JPH10321094A - Vacuum valve - Google Patents

Abstract

(57) [Problem] To provide a vacuum valve capable of simplifying a temporary assembly operation and reducing a manufacturing cost. SOLUTION: At both ends of the insulating container, a sealing member also serving as an end plate is brazed via a foil-like silver brazing material 14.
The sealing member has a peripheral side portion formed by bending the peripheral edge of the end plate portion substantially vertically. The silver brazing material 14 is provided at four positions in the circumferential direction of the annular portion with claw portions 14 for fitting to the inner surface of the peripheral side portion of the sealing member.
a is provided. The claw portion 14a is attached to the lower surface in the middle of the width of the ring-shaped portion, and is rectangular. In the circumferential direction of the annular portion, claw portions 14b for fitting with the inner surface of the insulating container are provided at four positions between the claw portions 14a. The claw portion 14b is obliquely attached to the inner peripheral edge of the ring-shaped portion on the upper surface side with its tip slightly outward, and is also rectangular. Further, a hemispherical projection 14c is provided on the outer surface of the claw portion 14b.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum valve and, more particularly, to simplification of positioning when assembling the same.

[0002]

2. Description of the Related Art FIG. 12 is a schematic sectional view showing a conventional vacuum valve disclosed in Japanese Patent Publication No. 56-34975. In FIG. 1, reference numeral 1 denotes a cylindrical insulating container made of, for example, alumina ceramic. At both ends of the insulating container 1, circular end plates 3 and 4 are provided via coaxial sealing members 22, respectively. Brazed using silver brazing material. A fixed electrode rod 6 having an electrode 8 at the tip is attached to the center of the inner surface of one end plate 4, and a movable electrode rod having an electrode 7 at the tip of the other end plate 3 is opened at the center. 5 is mounted here via a bellows 11. Therefore, the movable electrode rod 5 and the electrode 7 can move in the axial direction while maintaining airtightness. Slightly inside the periphery of the inner surface of the end plate 3, a substantially cylindrical arc shield 9 having a length surrounding the electrodes 7 and 8 and reaching the middle of the fixed electrode rod 6, and having a slightly smaller diameter at the tip end side. Is attached. A cylindrical arc shield 10 having a diameter slightly larger than that of the arc shield 9 and covering up to the tip of the arc shield 9 is provided slightly inside the peripheral edge of the inner surface of the end plate 4.
Is attached.

Next, a method for manufacturing this vacuum valve will be described. First, partial assembly is performed. That is, the electrode 8, the fixed electrode rod 6, the end plate 4, the arc shield 10, and the sealing member 22 are brazed in a non-oxidizing atmosphere to assemble the fixed-side subassembly. The fixed-side subassembly is assembled by brazing the electrode 7, the movable electrode rod 5, the bellows 11, the end plate 3, the arc shield 9, and the sealing member 22 in a non-oxidizing atmosphere. Then, a brazing material is sandwiched between these two subassemblies and the insulating container 1, placed in a vacuum furnace, and baked in the furnace at a high temperature of 400 to 600 ° C to sufficiently perform degassing. Then, the brazing material is melted by heating to the brazing temperature and hermetically sealed. The positioning of the two subassemblies, the insulating container and the brazing material sandwiched between them is performed by the insulating container 1
This is performed by fitting a brazing material to the step provided on the end face of the sub-assembly, and fitting the sealing member 22 of the sub-assembly to the step.

[0004]

Conventionally, assembling of a vacuum valve has been performed as described above. However, in order to position a brazing material to be sandwiched when assembling the two subassemblies and the insulating container 1, an insulating material is used. It is necessary to provide a radial step in the container 1 with a dimensional tolerance of less than ± 0.5 mm, which increases the cost of the insulating container 1. If there is no part that can be positioned between the subassembly and the insulating container 1 and the brazing material sandwiched therebetween, positioning is performed, and equipment and jigs and tools for maintaining the position are attached to the outer periphery of these parts. Need to be kept. Therefore, there is a problem that the tentative assembling operation is complicated, and the space occupied by the tentatively assembled product in the vacuum furnace is large, which causes an increase in manufacturing cost.

The present invention has been made in view of the above circumstances, and provides a vacuum valve capable of simplifying a temporary assembly operation and reducing a manufacturing cost by adding a nail portion to a brazing material. The purpose is to:

[0006]

According to the first aspect of the present invention,
The annular brazing material interposed between the insulating container and each end plate,
At least three first claws provided at the same diameter position with respect to the ring shaft for fitting the end plate, and at least three first claw portions provided at the same diameter position with respect to the ring shaft for fitting the insulating container. And a second claw portion.

According to a second aspect of the present invention, in the first aspect, the second claw has a projection on a contact surface with the insulating container.
The angle between the claw portion and the insulating container is elastically variable.

