JPH10296741A - Molding tool and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize short time optical interconnection between optical elements by a method wherein alignment mark transferring parts for obtaining a press- formed article having the alignment marks are provided on a transfer molding surface. SOLUTION: A first molding tool 10 is produced by forming a releasing film 7 on the whole outer surface of a matrix 5 on its side, on which the molding parts 6 for an alignment mark transferring part so as to adopt the surface of the releasing film as a transfer molding surface 10a. In this surface, four alignment mark transferring parts 8 consisting of the molding parts 6 for the alignment mark transferring part and the portions, which cover the outer surfaces of the molding parts in the releasing film 7 are formed. The maximum surface roughness at the top surface 8a of each alignment mark transferring part 8 is set to be, for example, 100 angstrom. Further, in the transfer molding surface 10a, the portion excluding parts, in each of which the alignment mark transferring part is formed, is substantially a flat plane, the maximum surface roughness of which is set to be, for example, about 1,000 angstrom.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a molding die, a method for producing the same, and a molded product produced by using the above-mentioned molding die, and more particularly to a microlens used for transmitting / receiving and relaying light. Optical elements such as polarizing plates, diffraction gratings, wavelength plates, filters, optical amplifiers, optical waveguides, optical fibers, light emitting elements such as semiconductor lasers and light emitting diodes, and light receiving elements such as photodiodes (hereinafter, these elements are referred to as A substrate on which the “optical element” is fixed or mounted (hereinafter, this substrate is referred to as “optical element fixing member”).
And a method for producing the same, and a molded product (optical element fixing member) manufactured using the above-described molding die.

[0002]

2. Description of the Related Art In order to transmit and receive and relay light, optical elements are desired to be optically connected to each other (hereinafter, "optically connected" is referred to as "optical connection"). It is necessary to fix or mount the optical element fixing member at a predetermined position with high precision. Further, it is necessary to position the optical element fixing members on which the optical elements are fixed or mounted with high precision so that predetermined optical elements fixed or mounted on the respective members are optically connected to each other. .

For example, a quartz single mode optical fiber used for long-distance optical communication is composed of a core having an outer diameter of about 10 μm and a cladding having an outer diameter of 125 μm which covers the core. When optically connecting single mode optical fibers to each other, a connection loss due to a shift of an optical axis at an optical connection portion is reduced (for example, 0.1 d).
B or less), a high alignment accuracy is required in which the optical axis shift is within ± 1 μm.

Conventionally, the above-mentioned optical element fixing member has been manufactured by molding a desired material into a predetermined shape by machining or press molding, and the optical connection between the optical elements on the optical element fixing member has been improved. The optical connection between the optical elements between the optical element fixing members after the optical elements are fixed or mounted is performed by active alignment using a precision stage. For example, when optically connecting optical fibers with each other by active alignment, light emitted from one optical fiber is incident on the other optical fiber, and the precision stage is driven over a wide range so that the amount of incident light is maximized. , And the two are aligned.

[0005]

However, in order to optically connect optical elements by active alignment, the precision stage must be driven over a wide range as described above, and it takes a long time. Further, for automation, the structure of the device must be complicated, and it is difficult to obtain a device capable of performing active alignment with desired accuracy.

SUMMARY OF THE INVENTION An object of the present invention is to shorten the optical connection between optical elements to be fixed or mounted or the optical connection between optical elements between optical element fixing members after fixing or mounting the optical element for a short time. An object of the present invention is to provide a molding die capable of obtaining an optical element fixing member that can be carried out by press molding, a method of manufacturing the same, and the above-described optical element fixing member.

[0007]

According to the present invention, there is provided a molding die having a transfer molding surface having a predetermined shape and used for press molding a molding material into an optical element fixing member. And a mold provided with an alignment mark transfer portion for obtaining a press-formed product having an alignment mark in the transfer molding surface.

On the other hand, a method of manufacturing a molding die according to the present invention for achieving the above object has a molding die having a transfer molding surface of a predetermined shape and used for press molding a molding material into an optical element fixing member. In manufacturing, so that an alignment mark transfer portion for obtaining an optical element fixing member having an alignment mark is formed in the transfer molding surface of the mold,
A molding portion for the alignment mark transfer portion is formed by dry etching on the mold material of the molding die, and thereafter, the molding portion is covered, and the surface of the release film is formed by the transfer molding. The mold release film is formed to be a surface, and has an alignment mark transfer portion including the mold portion and a mold release film covering the surface of the mold portion,
The method is characterized by obtaining a mold in which the surface of the release film is a transfer molding surface (hereinafter, this method is referred to as "method I").

Another method for manufacturing a mold according to the present invention for achieving the above object has a transfer molding surface of a predetermined shape, and is used for press-molding a molding material into an optical element fixing member. In manufacturing the mold, the mold material of the mold is dried so that the alignment mark transfer portion for obtaining the optical element fixing member having the alignment mark is located within the transfer molding surface of the mold. The method is characterized in that the alignment mark transfer portion is formed by etching (hereinafter, this method is referred to as "method II").

The optical element fixing member of the present invention for achieving the above object is a press-molded article in which an alignment mark for determining a positional relationship with another member is integrally formed. And the surface roughness around the alignment mark is different.

[0011]

Embodiments of the present invention will be described below in detail. First, the mold of the present invention will be described. This mold has a transfer molding surface of a predetermined shape as described above, and is used to press-mold a molding material into an optical element fixing member of a predetermined shape. Type. Since the optical element fixing member can be formed of glass, resin, or the like, the mold material of the above-mentioned molding die depends on the material of the optical element fixing member to be obtained, in other words, the press molding temperature or the press molding. It can be changed appropriately according to the pressure or the like.

In order to obtain an optical element fixing member having a small variation in dimensional accuracy and shape accuracy with respect to a temperature change in the surrounding environment and a small difference in thermal expansion from an optical element to be fixed or mounted by press molding. It is preferable that the optical element fixing member is formed of glass.
It is preferable to use a glass containing iO ₂ , B ₂ O ₃ and ZnO as glass components. Specific examples of such glass include, for example, the following (1) to (4).

(1) 1 to 30 SiO ₂ as a glass component
wt%, B ₂ O ₃ and 15 to 40 wt%, the ZnO 40～60W
t% (but not including 40 wt%), 0-15 w / MgO
t%, CaO is 0-10 wt%, SrO is 0-10 wt%,
0-10 wt% of BaO, 0-20 wt% of PbO, Al ₂
O ₃ to 0 wt% (but not 0 wt%), ZnO, MgO, CaO, SrO, BaO and P
Glass in which the total amount of bO is 40 to 60% by weight (but not including 40% by weight) and the total amount of the glass components is 75% by weight or more (hereinafter, this glass is referred to as "first glass").

(2) GeO ₂ is added to the first glass in an amount of 0 to 1;
0wt% (provided that the total amount of SiO ₂ and GeO ₂ 3~30wt
%), 0 to 20 wt% of La ₂ O ₃ and 0 to 10 wt% of Y ₂ O ₃
% And Gd ₂ O ₃ in an amount of 0 to 10% by weight (however, La ₂ O ₃ and Y ₂ O ₃
And the total amount of Gd ₂ O ₃ is 0 to 20 wt%), Nb ₂ O ₅
0 to 10 wt% and Ta ₂ O ₅ from 0 to 10 wt% (however, Nb ₂
O ₅ and the total amount is 0-10 wt% of Ta ₂ O _5), ZrO ₂
Containing 0 to 5 wt% of TiO ₂ and 0 to 3 wt% of TiO ₂ (hereinafter, this glass is referred to as “second glass”).

(3) For the purpose of improving defoaming and coloring, the first glass or the second glass is divided into As ₂ O _{3 and}
, Sb ₂ O ₃ , SnO, and glass to which at least one of SnO ₂ is added (hereinafter, this glass is referred to as “third glass”). (4) F, Bi ₂ O may be added to any of the first to third glasses as long as the properties of the glass are not deteriorated.
Glass to which ₃ , Yb ₂ O ₃ , WO ₃ , Na ₂ O, K ₂ O, etc. are added.

The mold material for forming the optical element fixing member made of glass by press molding includes a cemented carbide material containing tungsten carbide (WC), titanium nitride (TiN), and titanium carbide (TiC). ), Or a cermet containing aluminum oxide (Al ₂ O ₃ ), silicon carbide (SiC), glassy carbon, or the like. The cermet is preferably about 90 wt% of TiN, TiC or Al ₂ O _3. Those containing above are preferred.

However, in the case where a mold for manufacturing an optical element fixing member made of glass is to be obtained by using the above-mentioned mold material made of a super-hard material or a cermet, the mold is required to be formed at the time of press molding. In order to prevent fusion with the molding material (glass), a predetermined surface of a mold material processed into a desired shape (hereinafter, this mold material is referred to as a “base material”) is covered with a release film. It is preferable that the surface of the release film be a transfer molding surface.

As the release film, those having various compositions are used depending on the material of the base material, the material of the molding material, and the like, but the fusion of the molding material made of glass and the molding die is prevented. For example, Pt, Au, Ir,
At least one selected from the group consisting of Pd and Rh
A film containing various kinds of components and a film made of i-carbon can be used. When using a mold material made of SiC or glassy carbon to obtain a molding die for manufacturing a glass optical element fixing member, the release film may be provided or provided. It is not necessary.

