JPH10340699A - Holder transfer device - Google Patents

Abstract

(57) [Summary] (Modifications required) [Problem] To enable a sample holder that holds a sample without being exposed to the atmosphere to be transported over a long distance and to be able to exchange the sample holder near the operation. SOLUTION: A vacuum pipe 8 connecting between a first sample exchange chamber 6 and a second sample exchange chamber 7, a first approach position approaching the first sample exchange chamber 6 along a guide member 41, and A slider 42 which is controlled to move between a second approach position approaching the second sample exchange chamber 7 and a holder holding portion supported at the tip and having a tip end portion at the first approach position; The vacuum pipe 8 is moved into the sample exchange chamber 6 and in the second approach position.
A first arm that moves to an intermediate position between the first and second sample exchange chambers 7 at the second approach position, and
A holder transfer device including a second arm that moves to an intermediate position of the vacuum pipe 8 at the approach position, and a holder exchanging member 37 that exchanges the holder holders and the sample holder H at the intermediate position.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holder transfer device for transferring a sample held in a sample holder without exposing the sample to the atmosphere. The holder transfer device of the present invention is arranged in a vacuum pipe whose inside is held in a vacuum, and is used for transferring a sample holder between a first sample exchange chamber and a second sample exchange chamber connected to the vacuum pipe. Used for

[0002]

2. Description of the Related Art X-ray photoelectron spectroscopy (XPS: X-ray Ph
When two high vacuum analyzers, such as an analyzer using otoelectron spectroscopy (AES) and an Auger electron spectroscopy (AES), perform an analysis operation on one sample, both analyzers are connected by a vacuum pipe. In some cases, after performing an analysis operation on the sample in one analyzer, the sample is transported to the other analyzer without being exposed to the atmosphere, and the analysis operation is performed. At this time, the following techniques are conventionally known as a holder transfer device used as a device for transferring the sample.

(J01) (Techniques shown in FIGS. 5 to 8) FIG. 5 is an explanatory view of a conventional high vacuum analyzer equipped with a holder transfer device. FIG. 6 is a perspective view of the sample holder and the tip of the sample exchange member (sample exchange rod) of the high vacuum analyzer. FIG. 7 is an enlarged explanatory view of the sample stage. FIG. 8 is a partial cross-sectional view of the holder support of the sample stage. In order to facilitate understanding of the following description, coordinate axes X, Y, and Z that are orthogonal to each other are defined in the drawings, and the arrow X direction is forward, the arrow Y direction is left, and the arrow Z direction is upward. And In this case, the direction opposite to the X direction (−X direction) is backward, the direction opposite to the Y direction (−Y direction) is rightward, and the direction opposite to the Z direction (−Z direction) is downward. Also, referred to as the front-rear direction or the X-axis direction including the X direction and the -X direction, the left-right direction or the Y-axis direction including the Y direction and the -Y direction,
The vertical direction or the Z-axis direction includes the Z direction and the −Z direction. Furthermore, in the figure, those with "•" in "○" mean an arrow pointing from the back of the paper to the front,
A mark with "x" in "o" means an arrow pointing from the front to the back of the paper.

In FIG. 5, an XPS held in a high vacuum
(X-ray photoelectron spectroscopy)
The sample measurement chamber 01 and the second sample measurement chamber 02, which is a sample measurement chamber of an AES (Auger electron spectroscopy) analyzer, have a cylindrical first sample exchange through gate valves 03 and 04 in the front (X direction), respectively. Room 06 and second sample exchange room 07
The first sample exchange chamber 06 and the second sample exchange chamber 07 are connected by a vacuum pipe 08. 5 and 7, a motor unit M including a motor and gears is provided at the bottom of the first sample measuring chamber 01.
A Y-axis table Ty movable in the Y-axis direction by y is arranged, and an X-axis table Tx movable in the X-axis direction by a motor unit Mx is supported on the Y-axis table Ty. A rotary table T is supported on the upper surface of the X-axis table Tx. A holder support portion 011 is supported on the upper surface of the turntable T. The Y-axis tables Ty, X
A sample stage 09 is constituted by the axis table Tx and the holder support unit 011.

