JPH10271868A - Moving stage device - Google Patents

Abstract

(57) [Problem] To provide a moving scale device capable of forming an XY biaxial table with a flat structure. An X-axis table (20) is provided on a base member (100).
X- in which 0 and Y-axis table 300 are incorporated in a planar structure.
The X-axis table 200 and the Y-axis table 300 are controlled by the X-axis drive unit 500 and the Y-axis drive unit 600 having the Y table 400 arranged on the base member 100 in a planar structure. Each drive unit and each table are arranged with a magnetic body having a comb tooth surface facing each other, and by switching energization to a drive coil, the magnetic resistance is changed due to a change in a magnetic gap between the comb tooth surfaces of each magnetic body. Thrust is given to each table by changing. In addition, a detection device for detecting the position of each table is provided, and a detection signal is fed back to control the energization of the drive coil.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving stage device for controlling the movement of various movable members by utilizing a change in magnetic resistance.

[0002]

2. Description of the Related Art Various types of industrial XY (biaxial) table devices have been conventionally provided. For example, an X-axis table supported movably in the X-axis direction by a guide shaft or the like is provided on a fixed base, and the X-axis table is moved by a moving mechanism using a servomotor and precision screws (a feed screw and a half nut, etc.). Control movement in the direction.
A Y-axis table supported by a guide shaft or the like so as to be movable in the X-axis direction is disposed on the X-axis table, and the Y-axis table is moved by a servomotor and a precision screw (a feed screw and a half nut). To control the movement in the Y-axis direction. With such a structure, displacement of the Y-axis table in the XY directions on the fixed base is obtained.

[0003] As a driving method, in addition to the above-described servo motor driving, a linear motor using a magnetic circuit is assembled in upper and lower stages in the X-axis direction and the Y-axis direction, and the X-axis driving is performed.
There is also provided one that obtains displacement in the Y direction.
In addition to the above-described two-axis table of the X-axis and the Y-axis, in order to further obtain the displacement in the rotation direction (the θ-axis direction), the rotation table is rotatable on the above-described Y-axis table. There is provided an XY-θ (three-axis) table device which is rotatably supported by a servomotor or the like.

[0004]

However, the above-described conventional two-axis table apparatus and three-axis table apparatus have a structure in which the X-axis drive system and the Y-axis drive system are vertically stacked. In addition, it is difficult to flatten the device, and it may be difficult to secure an arrangement space when incorporating the device into various devices and facilities.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a moving stage device capable of obtaining a reliable operation with a flat structure.

[0006]

In order to achieve the above object, the present invention provides a moving stage device for moving an XY table disposed on a base member, wherein the XY table has an X-Y table on the base member. A substantially frame-shaped X-axis table supported movably in the axial direction, a substantially plate-shaped Y-axis table supported movably in the Y-axis direction within the frame of the X-axis table, The base member is provided on a side portion along the X-axis direction so as to face the base member, and is formed in a longitudinal shape along the X-axis direction.
An X-axis actuating magnetic body having a comb-tooth portion in which ridges and grooves are formed alternately at predetermined intervals in an axial direction; and a Y-axis table provided on the Y-axis table so as to face the base member. A comb-shaped portion having alternately formed peaks and grooves at predetermined intervals in the axial direction, the comb-shaped portion including a Y-axis operating magnetic body formed with a width corresponding to a stroke in the X-axis direction; The base member includes a plurality of X-axis driving magnetic members each having a comb-tooth portion having ridges and grooves alternately formed in the X-axis direction in opposition to the X-axis operating magnetic members of the XY table; A plurality of X-axis driving coils wound around the driving magnetic body, and by applying a current to each of the X-axis driving coils, switching the energization to the X-axis operating magnetic body to apply a thrust in the X-axis direction. X
An axial drive unit, and a plurality of Y-axis driving magnetic members having comb teeth that alternately form peaks and grooves in the Y-axis direction in opposition to the Y-axis operating magnetic members of the XY table. A plurality of Y-axis driving coils wound around each of the Y-axis driving magnetic bodies, and the Y-axis operating magnetic bodies are provided in the Y-axis direction by switching the energization of the respective Y-axis driving coils. A driving unit in the Y-axis direction for applying a thrust
The drive unit in the axial direction and the drive unit in the Y-axis direction are arranged on the base member in a planar structure.

The present invention also provides a moving stage device having a driving device for moving a moving body supported on a supporting member so as to be movable in a predetermined direction, wherein the moving body is provided so as to face the supporting member, An actuating magnetic body having a comb-tooth portion in which peaks and grooves are alternately formed in the predetermined direction at predetermined intervals, wherein the support member is alternately provided with the peaks in the predetermined direction in opposition to the operating magnetic body; A plurality of driving magnetic bodies having a comb-shaped portion having a groove, a plurality of driving coils wound around each driving magnetic body, and a switch for energizing each of the driving coils. A drive control circuit that applies a thrust in the predetermined direction to the magnetic body, wherein each of the drive magnetic bodies is formed so as to generate a sine waveform thrust with respect to the actuation magnetic body, and the drive control circuit The moving position of the moving body A position management unit for, a command circuit for outputting a drive command signal corresponding to the actuating coils on the basis of the target position information output from the position management unit,
A drive circuit unit that generates a switching signal for each of the drive coils in accordance with the drive command signal and supplies the signal to the drive coil.

The present invention also provides a moving stage device having a driving device for moving a moving body supported on a supporting member so as to be movable in a predetermined direction, wherein the moving body is provided so as to face the supporting member, The scale has a scale magnetic body having a comb-tooth portion in which peaks and grooves are alternately formed in the predetermined direction at predetermined intervals, and the support member alternately has a peak and a mountain in the predetermined direction facing the scale magnetic body. A detection magnetic body having a comb-shaped portion having a groove, a detection coil wound around the detection magnetic body, and a displacement of the moving body detected by a change in a detection current supplied to the detection coil. A displacement detection circuit for detecting the sine wave from the detection coil, wherein the detection magnetic body is formed so as to generate a sine waveform detection signal with respect to the scale magnetic body. Signal phase level Via a predetermined bit of the A / D converter is characterized in that as read by the arithmetic circuit.

In the moving stage apparatus of the present invention as described above, by switching the energization to the X-axis driving coil, the magnetic resistance between the comb teeth of the X-axis driving magnetic body and the X-axis operating magnetic body is switched. , A thrust is applied to the X-axis operating magnetic body, and the X-axis table moves. The Y-axis table also moves in the X-axis direction due to such movement of the X-axis table. The comb teeth of the Y-axis driving magnetic body of the Y-axis table have a width corresponding to the stroke in the X-axis direction. Therefore, the opposing relationship between the comb teeth of the Y-axis driving magnetic body and the Y-axis operating magnetic body does not change with respect to the movement in the X-axis direction. Therefore, the movement of the Y-axis table in the Y-axis direction can be controlled independently of the movement of the X-axis table in the X-axis direction. That is, by switching the energization of the Y-axis driving coil, a thrust is applied to the Y-axis operating magnetic body by a change in magnetic resistance between the comb teeth of the Y-axis driving magnetic body and the Y-axis operating magnetic body. Then, the Y-axis table moves.

As described above, the switching current is sequentially supplied to the driving unit in the X-axis direction and the driving unit in the Y-axis direction arranged in a planar structure on the base member. Can be obtained. Then, the XY table is configured by disposing the Y-axis table in the frame of the above-described X-axis table, and
By arranging the drive unit in the axial direction and the drive unit in the Y-axis direction on the base member in a planar structure, the entire device can be configured with a flat structure.

Further, in the moving stage device of the present invention, the moving magnetic body provided on the moving body has a comb-toothed portion.
A driving magnetic body having a comb tooth portion that generates a sinusoidal thrust is provided, and a switching current is supplied to a driving coil wound around the driving magnetic body, so that an operating magnetic body and a driving magnetic body are provided. A sinusoidal thrust is applied to the body, and the moving body is moved by the thrust. With such a configuration that generates a thrust having a sinusoidal waveform, it is possible to accurately grasp the state of action of the thrust of each driving magnetic body with respect to the moving position of the operating magnetic body and the state of fluctuation of the thrust between a plurality of driving magnetic bodies. Thus, effective driving control can be performed, and the moving body can be moved stably.

In the moving stage apparatus according to the present invention, a detection magnetic body having a comb-tooth portion for generating a sine waveform detection signal is provided for the comb-tooth portion of the scale magnetic body provided on the moving body. The position of the moving body is detected by reading a sine wave detection signal from a detection coil wound around the magnetic body for detection by an arithmetic circuit via an A / D converter. With such a sine wave detection signal, the movement position of the scale magnetic body and the phase level of the detection signal can be calculated in a highly accurate manner, and the position of the moving body can be detected with high resolution. This can contribute to fine drive control of the moving body.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a moving stage device according to the present invention will be described below. FIG. 1 is a plan view showing an outline of an XY-θ three-axis table device which is an example of a moving stage device according to the present invention, and FIGS. 2 (A) and 2 (B).
3 is a side view and a side sectional view of the moving stage device shown in FIG. 1 in the X-axis direction, and FIGS. 3A and 3B are side views of the moving stage device shown in FIG. 1 in the Y-axis direction. It is a side sectional view. 4 is a plan view showing a base member in the moving stage device shown in FIG. 1, FIG. 5 is a partially exploded perspective view of the base member shown in FIG. 4, and FIG. 6 is an XY diagram of the moving stage device shown in FIG. It is an exploded perspective view showing a table and a turntable. FIG. 7 is a plan view showing an arrangement of an X-axis drive unit and a Y-axis drive unit on a base member;
FIG. 8 is a bottom view showing the structure of the X-axis and Y-axis operating magnetic members provided on the XY table.

The three-axis table device of this embodiment has a base member 1
An X-Y table 400 in which an X-axis table 200 and a Y-axis table 300 are assembled in a planar structure is disposed on the base member 100, and an X-axis drive unit 500 and a Y-axis drive unit 600 arranged in a planar structure on the base member 100. By
The movement of the X-axis table 200 and the Y-axis table 300 is controlled. In addition, a rotary table 700 is arranged on the Y-axis table 300, and the rotation is controlled by a drive unit 800 in the θ-axis direction provided on the Y-axis table 300. Further, in the three-axis table device of the present example, there are provided position detection devices 900, 1000, and 1100 that detect the movement positions of the tables 200, 300, and 700, and based on these position detection signals, Drive control by the drive units 500, 600, 800 is performed. Hereinafter, each configuration of the three-axis table device of the present example will be described in detail.