In the molding die of the present invention, an alignment mark transfer portion for obtaining a press molded product having an alignment mark is provided in the transfer molding surface.
The shape of the transfer molding surface excluding the alignment mark transfer portion is appropriately selected according to the use of the optical element fixing member to be obtained by using the molding die.
A shape in which two or more planes whose boundary portions are steps, a plane (the one plane or the two or more planes) and a concave part of a predetermined shape, a plane (the one plane or the two planes) A combination of a flat surface (the above-mentioned plane) and a projection of a predetermined shape, a shape of a combination of a plane (the one plane or the two or more planes), a projection of a predetermined shape and a recess of a predetermined shape, and the like. can do.

On the other hand, the shape of the alignment mark transfer portion in plan view is appropriately selected according to the shape of the alignment mark to be formed on the optical element fixing member. Also,
The number of alignment mark transfer portions provided in one transfer molding surface and the formation location thereof are fixed to the use of the optical element fixing member to be obtained using the molding die and the optical element fixing member. Or, it is appropriately selected according to the shape and number of the optical element to be mounted, the use of the alignment mark in the optical element fixing member, and the like.

The alignment mark transfer portion may be composed of a convex portion or a concave portion. However,
When an optical element fixing member for fixing or mounting an optical element at a high density is to be obtained, an alignment mark formed on the optical element fixing member is also used for fixing or mounting the optical element. Since it is preferable to use the alignment mark as a part of the region, the alignment mark is formed by a concave portion so that the optical element can be stably and easily fixed or mounted so as to cover a part or the whole of the alignment mark. preferable. Further, there is a case where a desired member is placed on the optical element fixing member for the purpose of further firmly fixing the optical element fixed or mounted on the optical element fixing member. If the alignment mark formed on the optical element fixing member is formed by a concave portion, the above-mentioned member can be stably and easily mounted.

Therefore, when an optical element fixing member for fixing or mounting an optical element at a high density or an optical element fixing member on which members other than the optical element are mounted are to be obtained, It is preferable that the alignment mark transfer portion in the mold of the present invention is formed by a convex portion.

Usually, a plurality of optical elements are fixed or mounted on the optical element fixing member, and these optical elements are optically connected on the optical element fixing member only by mechanical positioning of the optical elements. Requires at least two-dimensional alignment. Further, when only predetermined optical elements fixed or mounted on the respective optical element fixing members are optically connected to each other only by mechanical positioning of the optical element fixing members on which the optical elements are fixed or mounted. Also requires at least two-dimensional alignment.

Therefore, the shape of the alignment mark transfer portion in plan view has two or more linear portions such as an L shape, a cross shape, a triangular frame, a rectangular frame shape, and these linear portions are at a predetermined angle to each other. It is preferable that the shape has the following shape.
The alignment mark formed by the alignment mark transfer portion having the shape has two or more linear portions, and these linear portions have a predetermined angle with respect to each other. An optical element fixing member that facilitates two-dimensional alignment of the fixing members can be obtained.

In the case where the mold has a release film, the alignment mark transfer portion is formed by a molding portion (formed on a base material) which is covered with the release film and serves as an alignment mark transfer portion. Hereinafter, this molded portion is simply referred to as a “molded portion”) and a release film covering the molded portion, or is formed on the release film itself. When the mold does not have a release film, it is formed on the mold material itself.

The formation of the molding portion on the mold material and the formation of the alignment mark transfer portion on the mold material itself can be performed by, for example, a method such as machining or etching. Since the tip of the cutting tool does not enter a portion where the two cross each other, an alignment mark transfer portion or a molded portion having such a crossed portion cannot be precisely formed. Further, when an attempt is made to obtain a molding die having a step (excluding the step between the alignment mark transfer portion and its surroundings) in the transfer molding surface, the vicinity of the step in the lower step region divided by the step Since the tip of the cutting tool cannot be inserted into the hole, the area where the alignment mark transfer portion or the above-mentioned forming portion can be formed by machining is limited. Further, the above-mentioned carbide material, cermet, Si
It is difficult to form a highly accurate alignment mark transfer portion or the above-mentioned molded portion on a mold material made of C, glassy carbon, or the like by wet etching.

For this reason, the molding portion formed on the mold material and the alignment mark transfer portion formed on the mold material itself, in particular, two or more linear portions are provided, and these linear portions are mutually fixed. It is particularly preferable that the molded portion or the alignment mark transfer portion having the shape of the above angle is formed by dry etching. According to dry etching, a molded part or an alignment mark transfer part having a desired shape can be formed at a desired location with high precision.

In order to obtain an optical element fixing member by which the alignment mark can be easily identified visually or by an image recognition device, it is necessary to make the surface roughness of the alignment mark different from the surface roughness around the alignment mark. As it is preferable, about the mold,
It is preferable that the surface roughness of the alignment mark transfer portion is different from the surface roughness of the transfer molding surface around the alignment mark transfer portion. By using a mold in which the surface maximum roughness of the alignment mark transfer portion and the surface maximum roughness of the transfer molding surface around the alignment mark transfer portion are different from each other by about 200 Å or more, even when transparent glass is used as the molding material, for example. An optical element fixing member that can easily identify the alignment mark by visual inspection or an image recognition device can be obtained by press molding.

Since the mold of the present invention described above has the above-described alignment mark transfer portion, the molds of the present invention are combined, or the mold of the present invention and a conventional mold are used. And a set of forming dies necessary for press forming (upper and lower dies, or
One consisting of upper mold, lower mold and body mold. Including those in which the lower mold or the upper mold is a flat plate. ), And a molding material is press-molded using the pair of molding dies, whereby an optical element fixing member having an alignment mark can be obtained. At this time, the mold materials of the molds constituting the set of molds may be the same or different. Further, each of the molds constituting the set of molds may or may not have a release film.

The entire shape of the optical element fixing member varies depending on its use and the like, such as a flat plate shape, a plate shape having one or more steps, and the like, so that an optical element fixing member having a desired shape can be obtained. As described above, the shape of each of the molds (the shape of the transfer molding surface in each mold) constituting the set of molds is appropriately selected.

Since a predetermined alignment mark is formed on an optical element fixing member obtained by press molding using the molding die of the present invention, a plurality of optical elements will be fixed or mounted on the optical element fixing member. In such a case, the positioning of these optical elements is performed using the alignment mark, whereby the optical elements are optically connected to each other only by the positioning, or the optical elements are almost optically connected to each other by the positioning. It becomes possible. Therefore, even if the optical connection is performed with higher precision by active alignment, the work of the optical connection can be performed in a short time. Similarly, even when the optical elements are optically connected to each other between the optical element fixing members after the optical elements are fixed or mounted, the above-described alignment marks formed on the respective optical element fixing members are used. By positioning these optical element fixing members, the time required for the optical connection can be reduced.

That is, by using the above-described optical element fixing member, optical connection between the optical elements to be fixed or mounted, or light between the optical element fixing members after the optical element is fixed or mounted. The optical connection between the elements can be performed in a shorter time as compared with the case where only the active alignment is performed. In addition, it becomes easy to automate these optical connections. The mold of the present invention capable of obtaining the optical element fixing member having the above-described advantages can be manufactured by, for example, the method I or the method II of the present invention described below.

As described above, the method I of the present invention uses an alignment method for manufacturing a molding die having a transfer molding surface of a predetermined shape and used for press-molding a molding material into an optical element fixing member. The mold material of this mold is dry-etched by dry etching so that an alignment mark transfer portion for obtaining an optical element fixing member having a mark is formed in the transfer molding surface of the mold. Forming a molded part, thereafter, covering the molded part, and forming the release film so that the surface of the release film is the transfer molding surface, It has an alignment mark transfer part consisting of a molding part and a release film covering the surface of the shape part, and obtains a molding die in which the surface of the release film is a transfer molding surface. Is what you do.

In the method I, a predetermined surface of a mold material (base material) after being processed into a desired shape is covered with a release film, and the surface of the release film is transferred to a transfer molding surface (in the transfer molding surface, In this method, a molding die for obtaining a press-molded product made of glass (an optical element fixing member) is to be manufactured by the method I. In such a case, it is preferable to use a material made of a cemented carbide material or a cermet (as already described in the description of the mold of the present invention) as the mold material of the mold. Of course, also in this case, a mold material made of SiC or glassy carbon can be used.

In forming a molded portion for an alignment mark transfer portion on a mold material by dry etching, at least a portion of the surface of the mold material where the molded portion is to be formed is processed in advance into a flat surface. Preferably, a resist pattern having a desired shape is provided on the plane, and dry etching is performed using the resist pattern as a mask.

The shape, number, location, and the like of the alignment mark transfer portion in plan view, as already described in the description of the molding die of the present invention, are obtained by using the optical element to be obtained by using the molding die. Since the shape, the number, the formation location, and the like of the molded portion in plan view are appropriately selected depending on the use of the fixing member, etc., the optical element fixing member to be obtained by using the molding die. It is appropriately selected according to the use and the like.

As described above in the description of the molding die of the present invention, a portion of the transfer molding surface other than the alignment mark transfer portion (hereinafter, this portion is referred to as a "peripheral portion").
That. The shape of ()) is appropriately selected according to the use of the optical element fixing member to be obtained by using the molding die, and is the base of the release film forming the peripheral portion. The shape of the surface of the mold material at the location is also appropriately selected according to the use of the optical element fixing member to be obtained by using the molding die.

Therefore, in obtaining a molding die by the method I, in addition to forming the molding portion for the alignment mark transfer portion by dry etching in advance before forming the release film, the molding die surface In this way, the base portion of the peripheral portion is also processed into a desired shape in advance to obtain a base material having a predetermined shape. The formation of the molding portion by dry etching and the molding of a portion of the surface of the mold material that becomes a base of the peripheral portion may be performed simultaneously or separately. Molding of a portion that becomes a base of the peripheral portion on the surface of the mold material may be performed by a method such as dry etching or mechanical processing, or a method using dry etching and mechanical processing in combination, depending on the shape. it can.

