JPH10250090A - Color filter manufacturing apparatus and manufacturing method, color filter and display device, and device equipped with this display device - Google Patents

Abstract

An object of the present invention is to provide a color filter manufacturing apparatus capable of efficiently cooling an ink jet head. An apparatus for manufacturing a color filter by ejecting ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, comprising: an ink jet head; A stage 203 for relatively moving the substrate 205, a cleaning unit 212 for cleaning the inkjet head 204, and a cooling mechanism for cooling the inkjet head 204 in parallel with cleaning by the cleaning unit 212 are provided. .

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for manufacturing a color filter used for a color liquid crystal display used in a color television, a personal computer and the like, a color filter and a display apparatus, and an apparatus having the display apparatus. It is about.

[0002]

2. Description of the Related Art In recent years, the development of personal computers,
In particular, with the development of portable personal computers, the demand for liquid crystal displays, especially color liquid crystal displays, tends to increase. However, for further widespread use, it is necessary to reduce the cost of the liquid crystal display, and in particular, there is an increasing demand for reducing the cost of a color filter having a high specific gravity. Conventionally, various methods have been tried to satisfy the above-mentioned requirements while satisfying the required characteristics of the color filter, but a method for satisfying all the required characteristics has not yet been established. The respective methods will be described below. The first method is a pigment dispersion method. In this method, a photosensitive resin layer in which a pigment is dispersed is formed on a substrate, and a monochromatic pattern is obtained by patterning the photosensitive resin layer. Further, by repeating this process three times, R,
G and B color filter layers are formed.

[0003] The second method is a dyeing method. In the dyeing method, a water-soluble polymer material, which is a material for dyeing, is applied on a glass substrate, and is patterned into a desired shape by a photolithography process. Get a pattern. This is repeated three times to form R, G, B color filter layers.

As a third method, there is an electrodeposition method. In this method, a transparent electrode is patterned on a substrate, and immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution, and the like to electrodeposit a first color. This process is repeated three times to form R, G, and B color filter layers, and finally fired.

As a fourth method, there is a printing method. In this method, a pigment is dispersed in a thermosetting resin, R, G, and B are separately applied by repeating printing three times, and then the resin is thermoset to form a colored layer. In any method, a protective layer is generally formed on the colored layer.

The common features of these methods are R,
In order to color the three colors G and B, the same process needs to be repeated three times, which increases the cost. In addition, there is a problem that the yield decreases as the number of steps increases.
Further, in the electrodeposition method, since a pattern shape that can be formed is limited, it is difficult to apply the current technology to a TFT. In the printing method, it is difficult to form a fine pitch pattern due to poor resolution and smoothness.

To compensate for these drawbacks, Japanese Patent Application Laid-Open No.
JP-A-5205, JP-A-63-235901 and JP-A-1-217320 disclose a method of manufacturing a color filter using an ink jet system. These methods are R (red), G (green), B
An ink containing three (blue) dyes is jetted onto a light-transmissive substrate by an inkjet method, and each ink is dried to form a colored image portion. In such an ink-jet method, each of the R, G, and B pixels can be formed at a time, so that a great simplification of the manufacturing process and a great cost reduction effect can be obtained.

[0008]

However, in the technique using the ink jet, there is a problem that the positioning accuracy is deteriorated due to a temperature change of the ink jet head. In particular, this is a big problem in a head that uses thermal energy to eject ink.

As a method of solving this, a head is provided with
A method is conceivable in which a refrigerant for keeping the temperature constant is passed, or the amount of change in the landing position is measured, and the amount of change is corrected by rotating the head in the θ direction.

However, when the coolant is supplied to the head, the positioning accuracy may be degraded due to the vibration caused by the pulsation, or the structure around the head may be complicated due to the piping of the coolant, and the operability may be reduced. In order to measure and correct the change amount, a step of measuring the ink landing position is required, which may affect the productivity.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide an apparatus and method for manufacturing a color filter capable of efficiently cooling an ink jet head.

It is another object of the present invention to provide a color filter and a display device manufactured by the above-described manufacturing apparatus and manufacturing method, and an apparatus provided with the display device.

[0013]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems and achieve the object, a color filter manufacturing apparatus according to the present invention provides an ink jet head that scans ink with respect to a color filter substrate. Discharge
An apparatus for manufacturing a color filter by coloring the color filter substrate, a moving unit for relatively moving the inkjet head and the color filter substrate, and a cleaning unit for cleaning the inkjet head, And a cooling unit for cooling the inkjet head in parallel with the cleaning by the cleaning unit.

In the apparatus for manufacturing a color filter according to the present invention, the cleaning means includes a sponge-shaped blade moistened with a liquid such as pure water or an organic solvent. A mechanism is provided, wherein the cooling means supplies the pure water, a liquid such as an organic solvent to the sponge-shaped blade, and includes a supply mechanism for controlling the temperature of the liquid such as the pure water and the organic solvent. I have.

In the apparatus for manufacturing a color filter according to the present invention, the ink-jet head is a head for discharging ink using thermal energy,
It is characterized by having a thermal energy generator for generating thermal energy given to the ink.

The color filter manufacturing apparatus according to the present invention manufactures a color filter by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate. An apparatus for moving the inkjet head and the color filter substrate relative to each other, a cap unit for capping the inkjet head, and cooling the inkjet head in parallel with the capping by the cap unit. And cooling means for cooling.

Further, in the color filter manufacturing apparatus according to the present invention, the cooling means is provided with a medium flow path for supplying a cooling medium at a contact portion of the cap means with the ink jet head.

In the apparatus for manufacturing a color filter according to the present invention, the ink jet head is a head that discharges ink using thermal energy,
It is characterized by having a thermal energy generator for generating thermal energy given to the ink.

The color filter manufacturing apparatus according to the present invention manufactures a color filter by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate. A moving unit for relatively moving the ink jet head and the color filter substrate; a cleaning unit for cleaning the ink jet head; and the cleaning unit for cleaning the ink jet head in parallel with the cleaning unit. A first cooling unit for cooling, a cap unit for capping the inkjet head, and a second cooling unit for cooling the inkjet head in parallel with the capping by the cap unit. age There.

