JPH10270148A - Heating resistor support structure of heat treatment furnace - Google Patents

Abstract

(57) [Problem] To provide a heating resistor support structure for supporting a heating resistor on the inner surface of a furnace wall of a heat treatment furnace by a simple means so as not to fall off. SOLUTION: A comb tooth tip portion of a comb tooth-shaped support A which passes through a space between coil pitches of a coil-shaped heating resistor B from the inside of a furnace into a concave portion 2 in a cylindrical axis direction provided on an inner peripheral surface of a furnace wall body 1. Mated,
Grooves 7 provided on both sides of the fitted comb tooth tip,
A rod-shaped wedge member C that engages with the groove 3 provided on the opposing surface of the recess 2 is inserted. [Effect] Since the installation of the comb-shaped support is a simple front installation from the inside of the furnace wall toward the furnace wall, the work is easy. In addition, since the support is connected to the furnace wall by inserting the rod-shaped wedge member, the support can be easily prevented from falling off.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating resistor support structure for a heat treatment furnace, and more particularly to a heating resistor for a heat treatment furnace suitable as a heating resistor support structure for a heat treatment furnace used for heat treatment of semiconductor wafers and the like. It relates to improvement of a body support structure.

[0002]

2. Description of the Related Art Conventionally, as a heating resistor support structure of this kind of heat treatment furnace, a comb-shaped support is formed of a material such as ceramic having heat resistance and electric insulation, and a gap between the comb teeth of the support is provided. In the state where the coil portion of the coil-shaped heating resistor is assembled, the tip of the comb teeth of the comb-shaped support is set in a mold form for molding the heat insulating material into a cylinder, and the cylinder molded by this There is known a heating resistor support structure for fixing the comb-shaped support to a shaped furnace wall (see JP-A-8-64546).

[0003]

According to the above-described heating resistor support structure, the coil-shaped heating resistor can be firmly supported on the furnace wall side through the comb-shaped support.

However, the above-mentioned heating resistor support structure requires a special assembling jig for assembling the comb-shaped supporting member and the coil-shaped heating resistor, and the assembling work is troublesome. There is. Furthermore, since a mold step for integrating a part of the comb-shaped support into the furnace wall is included, there is a problem in productivity.

On the other hand, a concave portion extending along the cylinder axis direction is provided on the inner peripheral surface of a furnace wall formed of a heat insulating material into a cylindrical shape.
Blocks having a rectangular cross section formed of a heat-resistant and electrically insulating material are sequentially fitted into the recesses in a stacked state, and the coil portion of the coil-shaped heating resistor is sandwiched between the block portions projecting out of the recesses. A known heating resistor support structure (Japanese Utility Model Publication No. Hei 8-6237) is known.

According to the above-described structure, the coil-shaped heat generating member is fitted into the concave portion provided on the inner peripheral surface of the cylindrical furnace wall from the inside of the furnace wall while the rectangular block supporting the heating resistor is fitted. Since the coil portion of the resistor can be supported at the same time, workability is good.

However, there is a risk that the block fitted into the concave portion may fall out of the concave portion as it is. As means for preventing the blocks from falling off, the above-mentioned publication adopts means for providing a through-hole in the fitting portion of the block, and holding the stacked blocks fitted in the recesses with a rod-shaped member inserted through the through-hole. . However, simply inserting the rod-shaped members into the stacked blocks does not prevent the blocks from falling off, but requires auxiliary means for connecting the rod-shaped members to the furnace body wall side by any means.

In order to make the above-mentioned comb-shaped support or block fit into a concave portion provided on the inner peripheral surface of a cylindrical furnace wall, the rod-shaped member or the like can be made unnecessary by, for example, a furnace. It is conceivable to provide a groove on the opposite surface of the concave portion provided on the inner peripheral surface of the wall, and to provide a protrusion fitted on the groove on the comb-shaped support or the block side. In this case,
The comb-shaped support or block can be fitted only from the end face side of the recess provided in the cylinder axis direction of the furnace wall. With the fitting from the end face side of the concave portion, it is difficult to assemble and support the coil-shaped heating resistor.

SUMMARY OF THE INVENTION The present invention has been made in order to solve all the problems of workability in assembling the above-described conventional heating resistor support structure, and the comb tooth-shaped support which is advantageous for supporting the heating resistor is provided. This comb-shaped support can be fitted from the inside of the furnace wall into a cylindrical axial recess provided on the inner peripheral surface of the furnace wall by a simple means so as not to fall out of the recess. A main object of the present invention is to provide a heating resistor support structure capable of holding.

[0010]

According to the present invention, in order to achieve the above object, a heating resistor supporting structure for a heat treatment furnace according to the present invention extends to the inner surface of a furnace wall formed of a heat insulating material and reaches both ends of the furnace wall. A plurality of concave portions are provided, and the comb-teeth-shaped tip portion of a comb-shaped support tool adapted to support a heating resistor placed inside the furnace wall at a constant pitch is fitted in the concave portion, and the fitting is performed. The gist has a configuration in which rod-shaped wedge members that are commonly engaged with grooves formed along the longitudinal direction of the concave portion are inserted into both side surfaces of the comb tooth tip and the opposite surface of the concave portion.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention include application to an annular heat treatment furnace.
As shown in FIG. 2, a plurality of rectangular recesses 2 having a rectangular cross section along the cylinder axis direction are provided on the inner peripheral surface of a furnace wall 1 formed into a tubular shape with a heat insulating material. The tip of the comb-shaped portion 5 having a rectangular cross section of the comb-shaped support A which can support the heating resistor through the coil pitch of the placed coil-shaped heating resistor B is fitted and fitted. A rod-shaped wedge member C that is commonly engaged with the groove 7 and groove 3 formed along the cylinder axis direction is inserted into both side surfaces of the comb tooth tip and the opposite surface of the concave portion.