It is preferable that the alignment mark transfer portion is formed with as high accuracy as possible. For this purpose, it is preferable that the above-mentioned molded portion for alignment mark transfer portion is formed with as high accuracy as possible. Then, in order to form the molded portion with as high accuracy as possible, the dry etching conditions are appropriately selected according to the material of the mold material. When the mold material is made of the above-mentioned carbide material or cermet, a rare gas (Ar gas, etc.), a fluorocarbon-based simple gas (CF ₄ gas, etc.) and chlorine gas are used as an etching gas for dry etching. It is preferable to use one or more kinds selected from the group consisting of system single gases (such as Cl ₂ gas). When the mold material is made of SiC or glassy carbon, the rare gas, the fluorocarbon-based gas, or the chlorine-based gas is used as an etching gas for dry etching. Is preferred.

The release film formed on the base material so as to cover the molded portion formed by the above-mentioned dry etching and to make the surface thereof a transfer molding surface is a molding die of the present invention. As described above, various compositions having various compositions are used depending on the material of the base material, the material of the molding material, and the like. As a release film for preventing the fusion of the molding material and the molding material made of glass, for example,
A film containing at least one component selected from the group consisting of Pt, Au, Ir, Pd and Rh;
A film made of carbon can be used. These release films can be formed by a method such as a sputtering method, an ion plating method, and a CVD method.

In order to obtain an optical element fixing member that allows the alignment marks to be easily identified visually or by an image recognition device, as described in the description of the mold of the present invention, the transfer of the alignment marks is performed. It is preferable to make the surface roughness of the part different from the surface roughness of the transfer molding surface around the alignment mark transfer part. However, in the mold manufactured by the method I, as described above, The surface is a transfer molding surface. The surface roughness of the release film changes according to the film forming conditions of the release film, the surface roughness on the surface of the mold material underlying the release film, the thickness of the release film, and the like.

Therefore, when it is desired to obtain a molding die having different surface roughness in the alignment mark transfer portion from the surface roughness in the transfer molding surface (the peripheral portion) around the alignment mark transfer portion by the method I, The conditions for forming the release film, the surface roughness of the mold material surface underlying the release film, the thickness of the release film, and the like are appropriately selected. However, it is practically preferable that the thickness of the release film is at least approximately 0.03 μm or more.

In the method I of the present invention described above, since the molded portion for the alignment mark transfer portion is formed by dry etching, the mold material is made of a super hard material, cermet, silicon carbide (SiC), glassy carbon or the like. Even in this case, as already described in the description of the molding die of the present invention, a molding part (a molding part for an alignment mark transfer part) that is more precise and more precise than machining or wet etching is formed at a desired position. Can be formed. In the molding die manufactured by the method I, since the surface of the release film formed so as to cover the molding portion is a transfer molding surface, an optical element having a highly accurate alignment mark is provided. A molding die from which a fixing member can be obtained is obtained.

Next, the method II of the present invention will be described.
As described above, the method II of the present invention has a transfer molding surface of a predetermined shape, and has an alignment mark in manufacturing a mold used for press-molding a molding material into an optical element fixing member. The alignment mark transfer portion is formed by dry etching on the mold material of the molding die so that the alignment mark transfer portion for obtaining the optical element fixing member is located within the transfer molding surface of the molding die. It is characterized by the following.

Since the method II is a method of obtaining an intended molding die by forming an alignment mark transfer portion on the mold material itself, a method for obtaining a glass press-molded product (optical element fixing member) by the method II. When a mold is to be manufactured, it is preferable to use a material made of SiC or glassy carbon as a mold material of the mold. Of course, the above-mentioned mold material made of a super hard material or a cermet can also be used.

In the formation of the alignment mark transfer portion on the mold material itself by dry etching, at least a portion of the surface of the mold material where the alignment mark transfer portion is to be formed is processed into a flat surface in advance, and then the desired surface is formed on the flat surface. This can be performed by providing a resist pattern having a shape and performing dry etching using the resist pattern as a mask.

As described above, the formation of the alignment mark transfer portion may be performed so that the alignment mark transfer portion is located within the transfer molding surface of the molding die. As already mentioned in
The shape and number of the alignment mark transfer portion in plan view, the formation location, and the shape of the transfer molding surface other than the alignment mark transfer portion, etc., depend on the use of the optical element fixing member to be obtained using the mold. Selected as appropriate.

Therefore, the formation of the alignment mark transfer portion by dry etching and the formation of the transfer molding surface other than the alignment mark transfer portion may be performed simultaneously or separately. The transfer molding surface other than the alignment mark transfer portion can be formed by a method such as dry etching or machining, or a combination of dry etching and machining depending on the shape. It is preferable that the alignment mark transfer portion is formed with as high a precision as possible. For this purpose, the etching conditions are appropriately selected according to the material of the mold material.

In order to obtain an optical element fixing member by which the alignment mark can be easily identified visually or by an image recognition apparatus, as described in the description of the molding die of the present invention, the alignment mark transfer It is preferable to make the surface roughness of the part different from the surface roughness of the transfer molding surface around the alignment mark transfer part, so that the dry etching when forming the alignment mark transfer part is performed so as to obtain such a mold. Taking into account the conditions, the material of the mold material, the method of forming the transfer molding surface other than the alignment mark transfer portion, etc., previously adjust the surface roughness of at least the portion of the mold material surface where the alignment mark transfer portion is to be formed. It is preferable to keep it.

In the method II of the present invention described above, since the alignment mark is formed by dry etching, the mold material is made of a super hard material, cermet, silicon carbide (Si).
C), even if it is made of glassy carbon or the like, as described in the description of the molding die of the present invention, an alignment mark that is more precise and more accurate than processing by machining or wet etching is formed at a desired position. Can be formed. Accordingly, a molding die capable of obtaining an optical element fixing member having a highly accurate alignment mark is obtained.

Next, the optical element fixing member of the present invention will be described. As described above, the optical element fixing member of the present invention is formed of a press-molded product in which alignment marks for determining the positional relationship with other members are integrally formed, and the surface roughness of the alignment marks and the alignment. It is characterized in that the surface roughness around the mark is different.

The shape of the alignment mark in a plan view can be appropriately selected according to its use, etc. The number of the alignment marks and the locations where the alignment marks are formed are determined by the use of the optical element fixing member, the optical element It is appropriately selected according to the shape and number of the optical element to be fixed or mounted on the fixing member, the use of the alignment mark in the optical element fixing member, and the like. In addition, the alignment mark may be formed of a convex portion or a concave portion, but as already described in the description of the mold of the present invention,
In order to obtain an optical element fixing member for fixing or mounting an optical element at high density and an optical element fixing member on which members other than the optical element are mounted, an alignment mark formed of a concave portion is preferable.

In order to achieve optical connection between optical elements to be fixed or mounted, or optical connection between optical element fixing members after the optical element is fixed or mounted, the plane of the alignment mark is determined. It is preferable that the visual shape has two or more straight portions such as an L shape, a cross shape, a triangular frame, a rectangular frame shape, and the straight portions form a predetermined angle with each other.

The value of the surface roughness of the alignment mark is not particularly limited. However, in order to easily identify the alignment mark visually or by an image recognition device, the maximum surface roughness of the alignment mark and the vicinity of the alignment mark are considered. It is preferable that the maximum surface roughness is different from the maximum surface roughness by approximately 200 angstroms or more.

The optical element fixing member of the present invention having the above-mentioned alignment mark is made of a press-moldable inorganic or organic material such as glass and resin.
In order to obtain an optical element fixing member having a small variation in dimensional accuracy and shape accuracy with respect to a temperature change in the surrounding environment and a small difference in thermal expansion from the optical element to be fixed or mounted, the molding of the present invention is performed. As already described in the description of the mold, the optical element fixing member is preferably formed of glass. Further, when the optical element fixing member of the present invention is made of a transparent body, the alignment mark formed on the optical element fixing member can be identified from various directions. For example, the following advantages (A) and (B) can be obtained as compared with the case of using a translucent body.

(A) The alignment is performed while identifying the alignment mark from the side surface or the back surface of the optical element fixing member (the surface opposite to the surface on which the optical element is to be fixed or mounted; the same applies hereinafter). Fixing or mounting the opaque optical element so as to cover the mark, in other words, it becomes possible to use the alignment mark as a part of the area for fixing or mounting the opaque optical element. It becomes easy to fix or mount the elements at high density.

(B) The alignment mark can be identified from the side and back surfaces of the optical element fixing member after fixing or mounting the optical element and a member for further firmly fixing the optical element. Therefore, even if the optical element, the above-mentioned member, and the like are opaque, there is a desired gap between the optical element fixing member and another optical element fixing member (after fixing or mounting the optical element). When optically connecting optical elements, it is possible to use alignment marks formed on each optical element fixing member.

Since the above-described optical element fixing member of the present invention has the above-mentioned alignment mark, when a plurality of optical elements are to be fixed or mounted on this optical element fixing member, these optical marks are required. By performing the positioning of the optical element using the alignment mark, it becomes possible to optically connect the optical elements only by the positioning or to optically connect the optical elements by the positioning. Therefore, even if the optical connection is performed with higher precision by active alignment, the work of the optical connection can be performed in a short time. Similarly, even when the optical elements are optically connected to each other between the optical element fixing members after the optical elements are fixed or mounted, the above-described alignment marks formed on the respective optical element fixing members are used. By positioning these optical element fixing members, the time required for the optical connection can be reduced.