In the apparatus for manufacturing a color filter according to the present invention, the cleaning means may include a sponge-shaped blade moistened with a liquid such as pure water or an organic solvent. Comprising a mechanism, the first cooling means, to supply the liquid such as pure water, an organic solvent to the sponge-shaped blade, comprising a supply mechanism for controlling the temperature of the liquid such as pure water, organic solvent, The second cooling means is provided with a medium flow path for supplying a cooling medium at a contact portion of the cap means with the ink jet head.

In the apparatus for manufacturing a color filter according to the present invention, the ink-jet head is a head for discharging ink using thermal energy,
It is characterized by having a thermal energy generator for generating thermal energy given to the ink.

In the method of manufacturing a color filter according to the present invention, a color filter is manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate. A method of relatively scanning the inkjet head and the color filter substrate to eject ink from the inkjet head and coloring the color filter substrate, and wiping a nozzle surface of the inkjet head. It is characterized by comprising a wiping step and a cooling step of cooling the inkjet head in parallel with the wiping step.

In the method of manufacturing a color filter according to the present invention, in the cooling step, the inkjet head is cooled by a liquid absorbed by a water-absorbing blade for wiping the nozzle surface in the wiping step. Features.

In the method of manufacturing a color filter according to the present invention, the ink jet head is a head for discharging ink using thermal energy,
It is characterized by having a thermal energy generator for generating thermal energy given to the ink.

In the method of manufacturing a color filter according to the present invention, a color filter is manufactured by ejecting ink while scanning an ink jet head relatively to a color filter substrate and coloring the color filter substrate. A method of relatively scanning the inkjet head and the color filter substrate to eject ink from the inkjet head and coloring the color filter substrate, and capping a nozzle surface of the inkjet head. It is characterized by including a capping step and a cooling step of cooling the inkjet head in parallel with the capping step.

In the method of manufacturing a color filter according to the present invention, in the cooling step, the ink jet head is cooled by a fluid flowing through a cap member that caps the nozzle surface in the capping step. .

In the method for manufacturing a color filter according to the present invention, the ink jet head is a head for discharging ink using thermal energy,
It is characterized by having a thermal energy generator for generating thermal energy given to the ink.

In the method of manufacturing a color filter according to the present invention, a color filter is manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate. A method of relatively scanning the inkjet head and the color filter substrate to eject ink from the inkjet head and coloring the color filter substrate, and wiping a nozzle surface of the inkjet head. A wiping step, a first cooling step of cooling the inkjet head in parallel with the wiping step, a capping step of capping the nozzle surface of the inkjet head, and cooling the inkjet head in parallel with the capping step The second cooling step It is characterized by comprising.

In the method for manufacturing a color filter according to the present invention, in the first cooling step, the ink jet head is cooled by a liquid absorbed by a water-absorbing blade for wiping the nozzle surface in the wiping step. The second cooling step is characterized in that the inkjet head is cooled by a fluid flowing in a cap member that caps the nozzle surface in the capping step.

In the method of manufacturing a color filter according to the present invention, the ink jet head is a head for discharging ink using thermal energy,
It is characterized by having a thermal energy generator for generating thermal energy given to the ink.

The color filter according to the present invention comprises:
A color filter manufactured by discharging ink while scanning the ink jet head relative to the color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color filter substrate are relatively moved. Scanning, ejecting ink from the inkjet head, coloring the color filter substrate, wiping the nozzle surface of the inkjet head, and cooling the inkjet head in parallel with the wiping step It is characterized by being manufactured through a cooling step.

Further, the display device according to the present invention has a color filter manufactured by discharging ink while causing the ink jet head to scan relative to the color filter substrate and coloring the color filter substrate. A display device, wherein the ink jet head and the color filter substrate are relatively scanned to eject ink from the ink jet head to color the color filter substrate, and a nozzle surface of the ink jet head is wiped. A color filter manufactured through a wiping step of performing the wiping step, a cooling step of cooling the inkjet head in parallel with the wiping step, and a light amount varying unit that varies a light amount.

Further, in the apparatus provided with the display device according to the present invention, the color filter manufactured by discharging the ink while causing the ink jet head to scan relative to the color filter substrate and coloring the color filter substrate. An apparatus provided with a display device having a filter, by relatively scanning the inkjet head and the color filter substrate, ejecting ink from the inkjet head, coloring the color filter substrate, A color filter manufactured through a wiping step of wiping a nozzle surface of an inkjet head, a cooling step of cooling the inkjet head in parallel with the wiping step, and a light amount varying unit for varying a light amount are integrally provided. A display device, and image signal supply means for supplying an image signal to the display device It is characterized by comprising.

The color filter according to the present invention comprises:
A color filter manufactured by discharging ink while scanning the ink jet head relative to the color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color filter substrate are relatively moved. Scanning, ejecting ink from the inkjet head, coloring the color filter substrate, capping the nozzle surface of the inkjet head, and cooling the inkjet head in parallel with the capping step It is characterized by being manufactured through a cooling step.

Further, the display device according to the present invention includes a color filter manufactured by discharging ink while causing the ink jet head to scan relative to the color filter substrate and coloring the color filter substrate. A display device, wherein the ink jet head and the color filter substrate are relatively scanned to discharge ink from the ink jet head, thereby coloring the color filter substrate; and capping a nozzle surface of the ink jet head. A color filter manufactured through a capping step of performing a capping step, a cooling step of cooling the inkjet head in parallel with the capping step, and a light amount varying unit for varying a light amount.

Further, in the device provided with the display device according to the present invention, the color head manufactured by discharging the ink while causing the ink jet head to scan relative to the color filter substrate and coloring the color filter substrate. An apparatus provided with a display device having a filter, by relatively scanning the inkjet head and the color filter substrate, ejecting ink from the inkjet head, coloring the color filter substrate, A color filter manufactured through a capping step of capping a nozzle surface of an ink jet head, a cooling step of cooling the ink jet head in parallel with the capping step, and a light amount changing unit for changing a light amount are integrally provided. A display device, and an image signal supplied to the display device. It is characterized by comprising an image signal supply means for.

