JPH10328047A - Structure for mounting getter of vacuum structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve productivity by rapidly activating a getter as a whole by an electromagnetic induction heating method. SOLUTION: In the mounting structure of a getter 6 for a vacuum structure (vacuum bottle 1) which is mounted to component members (inner bottle 2 and outer bottle 3) so as to be positioned in a space S enclosed by the component members, the getter 6 is disposed so as to be brought into contact with a member to be induction-heated which is made of magnetic metal having high resistance and heated by electromagnetic induction. The member to be induction-heated comprises a mounting member 7 for mounting the getter 6 to the component member, a plate member, and a foil member or a foil member 5 for covering the component members.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a getter mounting structure for a vacuum structure such as a thermos, a vacuum double tube, a vacuum insulation panel, and a vacuum vessel.

[0002]

2. Description of the Related Art Conventionally, a getter of a vacuum structure, for example, a thermos bottle composed of a metal inner bottle and an outer bottle, is attached to the inner bottle and the outer bottle by a mounting member made of the same metal as the inner bottle and the outer bottle. It is attached to the outer surface of the inner bottle or the inner surface of the outer bottle so as to be located in a space closed by the bottle. Then, in a state where the getter is attached to the inner bottle or the outer bottle, a double container is assembled by welding or the like, and the double container is disposed in a vacuum furnace or a heating furnace, and the double container is placed. While heating at a predetermined temperature, the space between the inner bottle and the outer bottle is exhausted from an exhaust hole formed in the outer bottle.

[0003] By the heating and evacuation operations, deposits such as oil, moisture, gas molecules and the like adhering to the surfaces of the inner bottle and the outer bottle are gasified and removed, and gas occluded inside the metal material is discharged. Further, the space between the inner bottle and the outer bottle is evacuated while simultaneously activating the getter. Then, when the space of the double container reaches a predetermined degree of vacuum, the exhaust hole of the outer bottle is sealed by a predetermined means. Thereby, the gas generated in the space after the sealing is absorbed by the getter, and the space can be maintained at a predetermined degree of vacuum.

[0004]

However, in the above-mentioned getter mounting structure, it is empirically heated at a high temperature for a long time in the furnace as in the prior art, so that the deposits and occlusions adhering to the inner bottle and the outer bottle are obtained. Gas removal, getter activation,
In addition, the operation of sealing the exhaust holes (melting of the brazing material) can be achieved uniformly, but heating according to the purpose cannot be performed. That is, there is no problem in applying when the degassing temperature of the double container is equal to or higher than the temperature at which the getter is activated, but when the degassing temperature of the double container is low, the getter is activated. Heating the double container more than necessary only for the purpose of causing the deterioration of the productivity and the generation of extra gas, disadvantageously increasing the size of the getter and lowering the degree of vacuum of the thermos.

The getter is heated by an arbitrary method from the outside (atmosphere side) of the component to which the getter is attached. The getter is arranged so as to be located in a space in a vacuum state. Therefore, there is an inconvenience that a long heating time is required to increase the temperature of the getter to the vacuum space side, that is, the entire getter by heat conduction by simple heating from the constituent member side. Therefore, an object of the present invention is to improve the productivity by quickly activating the entire getter using the electromagnetic induction heating method.

[0006]

In order to solve the above-mentioned problems, a getter mounting structure for a vacuum structure according to the present invention comprises a vacuum structure attached to a constituent member so as to be located in a space closed by the constituent member. In the getter mounting structure, the getter is provided so as to be in contact with an induced heating member made of a magnetic metal having a large resistance and induction-heated by electromagnetic induction.

According to the getter mounting structure of the vacuum structure, the heating efficiency of the getter can be improved by the induction-induced member by electromagnetic induction, and the work time required for activation is shortened. be able to.
In particular, when the mounting structure is employed in a vacuum structure formed of a metal component, the component also generates heat due to heat conduction and the like following the heat generation of the inductively heated member. Heating can be performed, and the working time can be greatly reduced.

In the getter mounting structure of the vacuum structure,
It is preferable that the guided heating member be a mounting member for mounting the getter to a constituent member. Alternatively, the guided heating member may be a plate member attached to the component together with the getter via an attachment member. Alternatively, the induced heating member comprises:
It may be made of a foil member that covers the getter. Alternatively, the guided heating member may be formed of a foil member that covers the constituent member, and the getter may be provided between the foil member and the constituent member.

