JPH10275974A - Apparatus for mounting very small ball - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a mounting apparatus in which a very small ball to be used as a bump is sucked to a suction hole by a suction jig extremely satisfactorily and surely and by which the mounting operation of the very small ball onto a work is performed satisfactorily. SOLUTION: A suction device is constituted of a suction head 12 by which very small balls B are sucked to suction holes 31a at a suction jig 31 by using the suction device and of a ball feed part 15 in which the very small balls B are stored. The ball feed part 15 is constituted of a case 21 which forms a space part K together with the suction jig 31 at the suction head 12 and of a filter 23 which is installed inside the case 21 and which is provided with air permeability. A compressed-air supply source which sends the air to the lower-part side of the filter 23 inside the case 21 is installed. When the air is sucked from the suction holes 31a so that the very small balls 13 are sucked to the suction holes 31a, the air is seat from the compressed-air supply source, the very small balls B which are placed on the surface of the filter 23 are levitated inside the space part K, and the very small balls B are sucked to the suction holes 31a satisfactorily.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-ball mounting apparatus for adsorbing micro-balls serving as bumps and mounting them on a work such as a substrate or a chip.

[0002]

2. Description of the Related Art Conventionally, a fine ball mounting apparatus for sucking a fine ball serving as a bump and mounting the fine ball on a work such as a substrate or a chip is provided with a suction apparatus for suctioning the fine balls to be mounted on the work. ing. As shown in FIG. 4, this type of suction device is provided with a suction head 1 which is moved up and down by an elevating mechanism (not shown). It has a plate-shaped suction jig 2 in which a plurality of suction holes 2a for vacuum suction are formed. Then, the suction head 1 is lowered by the lifting mechanism, and is suctioned by a suction device (not shown) in a state where the suction head 1 is brought close to the fine balls B placed in the metal stock dish 3 provided below. The fine ball B is vacuum-sucked into the suction hole 2a of the tool 2. Further, since the suction hole 2a formed in the suction jig 2 of this type of suction device has an extremely small diameter, the air flow is small when the suction hole 2a is separated from the suction hole 2a. The plate 3 is vibrated by a vibration generator 4 such as a parts feeder, and the vibration causes the fine balls B in the stock plate 3 to fly to the vicinity of the suction holes 2a to enhance the suction property.

[0003]

However, as described above, in the case of the fine ball mounting apparatus having the suction device having the above structure for flying the fine balls B by vibration, the fine balls B rub against each other due to mechanical vibration. There has been a problem that metal powder or the like is generated due to the friction and has an adverse effect. Further, there is a problem that the electrostatic force is generated due to the friction, and the fine balls B are connected in a dumpling shape, so that good suction to the suction head 1 is not performed. In such a case, Japanese Patent Laid-Open No. 7-15376
As shown in Japanese Patent Application Laid-Open No. 5 (1999) -1995, the suction head 1
Ultrasonic vibrations are applied to the side to drop extra fine balls B adsorbed, or as described in JP-A-8-162494 and JP-A-8-162495, Is vibrated obliquely, and extra fine balls B are shaken off by the horizontal component of the oblique vibration. However, in either case, the structure becomes large-scale or the generation of metal powder due to vibration is reduced. It could not be eliminated.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has a suction device capable of surely sucking a fine ball into a suction hole of a suction jig extremely efficiently without increasing the size of the device. It is an object of the present invention to provide a fine ball mounting device.

[0005]

In order to achieve the above object, a fine ball mounting apparatus according to the first aspect of the present invention includes a fine ball mounting device for sucking a fine ball to be a bump and mounting the sucked fine ball on a work. An apparatus, comprising: a suction jig having a plurality of suction holes formed therein; and a suction head for suctioning the fine ball to the suction holes by suction means.
A suction unit having a ball supply unit in which fine balls to be sucked by the suction head are stored, and the ball supply unit is provided with the suction head, whereby the suction recovery of the suction head is performed. A case that forms a space together with the tool, a filter having air permeability provided in the case, and air supply means for sending air to a lower side of the filter in the case; and By feeding air, the fine balls placed on the upper surface of the filter are floated in the space.

According to a second aspect of the present invention, there is provided a fine ball mounting apparatus according to the first aspect, wherein a plate portion having a plurality of holes formed below the filter is provided in the case, The air supplied from the air supply means is blown to the filter through the hole of the plate portion. The fine ball mounting device according to claim 3 is the fine ball mounting device according to claim 2,
The hole of the plate portion has a larger diameter at the center side than at the outer side.

According to a fourth aspect of the present invention, there is provided the fine ball mounting apparatus according to the first aspect, wherein the air is supplied to the lower side of the filter in the case toward the filter as the air supply means. It is characterized by having a fan to send out. Claim 5
The above described fine ball mounting apparatus is characterized in that in the fine ball mounting apparatus according to any one of claims 1 to 4, the supply of air by the air supply means is performed intermittently or with increasing or decreasing. . According to a sixth aspect of the present invention, there is provided the fine ball mounting apparatus according to the first aspect, wherein the excess fine balls adhering to the normally adsorbed fine balls are removed by the flow of air by the air supply means. It is characterized by.

