JPH10316667A - Photosensitive compound and photosensitive resin - Google Patents

Photosensitive compound and photosensitive resin

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Publication number
JPH10316667A
JPH10316667A JP9121926A JP12192697A JPH10316667A JP H10316667 A JPH10316667 A JP H10316667A JP 9121926 A JP9121926 A JP 9121926A JP 12192697 A JP12192697 A JP 12192697A JP H10316667 A JPH10316667 A JP H10316667A
Authority
JP
Japan
Prior art keywords
compound
acid
group
photosensitive
embedded image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9121926A
Other languages
Japanese (ja)
Other versions
JP4093501B2 (en
Inventor
Toru Shibuya
徹 渋谷
Kenei Shiya
建栄 謝
Tetsuaki Tochisawa
哲明 栃澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Gosei Co Ltd
Original Assignee
Toyo Gosei Co Ltd
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Filing date
Publication date
Application filed by Toyo Gosei Co Ltd filed Critical Toyo Gosei Co Ltd
Priority to JP12192697A priority Critical patent/JP4093501B2/en
Publication of JPH10316667A publication Critical patent/JPH10316667A/en
Application granted granted Critical
Publication of JP4093501B2 publication Critical patent/JP4093501B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Thiazole And Isothizaole Compounds (AREA)
  • Plural Heterocyclic Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a new compound being a photosensitive compound usable for cathode-ray tubes, screen printing, other display tubes, immobilized enzymes, PS plates, etching resist, etc. SOLUTION: This compound is such one expressed by formula I [R is a <=6C alkyl or -(CH2 )m - formed by joining of 2 of the Rs into one group (m) is 2 or 3}; (n) is 1-3; Rx is a group expressed by formula II or III (X is a water- soluble group; Y is H, NO2 , OCH3 Cl or Br), etc.], e.g. 3-(2-dimethoxybutyl) rhodanine. The compound of formula I is obtained by, e.g. condensation reaction between a rhodanine compound, having an acetal group, expressed by formula IV, and a water-soluble benzaldehyde expressed buy formula V, etc., an allylaldehyde derivative or an aldehyde compound having a heterocycle. The rhodanine compound having an acetal group is obtained by reacting an acetal compound having an amino group with carbon disulfide in the presence of a base to produce a dithiocarbamate, followed by reaction of the dithiocarbamate with ethyl chloroacetate.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、新規な感光性化合
物及び感光性樹脂に関し、特に、例えば、ブラウン管
用、スクリーン印刷用、その他表示管用、固定化酵素
用、PS板用、エッチングレジスト用などの用途で使用
可能な感光性化合物及び感光性樹脂に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel photosensitive compound and photosensitive resin, and more particularly, for example, for cathode ray tubes, screen printing, other display tubes, immobilized enzymes, PS plates, etching resists, and the like. The present invention relates to a photosensitive compound and a photosensitive resin that can be used in the above-mentioned applications.

【0002】[0002]

【従来の技術】従来より、感光性ユニットとして、未変
性ポリビニルアルコールにスチリルピリジウム塩化合物
又はスチリルキノリウム塩化合物などの第4級アンモニ
ウム塩を縮合反応させた感光性樹脂を含有するもの(P
VA−SbQ系レジストという)が知られている(特公
昭56−5761号公報、特公昭56−5762号公
報、特開昭56−11906号公報)。
2. Description of the Related Art Conventionally, a photosensitive unit containing a photosensitive resin obtained by subjecting unmodified polyvinyl alcohol to a condensation reaction with a quaternary ammonium salt such as a styrylpyridium salt compound or a styrylquinolium salt compound (P)
VA-SbQ-based resists) are known (JP-B-56-5761, JP-B-56-5762, and JP-A-56-11906).

