JPH10223643A - Cassette spacer for changing wafer size - Google Patents

Abstract

(57) [Problem] A conventional wafer heat treatment furnace has a problem that the use efficiency of all the shelves for 5 inches, 6 inches, and 8 inches is poor. In order to respond to the desire to handle things well. SOLUTION: A wafer size changing cassette spacer 1 used for loading a wafer of a smaller size by directly using a shelf for a large size wafer of a wafer heat treatment furnace, and having a positioning size of a large cassette and Positioning guides 2 of the same size as the large cassette,
Provided is a cassette spacer for changing a wafer size, to which 3, 4, and 5 are attached.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette spacer for changing the size of wafers, which is used when loading wafers of different sizes on a shelf of a wafer heat treatment furnace.

[0002]

2. Description of the Related Art Conventionally, in a wafer heat treatment furnace, 5
Dedicated shelves for inches, 6 inches and 8 inches were provided to store each wafer.

[0003]

However, in the above-mentioned conventional wafer heat treatment furnace, an 8-inch shelf is often used, so that the use efficiency of all the 5-inch, 6-inch, and 8-inch shelves is high. However, there has been a demand that a common machine should process 5-inch, 6-inch, and 8-inch devices well.

[0004]

SUMMARY OF THE INVENTION In order to meet the above-mentioned demands, the present invention is used for loading a wafer of a smaller size by directly using a shelf for a large-sized wafer in a wafer heat treatment furnace. A cassette spacer for changing the size of a wafer, wherein the spacer has the same size as the positioning size of the large cassette, and a positioning guide having the same center as that of the large cassette is mounted on the spacer. It is.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a wafer size changing cassette spacer according to the present invention will be described below with reference to FIGS. 1A and 1B show an embodiment of a wafer size changing cassette spacer according to the present invention, wherein FIG. 1A is a plan view, FIG. 1B is a front view of FIG.
(C) is a side view of (A), and FIG. 2 shows a mode of use of the wafer size changing cassette spacer of FIG.
(A) is a plan view, (B) is a front view of (A), and (C) is a side view of (A). The cassette spacer 1 for changing a wafer size according to the present invention is used for loading a wafer of a smaller size by directly using a shelf for a wafer of a large size of 8 inches in a wafer heat treatment furnace, and is large. A spacer having the same size as the positioning size of the cassette is used, and positioning guides 2, 3, 4, and 5 having the same center as the large cassette are attached to the spacer 1. That is, the structure of the cassette spacer according to the present invention is as follows with reference to FIGS. The cassette spacer 1 for changing the wafer size uses the shelf 7 on which a large cassette can be set as it is. The spacer 1 has the same size as the positioning size of the large cassette. Positioning guides 2, 3, 4, and 5 having the same center as the large cassette are attached to the spacer 1. With handle 6 for carrying. 11 is a 5-inch wafer, 2 and 3 are positioning guides in the left-right direction when a 5-inch wafer cassette is mounted,
4 and 5 are positioning guides in the front-rear direction when a 5-inch wafer cassette is mounted, and 12 is an 8-inch wafer.
A, 3A, 4A and 5A are positioning guides for mounting an 8-inch wafer cassette, 13 and 14 are positioning guides for the spacer 1 in the front-rear direction, and 9 is a 5-inch wafer cassette. The usability of the wafer size changing cassette spacer 1 according to the present invention is as follows with reference to FIGS. The wafer size changing cassette spacer 1 can be set on the shelf 7 by mounting a small cassette with the wafer cassette being set, or by removing the small cassette and carrying it. The spacer 1 can be manufactured in any small size by changing the guide position. Next, as an example, a procedure for replacing a 5-inch cassette will be described with reference to FIG. The shelf 7 is used as it is (using the 8-inch side). The 5-inch wafer 11 is placed on the spacer 1 and positioned by the guides 2, 3, 4, and 5. The spacer 1 and the 5-inch wafer cassette 9 are positioned on the shelf 7.

[0006]

The cassette spacer for changing the wafer size according to the present invention has the following effects because it is configured as described above. It is not necessary to change the shelf of the main unit, and it is possible to easily change the wafer size by creating a spacer that matches the cassette.

[Brief description of the drawings]

FIG. 1 shows an embodiment of a wafer size changing cassette spacer according to the present invention, wherein (A) is a plan view,
(B) is a front view of (A), (C) is a side view of (A).

2 (A) is a plan view, FIG. 2 (B) is a front view of FIG. 1 (A), and FIG. 2 (C) is a side view of FIG. 1 (A). It is.

[Description of Signs] 1: Cassette spacer for changing wafer size 2, 3, 4, 5: Positioning guide for 5 inch wafer 2A, 3A, 4A, 5A: Positioning guide for 8 inch wafer 6: Handle 7: Shelf 9: 5 Inch wafer cassette 11: 5 inch wafer 12: 8 inch wafer 13, 14: Front-back positioning guide

Claims (1)

[Claims] 1. A wafer size changing cassette spacer which is used for loading a wafer of a smaller size by directly using a shelf for a large size wafer of a wafer heat treatment furnace. A cassette spacer for changing a wafer size, wherein spacers of the same size are used, and a positioning guide having the same center as a large cassette is attached to the spacer.