That is, by using the optical element fixing member of the present invention, optical connection between the optical elements to be fixed or mounted, or between the optical element fixing members after the optical element is fixed or mounted. Optical connection between optical elements can be performed in a shorter time than when these optical connections are performed only by active alignment. In addition, it becomes easy to automate these optical connections. Further, since the optical element fixing member of the present invention can be obtained by press molding described later, it can be manufactured in large quantities at low cost.

The overall shape of the optical element fixing member of the present invention may be a flat plate, one or more steps (excluding the step between the alignment mark and its surroundings), depending on its use and the like.
Can be appropriately selected.

The optical element fixing member of the present invention having the above-mentioned advantages is provided by the molding die exemplified as one of the preferable molding dies of the present invention described above, that is, the surface roughness in the alignment mark transfer portion. And a molding die having a different surface roughness on the transfer molding surface in the vicinity of the alignment mark transfer portion, and another molding die (the molding die of the present invention or a conventional molding die). And a lower mold, or an upper mold, a lower mold, and a body mold, and the like, including those in which the lower mold or the upper mold is a flat plate.) And a press using the pair of molding dies. It can be manufactured by molding.

In the press molding, it is preferable to use a molding material (preform) whose shape in plan view is approximated to the shape in plan view of the optical element fixing member. As the molding material, a material made of a desired inorganic material or organic material that can be press-molded, such as glass and resin, is used. As described above, in order to obtain an optical element fixing member having a small variation in dimensional accuracy and shape accuracy with respect to a temperature change in the surrounding environment, and having a small difference in thermal expansion from the optical element to be fixed or mounted. It is preferable to use glass as the molding material. It is possible to obtain press molded products,
The glass from which the optical element fixing member having the above characteristics can be obtained includes those exemplified in the description of the mold of the present invention.

[0063]

Embodiments of the present invention will be described below with reference to the drawings. Example 1 (1) Production of First Mold by Method I First, a mold material made of a carbide material containing WC was prepared. The mold material is 20.0 mm long and 10.0 m wide.
m, a thickness of 2.0 mm, and a flat surface with a maximum surface roughness of 100 angstroms. Next, a positive type photoresist (AZ1350 manufactured by Hoechst) is applied to one surface of the mold material by a spin coating method, and as shown in FIG. A resist film 2 having a thickness of 0 μm was formed.

Next, a photomask having a predetermined shape, ie, a shape in plan view of 20 × 10
line width of 3.0 mm at the four corners of the ultraviolet-transparent substrate,
Cross-shaped light-shielding portion made of a Cr film of
m, a total width of 10 μm) was adhered so that the light-shielding portion was positioned on the resist film 2 side. Then, ultraviolet rays are irradiated from the photomask side to the resist film 2 (irradiation amount is 25 mW / cm ² ).
Then, the resist film 2 was exposed to light, and the exposed resist film 2 was developed by immersing it in a predetermined developing solution (AZ developer manufactured by Hoechst) for 90 seconds.

The exposed portion of the resist film 2 is dissolved and removed by the above-described development, and as shown in FIG. 1B, the unexposed portion (ultraviolet rays are blocked by the light shielding portion formed on the photomask). A cross-shaped resist pattern 3 composed of (shielded portion) was formed at each of the four corners on one side of the mold material 1. Each of the resist patterns 3 has a cross-sectional shape in plan view having a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm, and a film thickness of 2.0 μm.

After each resist pattern 3 was post-baked at 120 ° C. for 60 minutes, one side of the mold material 1 was dry-etched for 1 minute using these resist patterns 3 as a mask. This dry etching was performed using an induction discharge type reactive etching apparatus, and Cl ₂ gas was used as an etching gas. The etching conditions were a coil bias of 600 W, a substrate bias of 300 W, an etching gas (Cl ₂ gas) flow rate of 20.0 sccm, and a pressure of 5.0 mTorr.

By the dry etching under the above conditions, each resist pattern 3 was etched at an etching rate of 0.14 μm / min, and its film thickness was reduced to 1.86 μm (hereinafter, the resist pattern 3 after the dry etching was removed). This is referred to as “resist pattern 4.” See FIG. The mold material 1 on the side on which the resist pattern 3 is provided
The surface of the resist pattern 3 (resist pattern 4)
The etching was performed at an etching rate of 0.03 μm / min except for the parts protected by. As a result, as shown in FIG. 1C, the mold material 1 after the dry etching (hereinafter, this is referred to as “base material 5”).
Each of the four corners on one side has a shape in plan view with a total length of 10
A convex part 6 with a height of 0.03 μm and a cross shape of μm, a total width of 10 μm, and a line width of 3.0 μm was formed. These convex portions 6
Is used as a molding section for an alignment mark transfer section, which will be described later, and is hereinafter referred to as “a molding section 6 for an alignment mark transfer section”.

Thereafter, the resist pattern 4 was peeled off using a predetermined peeling liquid to obtain a target base material 5 for a first molding die. As shown in FIGS. 2 (a) and 2 (b), forming portions 6 for alignment mark transfer portions are formed at four corners on one surface of the base material 5, respectively. Top surface in 2. The same applies to the following examples.) The maximum surface roughness of 6a is 100 angstroms. The surface 5a of the base material 5 (excluding the formation portion of the molding portion 6) 5a on the side where the molding portion 6 is formed is substantially flat, and the maximum surface roughness of the surface 5a is 1000. Angstrom.

Next, on the entire outer surface of the base material 5 on which the molding 6 for the alignment mark transfer portion is formed, Au, Pt,
A release film composed of Pd and Rh was formed to a thickness of 1500 angstroms (the thickness on the surface 5a of the base material 5 or the upper surface 6a of the molded portion 6). At this time, the atmosphere gas (Ar
Gas) The flow rate was 20.0 sccm, and the atmospheric pressure was 1.0
Sputtering was performed at a Pa and RF bias of 300 W.

By forming a film up to the above-mentioned release film, an intended first molding die was obtained. FIG. 3 (a), (b)
As shown in the figure, the first molding die 10 is formed on the entire outer surface of the base material 5 described above and on the side of the base material 5 where the molded portion 6 for the alignment mark transfer portion is formed. In the first mold 10, the surface of the mold release film 7 is the transfer molding surface 1.
0a. In the transfer molding surface 10a, a molding portion 6 for an alignment mark transfer portion and a release film 7 are provided.
Among them, there are formed four alignment mark transfer portions 8 constituted by portions covering the outer surface of the molding portion 6.

The upper surface of each alignment mark transfer section 8 (the upper surface in FIG. 3B. The same applies to the following embodiments).
The maximum surface roughness at 8a is 100 angstroms. A portion (peripheral portion) of the transfer molding surface 10a excluding a portion where the alignment mark transfer portion 8 is formed is substantially flat, and the maximum surface roughness of the portion (peripheral portion) is 1000 angstroms. is there.

(2) Preparation of Second Mold First, as a base material for the second mold, a 20 mm long, 10 mm wide and 2 mm thick made of a carbide material containing WC.
A flat plate having a thickness of 0 mm and a maximum surface roughness of 100 angstroms was prepared. Next, A is formed on one surface of the base material by a sputtering method under the same conditions as in the case of obtaining the first mold.
A release film made of u, Pt, Pd and Rh and having a thickness of 1500 Å was formed. By forming this release film, the intended second molding die was obtained. In the second mold, the surface of the release film provided on one side of the base material functions as a transfer molding surface. By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.

(3) Preparation of Third Mold A block made of a super hard material containing WC is cut and polished into a cylindrical body having a predetermined size to obtain a base material. On the inner surface of the material, a 1500-Å-thick release film made of Au, Pt, Pd, and Rh was formed by sputtering under the same conditions as in the case of obtaining the first molding die. Was obtained. The third
The molding die has an inner dimension that allows the first and second molding dies to be inserted under a predetermined clearance. In this molding die, the inner surface of the base material The surface of the release film provided functions as a transfer molding surface. By combining the above-described first and second molds with the above-described third mold, the upper mold (the first mold or the second mold) and the lower mold (the second mold) Mold or first mold) and barrel mold (third mold)
Can be obtained.

(4) Press molding First, the first molding die prepared in the above (1) and the above (2)
And a second mold prepared in the above, a set of molds is formed, and the first mold is placed on the upper mold holder of the press molding machine such that its transfer molding surface is on the lower surface. The molds were fixed to the lower mold holders of the press molding machine, respectively, such that the transfer molding surface was on the upper surface. Then, 20.0 × 10.0 × 2.0 mm is placed on the lower mold (the second mold).
Is placed in a vacuum, the upper mold (first mold) temperature is 660 ° C., the lower mold (second mold) temperature is 630 ° C., and the press pressure is 170 kg / cm.
^2. Press molding under the condition of press time 120 seconds,
A plate-shaped optical element fixing member having a rectangular shape of 20.5 × 10.3 mm in plan view was obtained.

As shown in FIG. 4, each of the four corners on one side of the optical element fixing member 15 has a cross-sectional shape in plan view having a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm and a depth of 3.0 μm. Alignment marks 16 each having a recess of 0.03 μm are formed, and the maximum surface roughness of the bottom surface 16a of each alignment mark 16 is 80 Å. The surface (excluding the alignment marks 16) 15a of the optical element fixing member 15 on the side where the alignment marks 16 are formed is substantially flat, and the maximum surface roughness of the surface 15a is 80
0 Angstrom. Each alignment mark 16
Since the maximum surface roughness on the bottom surface 16a of the above-mentioned and the maximum surface roughness around these alignment marks 16 were different, the alignment marks 16 could be easily visually recognized.