First, the base member 100 is formed in a rectangular flat plate shape having a high-precision flat surface, and X-axis guide rail blocks 102 and 104 are provided at both ends. The X-axis table 200 is moved by the guide rails 106 provided on each of the X-axis guide rail blocks 102 and 104.
It is configured to be supported movably in the axial direction. Also,
On the upper surface of the base member 100, the X-axis driving magnetic bodies 510, 512, 514, of the X-axis driving unit 500 are located inside the respective X-axis guide rail blocks 102, 104.
516, X-axis driving coils 520, 522, 524,
526 are provided.

That is, the two X-axis driving magnetic members 51
0, 514 and X-axis driving coils 520, 524 are provided inside one X-axis guide rail block 102, and the remaining two X-axis driving magnetic bodies 512, 516 and X-axis driving coils 522, 526 are provided. It is provided inside the other X-axis guide rail block 104. Also,
Each X-axis driving magnetic body 510, 512, 514, 516
Has a comb-tooth portion in which peaks and valleys are alternately provided in the X-axis direction on the respective upper surfaces. The details will be described later. In addition, a non-magnetic protective film is applied to the surface of the comb teeth of each magnetic body in the present embodiment to prevent breakage and the like.

The Y-axis driving magnetic body 61 of the Y-axis driving unit 600 is provided at the center of the upper surface of the base member 100.
0, 612, 614, 616 and the Y-axis drive coil 62
0, 622, 624, and 626 are provided. That is, each Y-axis driving magnetic body 610, 612, 614, 61
6 and Y-axis driving coils 620, 622, 624, 6
26 is provided in two rows and two columns. Further, each of the Y-axis driving magnetic bodies 610, 612, 614, and 616 has a comb-tooth portion provided with peaks and grooves alternately in the Y-axis direction on the respective upper surfaces. The details will be described later. The X-axis guide rail blocks 102 and 104 are connected to the base member 10.
0, and is fixed in a positioning state by screwing, and each driving magnetic body 510, 512, 514, 516, 610,
The reference numerals 612, 614, and 616 are fixed in a positioning state by being screwed to a positioning guide portion 110 provided on the upper surface of the base member 100.

Next, the X-axis table 200 of the XY table 400 is formed in a rectangular frame shape having a substantially square shape in plan view. Guide rails 202 are provided on outer surfaces of both sides along the X-axis direction, and the guide rails 106 of the above-described X-axis guide rail blocks 102 and 104 are slidable via a cross roller (not shown) or the like. It is assembled. Thus, the X-axis table 200 is supported on the base member 100 so as to be movable in the X-axis direction.

On both sides along the X-axis direction, X-axis actuating magnetic bodies 210 and 212 whose movement is controlled by the above-described X-axis drive unit 500 are provided. Each of the X-axis operating magnetic bodies 210 and 212 is formed in a longitudinal shape corresponding to a stroke in the X-axis direction. On the lower surface of each of the X-axis actuating magnetic members 210 and 212, a comb-tooth portion having peaks and grooves alternately formed in the X-axis direction is provided. Is one of the X
The comb-shaped portion of the other X-axis actuating magnetic member 212 is arranged to face the shaft driving magnetic members 510 and 512, and faces the other X-axis driving magnetic members 514 and 516 described above.

The X-axis driving coil 52 described above
By supplying a switching current to the X-axis operating magnetic members 210 and 212 and the X-axis driving magnetic members 510, 512, 514, and 516, the switching current is supplied to the magnetic members 0, 522, 524, and 526. The movement of the X-axis table 200 is controlled in the X-axis direction by the fluctuation of the resistance. The details of the control will be described later. Guide rails 204 are provided inward on both sides of the X-axis table 200 along the Y-axis direction to guide the Y-axis table 300 to move in the Y-axis direction.

Next, the Y-axis table 300 is formed in the shape of a rectangular plate, and has guide rails 302 on the outer surfaces of both sides along the Y-axis direction. The guide rail 302 is slidably mounted on the guide rail 204 of the X-axis table 200 via a cross roller (not shown) or the like, so that the Y-axis table 300
Are supported movably in the Y-axis direction within the frame of the X-axis table 200. By arranging the Y-axis table 300 in the frame of the X-axis table 200 in this manner, the XY
The thickness of the table 400 is reduced.

On the lower surface of the Y-axis table 300, there is provided a Y-axis operating magnetic body 310 whose movement is controlled by the above-described Y-axis drive unit 600. The Y-axis operating magnetic body 310 has a length corresponding to the stroke in the Y-axis direction and is formed in a substantially square shape having a width corresponding to the stroke in the X-axis direction. The lower surface of the Y-axis operating magnetic body 310 has a comb tooth portion in which peaks and grooves are alternately formed in the Y-axis direction, and the Y-axis driving magnetic bodies 610, 612, 614, and 616 have the same shape. Are facing each other. Then, the above-described Y-axis driving coils 620, 6
Supplying the switching current to the Y-axis operating magnetic body 310 and the Y-axis driving magnetic body 61
0, 612, 614, and 616, the Y-axis table 300 is moved to the Y-axis
Control the movement in the axial direction. The details of the control will be described later.

As described above, in the three-axis table device of the present embodiment, the X-axis table 200 and the Y-axis table 300 are arranged in a plane structure on the base member 100 with respect to the XY table 400 in which the plane structure is provided. X axis drive unit 500
Since XY driving is obtained by the Y-axis driving unit 600 and the Y-axis driving unit 600, a device having a flat structure can be obtained.

Next, the rotary table 700A is
The shaft core 704 is formed on the lower surface of the Y-axis table 300, and the shaft core 704 is rotatably attached to a rotating shaft 320 provided on the upper surface of the central part of the Y-axis table 300. The θ-axis operating magnetic body 710 is provided on the lower surface of the turntable 700A. The θ-axis operating magnetic body 71
Numeral 0 is formed in a disk shape having an insertion line 710A through which the shaft core portion 704 is inserted at the center, and a rotary table 700A.
Is attached to the disk portion 702 via a rotary table base 700 by screws or the like. In addition, comb teeth having ridges and grooves formed at predetermined intervals in the circumferential direction are provided on the outer peripheral portion of the θ-axis operating magnetic body 710.

The θ-axis driving magnetic bodies 810, 812, 814, and 816 constituting the θ-axis driving unit 800 and the θ-axis driving coils 820, 822, 824, and 826 are provided at each corner of the Y-axis table 300. Is provided. Each of the θ-axis driving magnetic bodies 810, 812, 814, 816
Corresponding to the comb portions of the θ-axis actuating magnetic body 710, there are comb portions in which peaks and grooves are alternately formed along the outer peripheral direction of the rotary table 700.

The above-mentioned θ-axis driving coil 82
By supplying a switching current to the 0, 822, 824, and 826, the magnetic resistance formed between the comb teeth of the θ-axis operating magnetic body 710 and the θ-axis driving magnetic bodies 810, 812, 814, and 816 is reduced. The movement of the rotary table 700 is controlled in the rotation direction, that is, in the θ-axis direction by the fluctuation. The details of the control will be described later.

Next, each drive unit 50 as described above
The configuration of the magnetic circuit at 0, 600, and 800 will be described. First, the X-axis drive unit 500 and the Y-axis drive unit 600 will be described collectively because the opposing shapes of the comb teeth of each operating magnetic body and the comb teeth of each driving magnetic body are almost the same. .

FIGS. 9A to 9C are views showing the shape of the comb teeth of the magnetic material for operation, FIG. 9A is a side view of the magnetic material for operation, and FIG. (C) is an enlarged view showing a tooth profile of a comb tooth part. As shown in the figure, the operating magnetic body 10 is formed by stacking, for example, silicon steel plates, and the comb teeth portion 12 has a peak 12A and a groove 12B formed in a direction orthogonal to the stacking direction. Things.
The comb teeth 12 of the operating magnetic body 10 are formed at an equal pitch over the entire length. The above-described X-axis operating magnetic bodies 210 and 212 are formed by forming the width W of the operating magnetic body 10 shown in FIG. Further, the Y-axis operating magnetic body 310 has a width W of the operating magnetic body 10 shown in FIG.
Is made larger corresponding to the stroke in the X-axis direction, and is formed in a square plate shape as a whole.

Next, FIGS. 10A to 10C are views showing the shape of the driving magnetic body, FIG. 10A is a side view of the driving magnetic body, and FIG. FIG. 4C is an enlarged view showing the shape of the comb teeth. FIG. 10 shows an example of a comb tooth portion having four peaks and three grooves. As shown in the drawing, the magnetic body for driving 20 has a pair of arms 20B and 20C bent at both ends of a base 20A, and has a substantially concave side surface.
The front end of the OC is formed wide, and the end faces thereof are provided with comb teeth 22 having the same shape.

The driving magnetic body 20 is also formed by stacking, for example, silicon steel plates, similarly to the above-described operating magnetic body 10, and the comb teeth 22 are arranged in a direction orthogonal to the stacking direction. A peak 22A and a groove 22B are formed. In the driving magnetic body 20, the peaks 22A and the grooves 22B of the comb teeth 22 are formed on the peaks 1 of the comb teeth 12 of the operating magnetic body 10.
2A and the groove 12B are opposed to each other, and the relative position between the crest and the groove changes in accordance with the relative movement between the driving magnetic body 20 and the operating magnetic body 10, and the driving magnetic body 20 and the operating magnetic body 20 The magnetic resistance with the magnetic body 10 changes.