According to a third aspect of the present invention, in the first aspect, the second claw has a bent portion protruding toward the side of contact with the insulating container, and the angle between the second claw and the insulating container is elastic. It is characterized by being variable.

According to a fourth aspect of the present invention, in the first aspect, at least three second claws are provided at different positions in the ring radial direction.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to the drawings showing the embodiments. Embodiment 1 FIG. FIG. 1 is a schematic sectional view showing a vacuum valve according to the present invention. In the drawing, reference numeral 1 denotes a cylindrical insulating container made of, for example, alumina ceramic. A sealing member 2 serving as an end plate is brazed to both ends of the insulating container 1 via a foil-like silver brazing material 14. I have. In the sealing member 2, a peripheral side portion 2a is formed by bending the peripheral edge of the end plate portion substantially vertically. As a material of the sealing member 2, an Fe—Ni—Co alloy or a Fe—Ni alloy having a thermal expansion coefficient close to that of the alumina ceramic of the insulating container 1.
An alloy or a Cu—Ni alloy whose residual stress is reduced by plastic deformation due to a large difference in thermal expansion coefficient is used.

At the center of the inner surface of one of the sealing members 2, a fixed electrode rod 6 provided with an electrode 8 at the tip is attached, and the outer peripheral portion of the end plate portion has an arc shield 10 slightly longer than the peripheral side portion 2a.
Is attached. The other sealing member 2 has an opening at the center, and a movable electrode rod 5 having an electrode 7 at the tip is attached thereto via a bellows 11. Therefore, the movable electrode rod 5 and the electrode 7 can move in the axial direction while maintaining airtightness. An arc shield 9 having a length covering the moving area of the electrode 8 and the electrode 7 is attached in the middle of the inner surface of the insulating container 1.

FIG. 2 is an exploded sectional view of FIG. Electrode 8,
A fixed-side subassembly 12 in which the fixed electrode rod 6 and one sealing member 2 are assembled, an electrode 7, a fixed electrode rod 5, and a bellows
The movable side subassembly 13 in which 11 and the other sealing member 2 are assembled is shown separately from the silver brazing material 14. These two subassemblies 12, 13 are brazed in a non-oxidizing atmosphere. The silver brazing material 14 is used when these are finally assembled in a hermetically sealed manner.

FIG. 3 is an enlarged perspective view showing the silver brazing material 14. The silver brazing material 14 has claws at predetermined positions on a ring-shaped foil having a width substantially equal to the thickness of the insulating container 1. That is, at four positions in the circumferential direction of the ring-shaped portion, the claw portions 14a for fitting with the inner surface of the peripheral side portion 2a of the sealing member 2 are provided. Claw part 14a
Is attached to the lower surface side in the middle of the width of the annular part,
It is a rectangle. Further, in the circumferential direction of the ring-shaped portion, each claw portion 14a
Claws 14b for fitting with the inner surface of the insulating container 1 are provided at four places therebetween. The claw portion 14b is obliquely attached to the inner peripheral edge of the ring-shaped portion on the upper surface side with its tip slightly outward, and is also rectangular. Further, a hemispherical projection 14c is provided on the outer surface of the claw portion 14b.

As shown in FIG. 4, the thickness (height) of the projection 14c is set to 2α when the manufacturing variation of the inner diameter r of the insulating container 1 is ± α. It is manufactured so that the radius due to the top of the projection 14c changes by 2α by changing the angle. FIG.
(a) shows the case where the radius is the smallest, and FIG. 4 (b) shows the case where the radius is the largest.

FIG. 5 is an enlarged sectional view for explaining a fitting portion between the silver brazing material 14 and the sealing member 2. Since the dimensional tolerance of the inner surface of the peripheral side portion 2a of the sealing member 2 is formed to be ± 0.5 mm or less, a stable restraining force can be obtained only with the claw portion 14a.
FIG. 6 is an enlarged cross-sectional view for explaining a fitting portion between the silver brazing material 14 and the insulating container 1. The dimensional tolerance of the inner surface 1a of the insulating container 1 is generally as large as ± 0.5 mm or more. However, by providing the protrusion 14c, the inner surface 1a and the protrusion 14c come into contact with each other, and the inner surface 1a
The angle θ between the claw portion and the claw portion 14b is 45 ° or less (including the case where the claw portion 14b is located outside the inner periphery of the annular portion of the silver brazing material 14), and the positioning force and the binding force for maintaining the state are stable. Is obtained. This places the insulating container 1 and the two subassemblies 12, 13 coaxially.