[0008]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an embodiment of a fine ball mounting apparatus according to the present invention. In FIG.
Reference numeral 11 denotes a fine ball suction device constituting the fine ball mounting device. The suction head 12 of the fine ball suction device 11 is supported by a moving mechanism 14 via a lifting mechanism 13. The moving mechanism 14 has a supporting portion 14a fixed to a base, and an arm 14b supported to be movable in one direction with respect to the supporting portion 14a. Is supported movably in one direction. That is, the suction mechanism 12 is moved by the moving mechanism 14 in two directions orthogonal to each other. On the base,
A ball supply unit 15 is provided, and a compressed air source 16 is connected to the ball supply unit 15 via a tube 16a. The reference numeral 29 in FIG.
2 is connected to the suction head 1 via a tube 29a.
Air is sucked from a plurality of suction holes 31a formed in the two suction jigs 31.

As shown in FIG. 2, the ball supply unit 15
A case 21 formed in a concave shape; a concave housing 22 provided in the case 21;
And a filter 23 made of, for example, a metal wire mesh having air permeability and disposed so as to cover the upper part of the filter. The filter 23 is not limited to a metal filter but may be a synthetic resin filter or the like. The case 21 includes a lower case 21a and an O-ring 2 on the upper part of the lower case 21a.
Upper case 21 hermetically mounted via 1c
The lower case 21a and the upper case 21b are formed with steps 24 and 25, respectively, and a housing 22 in which a filter 23 is mounted in a recess between the steps 24 and 25 is stored and held. Have been. A hole 26 is formed at the bottom of the lower case 21a, and the tube 16a from the compressed air source (air supply means) 16 is connected to the hole 26. The upper case 21b is provided with an O-ring 27 at its upper end. When the suction head 12 is set on the ball supply unit 15, the concave portion in the case 21 of the ball supply unit 15 and the suction head 12 The space K surrounded by the suction jig 31 is hermetically sealed.

A housing 22 housed in a case 21
Has a plurality of compressed air supply holes (holes) 28 formed in a plate portion 22a formed at the bottom thereof. These compressed air supply holes 28 have a large diameter at the center and a small diameter at the outside.

Next, a case where the fine ball B is mounted on the work by the fine ball mounting apparatus having the above configuration will be described. The suction head 12 is moved to a position above the ball supply unit 15 by the moving mechanism 14,
The suction head 12 is lowered by 3, and the suction head 12 is installed above the ball supply unit 15. When the suction head 12 is placed on the ball supply unit 15 in this manner, the upper case 21b of the case 21 of the ball supply unit 15
The suction head 12 and the ball supply unit 15 are brought into close contact with each other by the O-ring 27 provided thereon, and a space K surrounded by the concave portion in the case 21 of the ball supply unit 15 and the suction jig 31 of the suction head 12 is formed. Sealed. In this state,
The suction device 29 and the compressed air source 16 operate respectively.
Thereby, the suction holes 3 of the suction jig 31 of the suction head 12 are formed.
The air is sucked from 1a, and accordingly, the fine ball B placed on the filter 23 of the ball supply unit 15 is sucked and sucked into the suction hole 31a.

Here, in the ball supply section 15, the compressed air sent from the compressed air source 16 is supplied to the compressed air supply hole 2 formed in the plate portion 22 a formed at the bottom of the housing 22.
8, is sent out into the recess of the housing 22, and is further blown out toward the suction head 12 via the filter 23, whereby the fine ball B placed on the filter 23 is moved toward the suction jig 31. The fine balls B flow because the air flows near the suction holes 31a, and the fine balls B can be floated along the entire surface of the suction jig 31. Thereby, the fine ball B can be reliably adsorbed to each of the adsorption holes 31a. Further, for example, when an electrostatic force is generated on the fine balls B, the surplus fine balls B attached to the normally adsorbed fine balls B are formed in a dumpling shape, but the compressed air supplied from the compressed air source 16 is A horizontal flow is generated along the plane by hitting the suction jig 31, and by the flow of the air, the surplus fine balls B not adsorbed in the suction holes 31 a are removed.

In particular, since the compressed air supply holes 28 formed in the plate portion 22a formed at the bottom of the housing 22 of the ball supply portion 15 are different between the center side and the outer side, the air is blown out above the filter 23. The air can be made to flow well. That is, since the flow velocity in the central portion is lower than that in the periphery, the fine balls B can be collected at the center and floated so as to increase the density in the central portion. Further, by supplying the compressed air from the compressed air source 16 intermittently or by sending it out with different strengths, the compressed air within the space K formed by the ball supply unit 15 and the suction jig 31 of the suction head 12 is formed. The fine balls B can be suspended by further increasing the flow velocity of the air, and the suction holes 31a
Thus, the fine ball B can be more favorably adsorbed.

As described above, when the fine balls B are sucked into the suction holes 31a of the suction jig 31,
The supply of compressed air from the compressed air supply source 16 is stopped,
The suction head 12 is raised by the elevating mechanism 13 and moved by the moving mechanism 14 so as to be arranged above a work (not shown). Then, the suction head 12 is lowered by the elevating mechanism 13, and the suction holes 31 a of the suction jig 31 are moved.
The fine ball B adsorbed on the work is mounted on the work.

