JPH10319043A - Probe device - Google Patents

Abstract

An object of the present invention is to provide a probe device capable of adjusting and suppressing displacement of a contact pin when tightening a bolt. A probe device according to the present invention includes a head having a contact probe brought into contact with a terminal;
And a base 23 to which the head 22 is attached. In the probe device 20, a hole 44 having an oblong cross section is formed in the base 23, and a rotatable eccentric pin 43 penetrating through the mounting portion 27 and inserted into the hole 44 is provided.
Are offset so that one or two points on the outer peripheral surface of the eccentric pin 43 contact the inner peripheral surface of the hole.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device (probe card) which is used as a probe pin or the like and performs an electrical test by contacting each terminal of a semiconductor IC chip or a liquid crystal device.

[0002]

2. Description of the Related Art Conventionally, a probe device has been known as a device for performing an electrical test by contacting a semiconductor chip such as an IC chip or an LSI chip or each terminal of an LCD (liquid crystal display). Regarding such a probe device, for example, in Japanese Patent Publication No. 7-82027, a plurality of pattern wirings are formed on a resin film, and the tips of these pattern wirings are arranged so as to protrude from the resin film. The technology of a contact probe used as a contact pin has been proposed. According to this technical example, the multi-pin narrow pitch can be achieved, and many complicated components are not required.

[0003] As shown in FIG.
Reference numeral 0 denotes a head 2 having a contact pin 1a connected to a contact probe 1 which is a flexible substrate, and a frame-shaped base 3 to which the head 2 is fixed. The tip of the contact pin 1a protruding from the head 2 comes into contact with a terminal (not shown) of the LCD (liquid crystal display) 4.

When a probe test is performed on the LCD 4 using the conventional probe device 10, for example, the probe device 10 is mounted on a prober and electrically connected to a tester, and a predetermined electric signal is transmitted from the contact pin 1a. Thereby, the electrical characteristics of the LCD 4 are measured.

[0005]

By the way, in recent years, IC
Along with high integration and miniaturization of chips and the like, narrow pitches of terminals (contact pads) are required. for that reason,
For example, for a terminal having a side of several tens μm,
In the case of contacting the contact pin a, it is necessary to adjust the position of the contact pin 1a with high accuracy.

However, in the conventional probe device 10, as shown in FIG. 9, since the head 2 is mounted and fixed to the base 3 via the bolt 5, the contact pin 1a is tightened when the bolt 5 is tightened. The position may be slightly shifted.

The screw hole into which the bolt 5 is screwed is often formed at an angle deviated from a design angle due to a processing error. When the bolt 5 is tightened due to the effect of the processing error, the contact pin 1a may be displaced. Further, it is practically difficult to completely machine the screw hole at the designed angle.

As described above, the conventional probe device 10 has a disadvantage that the position of the contact pin 1a is displaced by the fastening of the bolt 5, and it is difficult to perform high-precision positioning with respect to the narrow-pitch terminals. Was.

Since the surface of each terminal is oxidized and covered with a thin oxide film, the contact pins 1a are peeled off at the time of testing in order to secure conductivity by removing the oxide film.
Is applied while contacting the surface of the terminal (the contact pin 1a contacts the terminal and then is further lowered). At this time, contact pin 1
If a deviates from the proper position, and if the overdrive amount is large, the contact pin 1a moves further and separates from the terminal, and the probe test may not be performed properly.

Further, in the conventional probe device 10, the top clamp 1 forming the contact probe holding body 9 is formed.
1 and the inclined plate 12 are detachably attached to the bottom plate 15 via bolts 14. However, the bolt 14 is screwed from the lower surface of the bottom plate 15, so that the detaching work cannot be performed unless the head 2 is removed, and the bolt 5 must be removed to remove the entire head 2. Therefore, the operation is troublesome, and there is also a disadvantage that the contact pin 1a may accidentally come into contact with the LCD 4 and be damaged during the operation.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a probe device that can adjust the position of a contact pin and can easily attach and detach a contact probe.

[0012]

According to a first aspect of the present invention, there is provided a probe comprising a head having a contact probe to be brought into contact with a terminal, and a base to which the head is attached. An apparatus, wherein a hole having an elliptical cross section is formed in the base, a rotatable eccentric pin that penetrates the head and is inserted into the hole is provided, and a center of the eccentric pin is offset. One or two points on the outer peripheral surface of the eccentric pin are configured to contact the inner peripheral surface of the oblong hole, and the head moves without tilting by rotating the eccentric pin.

In the present invention, when adjusting the position of the head, the eccentric pin is rotated using a wrench or the like. The eccentric pin rotates while sliding one or two points on the outer periphery against the inner peripheral surface of the hole, and the head moves without tilting with the rotation. As described above, by finely adjusting the position of the head, the contact pins can be brought into contact with the terminals having a narrow pitch with high accuracy.

According to a second aspect of the present invention, in the probe device according to the first aspect, a mounting portion for mounting the contact probe holding body to the base, and a bolt passing through the contact probe holding body and the mounting portion. And a concave portion provided on a surface from which the bolt projects, and a nut screwed to the bolt and arranged in the concave portion.