【0003】[0003]

【発明が解決しようとする課題】かかるPVA−SbQ
系レジストは、感光速度が速い等の利点を有している
が、イオン的にはカチオン性のものに限定されてしまう
ので、用途及び組成物の制限が出てくる。また、露光光
源として、水銀灯(365nm)の他、メタルハライド
(400nm)の光源を用いるため、感光波長を長波長
に設定するには、4−メチルキノリン等を使用する必要
があり、コスト高になるという欠点がある。
SUMMARY OF THE INVENTION Such PVA-SbQ
The system resist has advantages such as a high photosensitivity, but is limited to cationic ones in terms of ionicity, which limits the application and composition. In addition, since a metal halide (400 nm) light source besides a mercury lamp (365 nm) is used as an exposure light source, it is necessary to use 4-methylquinoline or the like in order to set the photosensitive wavelength to a long wavelength, which increases costs. There is a disadvantage that.

【0004】従って、例えば、ブラウン管用、スクリー
ン印刷用、その他表示管用などの用途においては、40
0nmという長波長で感光性が良好で、水系溶媒に溶解
乃至分散できるものが要望されている。また、特に、蛍
光体パターン形成用途としては、バインダポリマーとし
てポリビニルアルコール(PVA)が優れているので、
PVA系レジストで、PVA−SbQ系レジストより感
光波長が長く、且つイオン性についても用途によりカチ
オン、アニオン、ノニオンの使い分けが可能な感光性樹
脂が要望されている。
[0004] Therefore, for example, for cathode ray tubes, screen printing, and other uses for display tubes, 40
There is a demand for a material having good photosensitivity at a long wavelength of 0 nm and which can be dissolved or dispersed in an aqueous solvent. In particular, polyvinyl alcohol (PVA) is excellent as a binder polymer for use in forming a phosphor pattern.
There is a demand for a PVA-based resist having a longer photosensitive wavelength than that of a PVA-SbQ-based resist, and also being able to use cations, anions, and nonions depending on the application in terms of ionicity.

【0005】本発明はこのような事情に鑑み、新規な感
光性樹脂を調製可能な感光性化合物及びこれを用いた感
光性樹脂を提供することを課題とする。
In view of such circumstances, an object of the present invention is to provide a photosensitive compound capable of preparing a novel photosensitive resin and a photosensitive resin using the same.

【0006】[0006]

【課題を解決するための手段】前記課題を解決する本発
明の感光性化合物は、下記一般式で示されることを特徴
とする感光性化合物にある。
Means for Solving the Problems A photosensitive compound according to the present invention for solving the above-mentioned problems is a photosensitive compound represented by the following general formula.

【0007】[0007]

【化7】 Embedded image

【0008】ここで、RはC6までのアルキル基,およ
び二つのRが一緒になって形成する−(CH2)m−(m
は2または3)から選択される。また、nは1,2又は
3である。さらに、Rxは下記Rx1〜Rx9から選択
され、Rx1〜Rx9中のXは水溶性基、Yは、H,N
O2,OCH3,Cl,およびBrから選択され、Ryは
アルキル基、Y-は、燐酸,メタンスルホン酸,モノメ
チル硫酸,塩素,臭素,蓚酸,p−トルエンスルホン酸
等の陰イオンである。
Here, R is an alkyl group up to C6 and-(CH 2 ) m- (m
Is selected from 2 or 3). N is 1, 2 or 3. Further, Rx is selected from the following Rx1 to Rx9, X in Rx1 to Rx9 is a water-soluble group, and Y is H, N
Ry is an alkyl group, Y - is an anion such as phosphoric acid, methanesulfonic acid, monomethylsulfuric acid, chlorine, bromine, oxalic acid, p-toluenesulfonic acid, etc., selected from O 2 , OCH 3 , Cl, and Br.

【0009】[0009]

【化8】 Embedded image

【0010】ここで、Xは、例えば、下記X1〜X13か
ら選択される。
Here, X is selected, for example, from the following X1 to X13.