[0005] In FIG. 7 and FIG.
11 has a holder support main body 011a. A base end (-X end) of a roller support member 011b made of an elastic member is fixed to both sides in the left-right direction (Y-axis direction) of the holder support portion main body 011a. The roller support member 0
A roller 011c is rotatably supported on the tip side of 11b. A holder support plate 011e having a holder fitting portion 011d that opens forward (X direction) in FIGS. 7 and 8 is fixed to the upper surface of the holder support portion main body 011a. A sample holder H described later is fitted to the holder fitting portion 011d. The sample holder H is in the holder fitting portion 0
When the sample holder H is fitted to the holder supporting member 011b, the sample holder H advances the roller 011c and the roller supporting member 011b of the elastic member outward from the holder fitting portion 011d toward the holder supporting portion main body 011a. The sample holder H is held on the holder support portion main body 011a side by the restoring force of (1). The Y-axis table Ty ′, the X-axis table Tx ′, and the holder support 01 are provided at the bottom of the second sample measurement chamber 02 in the same manner as the first sample measurement chamber 01.
A sample stage 09 'composed of 1' is arranged. Further, the holder support portion 011 'is also the holder support portion 011'.
It has the same configuration as 11.

A sample exchange member 012 is supported on the front side wall of the first sample exchange chamber 06. In addition, the second
A sample exchange member 012 'is supported on the front (X-direction) side wall of the sample exchange chamber 07. 5 and 6, the sample exchange member 012 has a forwardly extending outer cylinder 013 mounted on a front side wall of the first sample exchange chamber 06. An outer cylindrical slider member 014 having a permanent magnet (not shown) is slidably and rotatably supported on the outer surface of the outer cylinder 013 on the outer cylinder 013.
Inside the outer cylinder 013, a sample exchange rod 015 has a front-rear axis (X
(An axis extending in the direction), and is supported so as to be slidable and rotatable around a front-rear axis. Sample exchange rod 01
A permanent magnet (not shown) is fixed to the front end of the reference numeral 5. By moving the outer cylindrical slider member 014 in the front-back direction (X-axis direction), the outer cylindrical slider member 01 is moved.
The sample exchange rod 015 and the operation rod 016 inside the outer cylinder 013 slide in the front-rear direction (X-axis direction) by the magnetic force of the permanent magnet (not shown). Then, the inner end sides of the sample exchange rod 015 and the operation rod 016 move into the first sample exchange chamber 06. The detailed configuration of the outer end side of the sample exchange member 012 is described in Japanese Patent Application No. 7-7 / 1995.
No. 3266.

In FIG. 6, a holder holding member 018 is supported on the inner end side of the sample exchange rod 015, and a U-shaped holder holding portion 019 is formed on the holder holding member 018. An L-shaped member 020 is rotatably supported on the upper surface of the holder holding member 018, and the L-shaped member 020 has a contacted portion 021 contacted by the inner end side of the operation rod 016. Have. The L-shaped member 020 includes a spring 02 supported on the upper surface of the holder holding member 018.
2 is locked, and the spring 022 pulls the L-shaped member 020 so that the L-shaped member 020 closes the distal end side of the holder holding portion 019. Also,
The operating rod 016 is attached to the contacted part 21 of the L-shaped member 020.
The L-shaped member 020 is configured to open the front end of the holder holding portion 019 by bringing the inner end of the holder into contact with and pressing the front end of the holder holding portion 019. The movement of the operation rod 016 in the front-rear direction (X-axis direction) is enabled by rotating the outer cylindrical slider member 014 around the axis. The sample exchange member 012 has the code 0
13 to 022. Note that the sample exchange member 012 'is also
It is configured similarly to 2.

In FIGS. 5 and 6, a first sample exchange chamber 06 is provided.
The holder transport member 023 is supported on the left side wall of the holder. The holder transport member 023 has an outer cylinder 024, an outer cylindrical slider member 025, and a sample exchange member 026, and a holder holding member 027 is supported at the tip of the sample exchange rod 026. The holder support member 027
Has a U-shaped holder holding portion 028. The outer cylinder 024, the outer cylindrical slider member 025, the sample exchange member 026, and the holder holding member 027 of the holder transport member 023 are the outer cylinder 013, the outer cylindrical slider member 014, the sample exchange member 015, and the holder of the sample exchange member 012. It is configured almost similarly to the holding member 018 and the like.

In FIG. 6, a sample holder H used in the high vacuum analyzer is a cylindrical member, and a sample holding portion 032 for holding a sample S is formed on the upper surface. The sample S is fixed by a fixing screw 033 therein. On the outer surface of the sample holder H, an upper supported portion 034a and a lower supported portion 034b formed by a ring-shaped groove are formed. When the sample holder H is placed on the sample stages 09 and 09 ', the lower supported portion 0
Reference numeral 34b denotes a holder fitting portion 011e of the holder supporting portion 011 and a holder fitting portion 011e 'of the holder supporting portion 11' (FIG. 5).
) And are supported by holder support plates 011d and 011d '. Holder holders 019, 019 'of sample exchange members 012, 012' (019 'is not shown)
Supports the upper supported portion 034a, and the holder holding portion 028 of the holder transport member 023 and the lower supported portion 034b.

