JPH10294286A5 - - Google Patents

Info

Publication number
JPH10294286A5
JPH10294286A5 JP1997117526A JP11752697A JPH10294286A5 JP H10294286 A5 JPH10294286 A5 JP H10294286A5 JP 1997117526 A JP1997117526 A JP 1997117526A JP 11752697 A JP11752697 A JP 11752697A JP H10294286 A5 JPH10294286 A5 JP H10294286A5
Authority
JP
Japan
Prior art keywords
furnace opening
ring
detection flow
detection
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997117526A
Other languages
English (en)
Japanese (ja)
Other versions
JP3657386B2 (ja
JPH10294286A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11752697A priority Critical patent/JP3657386B2/ja
Priority claimed from JP11752697A external-priority patent/JP3657386B2/ja
Publication of JPH10294286A publication Critical patent/JPH10294286A/ja
Publication of JPH10294286A5 publication Critical patent/JPH10294286A5/ja
Application granted granted Critical
Publication of JP3657386B2 publication Critical patent/JP3657386B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11752697A 1997-04-21 1997-04-21 半導体製造装置及び半導体製造方法 Expired - Lifetime JP3657386B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11752697A JP3657386B2 (ja) 1997-04-21 1997-04-21 半導体製造装置及び半導体製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11752697A JP3657386B2 (ja) 1997-04-21 1997-04-21 半導体製造装置及び半導体製造方法

Publications (3)

Publication Number Publication Date
JPH10294286A JPH10294286A (ja) 1998-11-04
JPH10294286A5 true JPH10294286A5 (fr) 2005-02-24
JP3657386B2 JP3657386B2 (ja) 2005-06-08

Family

ID=14713977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11752697A Expired - Lifetime JP3657386B2 (ja) 1997-04-21 1997-04-21 半導体製造装置及び半導体製造方法

Country Status (1)

Country Link
JP (1) JP3657386B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4680350B2 (ja) * 2000-06-26 2011-05-11 東京エレクトロン株式会社 枚葉式処理装置

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