Further, a pair of molds includes the first mold prepared in (1), the second mold prepared in (2), and the third mold prepared in (3). Constitute
The first mold is placed on the upper mold holder with the transfer molding surface facing down, and the second mold is placed under the press molding machine with the transfer molding surface facing up. Press molding was performed in the same manner as described above except that each of the optical elements was fixed to the mold holder, and the third molding die was used as the body mold, and an optical element similar to the optical element fixing member 15 shown in FIG. 4 was obtained. A fixing member was obtained.

Example 2 (1) Production of First Mold by Method I First, a mold material made of a super hard material containing WC was prepared. This mold material is 30.0mm long and 20.0m wide.
m, a thickness of 1.0 mm and a maximum surface roughness of 100 angstroms. Next, in exactly the same manner as in Example 1 (1), the shape in plan view at each of the four corners on one side of the mold material was a cross shape with a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm. A resist pattern having a thickness of 2.0 μm was formed.

After each resist pattern 3 was post-baked at 120 ° C. for 60 minutes, one side of the mold material was dry-etched for 10 minutes using these resist patterns 3 as a mask. This dry etching was performed using an induction discharge type reactive etching apparatus, and an Ar gas and a CF ₄ gas were used as an etching gas. The etching conditions were a coil bias of 600 W, a substrate bias of 600 W, an Ar gas flow rate of 20.0 sccm, a CF ₄ gas flow rate of 10.0 sccm, and a pressure of 5.0 mTorr.

By the dry etching under the above conditions, each resist pattern was etched at an etching rate of 0.08 μm / min, and its film thickness was reduced to 1.2 μm. The surface of the mold material on which the resist pattern was provided was etched at an etching rate of 0.03 μm / min except for the portion protected by the resist pattern. As a result, each of the four corners of one side of the mold material after dry etching (hereinafter referred to as “base material”) has a shape in plan view having a total length of 10 μm and a total width of 1 μm.
0 μm, line width 3.0 μm, cross shape and height 0.3 μm
Was formed. Since these convex portions are used as molding portions for the alignment mark transfer portion, they are hereinafter referred to as “molding portions for the alignment mark transfer portion”.

Thereafter, the resist pattern was stripped using a predetermined stripping solution to obtain a target base material for a first molding die. Next, on the entire outer surface on the side of the base material on which the molded portion for the alignment mark transfer portion is formed, A is formed in exactly the same manner as in Example 1 (1).
A release film made of u, Pt, Pd and Rh and having a thickness of 1500 Å was formed.

By forming a film up to the above-mentioned release film, an intended first mold was obtained. The first mold includes the above-described base material, and the above-described release film formed on the entire outer surface of the base material on the side where the formed portion for the alignment mark transfer portion is formed. And the first
In the molding die described above, the surface of the release film is a transfer molding surface. Then, in the transfer molding surface, four alignment mark transfer portions formed by a molding portion for the alignment mark transfer portion and a portion of the release film covering the outer surface of the molding portion are formed. Have been.

The maximum surface roughness of the upper surface of each alignment mark transfer portion is 100 angstroms. The portion (peripheral portion) of the transfer molding surface excluding the portion where the alignment mark transfer portion is formed is substantially flat, and the surface has a maximum surface roughness of 300 angstroms.

(2) Preparation of second molding die As a base material for the second molding die, a 30 mm long, 20 mm wide, 1.0 m thick made of a carbide material containing WC was used.
m, a second mold was obtained in exactly the same manner as in Example 1 (2) except that a flat plate having a surface roughness of 100 Å was used. Also in the second mold, the surface of the release film provided on one surface of the base material functions as a transfer molding surface. By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.

(3) Preparation of Third Mold A third mold was obtained in the same manner as in Example 1 (3). Also in the third mold, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface. By combining the above-described first and second molds with the above-described third mold, the upper mold (the first mold or the second mold) and the lower mold (the second mold) Mold or first mold) and barrel mold (third mold)
A set of molds consisting of two molds can be obtained.

(4) Press molding A pair of molding dies is constituted by the first molding die and the second molding die, and 20.0 × 10.0 is used as a molding material.
Press molding was performed in exactly the same manner as in Example 1 (4) except that a non-alkali glass plate of × 3.0 mm was used, and the shape in plan view was a rectangle of 20.0 × 10.0 mm. An optical element fixing member was obtained.

Each of the four corners on one side of the optical element fixing member has a shape in plan view having a total length of 10 μm and a total width of 10 μm.
An alignment mark composed of a cross section having a depth of 0.3 μm and a cross shape having a line width of 3.0 μm and a width of 3.0 μm is formed. The maximum surface roughness of the bottom surface of each alignment mark is 80 Å. The surface (excluding the alignment marks) of the optical element fixing member on the side where these alignment marks are formed is substantially flat, and the surface has a maximum surface roughness of 800 angstroms. Since the maximum surface roughness on the bottom surface of each alignment mark and the maximum surface roughness around these alignment marks were different, the alignment marks could be easily visually recognized.

The first, second, and third molding dies constitute a set of molding dies.
Press molding was performed in the same manner as described above except that the molding die was used as the upper die, the second molding die was used as the lower die, and the third molding die was used as the body die. An optical element fixing member similar to that described above was obtained.

Example 3 (1) Production of First Mold by Method II First, a mold material made of glassy carbon was prepared. This mold material is 20.0mm long, 10.0mm wide and 3.0m thick.
m, a flat plate with a maximum surface roughness of 200 Å. Next, a negative type electron beam resist (ZEP70 manufactured by Zeon Corporation) was applied on one side of this mold material by spin coating.
00) to form a film having a thickness of 1.5 μm on one surface of the mold material.
Was formed.

Next, an electron beam (irradiation amount is 55 μC /
cm ² ) at each of the four corners in plan view of the resin layer, a regular triangle having a side length of 50 μm (the line width of each side is 5.
0 μm) was drawn, and the resin layer after the electron beam drawing was developed by immersing it in a predetermined developing solution (ZEP500 manufactured by Zeon Corporation) for 90 seconds.

By the above-described development, portions of the resin layer that were not subjected to electron beam drawing were dissolved and removed, and resist patterns composed of the portions subjected to electron beam drawing were formed at the four corners of the mold material. The shape of each resist pattern in plan view has a side length of 50 μm and a line width of 5.0.
It has a regular triangular frame shape with a thickness of 1.5 μm.

After each resist pattern was post-baked at 200 ° C. for 30 minutes, one side of the mold material was dry-etched for 10 minutes using these resist patterns as a mask. This dry etching was performed using an induction discharge type reactive etching apparatus, and Ar gas was used as an etching gas. The etching conditions were a coil bias of 600 W, a substrate bias of 300 W, an etching gas (Ar gas) flow rate of 20.0 sccm, and a pressure of 5.0 m.
Torr.

By the dry etching under the above conditions, each resist pattern was etched at an etching rate of 0.11 μm / min, and its film thickness was reduced to 0.4 μm. The surface of the mold material on the side provided with the resist pattern was etched at an etching rate of 0.09 μm / min except for the part protected by the resist pattern. As a result, each of the four corners on one side of the mold material after the dry etching has a shape in a plan view of one side 5.
0 µm, 5.0 µm line width, equilateral triangular frame, height 0.9
An alignment mark transfer portion consisting of a protrusion of μm was formed.

Thereafter, the above-mentioned resin layer was peeled off using a predetermined peeling liquid to obtain an intended first mold. The first mold has a shape in plan view of 20.0 × 10.0 mm.
The entire outer surface on the side where the alignment mark transfer portion is formed is a transfer molding surface.

The maximum surface roughness of the upper surface of each alignment mark transfer portion is 200 Å. The portion (peripheral portion) of the transfer molding surface excluding the portion where the alignment mark transfer portion is formed is substantially flat, and the surface has a maximum surface roughness of 500 angstroms.

(2) Preparation of Second Mold A glassy carbon block was cut and polished into a flat plate having a length of 20 mm, a width of 10 mm, a thickness of 3.0 mm, and a maximum surface roughness of 200 Å, and A second mold was obtained. In the second mold, one main surface functions as a transfer molding surface. By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.

(3) Preparation of Third Mold A block made of glassy carbon was cut and polished into a cylindrical body having a predetermined size to obtain an intended third mold. The third mold includes the first mold and the second mold.
Has an inner dimension enough to be inserted under a predetermined clearance, and in this mold, the inner surface functions as a transfer molding surface. By combining the above-described first and second molds with the above-described third mold, the upper mold (the first mold or the second mold) is combined.
Mold), lower mold (second mold or first mold)
Thus, a set of molding dies including three molding dies, ie, a body die (third molding die), can be obtained.

(4) Press molding A pair of molding dies is constituted by the first molding die and the second molding die, and 15.0 × 1 is used as a preform.
Press molding was performed in exactly the same manner as in Example 1 (4) except that 0.0 × 3.0 mm soda lime glass was used, and the shape in plan view was a 15.0 × 10.0 mm rectangle. A plate-shaped optical element fixing member was obtained.

Each of the four corners on one side of the optical element fixing member has a shape in plan view of 50 μm on a side and a line width of 5.0.
An alignment mark composed of a recess having a depth of 0.9 μm and a regular triangular frame of μm is formed, and the maximum surface roughness of the bottom surface of each alignment mark is 180 Å. The surface (excluding the alignment marks) of the optical element fixing member on the side where the periphery of these alignment marks is formed is substantially flat, and the surface has a maximum surface roughness of 450 angstroms. is there. Since the maximum surface roughness on the bottom surface of each alignment mark and the maximum surface roughness around these alignment marks were different, the alignment marks could be easily visually recognized.