In the present invention, for example, when the bolt insertion hole is drilled slightly inclined due to a processing error,
The inserted bolt enters with an inclination. Then, when the tip of the bolt is screwed into the nut, the nut comes into close contact with the bottom surface of the groove, and the bolt is fixed at a substantially predetermined angle. Therefore, the displacement of the position of the contact probe holding body that occurs when the bolt is tightened is suppressed.

According to a third aspect of the present invention, in the probe device according to the first aspect, the head includes a clamp for holding the contact probe, and a bolt for fixing the clamp to the apparatus main body. It is characterized in that it is configured to be screwed from above the device main body.

In the present invention, since the bolt is screwed from the upper surface of the clamp, the bolt can be loosened or tightened from above the probe device. Therefore, the operation of attaching and detaching the contact probe is easy, and a situation in which the contact pin erroneously contacts the inspected product and is damaged is prevented.

[0018]

Next, an embodiment of a probe device according to the present invention will be described in detail with reference to the drawings. FIG.
As schematically shown in FIG.
A head 22 having a contact probe 21 to be brought into contact with a terminal, and a base 23 to which the head 22 is fixed.
And As shown in FIG. 2, the head 22 includes a contact probe holding body 29 for holding the contact probe 21 and a
3 (FIG. 1).

The contact probe 21 is manufactured in a predetermined shape for an LCD by photolithography and plating, and has a plurality of contact pins 21a. The contact probe 21 has a flexible substrate 41.
Are connected to each other.

The contact probe holding body 29 comprises a top clamp 31, an inclined plate 32, and a bottom plate 35. Top clamp 31 has three downward projections 4
The contact probe 21 is attached to the inclined plate 32 by bolts 28 with the projection 42 holding the contact probe 21 from above. Further, the inclined plate 32 is fixed obliquely to the bottom plate 35 via bolts 34.

As shown in FIG. 1, the mounting portion 27 is formed in an L-shape when viewed from the side. A bottom plate 35 is mounted on a lower surface 27a, which is a horizontal surface, via a bolt 26. The base 23 is fixed to a rail 23a mounted on an end face of the base 23. Also, the rail 23a
A base mounting portion 38 protrudes horizontally from an upper portion of a surface on the base 23 side from the upper portion, and the base mounting portion 38 is attached to an upper portion of an inner edge of the base 23 via a bolt 39. Since the bolt 39 is screwed in from above, the probe device 20 can be easily removed and attached, and the work is easy.
A situation in which the LCD 1a is damaged by contact with the LCD 4 is prevented.

Next, the head 2 in the probe device 20
The configuration and operation of the means for performing position adjustment 2 will be described. This adjustment can be performed by the eccentric pin 43. As shown in FIGS. 1 and 3, the eccentric pin 43 is a cylindrical body having a relatively large diameter, penetrates the mounting portion 27 from the outside, and is inserted into a hole 44 having an oval cross section provided on the rail 23 a. ing. Insertion part 4 which is a part to be inserted into hole 44
3a has a circular cross section.

The center of the eccentric pin 43 is offset from the center of the insertion portion 43a by the amount of movement, and one or two points on the outer peripheral surface of the insertion portion 43a come into contact with the inner peripheral surface of the hole 44. I have. The head 43b of the eccentric pin 43 is provided with a hexagonal hole 43c for fitting a wrench.

A method for adjusting the position of the contact probe holding body 29 using the eccentric pin 43 will be described with reference to FIG. FIG. 4A shows a state where the eccentric pin 43 is at the standard position, and the center p1 of the eccentric pin 43 is offset, for example, downward from the center p2 of the insertion portion 43a. In this state, the center p1 of the eccentric pin 43 coincides with the reference line (a vertical line passing through the center p2 of the hole 44) c.

As shown in FIG. 4B, when the eccentric pin 43 is rotated counterclockwise by 90 ° using a wrench, one or two points on the outer periphery of the insertion portion 43 a are brought into contact with the inner peripheral surface of the hole 44. The eccentric pin 43 rotates while sliding, and the rotation center p1 of the eccentric pin 43 moves rightward from the reference line c. That is, the head 22 (FIG. 1)
Moves to the right. Similarly, when the eccentric pin 43 is rotated clockwise, the head 22 (FIG. 1) moves to the left. That is, since the movement of the head 22 is based only on the displacement of the contact point between the insertion portion 43a and the hole 44, the head 22 moves without tilting.

As described above, the position of the contact pin 21a is finely adjusted by rotating the eccentric pin 43 shown in FIG. Can be contacted.

Further, according to the present invention, it is possible to suppress a positional shift that occurs when the mounting portion 27 of the contact probe shown in FIG. 1 is fixed to the rail 23a with the bolt 25. Hereinafter, the configuration and operation of this means will be described.

FIG. 5 shows the surface of the rail 23a on the side in close contact with the base 23, and the fixing bolt 2 shown in FIG.
5, 25, a nut 51, 51 screwed to the tip of the bolt 25, 25, and a groove (recess) 52 in which the nut 51, 51 is arranged.

