JPH10312585A5 - - Google Patents
Info
- Publication number
- JPH10312585A5 JPH10312585A5 JP1997120963A JP12096397A JPH10312585A5 JP H10312585 A5 JPH10312585 A5 JP H10312585A5 JP 1997120963 A JP1997120963 A JP 1997120963A JP 12096397 A JP12096397 A JP 12096397A JP H10312585 A5 JPH10312585 A5 JP H10312585A5
- Authority
- JP
- Japan
- Prior art keywords
- concave
- convex pattern
- stamper
- optical recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
【0002】
【従来の技術】
光学記録媒体、例えばROM(Read Only Memory) 型の光ディスク、あるいは相変化記録層を有する書き換え可能型の光ディスク等においては、所要のフォーマットによるピットもしくは(および)グルーブ、すなわち微細凹凸パターンが形成される。
この微細凹凸パターンの形成は、この微細凹凸パターンの反転パターンによる凹凸パターンが形成されたスタンパを用いて射出成形することによって光ディスクの成型と同時に微細凹凸パターンを形成するとか、あるいは2P法(フォトポリマリゼーション:Photopolymerization 法) によって、すなわち基板上に紫外線硬化樹脂を塗布し、これに上述のスタンパを押圧して微細凹凸パターンを転写形成し紫外線照射するという方法が採られる。[0002]
2. Description of the Related Art
In optical recording media, such as ROM (Read Only Memory) type optical disks or rewritable optical disks having a phase change recording layer, pits and/or grooves, i.e., fine concave-convex patterns, are formed in a required format.
This fine uneven pattern can be formed by injection molding using a stamper on which an uneven pattern that is the reverse of the fine uneven pattern is formed, thereby forming the fine uneven pattern at the same time as molding the optical disk, or by using the 2P method (photopolymerization method), in which an ultraviolet-curable resin is applied to a substrate, the above-mentioned stamper is pressed against it to transfer and form the fine uneven pattern, and then ultraviolet light is irradiated.
【0009】
本発明においては、前述した記録波長351nmにおける記録スポット径の85%以下程度の長さの、0.40μm未満のきわめて短いピットを含む微細凹凸パターンを有する光学記録媒体においても、ピット幅のばらつきの改善をはかることができるようにし、またRF信号の劣化を改善することができるようにする。[0009]
In the present invention, it is possible to improve the variation in pit width and also to improve the degradation of RF signals even in optical recording media having a fine uneven pattern including extremely short pits of less than 0.40 μm , which are approximately 85% or less of the recording spot diameter at the aforementioned recording wavelength of 351 nm.
【0010】
また、本発明においては、微細凹凸パターンが、上述した85%以下程度の長さの、0.40μm未満のきわめて短いピットを含むことのない、例えばグルーブのみによる微細凹凸パターンである場合においても、そのグルーブ幅を、上述の記録露光のスポット径に比して充分小さくする場合において有益な光学記録媒体作製用スタンパ、スタンパ用原盤、および光学記録媒体の製造方法を提供するものである。[0010]
Furthermore, the present invention provides a stamper for producing an optical recording medium, a master disk for the stamper, and a method for producing an optical recording medium that are useful even when the fine uneven pattern is, for example, a fine uneven pattern consisting only of grooves, and does not include extremely short pits less than 0.40 μm, having a length of approximately 85% or less as described above, provided that the groove width is made sufficiently smaller than the spot diameter of the recording exposure described above.
【0014】
また、本発明による光学記録媒体の製造方法においては、上述した各本発明による、すなわち凹凸パターンの凹凸表面に沿って薄膜を堆積して縮小凹凸パターンを形成する工程を経て得たスタンパによってフォトポリマー法もしくは射出成形法によって光学記録媒体を得る。[0014]
Furthermore, in the method for manufacturing an optical recording medium according to the present invention, an optical recording medium is obtained by a photopolymer method or an injection molding method using a stamper obtained through the process according to each of the above-described present inventions, i.e., the process of depositing a thin film along the concave-convex surface of the concave-convex pattern to form a reduced concave-convex pattern.