[0009]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows a thermos 1 which is a vacuum structure to which the getter mounting structure of the present invention is applied. The thermos bottle 1 includes an inner bottle 2 and an outer bottle 3. The inner bottle 2
The outer bottle 3 is made of a non-magnetic metal whose degassing temperature is lower than the temperature at which the getter 6 described later is activated and whose penetration depth is low, such as SUS304.

[0010] A foil member 5 made of copper, aluminum, or the like for preventing radiant heat transfer is wound around the outer surface of the inner bottle 2 located in the space S between the inner bottle 2 and the outer bottle 3.

A getter 6 is mounted on the bottom plate 3a of the outer bottle 3 on the side located in the space S via a mounting member 7, which is a member to be heated by induction. The mounting member 7 is
Magnetic metal with high surface resistance, such as Fe or SUS430
Etc. As shown in FIG. 2, the mounting member 7 includes a holding portion 7a having a concave cross section so as to substantially cover the outer surface of the getter 6, and a mounting portion 7 extending from one side of the holding portion 7a.
b, and is fixed to the bottom plate 3a of the outer bottle 3 by welding or the like. In addition, as shown in FIG. 2, it is better to form a hole through which the getter 6 is exposed.

An exhaust hole 8 for evacuating the space S is provided in the bottom plate 3a of the outer bottle 3 at a position away from the place where the getter 6 is attached. Around the exhaust hole 8, a brazing material 9 having a melting point lower than the activation temperature of the getter 6 is provided so as to be located on the outer surface side of the bottom plate 3a.

A heating device 12 for activating the getter 6 is provided with an exhaust means for evacuating the space S in a state where the double container composed of the inner bottle 2 and the outer bottle 3 before evacuation is inverted. Is disposed above the exhaust device 18.

The heating device 12 employs an electromagnetic induction heating system. Specifically, a concave ferrite core 13 is provided at a position facing the getter 6, and the induction heating coil 14 is spirally wound around the ferrite core 13. The induction heating coil 14 is formed of a single thick wire or a litz wire composed of a plurality of thin wires, and is controlled by a controller 16 via an inductance adjusting coil 15.

The exhaust device 18 is made of a non-conductive material such as ceramic or heat-resistant resin, and has a cylindrical shape with one end closed and the other end opened.
A seal member 19 that is in pressure contact with is mounted. An exhaust pipe 20 is connected to a side surface of the exhaust tool 18.
0 is guided to a vacuum pump (not shown).

Next, a method for attaching the getter to the thermos bottle 1 will be described. First, before assembling the double container, the getter 6 is previously arranged at a predetermined position on the surface of the bottom plate 3a located on the space S side, and the mounting member 7 is attached so that the outer surface of the getter 6 is covered with the holding portion 7a. And the mounting portion 7b of the mounting member 7 is mounted on the bottom plate 3a by welding.

Next, the inner bottle 2 around which the foil member 5 is wound around the outer periphery is inserted from the lower end opening of the outer bottle 3 to which the bottom plate 3a is not attached, and these mouth portions are welded to each other. Stick.

Next, the bottom plate 3a is disposed in the opening of the outer bottle 3 such that the getter 6 side is the inner bottle 2 side and fixed by welding or the like to assemble a double container. And
A brazing material 9 is formed around the exhaust hole 8 on the outer surface of the bottom plate 3a.
Is arranged. For example, a flux is adhered around the bottom plate 3a exhaust hole 8, a metal brazing material is welded to the surface of the flux to form a first brazing material layer, and a flux exposed from the first brazing material layer is formed. After the removal, a brazing material 9 such as a solid metal of the same quality as the first brazing material layer is attached to the surface of the first brazing material layer to form a second brazing material layer.

Next, the double container is disposed at the open end of the exhaust device 18, the bottom plate 3a is brought into contact with the seal member 19, and the surfaces of the inner bottle 2 and the outer bottle 3 are heated by the heating means (not shown). While heating at a temperature at which the space S is not activated, the space S is formed through the exhaust holes 8 formed in the bottom plate 3a.
Exhaust. In this state, the heating device 12 is not operating. Thereby, the space S can be exhausted from the exhaust holes 8 of the bottom plate 3a while removing the deposits such as oil, moisture, and gas molecules and the occluded gas attached to the inner bottle 2 and the outer bottle 3.