Further, the arm portion 20 on which each comb tooth portion 22 is formed
A drive coil 24 is wound on the base end sides of B and 20C. When the drive coil 24 is energized, a magnetic flux is generated from one comb tooth portion 22 around the concave drive magnetic body 20 and directed to the other comb tooth portion 22, and the operating magnetic body 10 is turned on. A closed loop magnetic path 30 as shown in FIG. As described above, the drive magnetic body 20 is provided with the two arms 20 </ b> B and 20 </ b> C, and the comb teeth 22 are provided on the respective end surfaces to form a closed-loop magnetic path with the actuation magnetic body 10. As a result, the adjacent driving magnetic body 2
Thus, it is possible to efficiently obtain a thrust by preventing the interference of the magnetic field with zero and eliminating the leakage of the magnetic flux.

Further, in this embodiment, as shown in FIG. 10C, the comb teeth 22 of the driving magnetic body 20 are arranged such that the pitch P.phi.
> P1. Thus, the thrust applied from the driving magnetic body 20 to the operating magnetic body 10 has a substantially sinusoidal waveform.

In this embodiment, the X-axis drive unit 500 and the Y-axis drive unit 600 are configured by combining the four drive magnetic members 20 and four drive coils 24 as described above. Then, the X-axis driving magnetic bodies 510, 512, 514, and 516 of the X-axis driving unit 500 using the driving magnetic bodies 20 as described above are arranged with respect to the comb teeth of the X-axis operating magnetic bodies 210 and 212. 12 are shifted from each other by a quarter pitch, and when a switching signal is supplied, the thrust of the positive (or negative) side of the four sine waveforms shown in FIG. The shaft operating magnetic members 210 and 212 are moved.

That is, as shown in FIG. 13, each X-axis driving magnetic body 51 is attached to each X-axis operating magnetic body 210, 212.
In a state where 0, 512, 514, and 516 face each other, the switching signal A is supplied to the driving coil 520 of the first X-axis driving magnetic body 510 to drive the third X-axis driving magnetic body 514. The switching signal A
And the switching signal * A whose phase is inverted.
The driving coil 5 of the second X-axis driving magnetic body 512
22 is supplied with a switching signal B having a phase shifted by 90 ° from the switching signal A, and a driving coil 526 of a fourth X-axis driving magnetic body 516 is supplied with the switching signal B.
And the switching signal * B whose phase is inverted.
FIG. 13 shows an example of a comb tooth portion having three peaks and two grooves.

Here, the driving magnetic members 510, 512, 5
Assuming that a reference current supplied to each of the driving magnetic bodies 510, 512, 514, and 516 is i ₀ , i _A , i _B , i _{* A} , and i _{* B} are as follows. Given. _{i A = i 0 sinΘ A i} * A = i 0 sinΘ * A i B = i 0 conΘ B i * B = i 0 conΘ * B However, theta corresponds to a phase shift between the respective comb tooth portions sine Represents the angle of the waveform, Θ _A = Θ _{* A} -180 ° = Θ _B
+ 90 ° = Θ _{* B−} 90 °. The total thrust FΘ by the driving magnetic bodies 510, 512, 514, 516 is given by the following equation. _{FΘ = i A sinΘ A + i} * A sinΘ * A + i B conΘ
_B + i _* BconΘ _{* B} Therefore, FΘ is a constant value substantially proportional to i ₀ .

The Y-axis driving magnetic body 61 of the Y-axis driving unit 600 using the driving magnetic body 20 as described above.
Similarly, 0, 612, 614, and 616 are quarters of each other.
When the switching signals are supplied and the switching signals are supplied, the thrust obtained by synthesizing the thrust on the positive side (or the negative side) of the four sine waveforms as shown in FIG.
The shaft operating magnetic body 310 is moved. That is, the switching signal A is supplied to the drive coil 620 of the first Y-axis drive magnetic body 610, and the third Y
The drive signal 624 of the drive coil 624 of the shaft drive magnetic body 614 has a switching signal * A having a phase inverted to that of the switching signal A.
Is supplied.

A switching signal B having a phase shifted by 90 ° from the switching signal A is supplied to the driving coil 622 of the second Y-axis driving magnetic body 612, and the fourth Y-axis driving magnetic body 616 is provided. Is supplied with a switching signal * B whose phase is inverted from that of the switching signal B. Note that the relationship between the control current and the thrust applied to each of the Y-axis driving magnetic bodies 610, 612, 614, and 616 in the Y-axis driving unit 600 is the same as that in the case of the X-axis driving unit 600, and the description is omitted.

Next, the θ-axis drive unit 800 will be described. As with the X-axis drive unit 500 and the Y-axis drive unit 600 described above, the θ-axis drive unit 800
Are formed by stacking silicon steel plates. FIG.
FIG. 4 is a plan view showing the shape of the θ-axis operating magnetic body 710. As shown in the figure, a comb tooth portion 720 having peaks 720A and grooves 720B formed at predetermined intervals in the circumferential direction is provided on the outer peripheral portion of the θ-axis operating magnetic body 710. FIG.
Although a part of the comb tooth portion 720 is omitted in the figure, a peak 720A and a groove 720B are actually formed over the entire circumference.

FIG. 15A is a plan view showing a θ-axis driving magnetic body 810 and a θ-axis driving coil 820.
FIG. 15B shows the comb teeth 83 of the θ-axis driving magnetic body 810.
It is an enlarged view which shows 0. The remaining θ-axis driving magnetic members 812, 814, and 816 and the θ-axis driving coils 822, 8
24 and 826 have the same shape, and the description is omitted. FIG. 15 shows an example of a comb tooth portion having three peaks and two grooves.

The θ-axis driving magnetic body 810 includes a base 810A.
The arm 810B, 810C extends forward from both ends thereof, and has a substantially concave shape in plan view.
The tip of 10C is formed wide, and the end face thereof is provided with a comb-shaped portion 830 having the same shape.
Are arranged so as to face the comb teeth portion 720 of FIG. That is, the peak 830A and the groove 830B of the comb tooth portion 830
15B, as shown in FIG.
It is formed so as to be curved slightly inward along the arc shape of the 0 comb tooth portion 720, and forms a constant magnetic gap with the comb tooth portion 720 of the θ-axis operating magnetic body 710. And
Arms 810B, 810 provided with such comb teeth 830
A driving coil 820 is wound on the base end side of C.

Also in the θ-axis drive unit 800, the width of the peak 830A and the width of the groove 830B of the comb teeth 830 of the θ-axis driving magnetic body 810 are formed to be non-uniform with respect to the comb teeth 720 at equal intervals. By doing so, the θ-axis driving magnetic body 81
From 0, the thrust applied to the θ-axis operating magnetic body 710 has a substantially sinusoidal waveform. The other θ-axis driving magnetic bodies 812, 814, and 816 have the same shape.

In the θ-axis driving unit 800 using the four θ-axis driving magnetic bodies 810, 812, 814, and 816, each θ-axis driving magnetic body 810,
812, 814, and 816 are displaced from each other by a quarter pitch, and when a switching signal is supplied, the thrust (rotational force) on the positive (or negative) side of four sine waveforms as shown in FIG. ) Combined thrust (rotational force)
Thus, the θ-axis operating magnetic body 710 is moved.

That is, the first θ-axis driving magnetic body 810
The switching signal A is supplied to the driving coil 820 of the driving coil 820, and the driving coil 8 of the third θ-axis driving magnetic body 814 is
24 is supplied with a switching signal * A whose phase is inverted from that of the switching signal A. Further, a switching signal B having a phase shifted by 90 ° from the switching signal A is supplied to the driving coil 822 of the second θ-axis driving magnetic body 812 to drive the fourth θ-axis driving magnetic body 816. Coil 8
The switching signal * B whose phase is inverted from that of the switching signal B is supplied to 26.

The four θ-axis driving magnetic members 81
The rotation of the θ-axis operating magnetic body 710 is controlled by the thrusts generated by 0, 812, 814, and 816. The θ-axis drive magnetic bodies 810 and 81 in the θ-axis drive unit 800
The relationship between the control current and the thrust to 2, 814, and 816 is the same as that of the X-axis drive unit 600, and the description is omitted.

Next, the position detecting devices 900, 1000, and 1100 for detecting the moving positions of the tables 200, 300, and 700 in the above-described three-axis table device will be described. First, the position detecting device 900 of the X-axis table 200 connects the X-axis scale magnetic body 910 provided on one side along the X-axis direction of the X-axis table 200 to the one X-axis guide rail block 102 of the base member 100. Are detected by a pair of X-axis detection magnetic bodies 920 and 930 and X-axis detection coils 940 and 950 provided in the above.

The magnetic body 910 for the X-axis scale has a comb-tooth portion 91 in which peaks and grooves are alternately provided at predetermined intervals along the X-axis direction.
2 with the comb teeth 912 facing outward.
It is attached to a flange portion 200A provided on the shaft table 200. The magnetic material 910 for the X-axis scale was used.
Has the same planar shape as the above-described operation magnetic body 10 and is formed by laminating silicon steel plates or the like. However, since it is for detection, a large-capacity magnetic circuit is not required, and It is thinner than the magnetic body 10.

On the other hand, X-axis detecting magnetic bodies 920 and 930
Each has a planar shape similar to that of the above-described driving magnetic body 20, is formed by laminating silicon steel plates or the like, and has both ends of the concave shape wide, and the comb teeth 922, 93
2 and each of the comb teeth portions 922 and 932 is
The shaft scale magnetic body 910 is attached to the X-axis guide rail block 102 so as to be close to and opposed to the comb teeth portion 912. However, this X-axis detecting magnetic body 92
Since 0 and 930 are for detection, a large-capacity magnetic circuit is not required, and are formed thinner than the drive magnetic body 20. Then, X-axis detection coils 940 and 950 are wound around the base end side of the concave arm portion.

FIG. 16 is a perspective view showing such an X-axis scale magnetic body 910 and X-axis detection magnetic bodies 920 and 930. In the illustrated example, magnetic films 40 for protection are respectively attached to both side surfaces of each magnetic body. Also, in such X-axis detecting magnetic bodies 920 and 930, the pitch of both sides of the comb teeth portions 922 and 932 is narrower than the center pitch, so that a slightly complicated magnetic path is formed. , A detection signal having a sine waveform is detected by the detection coils 940 and 95.
0.