Further, the color filter according to the present invention comprises:
A color filter manufactured by discharging ink while scanning the ink jet head relative to the color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color filter substrate are relatively moved. Scanning, ejecting ink from the inkjet head, coloring the color filter substrate, wiping the nozzle surface of the inkjet head, and cooling the inkjet head in parallel with the wiping step It is characterized by being manufactured through a first cooling step, a capping step of capping the nozzle surface of the ink jet head, and a second cooling step of cooling the ink jet head in parallel with the capping step.

Further, in a device provided with a display device according to the present invention, a color is manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate. A display device provided with a filter, wherein the inkjet head and the color filter substrate are relatively scanned to eject ink from the inkjet head, and a coloring step of coloring the color filter substrate; and A wiping step of wiping the nozzle surface, a first cooling step of cooling the inkjet head in parallel with the wiping step, a capping step of capping the nozzle face of the inkjet head, and the capping step in parallel with the capping step. Second cooling for cooling the inkjet head A color filter manufactured through a step, and a light amount varying means for the light quantity variable is characterized in that it comprises integrated.

Further, in the apparatus provided with the display device according to the present invention, the ink is ejected while the ink-jet head is relatively scanned with respect to the color filter substrate to color the color filter substrate. An apparatus provided with a display device having a filter, by relatively scanning the inkjet head and the color filter substrate, ejecting ink from the inkjet head, coloring the color filter substrate, A wiping step of wiping the nozzle surface of the inkjet head, a first cooling step of cooling the inkjet head in parallel with the wiping step, a capping step of capping the nozzle surface of the inkjet head, and a step parallel to the capping step. To cool the inkjet head A display device integrally including a color filter manufactured through the second cooling step, and a light amount varying unit that varies a light amount, and an image signal supply unit that supplies an image signal to the display device. It is characterized by:

[0040]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

(First Embodiment) First, before describing the color filter manufacturing apparatus of the first embodiment, a process of manufacturing a color filter will be described.

FIG. 1 is a diagram showing an example of a manufacturing process of a color filter.

In this embodiment, a glass substrate is generally used as the substrate 1. However, the substrate 1 is not limited to a glass substrate as long as it has necessary characteristics such as transparency and mechanical strength as a color filter for liquid crystal. Absent.

FIG. 1A shows a glass substrate 1 provided with a light transmitting portion 7 and a black matrix 2 as a light shielding portion. First, a resin composition curable by light irradiation or light irradiation and heating and having an ink receiving property is applied to the substrate 1 on which the black matrix 2 is formed, and prebaking is performed as necessary to form the resin layer 3. It is formed (FIG. 1B). For forming the resin layer 3, a coating method such as spin coating, roll coating, bar coating, spray coating, or dip coating can be used, and is not particularly limited.

Next, a portion of the resin layer, which is shielded from light by the black matrix 2, is subjected to pattern exposure in advance by using a photomask 4 to cure a part of the resin layer so that ink is not absorbed by a portion 5 (non-colored portion). Part) (Fig. 1)
(C)), and then R,
The colors G and B are colored at a time (FIG. 1D), and the ink is dried if necessary.

As the photomask 4 used at the time of pattern exposure, a photomask 4 having an opening for curing a light-shielded portion by a black matrix is used. At this time, it is necessary to apply a relatively large amount of ink in order to prevent color loss of the colorant in a portion in contact with the black matrix. Therefore, it is preferable to use a mask having an opening smaller than the (light-shielding) width of the black matrix.

As the ink used for coloring, a dye or a pigment can be used as a pigment, and both a liquid ink and a solid ink can be used.

As the curable resin composition used in the present invention, any resin can be used as long as it has ink receptivity and can be cured by at least one of light irradiation and heating. Examples include acrylic resins, epoxy resins, silicone resins, cellulose derivatives such as hydroxypropylcellulose, hydroxyethylcellulose, methylcellulose, and carboxymethylcellulose, and modified products thereof.

It is also possible to use a photoinitiator (crosslinking agent) for causing these resins to undergo a crosslinking reaction by light or light and heat. As a photoinitiator, dichromate,
Bisazide compounds, radical initiators, cationic initiators, anionic initiators and the like can be used. These photoinitiators can be used as a mixture or in combination with other sensitizers. Further, a photoacid generator such as an onium salt can be used in combination as a crosslinking agent. Note that heat treatment may be performed after light irradiation in order to further promote the crosslinking reaction.

The resin layer containing these compositions is extremely excellent in heat resistance, water resistance and the like, and can sufficiently withstand a high temperature in a subsequent step or a washing step.

As the ink jet system used in the present invention, a bubble jet type using an electrothermal converter or a piezo jet type using a piezoelectric element can be used as an energy generating element. It can be set arbitrarily.

Although this embodiment shows an example in which a black matrix is formed on a substrate, the black matrix is formed on the resin layer after forming a curable resin composition layer or after coloring. However, there is no particular problem, and the form is not limited to this example. Also,
As a forming method thereof, it is preferable to form a metal thin film on a substrate by sputtering or vapor deposition and pattern it by a photolithography process, but it is not limited thereto.

Next, only the light irradiation, only the heat treatment, or the light irradiation and the heat treatment are performed to cure the curable resin composition (FIG. 1E), and a protective layer 8 is formed as needed (FIG. 1E).
(F). In the drawing, hν indicates the intensity of light, and in the case of heat treatment, heat is applied instead of the light of hν. The protective layer 8 can be formed using a second resin composition of a photo-curing type, a thermo-setting type or a combination of light and heat, or can be formed by vapor deposition or sputtering using an inorganic material. Any material can be used as long as it has the transparency in this case and can sufficiently withstand the subsequent ITO forming process, alignment film forming process, and the like.

FIG. 2 is a sectional view showing the basic structure of a color liquid crystal display device 30 incorporating the above-described color filter.