【0011】[0011]

【化9】 Embedded image

【0012】ここで、Qは、リチウム、ナトリウム、カ
リウム、アンモニウム、モノアルキルアンモニウム、ジ
アルキルアンモニウム、トリアルキルアンモニウム、又
はテトラアルキルアンモニウムを表し、Y-は、燐酸,
メタンスルホン酸,モノメチル硫酸,塩素,臭素,蓚
酸,p−トルエンスルホン酸等の陰イオンである。
[0012] Here, Q is represents lithium, sodium, potassium, ammonium, monoalkyl ammonium, dialkyl ammonium, trialkylammonium, or tetraalkylammonium, Y - is phosphate,
Anions such as methanesulfonic acid, monomethylsulfuric acid, chlorine, bromine, oxalic acid and p-toluenesulfonic acid.

【0013】また、本発明の感光性樹脂は、下記一般式
で示される構成単位を有することを特徴とする。
Further, the photosensitive resin of the present invention is characterized by having a structural unit represented by the following general formula.

【0014】[0014]

【化10】 Embedded image

【0015】ここで、nは1,2又は3である。また、
Rxは上記Rx1〜Rx9から選択される。さらに、R
x1〜Rx9中のXは水溶性基、Yは、H,NO2,O
CH3,Cr,及びBrから選択され、Ryはアルキル
基、Y-は、燐酸,メタンスルホン酸,モノメチル硫
酸,塩素,臭素,蓚酸,p−トルエンスルホン酸等の陰
イオンである。
Here, n is 1, 2 or 3. Also,
Rx is selected from the above Rx1 to Rx9. Further, R
X in x1 to Rx9 is a water-soluble group, and Y is H, NO 2 , O
CH 3 , Cr, and Br are selected, Ry is an alkyl group, and Y − is an anion such as phosphoric acid, methanesulfonic acid, monomethyl sulfate, chlorine, bromine, oxalic acid, and p-toluenesulfonic acid.

【0016】ここで、Xは、例えば、上記X1〜X13か
ら選択される。
Here, X is selected, for example, from the above X1 to X13.

【0017】また、本発明の感光性組成物は、上記感光
性樹脂を含有することを特徴とする。
Further, the photosensitive composition of the present invention is characterized by containing the above-mentioned photosensitive resin.

【0018】本発明者らは上述した課題を解決すべく鋭
意研究を重ねた結果、アセタール基を有するロダニン化
合物と、水溶性アルデヒド又は複素環を有するアルデヒ
ドとを縮合することにより、新規なロダニン骨格を有す
る、長波長で感光可能な新規化合物を開発し、本発明を
完成したものである。
The present inventors have conducted intensive studies to solve the above-mentioned problems, and as a result, a novel rhodanine skeleton was obtained by condensing a rhodanine compound having an acetal group with a water-soluble aldehyde or an aldehyde having a heterocyclic ring. The present invention has been completed by developing a novel compound capable of performing long-wavelength photosensitization.

【0019】なお、ロダニン骨格を有する感光性樹脂と
しては、米国特許第2,828,087号に開示された
ものがある。しかしながら、この感光性樹脂は、感光基
そのものが疎水性で、水溶性ではなく、ポリマーのカル
ボキシル基によりアルカリ水可溶性となっているもので
あり、本発明とは全く相違する。
The photosensitive resin having a rhodanine skeleton is disclosed in US Pat. No. 2,828,087. However, this photosensitive resin is completely different from the present invention because the photosensitive group itself is hydrophobic and not water-soluble, but is soluble in alkali water by a carboxyl group of the polymer.

【0020】本発明に係る上記一般式(I)で表される
化合物は、基本的に水溶性で、光二量化タイプの感光性
を有し、且つPVAにアセタール化することにより容易
に感光性樹脂を調製できるものである。
The compound represented by the above general formula (I) according to the present invention is basically water-soluble, has photodimerization type photosensitivity, and can be easily converted into a photosensitive resin by acetalization into PVA. Can be prepared.