Then, such an X-axis position detecting device 90
0, the comb teeth 9 of the X-axis detecting magnetic bodies 920 and 930
22 and 932 are at a quarter pitch with respect to the comb teeth 912 of the X-axis scale magnetic body 910, that is, 90 °.
Are arranged only in a phase shift. Therefore,
Output signals from the X-axis detection coils 940 and 950 are as follows:
Sine wave signals that are 90 ° out of phase with each other, ie, sin
It is output as a waveform and a cos waveform.

FIG. 17 shows such an X-axis position detecting device 9.
FIG. 18 is an explanatory diagram showing a configuration example of the detection circuit at 00, and FIG. 18 is a waveform diagram showing an example of a detection signal detected by the detection circuit shown in FIG. FIG. 17 shows an example of a comb tooth portion having three peaks and two grooves. As described above, the comb tooth portions 92 of the two detection magnetic bodies 920 and 930
Positions 2 and 932 are at a quarter pitch (phase 9) with respect to the pitch of the comb teeth 912 of the scale magnetic body 910.
0 °).

The detection circuit according to the present embodiment includes the detection coils 94
It has an oscillation circuit 960 for supplying a reference current of a predetermined frequency to 0 and 950, and two resistors 970A and 970B for detecting output currents from the detection coils 940 and 950. Accordingly, the position of X-axis scale magnetic body 910 is detected. Resistor 97
The output voltage at 0A and 970B depends on the phase difference between the magnetic bodies for detection 920 and 930, as shown in FIG.
One has a sin waveform and the other has a cos waveform. Therefore, in the present example, such a detected waveform is read by an arithmetic circuit by, for example, a 16-bit A / D converter (R / D (resolver / digital) converter). In addition,
In this example, such a detection signal having a sine waveform is referred to as a resolver signal.

Here, the detection coil 940 is set to the A phase, the detection coil 950 is set to the B phase, and the detection coils 940, 9
The currents Ia (Θ) and Ib (Θ) flowing through the coil 50 are represented by an exciting voltage VCO and an impedance of each coil Impa.
(Θ) and Impb (Θ) are as follows.
Θ represents the A-phase detection coil 940 and the detection magnetic body 9
20 indicates the electrical position, and Θ varies from 0 to 2π. Θ = 0 is defined as a position where the positions of the comb teeth of the A-phase detection coil 940 and the A-phase detection magnetic body 920 match each other.

First, the impedances of the detection coils 940 and 950 are as follows. In addition, Imp0, Im
p is a constant coefficient. Impa (Θ) = Imp0 + Imp ^* sinΘImpb (Θ) = Imp0 + Imp ^* cosΘ Therefore, Ia (Θ) = VOC / Impa (Θ) = VOC / (Imp0 + Imp ^* sinΘ) = I0 + I ^* sinΘIb (Θ) = VO (I) / VOC Θ) = VOC / (Imp0 + Imp ^* cosΘ) = I0 + I ^* cosΘ where I0 and I are constant coefficients.

From the above equation, Ia (Θ) and Ib (Θ) are detected, and I0 is subtracted by the position detection circuit, and I ^* sin
Θ, I ^* cos 、, and the position Θ is obtained by the A / D converter (resolver-digital converter). The resolution of the position Θ is determined by the resolution of a converter that converts analog sinΘ and cosΘ signals into digital signals. Therefore, for example, the length of one pitch of the comb tooth portion is 3.28 m.
Assuming that m and the resolution of the converter are 16 bits, the detection resolution is 3.28 / 65536 (mm / bit), which is about 0.05 μm / bit. Thus, the resolution is determined by the shape of the comb teeth and the resolution of the converter.

The maximum speed that can be handled at this time is determined by the frequency response of the converter. The frequency response of this converter depends on the resolution. At a resolution of 10 bits, the analog sin {/ cos} signal period is 1040 rev / sec.
c (53.3 when one pitch of the comb teeth is 3.28 mm)
mm / sec). The above description can be similarly applied to the Y axis and the θ axis, and the position and the rotation angle can be obtained by controlling the current in the same manner. The fine position detection within one pitch of the comb teeth is performed by the resolution of the detection circuit as described above. Information on how many pitches the X-axis table 200 has moved is accumulated in an arithmetic circuit described later. It is assumed that the number is counted and stored in the memory in order.

In this example, when the X-axis table 200 is moved to a target position, the X-axis driving coils 520, 5
The energization to 22, 524 and 526 is stopped, and only the position monitoring by the X-axis detection coils 940 and 950 is performed. Therefore, the driving power of the X-axis driving coils 520, 522, 524, and 526, which is larger than the detection power, can be reduced, and the power consumption can be reduced.

When an external force or the like is applied to the X-axis table 200 and the X-axis table 200 is slightly displaced, this is detected by detection signals from the X-axis detection coils 940 and 950, and the displacement is corrected. The energization to the X-axis driving coils 520, 522, 524, and 526 is resumed, and X
The X-axis table 200 is returned to the original position by the thrust of the shaft driving coils 510, 512, 514, 516. Thus, the X-axis table 200 is held at a fixed position.

Next, the position detecting device 1000 of the Y-axis table 300 is configured similarly to the position detecting device 900 of the X-axis. That is, the position detecting device 1000 has the Y-axis scale magnetic body 1010 provided on one side of the Y-axis table 300 along the Y-axis direction provided on one side of the X-axis table 200 along the X-axis direction. A pair of Y-axis detection magnetic bodies 1020 and 1030 and Y-axis detection coils 1040 and 1040
50. The magnetic body for Y-axis scale 1010 has a comb-tooth portion 1012 in which peaks and grooves are alternately provided at predetermined intervals along the Y-axis direction.
It is attached to the Y-axis table 300 with the 12 facing outward. The Y-axis scale magnetic body 101
No. 0 has the same planar shape as the above-described actuation magnetic body 10 and is formed by laminating silicon steel plates and the like. It is thinner than the magnetic material 10 for use.

On the other hand, Y-axis detecting magnetic members 1020 and 103
No. 0 has the same planar shape as the above-described driving magnetic body 20, is formed by laminating silicon steel plates or the like, and has both ends of the concave shape having a wide width.
1032, and each of the comb teeth portions 1022, 1
032 is a comb tooth part 101 of the magnetic body 1010 for Y-axis scale.
X-axis table 200 in a state where the X-axis table 200
Mounted on However, this Y-axis detecting magnetic body 1
Since 020 and 1030 are for detection, a large-capacity magnetic circuit is not required, and they are formed thinner than the driving magnetic body 20. The Y-axis detection coils 1040 and 1050 are wound on the base end side of the concave arm portion.

The Y-axis detecting magnetic body 102
Also at 0 and 1030, the width of the peaks and grooves of the comb teeth portions 1022 and 1032 is formed to be non-uniform to form a somewhat complicated magnetic path, so that a detection signal having a sinusoidal waveform is generated. To occur. And
In such a Y-axis position detecting device 1000, the comb teeth 1022, 103 of each of the Y-axis detecting magnetic bodies 1020, 1030.
2 are the comb teeth 1 of the magnetic body 1010 for the Y-axis scale.
012 are shifted by a quarter pitch, that is, 90 °. Therefore, the output signals from the Y-axis detection coils 1040 and 1050 are output as sine wave signals having a phase shift of 90 ° from each other, that is, a sin waveform and a cos waveform.

Further, such a Y-axis position detecting device 100
The detection circuit of 0 is also the same as the configuration example of the X-axis position detection device 900 shown in FIG. 17 described above, and the waveform of the detection signal is also the same as that shown in FIG. This will be described with reference to FIG. The detection circuit of this example includes an oscillation circuit 960 that supplies a reference current of a predetermined frequency to each of the detection coils 1040 and 1050,
It has two resistors 970A and 970B for detecting the output current from 040 and 1050, and the resistors 970A and 970
B-axis scale magnetic body 101 according to voltage value at B
The position of 0 is detected.

The output voltages of the resistors 970A and 970B are, as shown in FIG.
Due to the phase difference of 1030, one becomes a sin waveform,
The other has a cos waveform. Therefore, in the present example, such a detected waveform is read by an arithmetic circuit using a 16-bit A / D converter (R / D converter), and thus, as in the case of the X-axis detection device 900 described above, approximately The drive of the Y-axis table 300 is controlled with an accuracy of 0.05 μ. Although the fine position detection within the range of one pitch of the comb teeth is performed by the resolution of the detection circuit as described above, information on how many pitches the Y-axis table 300 has moved is accumulated in an arithmetic circuit to be described later. It is assumed that the number is counted and stored in the memory in order.

In the Y-axis position detecting device 1000, when the Y-axis table 300 is moved to a target position,
The power supply to the Y-axis drive coils 620, 622, 624, and 626 is stopped, and only the position monitoring by the Y-axis detection coils 1040 and 1050 is performed to reduce power consumption. When an external force or the like is applied to the Y-axis table 300 and the Y-axis table 300 is slightly displaced, this is detected by a detection signal from the Y-axis detection coils 1040 and 1050, and the Y-axis drive is performed in a direction to correct the displacement. To the coils for use 620, 622, 624, 626, and
The Y-axis table 300 is returned to the original position by the thrust of the shaft driving coils 610, 612, 614, 616. Thus, the Y-axis table 300 is held at a fixed position.

Next, the position detecting device 1100 of the turntable 700 will be described. This position detecting device 1100
The rotation displacement of the θ-axis scale magnetic body 1110 provided on the upper surface of the rotary table 700 is controlled by the pair of θ-axis detection magnetic bodies 1120 and 1130 provided on the Y-axis table 300 and the θ-axis detection coils 1140 and 1150. Is to be detected. The θ-axis scale magnetic body 1110 is attached to the upper surface of the rotary table 700 by screwing or the like, and is formed in a disk shape similarly to the above-described θ-axis drive magnetic body 710, and has a circumferential direction around the outer periphery. A comb tooth portion 1112 in which peaks and grooves are alternately formed is formed.

The θ-axis detecting magnetic bodies 1120 and 113
0 is the θ-axis driving magnetic body 810, 812, 81 described above.
4 and 816. That is,
It has a substantially concave shape in which the arms are extended forward from both ends of the base, the distal end of each arm is formed wide, and the end faces are provided with comb teeth 1122, 1132 of the same shape, respectively. It is arranged so as to face the comb teeth 1112 of the magnetic body 1110 for the θ-axis scale. The detection coils 1140 and 1150 are wound around the base end of the arm provided with the comb teeth 1122 and 1130.