Further, a set of forming dies is constituted by the first forming die, the second forming die and the third forming die.
Press molding was performed in the same manner as described above except that the molding die was used as the upper die, the second molding die was used as the lower die, and the third molding die was used as the body die. An optical element fixing member similar to that described above was obtained.

Example 4 (1) Production of First Mold by Method I First, a mold material made of a super hard material having the same composition as the super hard material used in Example 1 was prepared. This mold material is 20.0m long
m, 10.0 mm wide and 2.0 mm thick. Next, a flat surface was formed by cutting and removing one edge in the longitudinal direction on one surface of the mold material over a predetermined width and thickness (hereinafter, the polished surface after the polishing described below was performed on the flat surface was used). This is referred to as a “first transfer portion forming plane”.)
Further, both edges (excluding the plane serving as the first transfer portion forming plane) of the mold material in the short direction are cut and removed over a predetermined width and thickness, respectively. Plane surfaces are formed (hereinafter, the polished surfaces after these planes are polished later are collectively referred to as “second transfer portion forming planes”), and these planes are first subjected to cutting processing. The surface was polished together with the flat surface so that the maximum surface roughness was 100 Å. The first transfer portion forming plane and the second transfer portion forming plane are substantially located on one plane.

Next, the number of molding parts for the alignment mark transfer part is set to two, and the formation positions of these molding parts are two corners on the first transfer part formation plane (these corners are the two corners). It is located at one end in the longitudinal direction of the mold material after forming up to two transfer portion forming planes.) Except for being in the vicinity of each, the procedure is exactly the same as in Example 1 (1). Then, the mold material (after forming the two transfer portion forming planes) was dry-etched to form a molded portion for the alignment mark transfer portion on the mold material.

Next, a portion of the above mold material which is surrounded in plan view by the first transfer portion forming plane (after forming up to the above-mentioned molding portion) and the second transfer portion forming plane. (Hereinafter, this portion is referred to as a “V-groove convex portion forming region”.) By grinding, the V-groove convex portion forming region is provided with two convex portions having an isosceles triangular vertical cross section in the lateral direction. Formed.

The above-mentioned convex portion has a predetermined positional relationship with the forming portion for the above-mentioned alignment mark transfer portion, and one end in the longitudinal direction is connected to one end in the longitudinal direction of the mold material. It is formed to reach. Also,
These projections have a depth of 120 μm for fixing an optical fiber to the optical element fixing member when an optical element fixing member is obtained using the finally obtained first molding die. V
It is designed so that two grooves (meaning a groove having a V-shaped vertical cross section in the transverse direction; the same applies hereinafter) are formed (hereinafter, these protrusions are referred to as “V groove protrusions”). "). The periphery of these two V-groove projections is a plane, and the plane is located on substantially the same plane as the first transfer section formation plane and the second transfer section formation plane. .

By forming the molded portion for the alignment mark transfer portion and the convex portion for the V-groove in a mold material,
The target base material for the first molding die was obtained. After this,
In the same manner as in Example 1 (1), Au and Au were formed on the entire outer surface of the base material on which the molded portion for the alignment mark transfer portion and the convex portion for the V-groove were formed.
A release film of Pt, Pd and Rh having a thickness of 1500 angstroms was formed to obtain an intended first mold.

The first molding die thus obtained is formed on the entire outer surface of the base material and on the side of the base material on which the forming portion for the alignment mark transfer portion and the convex portion for the V-groove are formed. And the release film described above,
In the molding die described above, the surface of the release film is a transfer molding surface. In the transfer molding surface, (1) two alignment mark transfer portions formed by a molding portion for an alignment mark transfer portion and a portion of the release film covering the outer surface of the molding portion. Part and (2) V
Two V-groove transfer portions each including a groove convex portion and a portion of the release film that covers the outer surface of the V groove convex portion are formed.

The maximum surface roughness of the upper surface of each alignment mark transfer portion is 100 angstroms. In addition, a portion of the transfer molding surface excluding the formation portions of the alignment mark transfer portion and the V groove transfer portion is substantially flat, and the surface maximum roughness of the transfer molding surface around the alignment mark transfer portion is reduced. The height is 1000 angstroms.

(2) Preparation of Second Mold A second mold was obtained in exactly the same manner as in Example 1 (2). By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.

(3) Production of Third Mold A third mold was obtained in the same manner as in Example 1 (3). Also in the third mold, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface. By combining the above-described first and second molds with the above-described third mold, the upper mold (the first mold or the second mold) and the lower mold (the second mold) Mold or first mold) and barrel mold (third mold)
A set of molds consisting of two molds can be obtained.

(4) Press molding Press molding was carried out in exactly the same manner as in Example 1 (4) except that a pair of molding dies was constituted by the first molding die and the second molding die. Thus, an optical element fixing member having a rectangular shape in plan view was obtained.

As shown in FIG. 5, one side of the above-mentioned optical element fixing member 20 has alignment marks 21a and 21a near two corners at one end in the longitudinal direction.
An alignment mark 21b is formed, and these alignment marks 21a and 21b are formed by concave portions formed by an alignment mark transfer portion formed on the first mold. Further, on one surface of the optical element fixing member 20, two V-grooves 22a and 22b formed by a V-groove transfer portion formed in the first molding die are also formed. These V grooves 22a and 22b are for fixing an optical fiber to the optical element fixing member 20. The surface of the optical element fixing member 20 on the side where the alignment marks 21a and 21b and the V-grooves 22a and 22b are formed is aligned with the alignment marks 21a and 21b.
b and the V-grooves 22a and 22b are substantially flat except for the respective locations.

The alignment mark 21a and the V-groove 22a are connected to a predetermined optical element 23 (photodiode, laser diode, or the like having an alignment mark 23a; FIG.
Is fixed on the optical element fixing member 20 by using the alignment mark 23a formed on the optical element 23 and the alignment mark 21a formed on the optical element fixing member 20, and When the optical fiber is fixed to the V-groove 22a, the optical element 23 and the optical fiber are formed so as to be optically connected.

The alignment mark 21b and the V-groove 2
2b means that a predetermined optical element 24 (such as a photodiode or a laser diode; see FIG. 5) having an alignment mark 24a is aligned with the alignment mark 24a formed on the optical element 24 and an optical element fixing member. When the optical element 24 is fixed on the optical element fixing member 20 using the alignment mark 21b formed on the optical element 20 and the optical fiber is fixed in the V groove 22b, the optical element 24 and the optical fiber It is formed to connect.

The alignment marks 21a, 21a
Since the maximum surface roughness of the bottom surface of 1b is 80 angstroms and the maximum surface roughness around these alignment marks 21a and 21b is 800 angstroms, the above-described alignment marks 21a and 21b are respectively determined.
b could be easily recognized.

Further, a set of forming dies is constituted by the first forming die, the second forming die and the third forming die.
Press molding was performed in the same manner as described above except that the molding die was used as the upper die, the second molding die was used as the lower die, and the third molding die was used as the body die. An optical element fixing member similar to that described above was obtained.

Example 5 (1) Production of First Mold by Method I First, a mold material made of SiC was prepared. This mold material has a disk shape with a diameter of 50.0 mm and a thickness of 3.0 mm.
Next, a V-groove convex portion forming region is set at a predetermined location on one surface of the mold material, and a portion other than the V-groove convex portion forming region is cut and removed over a predetermined thickness to form a flat surface. This flat surface was polished so that the maximum surface roughness was 100 Å (hereinafter, the polished surface is referred to as “transfer portion forming flat surface”). The size of the V-groove convex portion forming region is the same as the V-groove convex portion forming region in Example 4 (1).

Next, a negative-type electron beam resist (ZEP7000, manufactured by Zeon Corporation) is applied to the transfer portion forming plane by a spin coating method, and a resin layer having a thickness of 1.5 μm is formed on one surface of the mold material. Was formed. Then, a cross shape of a predetermined size is drawn at a predetermined position (two places in total) of the resin layer by an electron beam (irradiation amount is 55 μC / cm ² ), and the resin layer after the electron beam drawing is applied to a predetermined developing solution. (ZEP500, manufactured by Zeon Corporation) for 90 seconds to develop.

By the above-described development, portions of the resin layer which were not subjected to the electron beam drawing were dissolved and removed, and resist patterns composed of the portions subjected to the electron beam drawing were formed at predetermined two places, respectively. Each resist pattern has a cross-sectional shape in plan view having a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm, and a film thickness of 1.5 μm.

After each resist pattern was post-baked at 200 ° C. for 30 minutes, one side of the mold material was dry-etched for 10 minutes using these resist patterns as a mask. This dry etching was performed using an induction discharge type reactive etching apparatus, and CF ₄ gas was used as an etching gas. The etching conditions are as follows:
The coil bias was 300 W, the substrate bias was 300 W, the flow rate of the etching gas (CF ₄ gas) was 30.0 sccm, and the pressure was 10.0 mTorr.

By the dry etching under the above conditions, each resist pattern was etched at an etching rate of 0.07 μm / min. The surface of the mold material on the side provided with the resist pattern was etched at an etching rate of 0.07 μm / min except for the part protected by the resist pattern. As a result, at predetermined locations (two locations in total) on one side of the mold material after the dry etching, the shape in plan view has a cross shape with a total length of 10 μm, an overall width of 10 μm, and a line width of 3.0 μm and a height of 0. Formed portions for an alignment mark transfer portion each having a convex portion of 0.7 μm were formed.