【0021】本発明に係る上記一般式(I)で表される
化合物は、アセタール基を有するロダニン化合物と、水
溶性のベンズアルデヒドもしくはアリルアルデヒド誘導
体又は複素環を有するアルデヒド化合物とを縮合するこ
とにより得ることができる。
The compound represented by the above general formula (I) according to the present invention is obtained by condensing a rhodanine compound having an acetal group with a water-soluble benzaldehyde or allylaldehyde derivative or an aldehyde compound having a heterocyclic ring. be able to.

【0022】ここで、アセタール基を有するロダニン化
合物は、下記式で示される。
Here, the rhodanine compound having an acetal group is represented by the following formula.

【0023】[0023]

【化11】 Embedded image

【0024】かかるアセタール基を有するロダニン化合
物は、例えば、アミノ基を有するアセタール化合物を、
アンモニア、トリエチルアミン、NaOH、KOH等の
塩基存在下で二硫化炭素とさせて、ジチオカルバミン酸
塩を合成し、続いて、クロル酢酸エチルと反応させるこ
とにより得ることができる。この場合の反応溶媒は、使
用するアミン化合物により、水、エーテル、DMF等を
選択して使用することができるが、これに限定されるも
のではない。
The rhodanine compound having an acetal group is, for example, an acetal compound having an amino group,
It can be obtained by synthesizing dithiocarbamate with carbon disulfide in the presence of a base such as ammonia, triethylamine, NaOH, or KOH, followed by reaction with ethyl chloroacetate. In this case, the reaction solvent can be selected from water, ether, DMF and the like depending on the amine compound used, but is not limited thereto.

【0025】また、このアセタール基を有するロダニン
化合物と縮合可能なベンズアルデヒドアルデヒドもしく
はアリルアルデヒド誘導体としては下記式(1)及び
(2)で示される。さらに、複素環を有するアルデヒド
化合物としては、下記式(3)〜(9)で示される。な
お、これらの化合物は、本発明の感光性化合物に水溶性
を付与するものであるので、水溶性を有するものであ
る。
The benzaldehyde aldehyde or allyl aldehyde derivative condensable with the rhodanin compound having an acetal group is represented by the following formulas (1) and (2). Further, the aldehyde compound having a heterocyclic ring is represented by the following formulas (3) to (9). These compounds impart water solubility to the photosensitive compound of the present invention, and therefore have water solubility.

【0026】[0026]

【化12】 Embedded image

【0027】[0027]

【化13】 Embedded image

【0028】ここで、式(1)及び(2)において、X
及びYは上述した通りである。
Here, in equations (1) and (2), X
And Y are as described above.

【0029】本発明の上記式(I)に示される感光性化
合物は、ポリ酢酸ビニルけん化物、又はビニルアルコー
ルと他のビニル化合物との水溶性共重合体に、酸触媒下
で反応させることにより、本発明の上記式(II)で示され
る感光性樹脂とすることができる。
The photosensitive compound represented by the above formula (I) of the present invention can be reacted with a saponified polyvinyl acetate or a water-soluble copolymer of vinyl alcohol and another vinyl compound in the presence of an acid catalyst. And the photosensitive resin represented by the above formula (II) of the present invention.

【0030】ここで用いられるポリ酢酸ビニルけん化物
としては、例えば、平均重合度200〜5000、けん
化度60〜100%のものが好適である。また、このポ
リ酢酸ビニルけん化物としては、例えば、親水基変性、
アニオン変性、カチオン変性、又はアセトアセチル基の
ような反応基変性などの変性酢酸ビニルけん化物を用い
ることができる。
As the saponified polyvinyl acetate used herein, for example, those having an average degree of polymerization of 200 to 5000 and a degree of saponification of 60 to 100% are preferable. As the saponified polyvinyl acetate, for example, hydrophilic group modification,
A modified vinyl acetate saponified by anionic modification, cationic modification, or modification of a reactive group such as an acetoacetyl group can be used.