The θ-axis detecting magnetic members 1120, 1120,
Also in 130, the width of the peaks and grooves of the comb teeth portions 1122 and 1130 is made uneven so that the detection signals obtained by the θ-axis detecting magnetic bodies 1120 and 1130 have a substantially sinusoidal waveform. . And such θ
Also in the shaft position detecting device 1100, the comb teeth 1122 and 1132 of each of the θ-axis detecting magnetic bodies 1120 and 1130 are
Comb portions 1112 of the magnetic body 1110 for the θ-axis scale mutually
Are arranged with a quarter pitch, that is, 90 ° out of phase. Therefore, the output signals from the θ-axis detection coils 1140 and 1150 are
0 ° phase shifted sine wave signal, ie, sin waveform and c
This will be output as an os waveform.

The θ-axis scale magnetic body 1110 and the θ-axis detection magnetic bodies 1120 and 1130 are also the above-described θ-axis scale magnetic bodies 1120 and 1130.
An axial drive magnetic body 710 and a θ-axis driving magnetic body 810;
Like 812, 814, and 816, they are formed by laminating silicon steel plates or the like. However, since they are used for detection, a large-capacity magnetic circuit is not required, and thus each magnetic body 710, 810, 812, 8
14, 816 are thinner. Further, the configuration of the detection circuit in the position detection device 1100 of such a rotary table 700 is such that each magnetic body 1110, 1120, 1
Except for the shape of 130, the waveforms are the same as those shown in FIG. 17 and the detected waveforms are the same as those shown in FIG. 18, so that the following description will be made with reference to FIGS.

The detection circuit according to the present embodiment includes the detection coils 114
0, 1150, and two resistors 970A, 970B for detecting output currents from the detecting coils 1140, 1150, and a voltage value at the resistors 970A, 970B. Accordingly, the position of the θ-axis scale magnetic body 1110 is detected. As shown in FIG. 18, one of the output voltages of the resistors 970A and 970B has a sin waveform and the other has a cos waveform due to the phase difference between the detection magnetic bodies 1120 and 1130. Therefore, in this example, such a detected waveform is represented by 1
The data is read by the arithmetic circuit by the 6-bit A / D converter (R / D converter), so that the X-axis detection device 90 described above can be used.
Similarly to the case of 0, the drive of the rotary table 700 is controlled with an accuracy of about 0.05 μ. Although the fine position detection within the range of one pitch of the comb teeth is performed by the resolution of the detection circuit as described above, information on how many pitches the rotary table 700 has moved is accumulated in an arithmetic circuit described later. It is assumed that counting is performed, and the information is sequentially stored in the memory and grasped.

Also, in the θ-axis position detecting device 1100, when the turntable 700 is moved to a target position,
The power supply to the θ-axis drive coils 820, 822, 824, and 826 is stopped, and only the position is monitored by the θ-axis detection coils 1140 and 1150, thereby reducing power consumption. When an external force or the like is applied to the rotary table 700 and the rotary table 700 is slightly displaced, this is detected by detection signals from the θ-axis detecting coils 1140 and 1150, and the θ-axis driving coil is moved in a direction to correct the displacement. 820, 822, 824, and 826 are restarted, and θ
The rotary table 700 is returned to the original position by the thrust of the shaft driving coils 810, 812, 814, 816. Thus, the turntable 700 is held at a fixed position.

Next, a drive control circuit for controlling the above-described three-axis table device will be described. FIG.
FIG. 2 is a block diagram showing a configuration of the drive control circuit.
This drive control circuit is based on an input from an external host device or the like (not shown), and controls the position control calculation unit 2000 that manages the entire control of the three-axis table device and the detection devices 900, 1000, and 1100 described above. A current command calculation unit 3000 that outputs a current command signal for driving each of the tables 200, 300, and 700 based on the detection signal;
A current control unit 4000 that outputs a switching signal to each drive coil based on the current command signal of the current command calculation unit 3000;
And a position detection circuit unit 5000 that supplies a detection signal from the control unit 1100 to the current command calculation unit 3000. It should be noted that the current control unit 4000 includes the drive units 500 and 6 for XYθ.
The position detection circuit unit 5000 includes three detection devices 900, 1000, 110
Three are provided corresponding to 0.

The current control section 4000 constitutes a current feedback control circuit for the motor coil by the full bridge system, and includes a pair of power FETs 4102 and 4104 for supplying a switching current to each drive coil.
100, a gate circuit unit 4200 for controlling the power FETs 4102 and 4104, and a power FET circuit unit 4
100 based on the current feedback signal from the
And a current feedback control circuit 4300 for controlling the level of the PWM signal to 200. In the current feedback control circuit 4300, the power FET circuit 41
00 based on a current error signal obtained by subtracting the current value fed back from the resistance current value detection circuit 4106 from the current command value.
The arithmetic unit output amplified to the command level by the PI controller is converted into a switching signal by a PWM conversion circuit. Then, the switching signal is output to the gate circuit unit 4200 via the insulating circuit.

In the gate circuit section 4200, the power FET 41 of the power FET circuit section 4100 receives the switching signal from the current feedback control circuit 4300 via the gate circuit and the inverted switching signal.
02, 4104 to control the DC power supply ± DC to supply a switching drive current of a constant amplitude level to the drive coil. In the current control unit 4000 of this example, a characteristic of 9 KHz is obtained as the frequency band of the current control. It should be noted that such a current control unit 4000 is XYθ
Has a common configuration for the drive units of
In FIG. 19, only the X-axis current control unit 4000 is shown, and the other components are omitted.

Further, the current command calculation section 3000 has the same configuration on the drive side and the detection side, and FIG. 19 shows only the configuration on the drive side. The current command calculator 3000 includes an 8-bit MPU 3100, a flash memory, a RAM, a shared RAM (memory 3200), a counter circuit 3400, and a bus interface (I / F) 350.
0, input / output interface (I / F) 3700, R / D
An interface (I / F) 3800 and the like are provided. Then, a current command value for each phase is calculated so that a thrust proportional to the motor thrust command from the upper position control calculation unit 2000 and the position detection signal from the position detection circuit unit 5000 is output. This is output to the control unit. Further, the current command calculation unit 3000 generates a synchronization signal for control at a constant period, and sends the synchronization signal to the position control calculation unit 2000. Also, the 8-bit MPU 3100 reads the position data from the position detection circuit unit 5000 for each synchronization signal to the position control calculation unit 2000, and transmits the position data by the shared RAM.

Next, such a current command calculation unit 3000
Will be described. As described above, the three-axis table device of the present example has four drive coils (A, *).
A, B, and * B phases) are switched and supplied with a drive current such that a repulsion change due to a change in the relative position (magnetic gap) of each comb tooth generates a thrust as shown in FIG. Things. Here, thrust T (Θ)
Is obtained when the currents flowing through the A-phase, * A-phase, B-phase, and * B-phase drive coils are ia0, ia1, ib0, and ib1, and the magnetic resistance of each drive coil is pa0, pa1, pb0, and pb1. The thrust is as follows.

Note that 電 気 indicates the electrical position of the A-phase driving coil and the driving magnetic material, and varies from 0 to 2π.
Then, Θ = 0 is defined as a position where the positions of the comb teeth of the A-phase driving coil and the driving magnetic body coincide with each other. K0 is a thrust coefficient when currents ia0, ia1, ib0, and ib1 flow. Also, i is the thrust command value from the position control calculation unit 2000, and | i | is the absolute value of i. Further, d (pa0) / dΘ, d (pa1)
/ DΘ, d (pb0) / dΘ, d (pb1) / dΘ are
The rate of change at the position の of the magnetic resistances pa0, pa1, pb0, and pb1 is shown.

(1) When a thrust of T (Θ)> 0 is generated: 0 <Θ <π / 2 T (Θ) = ia0 ^* K0 * d (pa0) / dΘ + ib1 ^* K0 * d (pb1) / dΘ = | I | ^* sinΘ ^* K0 ^* sinΘ + | i | ^* cosΘ ^* K0 ^* cosΘ = i ^* K0 From the above equation, ia0 = | i | ^* sinΘ ia1 = 0 ib0 = 0 ib1 = | i | ^* cosΘ

[0077] π / 2 <Θ <π T (Θ) = ia0 * K0 * d (pa0) / dΘ + ib0 * K0 * d (pb0) / dΘ = | i | * sinΘ * K0 * sinΘ + | i | * (- cosΘ) ^* K0 ^* (− cosΘ) = i ^* K0 From the above equation, ia0 = | i | ^* sinΘ ia1 = 0 ib0 = | i | ^* (− cosΘ) ib1 = 0

Π <Θ <π^* 3/2 T (Θ) = ia1^* K0 * d (pa1) / dΘ + ib0^* K0 * d (pb0) / dΘ = | i |^* (-SinΘ)^* K0^* (−sinΘ) + | i |^* (-CosΘ) ^* K0^* (−cosΘ) = i^* K0 From the above equation, ia0 = 0 ia1 = | i |^* (−sinΘ) ib0 = | i |^* (-CosΘ) ib1 = 0

Π^* 3/2 <Θ <2π T (Θ) = ia1^* K0 * d (pa1) / dΘ + ib1^* K0 * d (pb1) / dΘ = | i |^* (-SinΘ)^* K0^* (−sinΘ) + | i |^* cosΘ^* K0 ^* cosΘ = i^* K0 From the above equation, ia0 = 0 ia1 = | i |^* (−sinΘ) ib0 = 0 ib1 = | i |^* cosΘ

(2) When a thrust of T (Θ) <0 is generated: 0 <Θ <π / 2 T (Θ) = ia1 ^* K0 * d (pa1) / dΘ + ib0 ^* K0 * d (pb0) / dΘ = | I | ^* sinΘ ^* K0 ^* (− sinΘ) + | i | ^* cosΘ ^* K0 ^* (− cosΘ) = i ^* K0 From the above equation, ia0 = 0 ia1 = | i | ^* sinΘib0 = | i | ^* cosΘ ib1 = 0

Π / 2 <Θ <π T (Θ) = ia1^* K0 * d (pa1) / dΘ + ib1^* K0 * d (pb1) / dΘ = | i |^* sinΘ^* K0^* (−sin) Θ + | i |^* (-CosΘ)^* K0 ^* cosΘ = i^* K0 From the above equation, ia0 = 0 ia1 = | i |^* sinΘ ib0 = 0 ib1 = | i |^* (-CosΘ)

Π <Θ <π^* 3/2 T (Θ) = ia0^* K0 * d (pa0) / dΘ + ib1^* K0 * d (pb1) / dΘ = | i |^* (-SinΘ)^* K0^* sinΘ + | i |^* (-CosΘ)^* K0 ^* cosΘ = i^* K0 From the above equation, ia0 = | i |^* (−sinΘ) ia1 = 0 ib0 = 0 ib1 = | i |^* (-CosΘ)

Π ^* 3/2 <Θ <2πT (Θ) = ia0 ^* K0 * d (pa0) / dΘ + ib0 ^* K0 * d (pb0) / dΘ = | i | ^* (− sinΘ) ^* K0 ^* sinΘ + | i | ^* cosΘ ^* K0 ^* (− cosΘ) = i ^* K0 From the above equation, ia0 = | i | ^* (− sinΘ) ia1 = 0 ib0 = | i | ^* cosΘib1 = 0 The current ia flows through each driving coil according to the value.
By controlling 0, ia1, ib0, ib1, a constant thrust can be obtained. It should be noted that the above equation is based on the X axis, the Y axis,
The same applies to the θ axis.

