JPH10255319A5 - - Google Patents

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Publication number
JPH10255319A5
JPH10255319A5 JP1997076450A JP7645097A JPH10255319A5 JP H10255319 A5 JPH10255319 A5 JP H10255319A5 JP 1997076450 A JP1997076450 A JP 1997076450A JP 7645097 A JP7645097 A JP 7645097A JP H10255319 A5 JPH10255319 A5 JP H10255319A5
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JP
Japan
Prior art keywords
master
liquid
nozzle
exposure apparatus
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997076450A
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English (en)
Japanese (ja)
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JPH10255319A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9076450A priority Critical patent/JPH10255319A/ja
Priority claimed from JP9076450A external-priority patent/JPH10255319A/ja
Publication of JPH10255319A publication Critical patent/JPH10255319A/ja
Publication of JPH10255319A5 publication Critical patent/JPH10255319A5/ja
Pending legal-status Critical Current

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JP9076450A 1997-03-12 1997-03-12 原盤露光装置及び方法 Pending JPH10255319A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9076450A JPH10255319A (ja) 1997-03-12 1997-03-12 原盤露光装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9076450A JPH10255319A (ja) 1997-03-12 1997-03-12 原盤露光装置及び方法

Publications (2)

Publication Number Publication Date
JPH10255319A JPH10255319A (ja) 1998-09-25
JPH10255319A5 true JPH10255319A5 (2) 2004-09-16

Family

ID=13605497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9076450A Pending JPH10255319A (ja) 1997-03-12 1997-03-12 原盤露光装置及び方法

Country Status (1)

Country Link
JP (1) JPH10255319A (2)

Families Citing this family (186)

* Cited by examiner, † Cited by third party
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JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
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