【0031】ここで、平均重合度が200より小さい場
合には、十分な感度が得られ難く、また、平均重合度が
5000より大きい場合には、感光性樹脂の溶液の粘度
が高くなり、塗布性が悪くなるという不具合が発生し易
く、さらに、粘度を下げるために濃度を低くすると、所
望の塗布膜厚を得るのが困難となる。また、けん化度が
60%より低いと十分な水溶性及び水現像性が得られ難
い。
If the average degree of polymerization is less than 200, it is difficult to obtain a sufficient sensitivity. If the average degree of polymerization is more than 5,000, the viscosity of the photosensitive resin solution increases, and In addition, when the concentration is lowered to lower the viscosity, it becomes difficult to obtain a desired coating film thickness. On the other hand, if the saponification degree is lower than 60%, it is difficult to obtain sufficient water solubility and water developability.

【0032】一方、ビニルアルコールと他のビニル化合
物との共重合体としては、例えば、平均重合度200〜
5000のものが使用できる。なお、ビニルアルコール
と共重合され得るビニルモノマーとしては、例えば、N
−ビニルピロリドン、アクリルアミド等を挙げることが
できる。
On the other hand, as a copolymer of vinyl alcohol and another vinyl compound, for example, an average degree of polymerization of 200 to 200
5000 can be used. In addition, as a vinyl monomer copolymerizable with vinyl alcohol, for example, N
-Vinylpyrrolidone, acrylamide and the like.

【0033】このようなポリ酢酸ビニルけん化物類と、
上記式(I)で示される感光性化合物とを酸触媒存在下
で反応させて、上記式(II)で示される感光性樹脂を得る
場合、例えば、ホルムアルデヒド、アセトアルデヒド、
プロピオンアルデヒド、ブチルアルデヒド、ベンズアル
デヒド等のアルデヒド類又はこれらのアセタール類を同
時に反応させることもできる。
Such saponified polyvinyl acetates,
When the photosensitive compound represented by the above formula (I) is reacted with the photosensitive compound represented by the above formula (I) in the presence of an acid catalyst to obtain a photosensitive resin represented by the above formula (II), for example, formaldehyde, acetaldehyde,
Aldehydes such as propionaldehyde, butyraldehyde, and benzaldehyde, or their acetals can be reacted simultaneously.

【0034】ポリ酢酸ビニルけん化物類に対する一般式
(I)の感光性化合物の導入率は、モノマー単位当た
り、0.3〜5モル%程度が好ましい。
The introduction ratio of the photosensitive compound of the general formula (I) to the saponified polyvinyl acetate is preferably about 0.3 to 5 mol% per monomer unit.

【0035】[0035]

【発明の実施の形態】以下、本発明を各実施例に基づい
て詳細に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on embodiments.

【0036】(実施例1)[3−(2−ジメトキシブチ
ル)ロダニンの調製] アミノブチルアルデヒドジメチルアセタール67g、ト
リエチルアミン51gをジエチルエーテル300gに溶
解し、10℃に冷却した。。撹拌下に二硫化炭素38g
を60分かけて滴下し、その後、20℃で24時間反応
した。次に、ブロモ酢酸エチル84gを15分で滴下
し、室温下で48時間反応した。トリエチルアミン・臭
化水素酸塩を濾別で除き、エバポレータによりジエチル
エーテルを除き、下記式で示される目的物を含む油状液
を得た。
Example 1 Preparation of 3- (2-dimethoxybutyl) rhodanine 67 g of aminobutyraldehyde dimethyl acetal and 51 g of triethylamine were dissolved in 300 g of diethyl ether and cooled to 10 ° C. . 38 g of carbon disulfide under stirring
Was added dropwise over 60 minutes, and then reacted at 20 ° C. for 24 hours. Next, 84 g of ethyl bromoacetate was added dropwise over 15 minutes and reacted at room temperature for 48 hours. Triethylamine / hydrobromide was removed by filtration, and diethyl ether was removed by an evaporator to obtain an oily liquid containing the target compound represented by the following formula.