Next, the position control calculation unit 2000
2100, RAM 2200, flash memory 230
0, a bus interface (I / F) 2400, a serial communication interface (I / F) 2500, an interrupt circuit 2600, and the like. The position control calculation unit 2000 performs three-axis position feedback control calculation and command generation processing based on the synchronization signal from the current command calculation unit 3000.

Next, the position detection circuit section 5000 includes a sine wave excitation circuit for the detection coil, a gate circuit 5100 for inputting a sine wave signal (including a sin signal and a cos signal) from the detection coil, An R / D converter 5200 for converting a wave signal into a digital signal, an asynchronous MPU interface (I / F) circuit, and the like are provided. In the position detection circuit 5000, a sine wave signal (sin signal and cos signal) from each detection coil described above is provided.
And the sine wave signal is converted into data by R / D conversion. This data is stored in the current command calculation unit 3000
Is read by the MPU 3100.

As described above, when the pitch between the peaks and grooves of the comb teeth of the magnetic material for scale is 3.28 mm, the displacement of one cycle of the sine waveform is also 3.28 mm. Therefore, this displacement amount is determined by the resolution of the R / D converter (for example, 10 bits, 1 bit).
(2 bits, 14 bits, 16 bits) determines the minimum position detection amount. Therefore, the MPU 3100 of the current command calculation unit 3000 programmatically changes the resolution of the R / D conversion of the sine wave detection signal to 3.2 μm, 0.8 μm,
Resolution of displacement of m, 0.2 μm, 0.05 μm can be selected.

The speed that can be controlled by such resolution is as follows. 10-bit resolution 3.2 μm / bit; 3411 mm / sec 12-bit resolution 0.8 μm / bit; 853 mm / sec 14-bit resolution 0.2 μm / bit; 213 mm / sec 16-bit resolution 0.05 μm / bit; 53 mm / sec The resolution can be varied during operation. It should be noted that such a position detection circuit unit 5000 has an XY
19 has a common configuration with respect to the θ drive unit, and therefore, in FIG.
Is partially shown, and others are omitted.

Next, an outline of the circuit operation in such a drive control circuit will be described. (1-1) First, after the power is turned on, the current command calculation unit 3000
Of the position detection circuit unit 5000
The position resolution of the R / D converter for the sine wave detection signal described above is set. Next, the MPU 31 of the current command calculation unit 3000
00 sets the cycle count value in the counter circuit that generates the control synchronization signal. The MPU 3100 of the current command calculation unit 3000 and the position control calculation unit 20
The MPU 2100 of 00 generates an interrupt at the same time and performs the following operation. (1-2) MPU 3100 of Current Command Operation Unit 3000
Reads the position data の for each axis from the position detection circuit 5000. Then, this position data Θ is
Write to M.

(1-3) MP of position control calculation section 2000
U2100 reads position data の of each axis from the shared RAM of current command calculation unit 3000. Then, the change amount of the count value of the counter circuit that counts the position command pulse from the outside is read, and this pulse amount is converted into the position command Θref of the linear motor. (1-4) The MPU 21 of the position control calculation unit 2000
00 calculates a thrust command value i from the position data Θ and the position command Θref by the following [Equation 1], and writes the thrust command value i to the shared RAM of the current command calculation unit 3000.

[0090]

(Equation 1)

Here, Kpp is a proportional gain of position control,
Ki is an integral gain of the speed control, and Kp is a proportional gain of the speed control.

(1-5) MP of current command calculation section 3000
U3100 reads data i of the thrust command value of each axis from position control calculation section 2000. Then, from the data i and the position data Θ, as described above, the current command values for the four driving coils of each axis are calculated as follows. (1) If i> 0 0 <Θ <π / 2 ia0 = | i | ^* sinΘ ia1 = 0 ib0 = 0 ib1 = | i | ^* cosΘ π / 2 <Θ <π ia0 = | i | ^* sinΘ ia1 = 0 ib0 = | i | ^* (− cosΘ) ib1 = 0

Π <Θ <π ^* 3/2 ia0 = 0 ia1 = | i | ^* (− sinΘ) ib0 = | i | ^* (− cosΘ) ib1 = 0 π ^* 3/2 <Θ <2π ia0 = 0 ia1 = | i | ^* (− sinΘ) ib0 = 0 ib1 = | i | ^* cosΘ

(2) When i <0 0 <０ <π / 2 ia0 = 0 ia1 = | i | ^* sinΘib0 = | i | ^* cosΘ ib1 = 0 π / 2 <Θ <π ia0 = 0 ia1 = | I | ^* sin ib0 = 0 ib1 = | i | ^* (− cosΘ)

Π <Θ <π ^* 3/2 ia0 = | i | ^* (− sinΘ) ia1 = 0 ib0 = 0 ib1 = | i | ^* (− cosΘ) π ^* 3/2 <Θ <2πia0 = | i | ^* (− sinΘ) ia1 = 0 ib0 = | i | ^* cosΘ ib1 = 0

The current commands ia0, ia thus calculated
1, ib0, ib1 are digital-analog converters (D
AC) and is supplied to the current control unit 2000. (1-6) The current control unit 2000 includes the current command calculation unit 30
Based on the current command value from 00, the current control of each drive coil is calculated by the following calculation. Here, PI control calculation of the following [Equation 2] is performed on the current deviation ierr obtained by subtracting the feedback current of the drive coil from the current command value.

[0097]

(Equation 2)

Here, Kai is an integral gain, and Kap is a proportional gain. A signal obtained by converting the operation unit output iout into a switching signal by a PWM conversion circuit is supplied to a gate circuit 4200 of the power FETs 4102 and 4104 through an insulating circuit. Power FET 4102, 4104
Performs a switching operation on the drive coil so that a current corresponding to the current command value flows through the drive coil.

According to the three-axis table apparatus of the present embodiment as described above, the following effects can be obtained. (1) X-axis drive unit 500 and Y-axis drive unit 60
By arranging 0 on the base member 100 in the same plane structure, a small flat device can be obtained. (2) Since the X-axis table and the Y-axis table are integrally assembled as an XY table, the squareness, flatness, horizontality, and the like can be made high. (3) Since the position of the tip of each magnetic body for detection is arranged in the vicinity of each table to be controlled, the position feedback control can be performed more directly. For this reason, the positioning accuracy of each table can be higher than that of the conventional composite structure.

(4) Since the drive coil of the XY table is on the base member side, heat generated by the current of the drive coil is not easily transmitted to the XY table. For this reason, the displacement of the position due to the heat is reduced, and the heat is also radiated by the base member, so that the positioning can be stably performed with high absolute absolute accuracy. (5) Since it can be made mechanically compact, lightweight and highly rigid, high-speed operation and high-precision positioning can be performed. (6) An apparatus having a simple structure, a small number of parts, and a small number of assembly adjustment steps can be configured. (7) Since a permanent magnet is not used, the assembling property is good, a dustproof cover such as iron powder is not required, and a low-cost device can be configured.

(8) Since no permanent magnet is used, an object which is easily affected by magnetism can be used for perception or placed on a table. (9) Since the change in reluctance due to the magnetic path as shown in FIGS. 11 and 12 is converted into thrust and rotational force, the magnetic resistance is small, and a small and large output can be obtained. (10) A structure in which a small precision position sensor is integrated.
A precision positioning device having a smaller volume can be obtained. (11) It is possible to obtain a device which can be used even in a use environment where the degree of contamination is lower than that of the optical position detection and has a long life. (12) Since the components are composed of a coil and a magnetic material having a common structure, they can be easily mounted as a position detector of the position feedback control device, and the positioning device can be easily designed and downsized.

(13) The wiring of the position detection circuit is composed of three wires per axis, the wiring method is simple, and it is easy to incorporate it into the positioning device. (14) The resolution and operating speed can be freely designed by the tooth distance and the resolution of the detection circuit. Therefore, the same shape can be handled from low resolution to high resolution. (15) Since all axes are controlled synchronously at high speed, highly accurate positioning control can be performed synchronously. (16) Since the position resolution can be changed by a program, high-speed positioning and precision positioning can be compatible with the same device.

In the above, the case where the moving stage device of the present invention is applied to a three-axis table device has been described.
The present invention is not limited to this, and may be configured as an XY two-axis table device. In addition, the above-described driving device using a sine waveform thrust and a detection device that outputs a sine waveform detection signal can be applied to a linear actuator having only one axis.

[0104]

As described above, according to the present invention, the XY table having the planar structure is formed by arranging the Y-axis table in the frame of the X-axis table, and the XY table arranged in the planar structure on the base member. The XY table is driven by sequentially supplying a switching current to the driving unit in the axial direction and the driving unit in the Y-axis direction. Accordingly, the entire apparatus can be configured with a flat structure, and the efficiency of arrangement space can be improved when this moving stage apparatus is incorporated in various apparatuses. In addition, since the drive unit in the X-axis direction and the drive unit in the Y-axis direction having the magnetic flux directions orthogonal to each other are arranged in a planar structure, the magnetic fields of the drive units do not interfere with each other and the plane space can be reduced. And a smooth moving operation can be obtained.