The nuts 51, 51 are formed in a rectangular plate shape in plan view. The groove 52 is formed in a size that can accommodate the nuts 51, 51, and the bottom surface thereof is finished with high precision so as to be a vertical flat surface. Note that no screw portion is formed inside the insertion hole 53 (FIG. 1) through which the bolts 25, 25 pass.

The function of the means for suppressing the displacement of the head 22 having the above configuration will be specifically described with reference to FIG. As shown in FIG. 6A, when the insertion hole 53 is slightly inclined from the horizontal due to a processing error, the bolt 25 also enters while being inclined. Since no thread is formed on the inner peripheral surface of the insertion hole 53, the bolt 25 enters without being screwed. When the tip of the bolt 25 is screwed into the nut 51, the nut 51 slightly moves in the groove 52, but as the bolt 25 is tightened, the nut 5
1 is fixed to the bottom surface of the groove 52 so that the bolt 25 is substantially horizontal.

That is, the bolt 25 is directly connected to the rail 23a.
By screwing to the nut 51 without screwing to
Even when the insertion hole 53 is inclined, the bolt 25 is oriented in a substantially horizontal direction due to the regulation of the bottom surface of the groove 52 that has been machined with high precision. Therefore, the influence of the tightening of the bolt 25 is minimized, and the mounting portion 27 of the contact probe is
The displacement between the position shown in FIG. 1 and the rail 23a is suppressed.

Further, in this probe device 20, FIG.
The contact probe 21 can be easily removed together with the top clamp 31 and the inclined plate 32 as shown in FIG. That is, the bolt 34 for fixing the inclined plate 32 is
Is screwed in from above, so that the bolt 34 can be loosened or tightened from above the probe device 20. Therefore, as compared with the case where the fixing bolt 14 is attached to the lower side as in the conventional example (see FIG. 9), the attachment / detachment work is easier, and the contact pin 2 is attached to the LCD 4.
A situation in which 1a is erroneously contacted and damaged is prevented.

[0033]

As described above, according to the probe device of the first aspect, by rotating the eccentric pin, the position of the contact probe can be finely adjusted without tilting the head. The contact pins can be arranged with high precision with respect to the terminals having the narrow pin pitch.

According to the probe device of the second aspect, the bolt to be screwed in is regulated by the nut so as to have a substantially predetermined angle, so that the displacement of the contact probe holding body caused when the bolt is tightened is suppressed, Contact pins can be arranged with high accuracy.

According to the probe device of the third aspect, since the bolt can be loosened or tightened from above the probe device, the operation is easy, and the contact pin is erroneously contacted with the inspected product. A situation that may cause damage is prevented.

[Brief description of the drawings]

FIG. 1 is a partial cross-sectional view showing a configuration of a probe device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a configuration of a head.

FIG. 3 is a front view showing a configuration of an eccentric pin.

FIG. 4 is a diagram illustrating position adjustment using an eccentric pin.

FIG. 5 is a diagram of a surface of a rail that is in close contact with a base.

FIG. 6 is a cross-sectional view illustrating an operation of suppressing a positional shift by a combination of a nut and a groove.

FIG. 7 is a side view of the probe device showing a state where a contact probe holding body is removed.

FIG. 8 is a perspective view schematically showing a conventional probe device.

FIG. 9 is a partial cross-sectional view showing a configuration of a conventional probe device.

[Explanation of symbols]

 1,21 contact probe 1a, 21a contact pin 2,22 head 3,23 base 4 LCD 5,6,14,25,26,28,34 bolt 7,27 mounting part 9,29 contact probe holding body 10,20 probe Apparatus 11, 31 Top clamp 12, 32 Inclined plate 15, 35 Bottom plate 43 Eccentric pin 44 Hole 43a Insertion part 51 Nut 52 Groove

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Mitsuyoshi Ueki Inventor, No.12, Techno Park, Mita-shi, Hyogo Sanritsu Materials Co., Ltd.Mita Plant (72) Inventor Hideaki Yoshida Six Mitsubishi Materials Corporation Mita Plant

Claims (3)

[Claims] 1. A probe device (20) comprising a head (22) having a contact probe (21) brought into contact with a terminal and a base (23) to which the head is attached, wherein the base has an elliptical cross section. A rotatable eccentric pin (43) penetrating the head and being inserted into the hole is provided; a rotation center (p1) of the eccentric pin is offset; A probe device configured such that one or two points on the outer peripheral surface of the pin are in contact with the inner peripheral surface of the oblong hole, and the head moves without tilting by rotating the eccentric pin. . 2. The probe device according to claim 1, wherein a mounting portion (27) for mounting a contact probe holding body (29) to the base, and a bolt (25) inserted through the contact probe holding body and the mounting portion. ), A concave portion (52) provided on a surface from which the bolt projects, and a nut (5) screwed to the bolt and arranged in the concave portion.
The probe device according to claim 1, comprising: (1) and (2). 3. The probe device according to claim 1, wherein the head includes a clamp (31) for holding the contact probe, and a bolt (34) for fixing the clamp to the probe device body. Is configured to be screwed from above the probe device main body.