The claws 14a and 14b are arranged on a circle having a center coaxially with the insulating container 1, and it is sufficient that at least three claws are provided. Further, a configuration is also possible in which the claw portion 14b is provided on the outer peripheral edge of the ring-shaped portion, the projection 14c is formed on the inner surface thereof, fitted to the outer surface of the insulating container 1, and the claw portion 14a is fitted to the outer surface of the peripheral side portion 2a. Good.

Embodiment 2 FIG. FIG. 7 is a perspective view showing the silver brazing material 14 of the vacuum valve according to the second embodiment. As in the first embodiment, the silver brazing material 14 has the claw portions 14a provided at four positions in the circumferential direction of the loop portion, and the silver brazing material 14 has four positions between the respective claw portions 14a in the circumferential direction of the loop portion. Further, a claw portion 14b for fitting with the inner surface of the insulating container 1 is provided. Claw part 14
b is attached to the inner peripheral edge of the ring-shaped portion toward the upper surface side, and is also rectangular. Further, the claw portion 14b in the present embodiment is provided with a bent portion 14d having a horizontal ridge line and projecting outward instead of the protrusion 14c.

The thickness (height) of the bent portion 14d is set to 2α when the manufacturing variation of the inner diameter r of the insulating container 1 is ± α, as in the case of the protrusion 14c, and the annular shape of the claw portion 14b is set. By changing the angle with respect to the portion, the radius of the bent portion 14d due to the top is changed by 2α. Other configurations are the same as those of the first embodiment, and illustration and description are omitted.

FIG. 8 is an enlarged sectional view for explaining a fitting portion between the silver brazing material 14 and the insulating container 1. The dimensional tolerance of the inner surface 1a of the insulating container 1 is generally as large as ± 0.5 mm or more.
By providing the bent portion 14d, the inner surface 1a and the bent portion 14d come into contact with each other, the angle θ between the inner surface 1a and the claw portion 14b (the flat portion 14e) becomes 45 ° or less, and the binding force for positioning and maintaining the state is maintained. Is obtained stably. Thereby, the insulating containers 1 and 2
The two subassemblies 12, 13 are arranged coaxially.

Also in this embodiment, the claw portions 14a, 14b
It is arranged on a circumference having a center on the same axis as the insulating container 1,
What is necessary is just to provide at least three each. Further, the claw portion 14b is provided on the outer peripheral edge of the ring-shaped portion, the bent portion 14d is formed to be convex inward, and is fitted to the outer surface of the insulating container 1, and the claw portion 14a is connected to the peripheral side portion 2a
It is good also as a structure fitted with the outer surface of.

Embodiment 3 FIG. 9 is a perspective view showing the silver brazing material 14 of the vacuum valve according to the third embodiment. In the silver brazing material 14, the claws 14a in the present embodiment are provided at substantially equal intervals at three places in the circumferential direction of the ring-shaped portion, and an insulating material is provided between the claws 14a in the circumferential direction of the ring-shaped portion. Claw portions 14f and 14g for fitting with the inner surface of the container 1 are provided at substantially equal intervals. The claw portion 14f is attached to the upper surface at a position about 1/3 from the inner peripheral side of the width of the ring-shaped portion, and has a rectangular shape. The claw portion 14g is attached to the upper surface at the inner peripheral edge of the ring-shaped portion, and has a rectangular shape. Other configurations are the same as those of the first embodiment, and illustration and description are omitted.

FIGS. 10 and 11 are enlarged sectional views for explaining a fitting portion between the silver brazing material 14 and the insulating container 1. FIG. The dimensional tolerance of the inner surface 1a of the insulating container 1 is generally as large as ± 0.5 mm or more, but the size varies depending on the case. FIG. 10 shows a case where the dimensional tolerance is relatively large, and FIG. 11 shows a case where the dimensional tolerance is relatively small.

When the tolerance is large, the claw portion 14f located on the outside in the radial direction comes into contact with the insulating container 1, and the angle θ between them becomes 45 ° or less. As a result, the positioning force and the restraining force for maintaining the state can be stably obtained. At this time, the claw portion 14g located inside in the radial direction does not contact the insulating container 1.

When the tolerance is small, the claw portion 14g located on the inner side in the radial direction comes into contact with the insulating container 1, and the angle θ therebetween becomes 45 ° or less. As a result, the positioning force and the restraining force for maintaining the state can be stably obtained. At this time, the claw portion 14f located on the outer side in the radial direction has an angle θ of 45 ° or more with the insulating container 1 and has almost no binding force, so that it is irrelevant to the positioning.

As described above, in any case, the insulating containers 1 and 2
The two subassemblies 12, 13 are arranged coaxially.

In this embodiment, the claws 14a, 14f, 14
g are arranged on a circumference having a center on the same axis as the insulating container 1, and it is sufficient that at least three g are provided respectively.