The color liquid crystal display device is generally formed by combining the color filter substrate 1 with the counter substrate 21 and enclosing the liquid crystal compound 18. A TFT (Thin Film Transistor) is provided inside one substrate 21 of the liquid crystal display device.
r) (not shown) and transparent pixel electrodes 20 are formed in a matrix. In addition, a color filter 54 is provided inside the other substrate 1 so that RGB color materials are arranged at positions facing the pixel electrodes, and a transparent counter electrode (common electrode) 16 is formed on the entire surface. Is done. The black matrix 2 is usually formed on the color filter substrate 1 side. Further, an alignment film 19 is formed in the planes of both substrates, and rubbing the alignment film 19 allows liquid crystal molecules to be aligned in a certain direction. Polarizing plates 11 and 22 are adhered to the outside of each glass substrate, and the liquid crystal compound 18 is disposed between the glass substrates (2).
５5 μm). In addition, a combination of a fluorescent lamp (not shown) and a scattering plate (not shown) is generally used as the backlight, and the display is performed by making the liquid crystal compound function as an optical shutter that changes the transmittance of the backlight light. An example of a case where such a liquid crystal display device that performs the above is applied to an information processing device will be described with reference to FIGS.

FIG. 3 is a block diagram showing a schematic configuration when the above-mentioned liquid crystal display device is applied to an information processing device having functions as a word processor, a personal computer, a facsimile device, and a copying device.

In the figure, reference numeral 1801 denotes a control unit for controlling the entire apparatus, which includes a CPU such as a microprocessor and various I / O ports, outputs control signals and data signals to each unit, and controls signals from each unit. And control by inputting data signals. Reference numeral 1802 denotes a display unit, on which various menus, document information, and the image reader 18 are displayed.
In step 07, the read image data and the like are displayed. 18
Reference numeral 03 denotes a transparent pressure-sensitive touch panel provided on the display unit 1802. By pressing the surface of the touch panel with a finger or the like, it is possible to input items, coordinate positions, and the like on the display unit 1802.

Reference numeral 1804 denotes an FM (Frequency Modulation) sound source unit which stores music information created by a music editor or the like as digital data in a memory unit 1810 or an external storage device 1812, and reads out the FM information from the memory or the like.
The modulation is performed. The electric signal from the FM sound source unit 1804 is converted into an audible sound by the speaker unit 1805.
The printer unit 1806 is used as an output terminal of a word processor, a personal computer, a facsimile machine, and a copying machine.

Reference numeral 1807 denotes an image reader unit for reading and inputting original data photoelectrically, and is provided in the original conveying path, and reads various originals such as facsimile originals and copy originals.

Reference numeral 1808 denotes facsimile transmission of the original data read by the image reader unit 1807 and facsimile (F) for receiving and decoding the transmitted facsimile signal.
AX), and has an external interface function. Reference numeral 1809 denotes a telephone unit having various telephone functions such as a normal telephone function and an answering machine function.

Reference numeral 1810 denotes a ROM for storing a system program, a manager program, other application programs, character fonts, a dictionary, and the like; an application program and document information loaded from an external storage device 1812; and a memory including a video RAM and the like. Department.

Reference numeral 1811 denotes a keyboard for inputting document information and various commands.

Reference numeral 1812 denotes an external storage device using a floppy disk, a hard disk, or the like as a storage medium. The external storage device 1812 stores document information, music or audio information,
A user application program and the like are stored.

FIG. 4 is a schematic overview of the information processing apparatus shown in FIG.

In the figure, reference numeral 1901 denotes a flat panel display using the above-mentioned liquid crystal display device, which displays various menus, graphic information, document information and the like. By pressing the surface of the touch panel 1803 with a finger or the like on the display 1901, coordinate input and item designation input can be performed. A handset 1902 is used when the device functions as a telephone. Keyboard 190
3 is detachably connected to the main body via a cord,
Various document functions and various data inputs can be performed. The keyboard 1903 has various function keys 1904.
Etc. are provided. 1905 is an external storage device 1812
This is the slot for the floppy disk.

Reference numeral 1906 denotes a paper placing portion on which a document to be read by the image reader portion 1807 is placed. The read document is discharged from the rear of the apparatus. In the case of facsimile reception or the like, printing is performed by the inkjet printer 1907.

When the information processing apparatus functions as a personal computer or a word processor, various information input from the keyboard section 1811 is processed by the control section 1801 according to a predetermined program, and the information is processed by the printer section 1.
The image is output to an image 806.

When functioning as a receiver of a facsimile apparatus, facsimile information input from a facsimile transmission / reception unit 1808 via a communication line is received and processed by a control unit 1801 according to a predetermined program.
Is output as a received image.

When functioning as a copier, a document is read by an image reader 1807 and the read document data is sent to a printer 18 via a controller 1801.
06 is output as a copy image. When functioning as a facsimile receiver, the image reader unit 1
The original data read by 807 is transmitted to control unit 180.
After transmission processing according to a predetermined program by 1
The data is transmitted to the communication line via the facsimile transmission / reception unit 1808.

The information processing apparatus described above may be of an integrated type having a built-in ink jet printer as shown in FIG. 5, and in this case, the portability can be further improved. In the figure, parts having the same functions as those in FIG. 4 are denoted by the corresponding reference numerals.

Next, FIG. 6 is a schematic view of a color filter manufacturing apparatus according to the embodiment of the present invention.

In FIG. 6, reference numeral 201 denotes a surface plate for mounting the apparatus, 202 denotes a vibration isolation table that supports the surface plate 201 and shuts off external vibrations, and 203 denotes a large-stroke movement provided on the surface plate 201. XY stage to perform, 204 is R (red),
An ink jet head unit 205 including ink jet heads of three colors G (green) and B (blue). Reference numeral 205 denotes a substrate on which a color filter is formed (corresponding to the substrate 1 in FIG. 1 and a black matrix 2 and a resin layer 3 are formed). ),
206 is an alignment detecting optical system for aligning the substrate 205 in the X, Y, and θ directions, and 207 is the substrate 2
Z detection optical system for detecting the Z direction position 05, 2
Reference numeral 08 denotes an impact position detection optical system for detecting the impact position of the ink ejected by the inkjet head unit 204 on the substrate 205. Reference numeral 209 denotes the rotational position of the inkjet head unit 204 in the θ direction and the scanning direction (Y direction).
A head position adjustment unit for adjusting a position in a direction (X direction) perpendicular to the axis;
Numeral 11 denotes a length-measuring hyper-flat mirror, numeral 212 denotes a cleaning unit for wiping the ink discharge nozzle surface of the ink jet head, numeral 213 denotes a cap unit for preventing ink on the ink discharge nozzle surface of the ink jet head, and numeral 214 denotes a cap unit A cleaning unit 215 for cleaning the cleaning unit 212 is a drive system that moves the cleaning unit 212 and the cap unit 213 to below the inkjet head unit 204.