Thereafter, the V-groove convex portion forming region is ground in the same manner as in Example 4 (1) to form two V-groove convex portions. A base material for a mold was obtained. Then, Au, Pt, Pd and Au are formed on one surface of the base material (the surface on which the molded portion for the alignment mark transfer portion and the convex portion for the V-groove are formed) in the same manner as in Example 4 (1). A release film having a thickness of 1500 angstroms made of Rh was formed to obtain an intended first mold.

The first molding die thus obtained is, like the first molding die obtained in Example 4 (1), a base material and a molding part for the alignment mark transfer part in this base material. And the above-described release film formed on the entire outer surface on the side where the V-groove convex portion is formed. In the first mold, the surface of the release film is transferred. It is a molding surface. In the transfer molding surface, (1) two alignment mark transfer portions formed by a molding portion for the alignment mark transfer portion and a portion of the release film covering the outer surface of the molding portion. (2) Two V-groove transfer portions each including a V-groove protrusion and a portion of the release film covering the outer surface of the V-groove protrusion are formed.

The alignment mark transfer portions and the V groove transfer portions are formed in exactly the same positional relationship as in the first mold obtained in Example 4 (1). The maximum surface roughness on the upper surface is 100 Å. In addition, a portion of the transfer molding surface excluding the formation portions of the alignment mark transfer portion and the V groove transfer portion is substantially flat, and the surface maximum roughness of the transfer molding surface around the alignment mark transfer portion is reduced. The height is 1000 angstroms.

(2) Production of Second Mold A diameter of 50 mm made of SiC as a base material for the second mold.
A second mold was obtained in exactly the same manner as in Example 4 (2) except that a disk-shaped material having a thickness of 0 mm, a thickness of 3.0 mm and a maximum surface roughness of 100 Å was used. By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.

(3) Preparation of third mold [0124] Example 1 (3) except that a block made of SiC was used.
In the same manner as in the above, a third molding die was obtained. The third
Also in the molding die described above, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface. By combining the above-described first and second molds with the above-described third mold, the upper mold (the first mold or the second mold) and the lower mold (the second mold) It is possible to obtain a set of molding dies including three molding dies: a mold or a first molding die) and a body die (a third molding die).

(4) Press molding Press molding was carried out in exactly the same manner as in Example 4 (4) except that a pair of molding dies was constituted by the first molding die and the second molding die. An optical element fixing member having the same shape and size as the optical element fixing member obtained in Example 4 (4) was obtained. At the time of press molding, the preform was arranged such that an optical element fixing member having a desired shape was obtained.

In the optical element fixing member thus obtained, the maximum surface roughness at the bottom surface of each alignment mark is 80 Å and the maximum surface roughness around the alignment mark is 800 Å. Each of the alignment marks could be easily visually recognized.

Further, a set of forming dies is constituted by the first forming die, the second forming die and the third forming die.
Press molding was performed in the same manner as described above except that the molding die was used as the upper die, the second molding die was used as the lower die, and the third molding die was used as the body die. An optical element fixing member similar to that described above was obtained.

Example 6 (1) Production of First Mold by Method I First, exactly the same as in Example 2 (1) except that the shape and position of the alignment mark transfer portion in plan view were changed. In the same way, a mold was obtained. This mold has a shape in plan view having a total length of 10 μm, a total width of 10 μm, and a line width of 3.0.
A total of eight alignment mark transfer portions having an L-shape of μm are formed. Four of the eight alignment mark transfer portions are formed so as to overlap any one of the four corners of the first rectangle having a predetermined size, and the four alignment mark transfer portions are formed. The portions form a first alignment mark transfer portion group. The remaining four alignment mark transfer portions are the same size as the first rectangle, and are aligned in the width direction of the molding die at a predetermined interval from the first rectangle. The four alignment mark transfer portions form a second alignment mark transfer portion group.

The maximum surface roughness of the upper surface of each of the alignment mark transfer sections constituting the first and second alignment mark transfer section groups is 100 Å. In addition, a portion (peripheral portion) of the transfer molding surface of the above-described mold except for a portion where each of the alignment mark transfer portions is formed is substantially a flat surface. The roughness is 1000 angstroms. This mold is integrated with a mold described below to form a first mold, and is hereinafter referred to as a “first a mold”.

A flat plate made of a cemented carbide material having the same composition as that of the mold material of the molding die 1a and having a rectangular shape in plan view is used as the mold material. After both edges were cut and removed over a predetermined width and thickness, respectively, to form planes (two in total), these planes were polished so that the maximum surface roughness was 100 Å (hereinafter, referred to as “plane”). These surfaces after polishing are collectively referred to as “transfer portion forming planes”.)

Next, Example 1 (except that the number of molded portions for the alignment mark transfer portion was set to 2 and the forming positions of these formed portions were set at predetermined positions on the above-described transfer portion forming plane) The mold material (after forming up to the transfer portion forming plane) was dry-etched in exactly the same manner as in 1) to form a molding portion for the alignment mark transfer portion on the mold material.

Next, the portion of the mold material sandwiched between the two transfer portion forming planes in plan view is described in Example 4.
Grinding is performed in the same manner as in (1) to form two V-groove projections on the portion, thereby forming an intended molding die (hereinafter, referred to as a “first b molding die”). A base material was obtained. The V-groove convex portion has a predetermined positional relationship with the alignment mark transfer portion forming portion formed on the base material, and from one end in the longitudinal direction of the base material. It is formed so as to reach the other end.
These V-groove projections are used for fixing an optical fiber to the optical element fixing member when the optical element fixing member is obtained by using the finally obtained first molding die. Depth 1
It is designed so that two 20 μm V-grooves are formed.

Next, on the entire outer surface on the side where the molding portion for the alignment mark transfer portion and the convex portion for the V-groove are formed in the above-mentioned base material, Au is completely formed in the same manner as in Example 1 (1). , Pt, Pd, and Rh were formed into a release film having a thickness of 1500 angstroms to obtain a desired 1b molding die. An alignment mark transfer portion and a V groove transfer portion are formed in the transfer molding surface of the first die, and the maximum surface roughness of the upper surface of each alignment mark transfer portion is 100 angstroms. In addition, a portion of the transfer molding surface of the mold 1b other than the formation portions of the alignment mark transfer portion and the V groove transfer portion is substantially flat, and the periphery of the alignment mark transfer portion is formed. Has a maximum surface roughness of 1000 Å on the transfer molding surface.

Thereafter, the first mold and the first mold are integrated by a fixed frame such that the transfer molding surfaces formed on the respective molds face the same direction. Thus, an intended first molding die was obtained. In the first molding die, the transfer molding surface of the first molding die (excluding the alignment mark transfer portion).
Is the transfer molding surface of the mold 1b (excluding the alignment mark transfer portion and the V groove transfer portion).
And the alignment mark transfer portion formed on the first mold is located at one end side in the longitudinal direction of the first mold. The first mold has a rectangular shape in plan view.

(2) Preparation of second molding die A flat plate made of a carbide material containing WC and having a rectangular shape having a predetermined size in plan view is used for the second molding die. By using it as a base material, a second mold was obtained in exactly the same manner as in Example 1 (2). By combining the first mold described above and the second mold described above,
A side-free mold composed of these two molds can be obtained.

(3) Preparation of Third Mold A third mold was obtained in the same manner as in Example 1 (3). Also in the third mold, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface. By combining the above-described first and second molds with the above-described third mold, the upper mold (the first mold or the second mold) and the lower mold (the second mold) Mold or first mold) and barrel mold (third mold)
A set of molds consisting of two molds can be obtained.

(4) Press Molding The first molding die and the second molding die constitute a pair of molding dies, and are alkali-free glass having a rectangular shape of a predetermined size in plan view. Press molding was performed in exactly the same manner as in Example 1 (4) except that the plate was used as a preform, to obtain an optical element fixing member having a rectangular shape in plan view.

As shown in FIG. 6, the above-mentioned optical element fixing member 30 is formed of a pedestal 3 formed by the first die.
1 and an optical fiber engaging portion 32 formed by the first die. The pedestal portion 31 is one step lower than the optical fiber engaging portion. Four alignment marks 33 formed by concave portions formed by a first alignment mark transfer portion group formed on the first die are provided substantially at the center of the upper surface of the pedestal portion 31 in plan view.
a, 33b, 33c, and 33d, and four alignment marks 34 formed by concave portions formed by a second alignment mark transfer unit group formed in the first die.
a, 34b, 34c, 34d are formed, and the periphery of these alignment marks is substantially flat.

On the other hand, the first fiber
Two V-grooves 34a and 34b formed by the V-groove transfer portion formed in the molding die and two concave portions formed by the alignment mark transfer portion formed in the 1b molding die. Marks 35a, 35
b are formed. The V-grooves 34a and 34b are for fixing optical fibers, respectively, and the depth of each of the V-grooves 34a and 34b is 120 μm. The alignment marks 35a and 35b are provided on the optical element fixing member 3.
0 at one end in the longitudinal direction. Then, the V-grooves 34a and 34b and the alignment mark 3
Optical fiber engaging portion 3 on the side where 5a and 35b are formed
The surface 2 is substantially flat except for the V-grooves 34a and 34b and the alignment marks 35a and 35b.

The alignment marks 33a, 33b, 33
c, 33d (hereinafter, these alignment marks may be referred to as “first alignment mark group”) and V
The position of the groove 34a is determined by using the first alignment mark group to position an optical element 36 (photodiode, laser diode, or the like; see FIG. 6) having a rectangular shape having a predetermined size in plan view. When the optical element 36 is fixed on the optical element fixing member 30 and the optical fiber is fixed in the V-groove 34a, the optical element 36 and the optical fiber are formed so as to be optically connected.