[0012]

1 to 3 show an embodiment of the present invention. 1 to 3, reference numeral 1 denotes a furnace wall of an annular furnace formed of a heat insulating material into a cylindrical shape. On the inner peripheral surface of the furnace wall, concave portions 2 each having a rectangular cross section along the cylinder axis direction are formed at portions separated by a central angle of 90 degrees. A groove 3 having a semicircular cross section along the cylinder axis direction is formed on the facing surface of the recess 2.

A is a ceramic comb-shaped support for supporting the coil-shaped heating resistor B. This comb-shaped support A comprises a base portion 4 and four comb-shaped portions 5 each having a rectangular cross section projecting from the base portion. Department. Further, on both side surfaces of the distal end portion of the comb tooth portion 5, the same semi-circular groove portion 7 as the semi-circular groove portion 3 provided on the inner peripheral surface of the furnace wall facing the concave portion 2 is formed. .

Further, both ends of the base portion 4 are formed as raised portions 8 protruding from the comb tooth portion 5. Due to the raised portions 8, when the comb-shaped supports A are stacked, the comb-shaped portion 5 at the end of the base portion of one support and the comb-shaped portion 5 located at the end of the base portion of the other support. Between them, there is left a gap for sandwiching the coil portion of the heating resistor B. C denotes a ceramic rod-shaped wedge member used when the coil-shaped heating element B is held on the furnace wall 1 by the comb-shaped support A.

In order to support the coil-shaped heating resistor B on the furnace wall 1 using the comb-shaped supporting member A, the comb-shaped heating resistor B placed inside the furnace wall 1 is comb-shaped from the inside. The support A is mounted on the heating resistor B such that the comb teeth 5 pass between the coil pitches, and the tip of the comb tooth 5 is fitted into the recess 2 on the inner peripheral surface of the furnace wall 1. After the required number of comb teeth of the comb-shaped support A are fitted into the recesses 2 in this way, the semicircular grooves 7 on both sides of the comb teeth fitted into the recess 2 and the half of the recess side. A circular rod-shaped wedge member C made of ceramic is inserted into a circular through hole formed by the circular groove 3. With the insertion of the rod-shaped wedge member C, the comb tooth tips of the supports fitted into the recesses 2 are wedge-fixed to the furnace wall side. It is held firmly.

In the comb-shaped support of the embodiment, the comb-tooth portion 5 has a rectangular cross section. The cross-sectional shape of this comb-tooth portion can be fitted into the concave portion, and the wedge is formed by a rod-shaped wedge member. Other cross-sectional shapes may be used as long as they can form the stopping groove. The grooves 7 on both side surfaces of the comb tooth portion and the grooves 3 on the opposing surface of the concave portion 2 may be rectangular or triangular in cross section. In this case, a wedge member having a cross section corresponding to the groove may be used as the rod-shaped wedge member. Further, the support structure of the heating resistor of the heat treatment furnace of the present invention is not limited to the heating resistor support structure of the annular heat treatment furnace as shown in the embodiment, but may be a heat treatment furnace arranged along a planar furnace wall. It can also be applied as a support structure for the heat generating resistor.

[0017]

As described above, according to the present invention, the following effects can be obtained. (1) The comb-tooth-shaped support supporting the heating resistor can be wedge-fixed with a rod-shaped wedge member after the tip of the comb tooth is fitted into the recess of the furnace wall body. Prevents falling off. (2) Since the installation of the comb-shaped support is a simple front installation from the inside of the furnace wall to the furnace wall, the assembling work is easy and the working cost can be reduced. (3) The comb-shaped support has a simple structure and can be obtained at low cost. (4) Foreign matter hardly adheres to the heating resistor and the comb-shaped support.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a coiled heating resistor support structure of an annular furnace according to an embodiment of the present invention.

FIG. 2 is a plan view of FIG.

FIG. 3 is a perspective view of a comb-shaped support for supporting a coil-shaped heating resistor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Furnace wall body of annular furnace 2 Concave part 3 Groove part A Comb-shaped support 4 Base part 5 Comb part 6 Gap 7 Groove part 8 Raised part B Coil heating resistor C Rod wedge member

Claims (3)

[Claims] 1. A recess reaching both ends of a furnace wall is provided on an inner surface of a furnace wall formed of a heat insulating material, and the recess supports a heating resistor placed inside the furnace wall at a constant pitch. The tip of the comb teeth of the comb-shaped support is adapted to be fitted, and formed on both sides of the fitted tip of the comb teeth and the opposite surface of the recess along the longitudinal direction of the recess. A heat-generating resistor support structure of a heat treatment furnace, wherein a rod-shaped wedge member which is commonly engaged is inserted into a groove formed as described above. 2. A plurality of recesses extending along a cylinder axis direction are provided on an inner peripheral surface of a furnace wall formed of a heat insulating material in a cylindrical shape.
A comb tooth-shaped supporting member adapted to support the heating resistor through the coil pitch of the coil-shaped heating resistor placed inside the furnace wall is fitted with the comb teeth, and the fitted comb teeth are fitted. A heating resistor support structure for a heat treatment furnace configured by inserting rod-shaped wedge members that are commonly engaged with grooves formed along the cylinder axis direction on both side surfaces of the tip end and opposing surfaces of the recess. . 3. The comb-tooth-shaped support comprises a base portion, a plurality of comb-shaped portions having a rectangular cross section projecting from the base portion, and a raised portion having both ends of the base portion projected. The heating resistor support structure of a heat treatment furnace according to claim 1 or 2, wherein grooves are formed on both side surfaces of a tip portion of the portion.