【0037】[0037]

【化14】 Embedded image

【0038】(実施例2)[3−(2−ジメトキシブチ
ル)−(4−ピリジリデン)ロダニンの合成例] 4−ピリジンアルデヒド54g、水酸化ナトリウム2g
を水100g、メタノール100gに溶解した溶液を1
0℃に冷却し、これを実施例1の油状物にゆっくりと加
えた。反応に従い目的物が析出してくるが、そのまま撹
拌を続け、5時間反応した。濾別し、水洗、乾燥し、下
記式に示される目的物を得た。
(Example 2) [Synthesis example of 3- (2-dimethoxybutyl)-(4-pyridylidene) rhodanine] 54 g of 4-pyridinealdehyde, 2 g of sodium hydroxide
Was dissolved in 100 g of water and 100 g of methanol.
Cooled to 0 ° C. and added slowly to the oil of Example 1. Although the target product was precipitated according to the reaction, stirring was continued as it was, and the reaction was performed for 5 hours. It was separated by filtration, washed with water and dried to obtain the target product represented by the following formula.

【0039】液体クロマトグラフィー純度は98%であ
った。また、吸収極大は、370nmであった。
The purity of the liquid chromatography was 98%. Further, the absorption maximum was 370 nm.

【0040】[0040]

【化15】 Embedded image

【0041】さらに、この化合物を160gとメタノー
ル200gに、ジメチル硫酸65gを加え、50℃で5
時間反応することにより、四級化した。冷却後アセトン
を加えて下記式で示される目的物を析出させ、濾別し
た。吸収極大は、384nmであった。
Further, 65 g of dimethyl sulfate was added to 160 g of this compound and 200 g of methanol.
It was quaternized by reacting for hours. After cooling, acetone was added to precipitate the desired product represented by the following formula, which was separated by filtration. The absorption maximum was 384 nm.

【0042】[0042]

【化16】 Embedded image

【0043】(実施例3)[感光性PVAの合成] ポリビニルアルコール(GH−24、日本合成製)10
0gを水900gに溶解した。実施例2の化合物を17
g、燐酸3gを加え、60℃で24時間反応した。燐酸
をイオン交換処理により除去し、感光基がPVAに1.
6モル%導入された感光液を調製した。
(Example 3) [Synthesis of photosensitive PVA] Polyvinyl alcohol (GH-24, manufactured by Nippon Gosei) 10
0 g was dissolved in 900 g of water. Compound of Example 2 was converted to 17
g and 3 g of phosphoric acid were added and reacted at 60 ° C. for 24 hours. The phosphoric acid is removed by ion exchange treatment, and the photosensitive group is added to PVA.
A photosensitive solution into which 6 mol% was introduced was prepared.

【0044】(試験例1)実施例3の感光液を5%に希
釈し、ガラス板に膜厚1.0μm塗布し、超高圧水銀等
(紫外線照度5mW/cm2:UV−35(オーク製照
度計))にて、10mJ露光した。次いで、水現像する
ことによりパターンが形成することを確認した。
(Test Example 1) The photosensitive solution of Example 3 was diluted to 5%, coated on a glass plate with a film thickness of 1.0 μm, and applied with ultra-high pressure mercury or the like (ultraviolet illuminance 5 mW / cm 2 : UV-35 (manufactured by Oak (Illuminometer)). Next, it was confirmed that a pattern was formed by developing with water.

【0045】(実施例4)[3−(2−ジメトキシブチ
ル)−(ベンジリデン−4−カルボン酸Na)ロダニン
の合成例] テレフタルアルデヒド酸Na75g、水酸化ナトリウム
30gを水2000gに溶解した水溶液を10℃に冷却
し、これを、実施例2の化合物(化15に示す)160
gにゆっくりと加えた。反応するに従い目的物が析出し
てくるが、そのまま撹拌を続け、24時間反応した。N
aClを50g添加し、更に5時間撹拌し、濾別し、ア
セトンにて洗浄した。
Example 4 [Synthesis Example of 3- (2-dimethoxybutyl)-(benzylidene-4-carboxylate) rhodanine] An aqueous solution prepared by dissolving 75 g of terephthalaldehyde acid and 30 g of sodium hydroxide in 2000 g of water was prepared. C. and cooled with the compound of Example 2 (shown in Chemical Formula 15) 160
g. Although the target product was precipitated as the reaction proceeded, stirring was continued as it was, and the reaction was carried out for 24 hours. N
50 g of aCl was added, and the mixture was further stirred for 5 hours, filtered and washed with acetone.