FIG. 7 is a detailed view of the XY stage 203. The Z-tilt adjustment unit for adjusting the tilt of the substrate 205 in the Z direction and the substrate 2
A θ adjustment unit for adjusting the position by rotating 05 in the θ direction is configured, and 220 is a substrate holding plate,
221 is a Z tilt actuator, 222 is a Z tilt guide, 223 is a θ direction actuator, 224 is θ
The direction guide 225 is an XY operation unit base.

Next, FIG. 8 is a view showing the structure of an ink jet head IJH used in the above-mentioned color filter manufacturing apparatus. In FIG. 6, in the head unit 204, three inkjet heads IJH are provided corresponding to the three colors of R, G, and B. However, since these three heads have the same structure, respectively, FIG. FIG. 8 shows the structure of one of these three heads as a representative.

In FIG. 8, the ink jet head IJ
H generally includes a heater board 104 on which a plurality of heaters 102 for heating the ink are formed, and a top plate 106 overlaid on the heater board 104. The top plate 106 has a plurality of discharge ports 108.
A tunnel-like liquid passage 110 communicating with the discharge port 108 is formed behind the discharge port 108. Each liquid channel 110 is separated from an adjacent liquid channel by a partition 112. Each fluid channel 110 has one
The two ink liquid chambers 114 are connected in common, and ink is supplied to the ink liquid chambers 114 through ink supply ports 116, and the ink is supplied from the ink liquid chambers 114 to the respective liquid paths 110.

The heater board 104 and the top plate 106
Each heater 102 is positioned so as to come to a position corresponding to each liquid path 110, and assembled in a state as shown in FIG.
In FIG. 8, only two heaters 102 are shown, but one heater 102
Are arranged one by one. Then, when a predetermined drive pulse is supplied to the heater 102 in an assembled state as shown in FIG. 8, the ink on the heater 102 boils to form a bubble, and the ink expands from the ejection port 108 due to the volume expansion of the bubble. Extruded and discharged. Therefore, it is possible to control the driving pulse applied to the heater 102, for example, by controlling the magnitude of the electric power, to adjust the size of the bubble,
The volume of the ink ejected from the ejection port can be freely controlled.

Next, FIG. 9 is a flowchart for explaining the color filter coloring operation by the above-described color filter manufacturing apparatus.

At the time of manufacturing the color filter, as shown in FIG. 9, when the substrate 205 is mounted on the XY stage 203 (step S51), the surface of the substrate 205 falls within the detection range (depth of focus) of the alignment detection optical system 206. As described above, the Z tilt adjustment mechanisms 221 and 2 of the XY stage 203 are
22 to adjust the inclination of the substrate 205 (step S5).
2).

Thereafter, the alignment detection optical system 206
Thus, the amounts of displacement in the X, Y, and θ directions are detected so that the alignment mark on the substrate 205 is at the reference position. Here, the alignment detection optical system 206 is
An alignment mark is read by a sensor such as D, and image information obtained therefrom is analyzed by an image processing unit to calculate a shift amount. This detection may be performed by detecting a plurality of marks with a plurality of detection optical systems, or may be performed by moving the stage using a single detection optical system. Based on this detection result, the deviation of the θ component is
Are corrected by the θ adjustment mechanisms 223 and 224, and the deviation in the X direction is corrected by adjusting the X position of the XY stage 203. Further, the deviation in the Y direction (the scanning direction of the inkjet head unit 204) is
Alignment or inkjet head unit 2
This is performed by controlling the ejection timing from step 04 (step S54).

Further, as shown in FIG. 10, the ink ejected from the ink jet head unit 204 does not always fly perpendicular to the surface of the substrate 205. The gap between the units 204 is, for example, from l to l + δ
Changes the landing position from d to d (l + d / l). Therefore, the gap between the inkjet head unit 204 and the substrate 205 and the inclination of the substrate 205 are determined by the Z detection optical system 207, and coloring is performed by the inkjet head unit 204 while controlling the gap to be constant (step S56). Depending on the accuracy, the substrate 20
Alternatively, the inclination of the substrate 205 may be measured at the time of mounting 5, and the inclination may be corrected by the Z tilt adjusting mechanisms 221 and 222 of the XY stage and fixed during coloring.

The ink jet head unit 20
When the ink jet head unit 204 is attached to the apparatus, the ink is ejected, the landing position detecting optical system 208 detects the amount of deviation of the landing position with respect to the reference of the XY stage 203, and adjusts the head landing position. It is adjusted by the unit 209.

After the coloring is completed, the inkjet head cleaning sequence (step S57) is performed in parallel with the discharge operation and mounting operation of the substrate 205 (steps S57 and S51).
58).

FIG. 11 is a detailed view of the cleaning mechanism of the cleaning unit 212. In the figure, 23
Reference numeral 0 denotes a sponge-shaped blade for wiping the nozzle surface of each color head, 231 denotes a blade unit stage for moving the blade 230 in the vertical direction and the front-back direction, and 2.
32 is a blade suction pipe for adjusting the wetness of the blade 230. In the head cleaning sequence, the cleaning unit 212 moves to the lower portion of the head unit 204, and at that location, the blade unit stage 231 rises and moves back and forth to clean the nozzle surface of the inkjet head with the wet sponge-like blade 230. Perform by wiping. In order to wet the blade 230, pure water is applied to the blade 230 by a cleaning unit 214 and ink is flown to wash the blade 230, and the blade 230 is suctioned by a vacuum pump through a suction pipe 232.
A moderate wetness is obtained by sucking 0. The degree of wetness is adjusted by controlling the suction time.

FIG. 12 is a schematic view at the time of cleaning, and shows 233
Is a washing shower unit for applying pure water to the blade 230. The shower unit 233 is provided with a number of nozzles 234 so that the washing water is evenly applied to the blade.

FIG. 13 is a system diagram for controlling the temperature of the washing water. A cooling unit 235 and a washing water temperature adjusting tank 236 circulate the refrigerant cooled by the cooling unit 235 in the pipe 260. This pipe 26
The temperature of the pure water is controlled by cooling the washing water temperature control tank 236 according to 0.

