その対向側縁に側壁部を起立形成したことによ
り、各ダイパッドにパワー半導体素子のチップを半田マ
ウントする際に不要な溶融半田の側方への広がりを阻止
して、ダイパッド間に半田ブリッジが生じるのを確実に
防ぐことができる。
As described above, according to the structure of the present invention, the pair of left and right die pads in the lead frame are formed with the side walls standing on the opposite side edges, so that the power semiconductor element is provided in each die pad. When the chip is solder-mounted, unnecessary molten solder is prevented from spreading to the side, so that the occurrence of a solder bridge between the die pads can be surely prevented.

【0014】また、各ダイパッドごとに、ダイパッドと
該ダイパッドに接続する外部リードを一体に連結したリ
ードフレームを用いることにより、ダイパッドと外部リ
ードを切り離した従来構造と比べてチップ素子の発生熱
に対する放熱性の向上が図れる。
Further, by using a lead frame in which a die pad and an external lead connected to the die pad are integrally connected to each die pad, heat radiation to the heat generated from the chip element can be reduced as compared with the conventional structure in which the die pad and the external lead are separated. Performance can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例によるデュアル素子のSOPモ
ールド型半導体装置の組立構成図であり、(a) は平面
図、(b) は(a) の矢視X−X断面図
1A and 1B are assembly configuration diagrams of a dual-element SOP molded semiconductor device according to an embodiment of the present invention, wherein FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along line XX of FIG.

【図2】デュアル素子のSOPモールド型半導体装置を
対象とした従来構成の平面図
FIG. 2 is a plan view of a conventional configuration for a dual-element SOP molded semiconductor device.

【図3】図2の構成でリードフレームのダイパッド上に
チップを半田マウントした際に生じる半田ブリッジの発
生状況を表した図
FIG. 3 is a diagram showing a state of occurrence of a solder bridge generated when a chip is solder-mounted on a die pad of a lead frame in the configuration of FIG. 2;

【符号の説明】[Explanation of symbols]

1 リードフレーム 1a ダイパッド 1a-1 側壁部 1b〜1d 外部リード 2 パワー半導体素子 4 樹脂パッケージ 5 半田 DESCRIPTION OF SYMBOLS 1 Lead frame 1a Die pad 1a-1 Side wall part 1b-1d External lead 2 Power semiconductor element 4 Resin package 5 Solder

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】リードフレームに2素子のパワー半導体素
子を搭載して組立てた樹脂封止型の半導体装置であり、
左右に並べてリードフレームに形成した一対のダイパッ
ドに振り分けてパワー半導体素子のチップを半田マウン
トしたものにおいて、前記ダイパッドの対向側縁に沿っ
てチップマウント側に向けて起立する側壁部を形成した
ことを特徴とする半導体装置。
1. A resin-sealed semiconductor device in which two power semiconductor elements are mounted on a lead frame and assembled.
In the case where the chip of the power semiconductor element is solder-mounted by distributing it to a pair of die pads formed on the lead frame side by side, the side wall standing up toward the chip mount side is formed along the opposite side edge of the die pad. Characteristic semiconductor device.
【請求項2】請求項1記載の半導体装置において、ダイ
パッドの側壁部を、リードフレームをプレス加工で打ち
抜き形成する際に同時形成したことを特徴とする半導体
装置。
2. The semiconductor device according to claim 1, wherein the side wall of the die pad is formed simultaneously with the punching of the lead frame by press working.
【請求項3】請求項1記載の半導体装置において、各ダ
イパッドごとにダイパッドとその外部リードを一体に連
結してリードフレームに形成したことを特徴とする半導
体装置。
3. The semiconductor device according to claim 1, wherein a die pad and an external lead are integrally connected to each other for each die pad to form a lead frame.
JP00110497A 1997-01-08 1997-01-08 Semiconductor device Expired - Lifetime JP3519229B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP00110497A JP3519229B2 (en) 1997-01-08 1997-01-08 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00110497A JP3519229B2 (en) 1997-01-08 1997-01-08 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH10200023A true JPH10200023A (en) 1998-07-31
JP3519229B2 JP3519229B2 (en) 2004-04-12

Family

ID=11492185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00110497A Expired - Lifetime JP3519229B2 (en) 1997-01-08 1997-01-08 Semiconductor device

Country Status (1)

Country Link
JP (1) JP3519229B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7982293B2 (en) 2006-11-06 2011-07-19 Infineon Technologies Ag Multi-chip package including die paddle with steps
US8304902B2 (en) 2010-03-23 2012-11-06 Sanken Electric Co., Ltd. Semiconductor device
JP2017191895A (en) * 2016-04-14 2017-10-19 ローム株式会社 Semiconductor device and method of manufacturing the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106298723A (en) * 2015-05-13 2017-01-04 无锡华润安盛科技有限公司 A kind of twin islet lead frame framework

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7982293B2 (en) 2006-11-06 2011-07-19 Infineon Technologies Ag Multi-chip package including die paddle with steps
US8304902B2 (en) 2010-03-23 2012-11-06 Sanken Electric Co., Ltd. Semiconductor device
JP2017191895A (en) * 2016-04-14 2017-10-19 ローム株式会社 Semiconductor device and method of manufacturing the same

Also Published As

Publication number Publication date
JP3519229B2 (en) 2004-04-12

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