When the space S reaches a predetermined degree of vacuum, the heating device 12 is operated and the induction heating coil 1 is turned on.
4 is supplied with a high-frequency current. As a result, a part of the electromagnetic wave from the induction heating coil 14 is transmitted to the outer bottle 3 having a deep penetration depth.
The eddy current is generated by the electromagnetic induction effect at the mounting member 7 which is a guided heating member and the getter mounting portion of the bottom plate 3a, and the mounting member 7 generates heat, and then heat conduction. For example, the bottom plate 3a generates heat. As a result, the getter 6 is activated by heating from both sides of the mounting member 7 and the bottom plate 3a, and gas generated at the time of the activation is exhausted from the exhaust hole 8.

Thereafter, the heat generated by the bottom plate 3a is transferred to the position where the brazing material 9 is disposed away from the getter 6, and the heat melts the brazing material 9, thereby sealing the exhaust hole 8 with the brazing material 9. To form a thermos bottle 1. The gas generated in the space S after the sealing is absorbed by the action of the getter 6, and the space S of the thermos 1 is maintained at a predetermined degree of vacuum. Note that the activation of the getter 6 may be performed after the exhaust hole 8 is closed.

As described above, in the getter mounting structure of the thermos 1, the heating of the double container before the evacuation and the heating for activating the getter 6 are performed separately, so that the thermos 1 to be manufactured is manufactured. Can be performed according to the temperature. Moreover, since the getter 6 can be heated from both sides by combining the bottom plate 3a of the metal outer bottle 3 and the mounting member 7, the heating efficiency can be improved. Therefore, the getter 6 can be quickly activated, and the working time can be greatly reduced. Further, since the brazing material 9 can be melted and sealed by heat transmitted through the bottom 3a of the outer bottle 3, the energy cost required for manufacturing the thermos bottle 1 can be reduced.

FIG. 3 shows a getter mounting structure according to a second embodiment. This embodiment is different from the first embodiment only in that the mounting member 7 'is made of an appropriate metal and the electromagnetic induction member made of a magnetic metal having a large surface resistance is made of the plate member 22. . The plate member 22 has a plate shape having substantially the same shape as the outer surface of the getter 6.

FIG. 3 shows a method of attaching the getter to the thermos bottle.
As shown in (A), first, the getter 6 is arranged at a predetermined position on a surface of the bottom plate 3a located on the space S side, and the plate member 22 is arranged on the outer surface of the getter 6, and then the plate member The mounting member 7 'is disposed so as to cover 22 with the holding portion 7a', and the mounting portion 7b 'of the mounting member 7' is mounted by welding to the bottom plate 3a. Subsequent process and heating device 1
Since the heating action and effect of the second embodiment are the same as those of the first embodiment, the description is omitted.

As shown in FIG. 3B, first, the plate member 22 is disposed at a predetermined position on the surface of the bottom plate 3a located on the space S side, and the getter 6 is attached to the outer surface of the plate member 22. May be arranged and mounted via the mounting member 7 ′. Also, in FIGS. 3A and 3B,
It is better to provide the mounting member 7 'with a hole through which the getter 6 is exposed.

FIG. 4 shows a getter mounting structure according to a third embodiment. This embodiment is different from the second embodiment in that the induction-induced heating member is constituted by a foil member 23 made of a magnetic metal having a large surface resistance instead of the plate member 22 shown in the second embodiment. ing. In this case as well, the foil member 2
It is preferable to provide a hole in which the getter is exposed in 3.

The method of attaching the getter to the thermos is as follows.
The outer periphery of the getter 6 is covered with a foil member 23. Then, the getter 6 is arranged at a predetermined position on a surface of the bottom plate 3a located on the space S side, and the getter 6 is mounted on the bottom plate 3a via a mounting member 7 '. Subsequent steps are the first
This is the same as the embodiment.

FIG. 5 shows a getter mounting structure according to a fourth embodiment. The thermos bottle 1 of this embodiment includes an induced heating member,
It is composed of a foil member 5 'for preventing radiation heat transfer shown in the first embodiment.

In the method of attaching the getter 6 to the thermos bottle 1, the getter 6 is attached to a predetermined position of the inner bottle 2 via the attaching member 7 ′, and then the foil member 5 ′ is wound around the outer periphery of the inner bottle 2. Thereafter, the inner bottle 2 is inserted through the opening of the outer bottle 3.
Are inserted into each other, and their mouths are welded and fixed, and then the bottom plate 3a is fixed to the opening of the outer bottle 3 by welding. Subsequent steps are the same as in the first embodiment.