Here, it is possible to control the temperature of the blade 230 by controlling the temperature of pure water used for cleaning. That is, by wiping the nozzle surface of the inkjet head with the blade 230 that has absorbed the temperature-controlled pure water, the inkjet head is cooled by the blade 230.

As shown in the operation flowchart of the manufacturing apparatus in FIG. 9, the cleaning operation is performed for each substrate.
Performed between the discharge of the colored substrate and the input of the new substrate,
The condition of the nozzle surface of the inkjet head for each of the ink jet heads 05 is fixed. As a result, the temperature of the head for each substrate is managed without affecting the manufacturing tact time at all.

When the temperature of pure water for cleaning was set to 18 ° C. with respect to the ambient temperature of the manufacturing apparatus of 23 ° C., the head temperature increased by 7 ° C. when the method of the present embodiment was not used.
However, when the method of the present embodiment was used, the temperature could be set to about 2 ° C. The elongation in the length direction of the head due to the temperature change at this time was about 2 μm in total length. Since the pixel width of the color filter is about 100 μm, the deviation of the landing position of the ink of about 2 μm is a fluctuation within an allowable range of the landing error, and is a value that does not cause a problem in practical use.

In the above embodiment, pure water is used for cleaning the blade. However, the present invention is not limited to this, and a liquid such as an organic solvent may be used.

(Second Embodiment) A second embodiment of the present invention will be described.

In the operation flowchart of the manufacturing apparatus shown in FIG. 9, after head cleaning, in a state of waiting for preparation of the substrate 205, in order to prevent drying of the ink discharge surface of the head, it is desirable to put a cap on the head and wait. The cap is configured in a cap unit 213,
When necessary, the cap unit 213 moves to the lower part of the head, and the cap rises, so that the cap comes into close contact with the head. Therefore, by configuring the same drive system as the cleaning unit, the number of drive mechanisms can be reduced. As shown in the operation flowchart of the manufacturing apparatus in FIG. 9, there is no problem in using the same drive system in sequence.

FIG. 14 is a schematic view of the cap unit 213 when the head is capped, 240 is a cap, 241 is a mechanism for moving the cap up and down, and 243 is a head holding member. FIG. 15 is a cross-sectional view taken along the line AA of FIG. 14. Reference numeral 242 denotes a cooling fluid flow path for flowing a coolant formed at a tip end portion of the cap in contact with the nozzle surface of the head. By flowing a coolant through the flow path 242, the head can be cooled during head capping. During coloring, since the cap is retracted, the pulsation of the refrigerant does not affect the positioning accuracy of the head, and the head can be cooled.

(Third Embodiment) In order to maximize the effects of the present invention, it is desirable to combine the first and second embodiments. At this time, the cap 240
The time during which the substrate 205 is brought into close contact with the head depends on the time interval for loading the substrate 205 and is not always constant. Therefore, it is desirable that the temperature of the refrigerant flowing through the cap 240 be equal to the ambient temperature of the head unit 204 and that the flow rate of the refrigerant be increased. Further, it is desirable that the cooling fluid temperature of the blade 230 is controlled to be lower than the ambient temperature, the cooling effect of the head is enhanced by the blade 230, and the cooling by the cap is a fine adjustment function.

When the temperature of pure water for cleaning was set to 18 ° C., the temperature of the refrigerant flowing through the cap was set to 23 ° C., and the flow rate was set to 0.5 l / min with respect to the ambient temperature of 23 ° C. of the manufacturing apparatus. The rise could be kept below 2 ° C.

The present invention can be applied to a modification or modification of the above embodiment without departing from the gist of the invention.

The present invention includes a means (for example, an electrothermal converter or a laser beam) for generating thermal energy as energy used for performing ink ejection, particularly in an ink jet recording system. The printing apparatus of the type that causes a change in the state of the ink has been described.
High definition can be achieved.

The typical structure and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method can be applied to both the so-called on-demand type and continuous type. In particular, in the case of the on-demand type, liquid (ink)
By applying at least one drive signal corresponding to the recorded information and providing a rapid temperature rise exceeding the film boiling to an electrothermal transducer arranged corresponding to the sheet or the liquid path in which Since thermal energy is generated in the electrothermal transducer and film boiling occurs on the heat-acting surface of the recording head, bubbles in the liquid (ink) corresponding to this drive signal on a one-to-one basis can be formed. It is valid. By discharging the liquid (ink) through the discharge opening by the growth and contraction of the bubble, at least one droplet is formed. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of the liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable.

As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. Further, if the conditions described in US Pat. No. 4,313,124 relating to the temperature rise rate of the heat acting surface are adopted, more excellent recording can be performed.

The configuration of the recording head is not limited to the combination of a discharge port, a liquid path, and an electrothermal converter (a linear liquid flow path or a right-angled liquid flow path) as disclosed in the above-mentioned specifications. A configuration using U.S. Pat. No. 4,558,333 or U.S. Pat. No. 4,459,600, which discloses a configuration in which a heat acting surface is arranged in a bent region, is also included in the present invention. In addition, for multiple electrothermal transducers,
JP-A-59-123670 which discloses a configuration in which a common slot is used as a discharge part of an electrothermal transducer, and JP-A-59-123670 which discloses a configuration in which an opening for absorbing a pressure wave of thermal energy corresponds to a discharge part. A configuration based on 138461 may be adopted.

Further, as a full-line type recording head having a length corresponding to the width of the maximum recording medium that can be recorded by the recording apparatus, the length is determined by combining a plurality of recording heads as disclosed in the above specification. This may be either a configuration satisfying the above requirements or a configuration as a single recording head formed integrally.

In addition, by being mounted on the apparatus main body, it is possible to make an electrical connection with the apparatus main body and supply ink from the apparatus main body. Alternatively, a cartridge type recording head provided with an ink tank may be used.

It is preferable to add recovery means for the print head, preliminary auxiliary means, and the like provided as components of the printing apparatus of the present invention since the effects of the present invention can be further stabilized. . If these are specifically mentioned, capping means for the recording head, cleaning means, pressurizing or suction means, preheating means using an electrothermal transducer or another heating element or a combination thereof, and printing Performing a preliminary ejection mode for performing another ejection is also effective for performing stable printing.

