JPH10287969A5 - - Google Patents
Info
- Publication number
- JPH10287969A5 JPH10287969A5 JP1997099171A JP9917197A JPH10287969A5 JP H10287969 A5 JPH10287969 A5 JP H10287969A5 JP 1997099171 A JP1997099171 A JP 1997099171A JP 9917197 A JP9917197 A JP 9917197A JP H10287969 A5 JPH10287969 A5 JP H10287969A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- peltier element
- temperature
- temperature sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9917197A JPH10287969A (ja) | 1997-04-16 | 1997-04-16 | 真空成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9917197A JPH10287969A (ja) | 1997-04-16 | 1997-04-16 | 真空成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10287969A JPH10287969A (ja) | 1998-10-27 |
| JPH10287969A5 true JPH10287969A5 (2) | 2005-03-03 |
Family
ID=14240214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9917197A Withdrawn JPH10287969A (ja) | 1997-04-16 | 1997-04-16 | 真空成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10287969A (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4589346B2 (ja) * | 1999-07-14 | 2010-12-01 | 三星モバイルディスプレイ株式會社 | 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置 |
| JP3625736B2 (ja) * | 2000-04-27 | 2005-03-02 | 古河電気工業株式会社 | 光学フィルタの製造方法 |
| JP2005082837A (ja) | 2003-09-05 | 2005-03-31 | Shin Meiwa Ind Co Ltd | 真空成膜方法、装置、及びそれらを用いて製造されたフィルタ |
-
1997
- 1997-04-16 JP JP9917197A patent/JPH10287969A/ja not_active Withdrawn
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