【0046】下記式で示される生成物は、液体クロマト
グラフィー純度95%であった。また、吸収極大は、3
83nmであった。
The product represented by the following formula had a purity by liquid chromatography of 95%. The absorption maximum is 3
83 nm.

【0047】[0047]

【化17】 Embedded image

【0048】(実施例5)[感光性PVAの合成] ポリビニルアルコール(GH−24、日本合成製)10
0gを水900gに溶解した。実施例4の化合物を19
g、燐酸3gを加え、60℃で24時間反応した。燐酸
をイオン交換処理により除去し、感光基がPVAに2.
0モル%導入された感光液を調製した。
(Example 5) [Synthesis of photosensitive PVA] Polyvinyl alcohol (GH-24, manufactured by Nippon Gosei) 10
0 g was dissolved in 900 g of water. Compound of Example 4 was converted to 19
g and 3 g of phosphoric acid were added and reacted at 60 ° C. for 24 hours. Phosphoric acid is removed by ion exchange treatment, and the photosensitive group is added to PVA.
A photosensitive solution in which 0 mol% was introduced was prepared.

【0049】(試験例2)実施例5の感光液を5%に希
釈し、ガラス板に膜厚1.0μm塗布し、超高圧水銀等
(紫外線照度5mW/cm2:UV−35(オーク製照
度計))にて、20mJ露光した。水現像により、パタ
ーンが形成することを確認した。
(Test Example 2) The photosensitive solution of Example 5 was diluted to 5%, coated on a glass plate to a thickness of 1.0 μm, and applied with ultra-high pressure mercury or the like (ultraviolet illuminance 5 mW / cm 2 : UV-35 (manufactured by Oak) 20 mJ). It was confirmed that a pattern was formed by water development.

【0050】[0050]

【発明の効果】以上説明したように、本発明によれば、
アセタール基を有するロダニン化合物と、水溶性アルデ
ヒド又は複素環を有するアルデヒドとを縮合することに
より、新規なロダニン骨格を有する、長波長で感光可能
な新規化合物を提供することができる。
As described above, according to the present invention,
By condensing a rhodanine compound having an acetal group with a water-soluble aldehyde or an aldehyde having a heterocyclic ring, it is possible to provide a novel compound having a novel rhodanine skeleton and capable of being exposed to light at a long wavelength.

フロントページの続き (51)Int.Cl.6 識別記号 FI C09B 57/00 C09B 57/00 Z G03F 7/038 G03F 7/038 Continued on the front page (51) Int.Cl. 6 Identification code FI C09B 57/00 C09B 57/00 Z G03F 7/038 G03F 7/038