In the embodiments of the present invention described above, the ink is described as a liquid. However, any ink that solidifies at room temperature or below, or one that softens or liquefies at room temperature may be used. It is only necessary that the ink be in a liquid state when the recording signal is applied.

In addition, in order to positively prevent the temperature rise due to thermal energy as energy for changing the state of the ink from the solid state to the liquid state,
Alternatively, in order to prevent evaporation of the ink, an ink which solidifies in a standing state and liquefies by heating may be used. In any case, the application of heat energy causes the ink to be liquefied by application of the heat energy according to the recording signal and the liquid ink to be ejected, or to start to solidify when reaching the recording medium. The present invention is also applicable to a case where an ink having a property of liquefying for the first time is used. In such a case, as described in JP-A-54-56847 or JP-A-60-71260, the ink is held in a liquid state or a solid state in the concave portion or through hole of the porous sheet. It is good also as a form which opposes an electrothermal transducer. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0105]

As described above, according to the present invention, by cooling the head using the cleaning blade or the cap of the head, it is possible to suppress the deterioration of the ink landing position accuracy due to the temperature change of the head, and In addition, the effects of vibration and pulsation of the cooling mechanism can be suppressed, and high-precision drawing can be performed, and a uniform color filter without unevenness can be formed over the entire substrate.

[0106]

[Brief description of the drawings]

FIG. 1 is a diagram showing a manufacturing process of a color filter.

FIG. 2 is a diagram showing a basic configuration of a color liquid crystal display device incorporating a color filter.

FIG. 3 is a diagram illustrating an information processing apparatus in which a liquid crystal display device is used.

FIG. 4 is a diagram illustrating an information processing apparatus in which a liquid crystal display device is used.

FIG. 5 is a diagram showing an information processing apparatus in which a liquid crystal display device is used.

FIG. 6 is a perspective view of a main part of a color filter manufacturing apparatus according to an embodiment of the present invention.

FIG. 7 is a side view of a main part of the XY stage.

FIG. 8 is a diagram illustrating a structure of an ink jet head used in a color filter manufacturing apparatus.

FIG. 9 is a flowchart illustrating a coloring process of a color filter.

FIG. 10 is a diagram illustrating a state where the landing positions of ink are shifted.

FIG. 11 is a perspective view showing a configuration of a blade portion of the cleaning unit.

FIG. 12 is a diagram illustrating a state of cleaning a blade.

FIG. 13 is a temperature control system diagram of blade cleaning water.

FIG. 14 is a diagram showing a configuration of a cap unit.

FIG. 15 is a sectional view taken along line AA of FIG. 14;

[Explanation of symbols]

Reference Signs List 201 surface plate 202 anti-vibration table 203 XY stage 204 inkjet head unit 205 substrate 206 alignment detection optical system 207 Z detection optical system 208 landing position detection optical system 209 head position adjustment unit 210 laser for length measurement 211 hyperplane mirror 212 Cleaning unit 213 Cap unit 214 Cleaning unit 215 Front and rear drive system of cleaning and cap unit 220 Substrate holding plate 221 Z tilt actuator 222 Z tilt guide 223 θ direction actuator 224 θ direction guide 225 XY operating part base 230 Blade 231 Blade unit stage 232 Blade suction pipe 233 Cleaning shower unit 234 Shower nozzle 235 Cooling unit 236 Cleaning water temperature control Tank 240 cap 241 cap unit stage 242 the cooling fluid channel 243 head holding member

Continued on the front page (51) Int.Cl. ⁶ Identification code FI B41J 29/00 P

Claims (27)