Further, in the moving stage device of the present invention, a driving magnetic body having a comb tooth portion that generates a sine waveform thrust is provided for the comb tooth portion of the operating magnetic material provided on the moving body. By supplying a switching current to the driving coil wound around the driving magnetic body, a thrust having a sinusoidal waveform is applied between the operating magnetic body and the driving magnetic body, and the moving body is moved by the thrust. . With this, it is possible to accurately grasp the state of action of the thrust of each drive magnetic body with respect to the movement position of the operating magnetic body and the state of fluctuation of the thrust between a plurality of drive magnetic bodies, and perform effective drive control. Can move the moving object stably.

Further, in the moving stage device of the present invention, a detection magnetic body having a comb-tooth portion for generating a sinusoidal detection signal is provided for the comb-tooth portion of the scale magnetic body provided on the moving body. The position of the moving body is detected by reading a sine wave detection signal from a detection coil wound around the magnetic body for detection by an arithmetic circuit via an R / D converter. As a result, the moving position of the scale magnetic body and the phase level of the detection signal can be calculated with high accuracy in correspondence with each other, and the position of the moving body can be detected with high resolution. Can contribute to

[Brief description of the drawings]

FIG. 1 is an example of a moving stage device X according to the present invention.
It is a top view which shows the outline | summary of the three-axis table apparatus of -Y- (theta).

2A is a side view of the moving stage device shown in FIG. 1 as viewed in the X-axis direction, and FIG. 2B is a sectional side view of the same.

3A is a side view of the moving stage device shown in FIG. 1 as viewed in the Y-axis direction, and FIG. 3B is a side sectional view of the same.

FIG. 4 is a plan view showing a base member in the moving stage device shown in FIG.

5 is a partially exploded perspective view of the base member shown in FIG.

FIG. 6 is an exploded perspective view showing an XY table and a rotary table of the moving stage device shown in FIG.

FIG. 7 is a plan view showing an arrangement of X-axis and Y-axis driving magnetic bodies of the moving stage device shown in FIG. 1;

FIG. 8 is a bottom view showing the arrangement of the X-axis and Y-axis operating magnetic members of the moving stage device shown in FIG. 1;

9A is a side view of a magnetic body for X-axis and Y-axis operation of the moving stage device shown in FIG. 1, FIG. 9B is a front view thereof,
(C) is an enlarged view of a comb tooth part.

10A is a side view of a magnetic body for driving the X-axis and Y-axis of the moving stage device shown in FIG. 1, FIG. 10B is a front view thereof,
(C) is an enlarged view of a comb tooth part.

11 is a side view showing a shape of a magnetic path formed between the operating magnetic body and the driving magnetic body of the moving stage device shown in FIG.

FIG. 12 is an explanatory diagram showing a thrust fluctuation waveform by a driving magnetic body of the moving stage device shown in FIG. 1;

FIG. 13 is a side view showing the opposing magnetic body and four driving magnetic bodies of the moving stage device shown in FIG. 1;

FIG. 14 is a plan view showing a θ-axis operating magnetic body of the moving stage device shown in FIG. 1;

15A is a plan view showing a magnetic body for driving the θ-axis of the moving stage device shown in FIG. 1, and FIG. 15B is an enlarged view of a comb portion.

FIG. 16 is a perspective view showing a state where the scale magnetic body and the detection magnetic body of the moving stage device shown in FIG. 1 are opposed to each other.

17 is an explanatory diagram showing a position detection circuit of the moving stage device shown in FIG.

FIG. 18 is an explanatory diagram showing a position detection signal waveform of the moving stage device shown in FIG.

19 is a block diagram showing a drive control circuit of the moving stage device shown in FIG.

[Explanation of symbols]

100: Base member, 200: X-axis table, 21
0, 212: magnetic material for X-axis operation, 300: Y-axis table, 310: magnetic material for Y-axis operation, 400: XY
Table, 500: X-axis drive unit, 510, 51
2, 514, 516... X-axis driving magnetic body, 520, 5
22, 524, 526 ... X-axis drive coil, 600 ...
... Y-axis drive unit, 610, 612, 614, 616
...... Y-axis drive magnetic body, 620, 622, 624, 62
6... Y-axis drive coil, 700.
700A: rotary table, 710: θ-axis driven magnetic body, 800: θ-axis drive unit, 810, 812, 8
14, 816... Θ-axis driving magnetic body, 820, 822,
824, 826... Θ-axis drive coil, 900... X-axis position detecting device, 910... X-axis scale magnetic body, 92
0, 930: X-axis detecting magnetic body, 940, 950:
X-axis detection coil, 1000: Y-axis position detection device, 1
010: Magnetic body for Y-axis scale, 1020, 1030
... Y-axis detection magnetic body, 1040, 1050... Y-axis detection coil, 1100.
... Magnetic body for θ-axis scale, 1120, 1130.
Magnetic body for axis detection, 1140, 1150 ... Coil for θ axis detection.

Claims (39)