Incidentally, the getter mounting structure of the present invention is not limited to the above configuration. For example, the holding portions 7a and 7a 'of the attachment members 7 and 7' of the above embodiments may be plate-shaped instead of being concave in cross section, and may have any configuration that can securely hold the getter 6. In this case, a concave portion in which the getter 6 can be positioned may be formed on the component member side. Also, the fourth
In the getter mounting structure shown in the embodiment, in the step of heating the getter 6, the heating device 12 may be arranged inside the inner bottle 2 and induction heating may be performed from the inner surface side. Further, in the fourth embodiment, the getter 6 may be held between the inner bottle 2 and the foil member 5 'without using the attachment member 7'. Further, even when applied to a vacuum structure such as a vacuum double tube, a vacuum insulation panel, or a vacuum vessel instead of the thermos bottle 1, the same operation and effect can be obtained. Even when the getter 6 is formed of a conductive material, the getter 6 can be reliably heated via the induced heating member. In addition, getter 6
The constituent member to which is attached is not limited to non-magnetic, but may be a magnetic material such as Fe. In this case, an eddy current is also generated in the constituent members, but the effect is substantially the same as that of the non-magnetic one.

Further, in the above embodiment, the getter 6 is attached to the bottom plate 3a of the outer bottle 3, but may be attached to any position in the inner bottle 2 and the outer bottle 3. For example, as shown in FIG. 6, it may be attached to the side surface of the outer bottle 3, or may be attached to the bottom plate of the inner bottle 2, as shown in FIG. In these cases, the heating device 25 that activates the getter 6 is disposed so as to face the getter 6 through a wall of an arbitrary exhaust unit such as a heating furnace 26. More specifically, the heating device 25 has a concave-shaped ferrite core 28 around which an induction heating coil 29 is wound, inside a case 27 made of ceramic or heat-resistant resin. A heat equalizing case 3 made of aluminum or the like having a water cooling tube 31 formed therein is provided on an outer peripheral portion of the case 27.
0 prevents the temperature of the case 27, the ferrite core 28 and the induction heating coil 29 from rising due to the heat of the heating furnace 26.

[0032]

As is clear from the above description, in the getter mounting structure of the vacuum structure according to the present invention, the getter is heated by electromagnetic induction heating, and the heating efficiency of the getter is improved by the induced heating member. Since the getter can be quickly activated, the productivity of the vacuum structure can be improved.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a getter mounting structure of a thermos, which is a vacuum structure according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a mounting member.

FIGS. 3A and 3B are cross-sectional views illustrating a getter mounting structure of a thermos, which is a vacuum structure according to a second embodiment.

FIG. 4 is a cross-sectional view showing a getter mounting structure of a thermos as a vacuum structure according to a third embodiment.

FIG. 5 is a sectional view showing a getter mounting structure of a thermos, which is a vacuum structure according to a fourth embodiment.

FIG. 6 is a sectional view showing a modified example of the getter mounting structure.

FIG. 7 is a sectional view showing another modified example of the getter mounting structure.

[Explanation of symbols]

1 ... thermos bottle, 2 ... inner bottle, 3 ... outer bottle, 3a ... bottom plate, 5 ...
Foil, 6 getter, 7 mounting member, 8 exhaust hole, 9 brazing material, 12 heating device, 22 plate member, 23 foil member,
S ... space.

Claims (5)

[Claims] 1. A getter mounting structure for a vacuum structure mounted on a component so as to be located in a space closed by the component, wherein the getter is made of a magnetic metal having a large resistance and is induction-heated by electromagnetic induction. A getter mounting structure for a vacuum structure, wherein the getter mounting structure is provided so as to be in contact with an induced heating member. 2. The getter mounting structure for a vacuum structure according to claim 1, wherein the induced heating member comprises a mounting member for mounting the getter to a constituent member. 3. The getter mounting structure of a vacuum structure according to claim 1, wherein the guided heating member comprises a plate member mounted on the constituent member together with the getter via a mounting member. 4. The getter mounting structure according to claim 1, wherein the induced heating member comprises a foil member covering the getter. 5. The vacuum structure according to claim 1, wherein the guided heating member is formed of a foil member that covers the constituent member, and the getter is disposed between the foil member and the constituent member. Getter mounting structure for body.