In the above example, the compressed air supply source 16
As shown in FIG. 3, instead of the compressed air supply source 16, a compressed air supply source 16 is provided below the filter 23 in the ball supply unit 15 as an air supply unit. A structure may be adopted in which a fan 41 is provided, and air is sent from the filter 23 toward the suction jig 31 by the fan 41 to cause the air in the space K to flow to float the fine balls B. In the case of this structure, A simple structure in which the fan 41 as a supply unit is integrated with the ball supply unit 15 can be achieved, and the manufacturing cost can be reduced. In this case, too, by driving the fan 41 intermittently or with different levels of strength, as described above, the air in the space K can further flow to float the fine balls B,
The fine balls B can be more appropriately adsorbed to the adsorption holes 31a.

[0016]

As described above, according to the fine ball mounting apparatus of the present invention, the following effects can be obtained.
According to the fine ball mounting device of the present invention, when the suction means sucks air from the suction holes of the suction jig in a state where the suction head is installed on the ball supply unit, and suctions the fine balls. The fine balls placed on the filter are blown up and floated in the direction of the suction jig by the air from the air supply means, and further, the air flows near the suction holes, so that the fine balls flow. ,
The fine balls can be floated along the entire surface of the suction jig, whereby the fine balls can be reliably sucked into each suction hole. Further, for example, even if an electrostatic force is generated in the fine balls, it is possible to avoid a disadvantage that the fine balls are successively adsorbed in a dumpling shape by the flowing air.

According to the second aspect of the present invention, since the air from the air supply means is blown to the filter through the plurality of holes formed in the plate portion, the air blown upward from the filter is excellent. Thus, the fine balls can be more appropriately sucked into the suction holes of the suction jig. According to the fine ball mounting device of the third aspect, the plurality of holes formed in the plate portion have a larger diameter at the center side than at the outer side, so that the air blown out above the filter is more favorable. Can be made to flow. That is, since the flow velocity in the central portion is lower than that in the periphery, the fine balls can be collected at the center and floated so as to increase the density in the central portion.

According to the fourth aspect of the present invention, since the fan as air supply means is integrated with the ball supply section, the structure can be simplified, and the manufacturing cost can be reduced. Can be reduced. According to the fine ball mounting apparatus according to the fifth aspect, by supplying the air by the air supply means intermittently or with strength, it is possible to further flow the air blown upward from the filter and float the fine balls. As a result, the fine balls can be more appropriately sucked into the suction holes of the suction jig. According to the fine ball mounting apparatus of claim 6, the compressed air supplied from the air supply means collides with the suction jig, and becomes a horizontal flow along the plane.
Excessive fine balls not adsorbed to the suction holes can be reliably removed.

[Brief description of the drawings]

FIG. 1 is a perspective view of a fine ball mounting device for explaining an embodiment of the fine ball mounting device of the present invention.

FIG. 2 is a cross-sectional view of the suction device for explaining the configuration and structure of the suction device constituting the fine ball mounting device of the present invention.

FIG. 3 is a cross-sectional view of a suction device illustrating a suction device having another structure that constitutes the fine ball mounting device of the present invention.

FIG. 4 is a cross-sectional view of a suction device for explaining a conventional technique of a suction device constituting a fine ball mounting device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Fine ball suction device 12 Suction head 15 Ball supply part 16 Compressed air supply source (air supply means) 21 Case 22a Plate part 23 Filter 28 Hole part (compressed air supply hole) 29 Suction device (suction means) 31 Suction jig 31a Suction hole 41 Fan B Fine ball K Space

Claims (6)

[Claims] 1. A fine ball mounting apparatus for sucking a fine ball to be a bump and mounting the sucked fine ball on a work, comprising: a suction jig having a plurality of suction holes formed therein; The apparatus further comprises a suction device having a suction head for sucking the fine balls into the suction holes, and a ball supply unit in which the fine balls to be sucked to the suction heads are stored. Is installed, a case forming a space together with the suction jig of the suction head, a filter having air permeability provided in the case, and air in the case below the filter in the case. Air supply means for injecting the air, and injecting air from the air supply means to float fine balls placed on the upper surface of the filter in the space. Fine ball mounting device, characterized in that to. 2. A plate having a plurality of holes formed below the filter is provided in the case, and air supplied from the air supply means is provided through the holes of the plate. 2. The filter is sprayed on the filter.
The micro-ball mounting device described in the above. 3. The fine ball mounting apparatus according to claim 2, wherein the hole of the plate portion has a larger diameter at the center side than at the outer side. 4. The fine ball mounting according to claim 1, wherein a fan for sending air toward the filter is provided as the air supply means below the filter in the case. apparatus. 5. The fine ball mounting apparatus according to claim 1, wherein the supply of air by said air supply means is performed intermittently or with increasing or decreasing. 6. The fine ball mounting apparatus according to claim 1, wherein excess fine balls adhering to the normally adsorbed fine balls are removed by the flow of air by the air supply means.