The alignment marks 34a, 34
b, 34c, and 34d (hereinafter, these alignment marks may be referred to as “second alignment mark group”) and the V-groove 34b are optical elements each having a rectangular shape having a predetermined size in plan view. 37 (photodiode, laser diode, etc .; see FIG. 6) by using the second alignment mark group to fix the optical element 36 on the optical element fixing member 30, and to position the V groove 34b. When the optical fiber is fixed to the optical fiber 37, the optical element 37 and the optical fiber are optically connected.

Then, each of the alignment marks 33a, 33b, 33 constituting the first alignment mark group is set.
Each of the alignment marks 34a, 34b, 34c and 34 constituting the second alignment mark group has a maximum surface roughness of 80 angstrom on the bottom surfaces of c and 33d.
The maximum surface roughness of the bottom surface of d is also 80 angstroms, and the maximum surface roughness of the periphery of these alignment marks (the surface of the pedestal portion 31) is 80.
0 angstrom, the alignment marks 33a, 33b, 33c, 33d, 34a, 34
b, 34c, and 34d could be easily visually recognized. Similarly, the maximum surface roughness of the bottom surfaces of the alignment marks 35a and 35b is 80 Å, and the periphery of these alignment marks (however,
2 surface. ) Is 800 Å, the alignment marks 3
5a and 35b were also easily visible.

Further, a set of forming dies is constituted by the first forming die, the second forming die, and the third forming die.
Press molding was performed in the same manner as described above except that the molding die was used as the upper die, the second molding die was used as the lower die, and the third molding die was used as the body die. An optical element fixing member similar to that described above was obtained.

Example 7 (1) Production of First Mold by Method II First, 20.0 mm in length, 10.0 mm in width, and 3.0 m in thickness
m, a flat plate made of glassy carbon having a maximum surface roughness of 200 angstroms was used as a mold material, and the first material was applied to one surface of the mold material in exactly the same manner as in Example 4 (1).
And a second transfer portion forming plane were formed.

Next, the number of alignment mark transfer portions is set to 2
The alignment mark transfer portions are formed at two corners in the first transfer portion forming plane (these corners are formed by the two transfer portions). It is located at one end in the longitudinal direction of the mold material after forming up to the forming plane.) The mold material is exactly the same as in Example 3 (1) except that it is near each of them. (After the above-mentioned two transfer portion forming planes are formed),
An alignment mark transfer portion was formed on the mold material.

Further, the second transfer portion forming plane is ground in the same manner as in Example 4 (1), and the V-groove transfer portion having a short vertical cross-sectional shape formed of an isosceles triangle is used. Two sections were formed. By forming the above-described alignment mark transfer portion and the V groove transfer portion, an intended first molding die was obtained.

The first mold has a shape in plan view of 2
It is made of a flat glassy carbon having a rectangular shape of 0.0 × 10.0 mm, and the alignment mark transfer portion and the V
The entire outer surface on the side where the groove transfer portion is formed is a transfer molding surface. The V-groove transfer portion is arranged to have a predetermined positional relationship with the alignment mark transfer portion, and one end in the longitudinal direction is connected to one end in the longitudinal direction of the first mold. It is formed to reach. In addition, these V-groove transfer portions have two V-grooves having a depth of 120 μm for fixing an optical fiber to the optical element fixing member when the optical element fixing member is obtained using a molding die. Designed to be formed.

The maximum surface roughness of the upper surface of each alignment mark transfer portion is 100 Å. In addition, a portion of the transfer molding surface excluding the formation portions of the alignment mark transfer portion and the V groove transfer portion is substantially flat, and the surface maximum roughness of the transfer molding surface around the alignment mark transfer portion is reduced. The height is 1000 angstroms.

(2) Production of Second Mold A second mold was obtained in the same manner as in Example 3 (2). By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.

(3) Production of Third Mold A third mold was obtained in the same manner as in Example 3 (3). In the third mold, the inner surface functions as a transfer molding surface. By combining the above-described first and second molds with the above-described third mold, the upper mold (the first mold or the second mold) and the lower mold (the second mold) Mold or first mold) and barrel mold (third mold).
) Can be obtained.

(4) Press molding Press molding was performed in the same manner as in Example 3 (4) except that a pair of molding dies was constituted by the first molding die and the second molding die. An optical element fixing member having substantially the same shape as the optical element fixing member obtained in Example 4 (4) was obtained. In the optical element fixing member thus obtained, the maximum surface roughness at the bottom surface of each alignment mark is 80 Å, and the maximum surface roughness around these alignment marks is 800 Å. Each of the alignment marks was easily visually recognized.

Further, a set of forming dies is constituted by the first forming die, the second forming die and the third forming die.
Press molding was performed in the same manner as described above except that the molding die was used as the upper die, the second molding die was used as the lower die, and the third molding die was used as the body die. An optical element fixing member similar to that described above was obtained.

[0153]

As described above, by using the molding die of the present invention, an optical element fixing member having an alignment mark at a desired position can be obtained by press molding. Therefore, according to the present invention, optical connection between optical elements to be fixed or mounted, or optical connection between optical elements between optical element fixing members after fixing or mounting the optical element is performed in a short time. A large number of optical element fixing members that can
In addition, it can be provided at low cost.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view schematically showing a process of forming a molding portion for an alignment mark transfer portion on a mold material for a first molding die in Example 1, and FIG. 1 (a) is dry etching. 1B is a cross-sectional view schematically showing a mold material after forming a resist film to be a material of a resist pattern for use, FIG. 1B is a cross-sectional view schematically showing the mold material after forming a resist pattern, and FIG. () Is a cross-sectional view schematically showing a mold material after forming a molding portion for an alignment mark transfer portion.

FIG. 2A is a schematic view of a first molding die base material manufactured in Example 1 when viewed from a side where a molding portion for an alignment mark transfer portion is formed in the base material. FIG. 2B is a cross-sectional view schematically illustrating the base material.

FIG. 3A is a plan view schematically illustrating the first molding die manufactured in Example 1 when viewed from the side where the alignment mark transfer portion is formed in the first molding die. FIG. 2B is a cross-sectional view schematically showing the first mold.

FIG. 4 is a plan view schematically illustrating the optical element fixing member manufactured in Example 1 when viewed from the side on which the alignment mark is formed in the optical element fixing member.

FIG. 5 is a plan view schematically showing the optical element fixing member manufactured in Example 4 when viewed from the side where the alignment mark is formed in the optical element fixing member.

FIG. 6 is a perspective view schematically showing an optical element fixing member manufactured in Example 6.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Mold material, 5 ... Base material, 6 ... Molding part for alignment mark transfer part, 7 ... Release film, 8 ... Alignment mark transfer part, 10a ... Transfer molding surface, 10 ... First molding die, 15, 20, 30: Optical element fixing member, 1
6, 21a, 21b, 33a, 33b, 33c, 33
d, 34a, 34b, 34c, 34d, 35a, 35b
…Alignment mark.

Claims (12)

[Claims] 1. A molding die having a transfer molding surface of a predetermined shape and used for press molding a molding material into an optical element fixing member, comprising: a press molding having an alignment mark in the transfer molding surface. A mold having an alignment mark transfer portion for obtaining a product. 2. A base material comprising a base material and a release film formed on the surface of the base material, wherein the base material is (1) a carbide material containing WC, or (2) TiN, TiC or Al ₂
The mold according to claim 1, comprising a cermet containing O ₃ , wherein the surface of the release film is a transfer molding surface. 3. A molded part for an alignment mark transfer part is formed on the base material itself, and the alignment mark transfer part is formed by the molded part and a release film covering the surface of the molded part. The mold according to claim 2, which is provided. 4. The mold according to claim 1, wherein the mold is made of SiC or glassy carbon. 5. The mold according to claim 1, wherein the alignment mark transfer portion comprises a projection. 6. The mold according to claim 1, wherein the surface roughness of the alignment mark transfer portion is different from the surface roughness of a transfer molding surface around the alignment mark transfer portion. 7. An optical element fixing member having an alignment mark for manufacturing a molding die having a transfer molding surface of a predetermined shape and used for press-molding a molding material into an optical element fixing member is obtained. The molding material for the alignment mark transfer portion is formed by dry etching on the mold material of the molding die so that an alignment mark transfer portion for the molding is formed in the transfer molding surface of the molding die. In such a manner as to cover the molded part, and the release film is formed so that the surface of the release film is the transfer molding surface, and covers the molded part and the surface of the molded part. A method for manufacturing a molding die, comprising: obtaining a molding die having an alignment mark transfer portion composed of a release film formed thereon and a surface of the release film serving as a transfer molding surface. 8. The molding part for the alignment mark transfer part is formed such that the surface roughness of the alignment mark transfer part is different from the surface roughness of the transfer molding surface around the alignment mark transfer part. The method according to claim 7. 9. An optical element fixing member having an alignment mark for producing a molding die having a transfer molding surface of a predetermined shape and used for press-molding a molding material into an optical element fixing member is obtained. Forming the alignment mark transfer portion by dry etching on a mold material of the mold so that an alignment mark transfer portion for the mold is located within a transfer molding surface of the mold. Manufacturing method. 10. The alignment mark transfer unit according to claim 9, wherein the alignment mark transfer unit is formed such that the surface roughness of the alignment mark transfer unit is different from the surface roughness of a transfer molding surface around the alignment mark transfer unit. The described method. 11. A press-molded product in which an alignment mark for determining a positional relationship with another member is integrally formed, wherein a surface roughness of the alignment mark is different from a surface roughness of a periphery of the alignment mark. A member for fixing an optical element. 12. The optical element fixing member according to claim 11, wherein the member is made of glass.