In each figure, the silver brazing material of the insulating container 1 is shown.
Although the contact portion with the metal 14 is shown as being angular, the corner is actually chamfered so that the silver brazing material 14 is not caught when fitted. Claws 14a, 1
The shapes of 4b, 14f, and 14g are not limited to rectangles.

[0028]

As described above, in the vacuum valve according to the first aspect, since the brazing material has the claw portion, the positioning between the insulating container and the end plate can be easily and reliably performed during the temporary assembly, and the state is maintained. Therefore, the operation can be simplified, and the positioning jig and the holding jig are not required, so that the manufacturing cost can be reduced.

According to the vacuum valve of the present invention, in addition to the effect of the vacuum valve of the present invention, even if the inner surface of the insulating container has a large dimensional tolerance, the inner surface and the projection come into contact with each other, and When the angle between the two claw portions is 45 ° or less, the component tolerance is absorbed, and the positioning force and the restraining force for maintaining the state can be stably obtained. Thereby, the insulating container and the two subassemblies composed of the electrodes and the end plates are arranged coaxially.

[0030] In addition to the effect of the vacuum valve according to the first aspect, the vacuum valve according to the third aspect allows the inner surface to come into contact with the bent portion even if the inner surface of the insulating container has a large dimensional tolerance. When the angle θ formed with the second claw portion is 45 ° or less,
The component tolerance is absorbed, and the positioning and the restraining force for maintaining the state are stably obtained. This places the insulating container and the two subassemblies coaxially.

In the vacuum valve according to the fourth aspect, in addition to the effect of the vacuum valve according to the first aspect, when the tolerance is relatively large, the second claw portion located outside in the radial direction comes into contact with the insulating container. And the angle θ formed between them is 45 ° or less. At this time, the second claw portion located inside in the radial direction does not contact the insulating container. When the tolerance is relatively small, the second claw portion located inside in the radial direction comes into contact with the insulating container,
The angle θ formed between them is 45 ° or less. At this time, the angle θ formed between the second claw portion and the insulating container at the outer side in the radial direction is 45 ° or more and has little binding force.
It has nothing to do with positioning. In any case, the present invention has excellent effects such that the component tolerance is absorbed, the positioning and the restraining force for maintaining the state are stably obtained, and the insulating container and the two subassemblies are coaxially arranged. Play.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing a vacuum valve according to a first embodiment.

FIG. 2 is an exploded sectional view of FIG.

FIG. 3 is an enlarged perspective view of the silver brazing material shown in FIG. 1;

FIG. 4 is a diagram illustrating an allowable range of the silver brazing material shown in FIG. 1;

5 is an enlarged cross-sectional view for explaining a fitting portion between the silver brazing material shown in FIG. 1 and a sealing member.

FIG. 6 is an enlarged sectional view for explaining a fitting portion between the silver brazing material shown in FIG. 1 and the insulating container.

FIG. 7 is a perspective view showing a silver brazing material according to a second embodiment.

8 is an enlarged sectional view for explaining a fitting portion between the silver brazing material shown in FIG. 7 and an insulating container.

FIG. 9 is a perspective view showing a silver brazing material according to a third embodiment.

10 is an enlarged sectional view for explaining a fitting portion between the silver brazing material shown in FIG. 9 and an insulating container.

11 is an enlarged sectional view for explaining a fitting portion between the silver brazing material shown in FIG. 9 and an insulating container.

FIG. 12 is a schematic sectional view showing a conventional vacuum valve.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Insulated container, 2 sealing members, 5 movable electrode rods, 6 fixed electrode rods, 7 and 8 electrodes, 11 bellows, 14 silver brazing material, 14a, 14b, 14f, 14g claws, 14c protrusions, 14d bent parts, 14e Flat part.

Claims (4)

[Claims] 1. A fixed electrode, a movable electrode, a cylindrical insulating container in which these are opened and closed, and an end plate attached to one end of the insulating container for fixing and holding the fixed electrode, An end plate attached to the other end of the insulating container and holding the movable electrode via a flexible material, and an annular brazing material interposed between each end plate and the insulating container, wherein the brazing material is At least three first claws provided at the same diameter position with respect to the ring shaft for fitting the end plate, and at least three first claw portions provided at the same diameter position with respect to the ring shaft for fitting the insulating container. A vacuum valve having three second claws. 2. The method according to claim 1, wherein the second claw has a projection on a contact surface with the insulating container, and an angle between the second claw and the insulating container is elastically variable. Vacuum valve. 3. The method according to claim 2, wherein the second claw has a bent portion protruding toward the contact side with the insulating container, and an angle formed between the second claw and the insulating container is elastically variable. The vacuum valve according to 1. 4. The vacuum valve according to claim 1, wherein at least three second claws are provided at different positions in the ring radial direction.