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 下記一般式で示されることを特徴とする
感光性化合物。 【化1】 ここで、RはC6までのアルキル基,および二つのRが
一緒になって形成する−(CH2)m−(mは2または
3)から選択される。また、nは1,2又は3である。
さらに、Rxは下記Rx1〜Rx9から選択され、Rx
1〜Rx9中のXは水溶性基、Yは、H,NO2,OC
H3,Cl,およびBrから選択され、Ryはアルキル
基、Y-は、燐酸,メタンスルホン酸,モノメチル硫
酸,塩素,臭素,蓚酸,p−トルエンスルホン酸等の陰
イオンである。 【化2】
1. A photosensitive compound represented by the following general formula: Embedded image Here, R represents an alkyl group of up to C6, and two R form together - (CH 2) m - ( m is 2 or 3) is selected from. N is 1, 2 or 3.
Further, Rx is selected from the following Rx1 to Rx9,
X in 1 to Rx9 is a water-soluble group, Y is H, NO 2 , OC
H 3, Cl, and are selected from Br, Ry is an alkyl radical, Y - is phosphate, methanesulfonic acid, monomethyl sulfate, chlorine, bromine, oxalic acid, anions such p- toluenesulfonic acid. Embedded image
【請求項2】 請求項1において、Xが下記X1〜X13
から選択されることを特徴とする感光性化合物。 【化3】 ここで、Qは、リチウム、ナトリウム、カリウム、アン
モニウム、モノアルキルアンモニウム、ジアルキルアン
モニウム、トリアルキルアンモニウム、又はテトラアル
キルアンモニウムを表し、Y-は、燐酸,メタンスルホ
ン酸,モノメチル硫酸,塩素,臭素,蓚酸,p−トルエ
ンスルホン酸等の陰イオンである。
2. The method according to claim 1, wherein X is X1 to X13 below.
A photosensitive compound selected from the group consisting of: Embedded image Here, Q represents lithium, sodium, potassium, ammonium, monoalkylammonium, dialkylammonium, trialkylammonium, or tetraalkylammonium, and Y − represents phosphoric acid, methanesulfonic acid, monomethylsulfuric acid, chlorine, bromine, oxalic acid. , P-toluenesulfonic acid and the like.
【請求項3】 下記一般式で示される構成単位を有する
ことを特徴とする感光性樹脂。 【化4】 ここで、nは1,2又は3である。また、Rxは下記R
x1〜Rx9から選択される。さらに、Rx1〜Rx9
中のXは水溶性基、Yは、H,NO2,OCH3,Cr,
及びBrから選択され、Ryはアルキル基、Y-は、燐
酸,メタンスルホン酸,モノメチル硫酸,塩素,臭素,
蓚酸,p−トルエンスルホン酸等の陰イオンである。 【化5】
3. A photosensitive resin having a structural unit represented by the following general formula. Embedded image Here, n is 1, 2 or 3. Rx is the following R
x1 to Rx9. Further, Rx1 to Rx9
X represents a water-soluble group, and Y represents H, NO 2 , OCH 3 , Cr,
Ry is an alkyl group, Y - is phosphoric acid, methanesulfonic acid, monomethyl sulfate, chlorine, bromine,
Anions such as oxalic acid and p-toluenesulfonic acid. Embedded image
【請求項4】 請求項3において、Xが下記X1〜X13
から選択されることを特徴とする感光性化合物。 【化6】 ここで、Qは、リチウム、ナトリウム、カリウム、アン
モニウム、モノアルキルアンモニウム、ジアルキルアン
モニウム、トリアルキルアンモニウム、又はテトラアル
キルアンモニウムを表し、Y-は、燐酸,メタンスルホ
ン酸,モノメチル硫酸,塩素,臭素,蓚酸,p−トルエ
ンスルホン酸等の陰イオンである。
4. The method according to claim 3, wherein X is the following X1 to X13.
A photosensitive compound selected from the group consisting of: Embedded image Here, Q represents lithium, sodium, potassium, ammonium, monoalkylammonium, dialkylammonium, trialkylammonium, or tetraalkylammonium, and Y − represents phosphoric acid, methanesulfonic acid, monomethylsulfuric acid, chlorine, bromine, oxalic acid. , P-toluenesulfonic acid and the like.
【請求項5】 請求項3又は4の感光性樹脂を含有する
ことを特徴とする感光性組成物。
5. A photosensitive composition comprising the photosensitive resin according to claim 3 or 4.
JP12192697A 1997-05-13 1997-05-13 Photosensitive compound and photosensitive resin Expired - Fee Related JP4093501B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028382A1 (en) * 1997-05-13 2000-05-18 Toyo Gosei Kogyo Co., Ltd. Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028382A1 (en) * 1997-05-13 2000-05-18 Toyo Gosei Kogyo Co., Ltd. Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions

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