[Claims] 1. A moving stage device for moving an XY table disposed on a base member, wherein the XY table is supported on the base member so as to be movable in the X-axis direction. An axis table; a substantially plate-shaped Y-axis table supported in the frame of the X-axis table so as to be movable in the Y-axis direction; and a side portion along the X-axis direction of the X-axis table facing the base member. X-axis actuating magnet having a comb-like portion provided in a state and formed in a longitudinal shape along the X-axis direction and having peaks and grooves alternately formed at predetermined intervals in the X-axis direction on a surface facing the base member. And a body which is provided on the Y-axis table so as to face the base member, and has a comb-tooth portion having a mountain and a groove formed alternately at predetermined intervals in the Y-axis direction on a surface facing the base member. With a width corresponding to the stroke in the X-axis direction The base member includes a comb-tooth portion having a mountain and a groove alternately formed in the X-axis direction in opposition to the X-axis operation magnetic body of the XY table. Have multiple X
An X-axis driving magnetic body, and a plurality of X-axis driving coils wound around each of the X-axis driving magnetic bodies. A drive unit in the X-axis direction for applying a thrust in the X-axis direction to the magnetic body; and a comb-tooth portion having mountains and grooves alternately formed in the Y-axis direction in opposition to the Y-axis operating magnetic body of the XY table. A plurality of Y-axis driving magnetic bodies having a plurality of Y-axis driving magnetic bodies, and a plurality of Y-axis driving coils wound around each of the Y-axis driving magnetic bodies. A driving unit in the Y-axis direction for applying a thrust in the Y-axis direction to the Y-axis operating magnetic body, wherein the driving unit in the X-axis direction and the driving unit in the Y-axis direction are arranged on a base member in a planar structure. A moving stage device, wherein: 2. The moving stage device according to claim 1, wherein the X-axis operating magnetic body and the X-axis driving coil are disposed on both side portions of the X-axis table. 3. Each of the X-axis driving magnetic bodies is formed in a substantially concave shape, and both ends of the concave shape are arranged so as to form a line along the X-axis direction. The surface is provided with the comb-tooth portion, and the X
The moving stage device according to claim 1, wherein the shaft driving coil is wound. 4. The drive unit in the X-axis direction has four X-axis drive magnetic bodies and four X-axis drive coils wound around the X-axis drive magnetic bodies.
A thrust having a phase shifted by one part is applied to the X-axis operating magnetic body. The four X-axis driving magnetic bodies and the X-axis driving coil are provided on both sides of the X-axis table. 3. The moving stage device according to claim 2, wherein two of the magnetic members for X-axis operation are dispersedly disposed. 5. Each of the Y-axis driving magnetic bodies is formed in a substantially concave shape, and both ends of the concave shape are arranged so as to form a line along the Y-axis direction. The surface is provided with the comb-tooth portion, and the Y
The moving stage device according to claim 1, wherein the shaft driving coil is wound. 6. The drive unit in the Y-axis direction includes four Y-axis drive magnetic members and four Y-axis drive coils wound around the Y-axis drive magnetic members.
A thrust having a phase shifted by one part is applied to the Y-axis operating magnetic body. The four Y-axis driving magnetic bodies and the Y-axis driving coil are arranged in two rows and two columns. The moving stage device according to claim 1, wherein 7. A θ-axis table that moves in a rotating direction on a Y-axis table of the XY table, and a circumferential direction of the θ-axis table is provided on a surface of the θ-axis table facing the Y-axis table. Is provided in an annular shape along
A magnetic body for actuating the θ-axis having a comb-teeth portion in which peaks and grooves are alternately formed at predetermined intervals in the circumferential direction, wherein the XY table faces the magnetic body for the θ-axis actuation, and A plurality of θ-axis driving magnetic bodies each having a comb-tooth portion having ridges and grooves alternately formed in the circumferential direction of the shaft table, and a plurality of θ-axis driving coils wound around each θ-axis driving magnetic body And a θ-axis direction drive unit that applies a thrust in the rotation direction of the θ-axis table to the θ-axis operation magnetic body by switching the energization to each of the θ-axis drive coils. The moving stage device according to claim 1, wherein: 8. The θ-axis driving magnetic bodies are each formed in a substantially concave shape, and both ends of the concave shape are arranged so as to form a line along a circumferential direction of the θ-axis table,
8. The moving stage device according to claim 7, wherein the comb teeth portion is provided on a tip end surface of each end portion, and the θ-axis driving coil is wound around a base side of each end portion. 9. The drive unit in the θ-axis direction includes four θ-axis drive magnetic members and four θ-axis drive coils wound around these Y-axis drive magnetic members.
The thrusts having phases shifted by one part are applied to the θ-axis operating magnetic body, and the four θ-axis driving magnetic bodies and the θ-axis driving coil are arranged in a circumferential direction of the θ-axis table. The moving stage device according to claim 7, wherein the moving stage device is disposed along the moving stage. 10. A magnetic body for an X-axis scale provided on the X-axis table and having a comb-tooth portion having peaks and grooves alternately formed at predetermined intervals in the X-axis direction, and provided on the base member;
A magnetic body for X-axis detection having a comb-tooth part having peaks and grooves alternately formed in the X-axis direction facing the comb-tooth part of the magnetic body for X-axis scale; And an X-axis displacement detection device for detecting the displacement of the X-axis table by a change in a detection current supplied to the X-axis detection coil. The moving stage device according to claim 1. 11. The magnetic body for X-axis detection is formed in a substantially concave shape, and both ends of the concave shape are arranged so as to form a line along the X-axis direction. The moving stage device according to claim 10, wherein the comb teeth portion is provided, and the X-axis detection coil is wound around a base side of each end portion. 12. The X-axis displacement detecting device according to claim 1, wherein the ridges and grooves of the comb teeth of the magnetic body for X-axis detection are set at 4 2. The device according to claim 1, further comprising: two X-axis detecting magnetic bodies shifted by one-one pitch, and two X-axis detecting coils wound around the X-axis detecting magnetic bodies. 11. The moving stage device according to item 10. 13. A magnetic body for a Y-axis scale, provided on the Y-axis table, having a comb tooth portion having peaks and grooves alternately formed at predetermined intervals in a Y-axis direction, and provided on the X-axis table, A Y-axis detecting magnetic body having a comb-tooth part in which peaks and grooves are alternately formed in the Y-axis direction in opposition to the comb-teeth part of the Y-axis scale magnetic body, and wound around the Y-axis detecting magnetic body And a Y-axis detection coil for detecting the displacement of the Y-axis table by a change in the detection current supplied to the Y-axis detection coil. The moving stage device according to claim 1. 14. The magnetic body for Y-axis detection is formed in a substantially concave shape, and both ends of the concave shape are arranged so as to form a line along the Y-axis direction. 14. The moving stage device according to claim 13, wherein the comb teeth portion is provided, and the Y-axis detecting coil is wound around a base side of each of the end portions. 15. The Y-axis displacement detecting device according to claim 1, wherein the ridges and grooves of the comb teeth of the Y-axis detecting magnetic body are set at 4 to the ridges and grooves of the comb teeth of the Y-axis scale magnetic body. 2. The device according to claim 1, further comprising: two Y-axis detecting magnetic members shifted by one-one pitch, and two Y-axis driving coils wound around the Y-axis detecting magnetic members. 14. The moving stage device according to item 13. 16. A magnetic body for a θ-axis scale, provided on the θ-axis table, having a comb-teeth portion having peaks and grooves alternately formed at predetermined intervals in a circumferential direction of the θ-axis table; A θ-axis detecting magnetic body having a comb-shaped portion provided with a peak and a groove alternately formed in the circumferential direction of the θ-axis table in opposition to the comb-shaped portion of the θ-axis scale magnetic material; A θ-axis detection coil wound around the detection magnetic body,
2. The moving stage device according to claim 1, further comprising a [theta] -axis displacement detection device that detects a displacement of the [theta] -axis table based on a change in a detection current supplied to the [theta] -axis detection coil. 17. The θ-axis detecting magnetic body is formed in a substantially concave shape, and both ends of the concave shape are arranged so as to form a line along a circumferential direction of the θ-axis table. 17. The moving stage device according to claim 16, wherein the comb teeth portion is provided on a tip end surface of the moving stage, and the [theta] -axis detecting coil is wound around a base portion side of each end portion. 18. The θ-axis displacement detecting device, wherein the peaks and grooves of the comb teeth of the θ-axis detecting magnetic body are four times larger than the peaks and grooves of the comb teeth of the θ-axis scale magnetic body. 2. A magnetic head according to claim 1, further comprising: two .theta.-axis detecting magnetic bodies shifted by one-one pitch, and two .theta.-axis detecting coils wound around these .theta.-axis detecting magnetic bodies. 17. The moving stage device according to item 16. 19. A comb-shaped portion of each of the X-axis driving magnetic members,
2. The moving stage device according to claim 1, wherein the moving stage device is formed so as to generate a sinusoidal thrust with respect to the X-axis operating magnetic body. 20. The thrust of the sinusoidal waveform is generated by making the width of the comb teeth of the X-axis driving magnetic body different from the width of the comb teeth of the X-axis driving magnetic body. 20. The moving stage device according to claim 19, wherein: 21. A comb-shaped portion of each of the Y-axis driving magnetic members,
2. The moving stage device according to claim 1, wherein the moving stage device is formed so as to generate a thrust having a sinusoidal waveform with respect to the Y-axis operating magnetic body. 22. The thrust of the sinusoidal waveform is generated by making the width of the comb teeth of the Y-axis driving magnetic material different from the width of the comb teeth of the Y-axis driving magnetic material. 22. The moving stage device according to claim 21, wherein: 23. The comb teeth of each of the θ-axis driving magnetic bodies,
8. The moving stage device according to claim 7, wherein the moving stage device is formed so as to generate a sinusoidal thrust with respect to the θ-axis operating magnetic body. 24. The thrust having the sinusoidal waveform is generated by making the width of the comb teeth of the comb teeth of the θ-axis driving magnetic body and the width of the comb teeth of the θ-axis operation magnetic body different from each other. 24. The moving stage device according to claim 23, wherein: 25. A comb-shaped portion of each of the X-axis detecting magnetic bodies,
11. The moving stage device according to claim 10, wherein the moving stage device is formed so as to generate a sine waveform detection signal for the X-axis scale magnetic body. 26. Since the width of the comb teeth of the X-axis scale magnetic body and the width of the comb teeth of the X-axis scale magnetic body are different from each other, the detection signal of the sine waveform is formed. The moving stage apparatus according to claim 15, wherein the moving stage apparatus is provided. 27. A comb-shaped part of each of the Y-axis detecting magnetic members,
14. The moving stage device according to claim 13, wherein the moving stage device is formed so as to generate a sine waveform detection signal for the Y-axis scale magnetic body. 28. Since the width of the comb teeth of the Y-axis detection magnetic body and the width of the Y-axis scale magnetic body are different from each other, the detection signal of the sine waveform is obtained. The moving stage apparatus according to claim 27, wherein the moving stage apparatus is provided. 29. A comb-shaped portion of each of the θ-axis detecting magnetic bodies,
17. The moving stage apparatus according to claim 16, wherein the movable stage apparatus is formed so as to generate a detection signal having a sine waveform with respect to the magnetic body for the θ-axis scale. 30. The width of the comb teeth of each of the comb teeth of the θ-axis detection magnetic body and the width of the comb teeth of the θ-axis scale magnetic body are different from each other, so that the detection signal having the sinusoidal waveform is obtained. 30. The moving stage apparatus according to claim 29, wherein the moving stage apparatus is provided. 31. A moving stage device having a driving device for moving a moving body supported on a supporting member so as to be movable in a predetermined direction, wherein the moving body is provided so as to face the supporting member, and is provided in the predetermined direction. An actuating magnetic body having a comb-tooth portion in which peaks and grooves are alternately formed at predetermined intervals, wherein the support member alternately forms peaks and grooves in the predetermined direction in opposition to the operating magnetic body. A plurality of driving magnetic bodies having a comb-teeth portion, a plurality of driving coils wound around each driving magnetic body, and switching the energization to each driving coil to the operating magnetic body. A drive control circuit for applying a thrust in the predetermined direction, wherein each of the drive magnetic bodies is formed so as to generate a sine waveform thrust with respect to the actuation magnetic body; Position to manage body movement position A management unit, a command circuit unit that outputs a drive command signal corresponding to each of the drive coils based on target position information output from the position management unit, and a command circuit unit for each of the drive coils according to the drive command signal. And a drive circuit unit for generating a switching signal and supplying the switching signal to the drive coil. 32. The thrust of the sinusoidal waveform is generated by making the width of the comb teeth of the comb teeth of the driving magnetic bodies and the width of the comb teeth of the operating magnetic bodies different from each other. 32. The moving stage device according to claim 31, wherein: 33. The drive circuit section generates a pulse width modulation signal according to a predetermined synchronization timing to each drive magnetic body in response to a drive command signal from the command circuit section. 32. The moving stage apparatus according to claim 31, wherein the switching signal is generated and supplied to a driving coil by opening and closing an output gate of a driving current source. 34. The drive circuit unit detects an output current value of the output gate and feeds back the output current value,
The moving stage device according to claim 33, wherein the switching signal is controlled to a constant current level. 35. A moving stage device having a driving device for moving a moving body movably supported on a supporting member in a predetermined direction, wherein the moving body is provided so as to face the supporting member, and is provided in the predetermined direction. A scale magnetic body having a comb-tooth portion in which peaks and grooves are alternately formed at predetermined intervals, and the support member alternately forms peaks and grooves in the predetermined direction in opposition to the scale magnetic body. Detecting magnetic body having a comb-shaped portion, a detecting coil wound around the detecting magnetic body, and displacement detection for detecting a displacement of the moving body by a change in a detecting current supplied to the detecting coil. And the detection magnetic body is formed so as to generate a detection signal having a sine waveform with respect to the scale magnetic body, and the displacement detection circuit is configured to generate a phase of a sine wave detection signal from the detection coil. Set the level And to read the arithmetic circuit through the city of A / D converter, the movable stage apparatus characterized by. 36. The sine waveform detection signal is generated by making the width of the comb teeth of the magnetic body for detection and the width of the comb teeth of the magnetic body for scale different from each other. The moving stage device according to claim 35. 37. The detection magnetic body is provided two at a quarter pitch from the peaks and grooves of the comb teeth of the scale magnetic body. By supplying an oscillating signal of the same phase to the two wound detection coils, the 90
36. The method according to claim 35, wherein two sine wave detection signals having a phase shift are detected, and a displacement amount and a displacement direction of the scale magnetic body are detected based on each sine wave detection signal. Moving stage device. 38. The moving position of the scale magnetic body according to claim 35, wherein the detection signal from the displacement detecting circuit is cumulatively processed and stored to manage the moving position of the scale magnetic body. Moving stage device. 39. The moving device according to claim 1, wherein each of the magnetic bodies is formed by laminating plate members made of a magnetic material, and a non-magnetic protective film is applied to each comb tooth portion. Stage equipment.