JPH10238462A5 - - Google Patents
Info
- Publication number
- JPH10238462A5 JPH10238462A5 JP1997043711A JP4371197A JPH10238462A5 JP H10238462 A5 JPH10238462 A5 JP H10238462A5 JP 1997043711 A JP1997043711 A JP 1997043711A JP 4371197 A JP4371197 A JP 4371197A JP H10238462 A5 JPH10238462 A5 JP H10238462A5
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum pump
- dry vacuum
- exhaust
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04371197A JP3941147B2 (ja) | 1997-02-27 | 1997-02-27 | 真空排気装置及びそのメンテナンス方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04371197A JP3941147B2 (ja) | 1997-02-27 | 1997-02-27 | 真空排気装置及びそのメンテナンス方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10238462A JPH10238462A (ja) | 1998-09-08 |
| JPH10238462A5 true JPH10238462A5 (2) | 2004-12-16 |
| JP3941147B2 JP3941147B2 (ja) | 2007-07-04 |
Family
ID=12671397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04371197A Expired - Lifetime JP3941147B2 (ja) | 1997-02-27 | 1997-02-27 | 真空排気装置及びそのメンテナンス方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3941147B2 (2) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001089320A1 (en) * | 2000-05-24 | 2001-11-29 | Fruit Chips B.V. | Method and device for frying products |
| JP2008008302A (ja) * | 2001-09-06 | 2008-01-17 | Ulvac Japan Ltd | 多段式容積移送型ドライ真空ポンプの省エネ方法 |
| US20150068399A1 (en) | 2011-12-14 | 2015-03-12 | Heiner Kösters | Device and Method for Evacuating a Chamber and Purifying the Gas Extracted From Said Chamber |
| JP6120469B1 (ja) * | 2016-09-21 | 2017-04-26 | 株式会社テクノス | 真空ポンプの寿命を延ばす運用方法 |
| JP7306140B2 (ja) * | 2019-07-30 | 2023-07-11 | 株式会社デンソーウェーブ | ロボット用吸着ハンド |
| CN112032021B (zh) * | 2020-09-10 | 2024-04-26 | 北京通嘉宏瑞科技有限公司 | 一种真空泵用温度调控装置及使用方法 |
| GB2632398A (en) * | 2023-07-25 | 2025-02-12 | Leybold Gmbh | Claw pump |
-
1997
- 1997-02-27 JP JP04371197A patent/JP3941147B2/ja not_active Expired - Lifetime
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