【0015】
上述の本発明方法によれば、光学記録媒体を得るためのスタンパを形成する原盤もしくはマザー盤における凹凸パターンに薄膜の成膜を行うことによって縮小凹凸パターンを形成するようにしたことから、原盤形成の露光記録においては、その幅を大に形成することができる。つまり、例えばピット長が、記録波長351nmにおける露光スポット径の85%未満に相当する0.40μm未満のピット長を含むフォーマットによる光学記録媒体を得る場合においても、その原盤形成の露光記録における凹凸パターンの幅を大に形成することができることから、その露光強度を充分大きくすることができ、図23で説明したように、凹凸パターンの幅のばらつきを改善できる。また、露光強度を充分大きくすることができることから、いわゆる“きれ”のよいパターンとして形成することがでる。したがって、最終的に得る光学記録媒体における微細凹凸パターンは、その幅のばらつきが改善され、さらにパターンのいわゆる“きれ”がよい微細凹凸パターンとして形成されることからRF特性の改善が図られる。[0015]
According to the above-described method of the present invention, a reduced concave-convex pattern is formed by depositing a thin film on the concave-convex pattern of a master or mother disk that forms a stamper for obtaining an optical recording medium. This allows the width of the concave-convex pattern to be increased during exposure recording for master formation. That is, even when obtaining an optical recording medium using a format that includes a pit length of less than 0.40 μm, which corresponds to less than 85% of the exposure spot diameter at a recording wavelength of 351 nm , the width of the concave-convex pattern can be increased during exposure recording for master formation. This allows the exposure intensity to be sufficiently increased, thereby improving the width variation of the concave-convex pattern, as explained in FIG. 23 . Furthermore, since the exposure intensity can be sufficiently increased, a so-called "clear" pattern can be formed. Therefore, the fine concave-convex pattern in the final optical recording medium has reduced width variation and is formed as a so-called "clear" fine concave-convex pattern, thereby improving RF characteristics.
【0020】
また、本発明による光学記録媒体の製造方法においては、上述した各本発明による、すなわち凹凸パターンの凹凸表面に沿って薄膜を堆積して縮小凹凸パターンを形成する工程を経て得たスタンパによってフォトポリマー法もしくは射出成形法によって光学記録媒体を得る。[0020]
Furthermore, in the method for manufacturing an optical recording medium according to the present invention, an optical recording medium is obtained by a photopolymer method or an injection molding method using a stamper obtained through the process according to each of the above-described present inventions, i.e., the process of depositing a thin film along the concave-convex surface of the concave-convex pattern to form a reduced concave-convex pattern.
【0029】
このようにして得たスタンパ9を、図示しないが、射出成形用金型内に配置して、ポリカーボネート等の樹脂の注入を行って、スタンパ9の凹凸パターン24が転写された微細凹凸パターン34が形成された目的とする光学記録媒体10例えば光ディスクを得る。[0029]
The stamper 9 obtained in this manner is placed in an injection molding die (not shown), and a resin such as polycarbonate is injected into it to obtain the desired optical recording medium 10, such as an optical disk, on which a fine concave-convex pattern 34 is formed by transferring the concave-convex pattern 24 of the stamper 9.
【0039】
このようにして得たスタンパ70を、図示しないが、射出成形用金型内に配置して、ポリカーボネート等の樹脂の注入を行って、スタンパ70の凹凸パターン74が転写された目的とする微細凹凸パターン34が形成された光学記録媒体10例えば光ディスクを得る。[0039]
The stamper 70 obtained in this manner is placed in an injection molding die (not shown), and a resin such as polycarbonate is injected into it to obtain an optical recording medium 10, such as an optical disk, on which the desired fine concave-convex pattern 34 is formed by transferring the concave-convex pattern 74 of the stamper 70.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096397A JPH10312585A (en) | 1997-05-12 | 1997-05-12 | Stamper for producing optical recording medium, master for stamper, and method for producing optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096397A JPH10312585A (en) | 1997-05-12 | 1997-05-12 | Stamper for producing optical recording medium, master for stamper, and method for producing optical recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10312585A JPH10312585A (en) | 1998-11-24 |
| JPH10312585A5 true JPH10312585A5 (en) | 2004-11-25 |
Family
ID=14799345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12096397A Pending JPH10312585A (en) | 1997-05-12 | 1997-05-12 | Stamper for producing optical recording medium, master for stamper, and method for producing optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10312585A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005004839A (en) * | 2003-06-10 | 2005-01-06 | Hitachi Maxell Ltd | Substrate molding stamper, substrate molding glass master, optical recording medium resin substrate, optical recording medium, and substrate molding stamper manufacturing method. |
| JP4646705B2 (en) * | 2005-06-03 | 2011-03-09 | アルプス電気株式会社 | Mold manufacturing method and molded product manufacturing method |
| US8343362B2 (en) | 2008-12-22 | 2013-01-01 | Kabushiki Kaisha Toshiba | Stamper manufacturing method |
| JP4575497B2 (en) | 2009-01-23 | 2010-11-04 | 株式会社東芝 | Stamper manufacturing method |
-
1997
- 1997-05-12 JP JP12096397A patent/JPH10312585A/en active Pending
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