[Claims] 1. An apparatus for manufacturing a color filter by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color Moving means for relatively moving the filter substrate; cleaning means for cleaning the inkjet head; and cooling means for cooling the inkjet head in parallel with cleaning by the cleaning means. An apparatus for manufacturing a color filter. 2. The cleaning means includes a wiping mechanism for wiping an ink ejection surface of the ink jet head by a sponge-shaped blade moistened with a liquid such as pure water or an organic solvent. 2. The color filter according to claim 1, further comprising a supply mechanism configured to supply the liquid such as the pure water or the organic solvent to the blade in a shape of a liquid and to control the temperature of the liquid such as the pure water or the organic solvent. apparatus. 3. The ink-jet head according to claim 1, wherein the ink-jet head is a head that ejects ink using thermal energy, and includes a thermal energy generator for generating thermal energy to be applied to the ink. An apparatus for manufacturing the color filter according to the above. 4. An apparatus for producing a color filter by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color Moving means for relatively moving the filter substrate; cap means for capping the ink jet head; and cooling means for cooling the ink jet head in parallel with capping by the cap means. A color filter manufacturing apparatus. 5. The color filter manufacturing apparatus according to claim 4, wherein the cooling unit includes a medium passage for supplying a cooling medium at a contact portion of the cap unit with the inkjet head. 6. The ink-jet head according to claim 4, wherein the ink-jet head is a head that ejects ink using thermal energy, and includes a thermal energy generator for generating thermal energy to be applied to the ink. An apparatus for manufacturing the color filter according to the above. 7. An apparatus for manufacturing a color filter by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color Moving means for relatively moving the filter substrate; cleaning means for cleaning the inkjet head; first cooling means for cooling the inkjet head in parallel with cleaning by the cleaning means; An apparatus for manufacturing a color filter, comprising: cap means for capping the ink jet head; and second cooling means for cooling the ink jet head in parallel with capping by the cap means. 8. The cleaning means includes a wiping mechanism for wiping an ink ejection surface of the inkjet head by a sponge-shaped blade moistened with a liquid such as pure water or an organic solvent. A supply mechanism for supplying a liquid such as the pure water and the organic solvent to the sponge-shaped blade and controlling a temperature of the liquid such as the pure water and the organic solvent, wherein the second cooling means includes the cap means. The apparatus for manufacturing a color filter according to claim 7, further comprising a medium flow path for supplying a cooling medium at a contact portion of the color filter with the ink jet head. 9. The ink-jet head according to claim 7, wherein the ink-jet head is a head that uses thermal energy to eject ink, and includes a thermal energy generator for generating thermal energy to be applied to the ink. An apparatus for manufacturing the color filter according to the above. 10. A method of manufacturing a color filter by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, the method comprising: A relative scanning of the filter substrate, a discharge step of discharging ink from the inkjet head and coloring the color filter substrate, a wiping step of wiping a nozzle surface of the inkjet head, And a cooling step of cooling the ink jet head. 11. The color filter according to claim 10, wherein in the cooling step, the inkjet head is cooled by a liquid absorbed by a water-absorbing blade that wipes the nozzle surface in the wiping step. Manufacturing method. 12. The ink-jet head according to claim 10, wherein the ink-jet head is a head that ejects ink using thermal energy, and includes a thermal energy generator for generating thermal energy to be applied to the ink. A method for producing the color filter according to the above. 13. A method of manufacturing a color filter by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, the method comprising: By relatively scanning the filter substrate, discharging ink from the inkjet head and coloring the color filter substrate, a capping step of capping the nozzle surface of the inkjet head, and in parallel with the capping step And a cooling step of cooling the ink jet head. 14. The method according to claim 13, wherein in the cooling step, the ink jet head is cooled by a fluid flowing in a cap member that caps the nozzle surface in the capping step. . 15. The ink-jet head according to claim 13, wherein the ink-jet head is a head that uses thermal energy to eject ink, and includes a thermal energy generator for generating thermal energy to be applied to the ink. A method for producing the color filter according to the above. 16. A method of manufacturing a color filter by ejecting ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, the method comprising: A relative scanning of the filter substrate, a discharge step of discharging ink from the inkjet head and coloring the color filter substrate, a wiping step of wiping a nozzle surface of the inkjet head, A first cooling step of cooling the inkjet head, a capping step of capping a nozzle surface of the inkjet head, and a second cooling step of cooling the inkjet head in parallel with the capping step. Characteristic color filter Production method. 17. In the first cooling step, the inkjet head is cooled by a liquid absorbed by a water-absorbing blade for wiping the nozzle surface in the wiping step, and in the second cooling step, 17. The method according to claim 16, wherein the inkjet head is cooled by a fluid flowing in a cap member that caps the nozzle surface in the capping step. 18. The ink-jet head according to claim 16, wherein the ink-jet head is a head that ejects ink using thermal energy, and includes a thermal energy generator for generating thermal energy to be applied to the ink. A method for producing the color filter according to the above. 19. A color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color filter are provided. The substrate is relatively scanned, ink is ejected from the inkjet head, a coloring step of coloring the color filter substrate, a wiping step of wiping a nozzle surface of the inkjet head, and the wiping step are performed in parallel. A color filter manufactured through a cooling step of cooling an inkjet head. 20. A display device comprising a color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, A coloring step of relatively scanning the head and the color filter substrate to discharge ink from the inkjet head and coloring the color filter substrate; a wiping step of wiping a nozzle surface of the inkjet head; and the wiping step. A color filter manufactured through a cooling step of cooling the ink jet head in parallel with the above, and a light amount varying means for varying a light amount. 21. An apparatus provided with a display device having a color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate. A scanning step of relatively scanning the inkjet head and the color filter substrate, ejecting ink from the inkjet head, and coloring the color filter substrate, and a wiping step of wiping a nozzle surface of the inkjet head, A display device that integrally includes a color filter manufactured through a cooling step of cooling the inkjet head in parallel with the wiping step, and a light amount varying unit that varies a light amount; and supplies an image signal to the display device. A display device, comprising: Device. 22. A color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color filter are provided. The substrate is relatively scanned, the ink is ejected from the inkjet head, a coloring step of coloring the color filter substrate, a capping step of capping the nozzle surface of the inkjet head, and the capping step in parallel with the capping step A color filter manufactured through a cooling step of cooling an inkjet head. 23. A display device provided with a color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, A coloring step of relatively scanning the head and the color filter substrate to discharge ink from the inkjet head and coloring the color filter substrate; a capping step of capping a nozzle surface of the inkjet head; and the capping step. A color filter manufactured through a cooling step of cooling the ink jet head in parallel with the above, and a light amount varying means for varying a light amount. 24. An apparatus provided with a display device having a color filter manufactured by discharging ink while causing an inkjet head to scan relative to a color filter substrate and coloring the color filter substrate. A relative scanning of the inkjet head and the color filter substrate, discharging ink from the inkjet head, a coloring step of coloring the color filter substrate, a capping step of capping the nozzle surface of the inkjet head, A display device that integrally includes a color filter manufactured through a cooling step of cooling the inkjet head in parallel with the capping step, and a light amount varying unit that varies a light amount; and supplies an image signal to the display device. Image signal supply means And symptoms, including the display device unit. 25. A color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, wherein the ink jet head and the color filter are provided. The substrate is relatively scanned, ink is ejected from the inkjet head, a coloring step of coloring the color filter substrate, a wiping step of wiping a nozzle surface of the inkjet head, and the wiping step are performed in parallel. The inkjet head is manufactured through a first cooling step of cooling the inkjet head, a capping step of capping the nozzle surface of the inkjet head, and a second cooling step of cooling the inkjet head in parallel with the capping step. A color filter characterized by the following. 26. A display device comprising a color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate, A coloring step of relatively scanning the head and the color filter substrate to discharge ink from the inkjet head and coloring the color filter substrate; a wiping step of wiping a nozzle surface of the inkjet head; and the wiping step. A first cooling step of cooling the ink-jet head in parallel with the above, a capping step of capping the nozzle surface of the ink-jet head, and a second cooling step of cooling the ink-jet head in parallel with the capping step. With color filters manufactured through Display device characterized by comprising integrally a light amount varying means for the light quantity variable. 27. An apparatus provided with a display device having a color filter manufactured by discharging ink while causing an ink jet head to scan relative to a color filter substrate and coloring the color filter substrate. A relative scanning of the ink jet head and the color filter substrate, discharging ink from the ink jet head, a coloring step of coloring the color filter substrate, a wiping step of wiping the nozzle surface of the ink jet head, A first cooling step of cooling the inkjet head in parallel with the wiping step, a capping step of capping the nozzle surface of the inkjet head, and a second cooling step of cooling the inkjet head in parallel with the capping step Colors manufactured through the process A filter, and wherein the display device and a light amount changing means together for the light quantity variable, by including the image signal supply means for supplying an image signal to the display device, a device equipped with a display device.