JPH10287969A - 真空成膜装置 - Google Patents

真空成膜装置

Info

Publication number
JPH10287969A
JPH10287969A JP9917197A JP9917197A JPH10287969A JP H10287969 A JPH10287969 A JP H10287969A JP 9917197 A JP9917197 A JP 9917197A JP 9917197 A JP9917197 A JP 9917197A JP H10287969 A JPH10287969 A JP H10287969A
Authority
JP
Japan
Prior art keywords
substrate holder
substrate
forming apparatus
film forming
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9917197A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10287969A5 (2
Inventor
Hideo Fujii
秀雄 藤井
Kiyoshi Araki
清 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP9917197A priority Critical patent/JPH10287969A/ja
Publication of JPH10287969A publication Critical patent/JPH10287969A/ja
Publication of JPH10287969A5 publication Critical patent/JPH10287969A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9917197A 1997-04-16 1997-04-16 真空成膜装置 Withdrawn JPH10287969A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9917197A JPH10287969A (ja) 1997-04-16 1997-04-16 真空成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9917197A JPH10287969A (ja) 1997-04-16 1997-04-16 真空成膜装置

Publications (2)

Publication Number Publication Date
JPH10287969A true JPH10287969A (ja) 1998-10-27
JPH10287969A5 JPH10287969A5 (2) 2005-03-03

Family

ID=14240214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9917197A Withdrawn JPH10287969A (ja) 1997-04-16 1997-04-16 真空成膜装置

Country Status (1)

Country Link
JP (1) JPH10287969A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001305337A (ja) * 2000-04-27 2001-10-31 Furukawa Electric Co Ltd:The 光学フィルタおよびその光学フィルタの製造方法
WO2005024090A1 (ja) * 2003-09-05 2005-03-17 Shinmaywa Industries, Ltd. 真空成膜方法、装置、及びそれらを用いて製造されたフィルタ
JP2007154316A (ja) * 1999-07-14 2007-06-21 Samsung Sdi Co Ltd 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007154316A (ja) * 1999-07-14 2007-06-21 Samsung Sdi Co Ltd 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置
JP2001305337A (ja) * 2000-04-27 2001-10-31 Furukawa Electric Co Ltd:The 光学フィルタおよびその光学フィルタの製造方法
WO2005024090A1 (ja) * 2003-09-05 2005-03-17 Shinmaywa Industries, Ltd. 真空成膜方法、装置、及びそれらを用いて製造されたフィルタ
KR100782522B1 (ko) 2003-09-05 2007-12-06 신메이와 인더스트리즈,리미티드 진공 성막 방법 및 장치

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