JPH10237640A5 - - Google Patents

Info

Publication number
JPH10237640A5
JPH10237640A5 JP1997036527A JP3652797A JPH10237640A5 JP H10237640 A5 JPH10237640 A5 JP H10237640A5 JP 1997036527 A JP1997036527 A JP 1997036527A JP 3652797 A JP3652797 A JP 3652797A JP H10237640 A5 JPH10237640 A5 JP H10237640A5
Authority
JP
Japan
Prior art keywords
target
dielectric film
ceramic
forming
tio3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997036527A
Other languages
English (en)
Japanese (ja)
Other versions
JP3949209B2 (ja
JPH10237640A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP03652797A priority Critical patent/JP3949209B2/ja
Priority claimed from JP03652797A external-priority patent/JP3949209B2/ja
Publication of JPH10237640A publication Critical patent/JPH10237640A/ja
Publication of JPH10237640A5 publication Critical patent/JPH10237640A5/ja
Application granted granted Critical
Publication of JP3949209B2 publication Critical patent/JP3949209B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP03652797A 1997-02-20 1997-02-20 誘電体膜の成膜方法 Expired - Lifetime JP3949209B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03652797A JP3949209B2 (ja) 1997-02-20 1997-02-20 誘電体膜の成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03652797A JP3949209B2 (ja) 1997-02-20 1997-02-20 誘電体膜の成膜方法

Publications (3)

Publication Number Publication Date
JPH10237640A JPH10237640A (ja) 1998-09-08
JPH10237640A5 true JPH10237640A5 (2) 2004-11-25
JP3949209B2 JP3949209B2 (ja) 2007-07-25

Family

ID=12472280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03652797A Expired - Lifetime JP3949209B2 (ja) 1997-02-20 1997-02-20 誘電体膜の成膜方法

Country Status (1)

Country Link
JP (1) JP3949209B2 (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5414340B2 (ja) * 2009-04-24 2014-02-12 株式会社アルバック スパッタリング方法
JP6680482B2 (ja) * 2015-08-11 2020-04-15 株式会社高純度化学研究所 強誘電体薄膜形成用スパッタリングターゲット及びその製造方法
US20220056571A1 (en) * 2019-11-28 2022-02-24 Ulvac, Inc. Film Forming Method

Similar Documents

Publication Publication Date Title
EP0794542B1 (en) Dielectric ceramic and monolithic ceramic electronic part using the same
TW200811891A (en) Thin film dielectrics with co-fired electrodes for capacitors and methods of making thereof
US5384681A (en) Electrostatic chuck
KR930003791B1 (ko) 초전도체를 이용하는데 적합한 절연체를 구비한 장치
US5091820A (en) Ceramic piezoelectric element with electrodes formed by reduction
JPH10237640A5 (2)
CN1153756A (zh) 压电陶瓷及其制备方法
JP3949209B2 (ja) 誘電体膜の成膜方法
JPS5892205A (ja) 薄膜キヤパシタ
CN1064942C (zh) 压电陶瓷及其制备方法
US4987515A (en) Ceramic capacitor with electrodes formed by reduction
CN1151981A (zh) 压电陶瓷及其制备方法
JPH0416884B2 (2)
JPH07126845A (ja) 誘電体膜の成膜方法
JP3464251B2 (ja) スパッタリングターゲット
JPH07166340A (ja) スパッタリングターゲットの製造方法
JPH0610926B2 (ja) 誘電体膜の製造法
JP2893129B2 (ja) 誘電体磁器組成物
JP2839629B2 (ja) 誘電体薄膜及び薄膜コンデンサ
JP2658121B2 (ja) 高誘電材料および同材料を用いたコンデンサ
JPH0133928B2 (2)
JPH038759A (ja) 半導体磁器物質
JP2893130B2 (ja) 誘電体磁器組成物
JPH06256061A (ja) 圧電磁器
JPH0135489B2 (2)