In FIG. 5, the sample holder H on the measurement position P1 in the first sample measurement chamber 01 is gripped by the holder gripping part 019 of the sample exchange member 012 in a vacuum state and removed from the sample stage 09 by the above-described configuration. . While being held by the sample exchange member 012, the sample holder H is moved through the gate valve 03 to the exchange position P2 in the first sample exchange chamber 06. On the exchange position P2, the sample holder H is moved from the sample exchange member 012 to the holder transport member 02.
Transfer to 3. The transferred sample holder H is transferred by the holder transfer member 023 to the exchange position Q1 in the second sample exchange chamber 07, and is transferred to the sample exchange member 012 'on the second sample measurement chamber 02 side. The transferred sample holder H is moved to the second sample measurement chamber 02 by the sample exchange member 012 '.
The sample S is supported by the holder support portion 011 'located on the measurement position Q2 of FIG.

[0011]

[Problems to be solved by the invention]

(Problem of (J01)) The sample exchange member 01 on the first sample measurement chamber side of the high vacuum analyzer of the prior art (J01).
Sample exchange member 012 'on the second and second sample measurement chamber 02 side
Is away. For this reason, the sample exchange members 012, 0
In order to convey between 12 ', the holder conveying member 023 becomes long. Therefore, when the holder transport member 023 is manually operated, the operation position on the base end side of the holder transport member 023 is separated from the exchange position Q1 on the distal end side of the holder transport member 023, and the operation position of the holder transport member 023 is separated. Since the exchange position Q1 cannot be seen from the camera, there is a problem that it is difficult to reliably transfer the sample holder H. Further, if the holder transport member 023 is long, the holder transport member 023 has a length corresponding to the length.
The outer ends of the 23 outer cylinders 024 extend outward from the first sample exchange chamber 06. For this reason, there has been a problem that the operation is obstructive when the observer moves around the apparatus during operation.

The present invention has been made in view of the above circumstances, and has the following content as an object. (O01) A sample holder that holds a sample without being exposed to the atmosphere can be transported over a long distance, and transfer of the sample holder can be performed near an operation place.

[0013]

Next, the present invention devised to solve the above-mentioned problems will be described. The elements of the present invention are used to facilitate correspondence with the elements of the embodiments described later. , The reference numerals of the elements of the embodiment are enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(A present invention) In order to solve the above problems, a holder transfer device of the present invention has the following requirements. (A01) First sample exchange chamber (6) and second sample exchange chamber
A vacuum pipe (8) in which the interior connecting the sample exchange chambers (7) is kept at a vacuum, (A02) the vacuum pipe (8)
Along the guide member (41) arranged in the
A slider (42) controlled to move between a first approach position approaching the sample exchange chamber (6) and a second approach position approaching the second sample exchange chamber (7), and a sample holder at the tip of (A03). (H) holder holder (47
a, 48a) and a first arm (44a) and a second arm (44b) supported by the slider (42);
(A04) When the slider (42) moves to the first approach position, the tip of the arm moves into the first sample exchange chamber (6) and the slider (42) moves to the second sample position.
The first arm (4) in which the tip end of the arm moves to an intermediate position of the vacuum pipe (8) when moving to the approach position.
4a), (A05) when the slider (42) moves to the second approach position, the tip of the arm moves into the second sample exchange chamber (7) and the slider (42) moves to the first position. The second arm (44b), (A06) provided at an intermediate position of the vacuum pipe (8), wherein the arm tip moves to an intermediate position of the vacuum pipe (8) when the arm moves to the approach position; Each of the holder holding portions (47a, 47a, 44a) at the distal ends of the first arm (44a) and the second arm (44b).
48a) a holder exchange member (37) for exchanging the sample holder (H).

(Operation of the present invention) In the holder transfer device of the present invention having the above-mentioned features, the vacuum pipe (8) is connected to the first sample exchange chamber (6) and the second sample exchange chamber (7). The space is connected and the inside is kept in a vacuum. When the slider (42) whose movement is controlled moves along the guide member (41) arranged in the vacuum pipe (8) to the first approach position, the slider (42) supported by the slider (42). 1
The tip of the arm (44a) moves into the first sample exchange chamber (6), and the tip of the second arm (44b) supported by the slider (42) is connected to the vacuum pipe (8).
Move to the middle position of. A sample holder (H) is detachably held by a holder holding portion (47a) at the tip of the first arm (44a) moved into the first sample exchange chamber (6). In this state, when the slider (42) moves to the second approach position, the tip end of the first arm (44a) moves to an intermediate position of the vacuum pipe (8), and the second arm (44b) moves. The arm tip moves to the second sample exchange chamber (7).

When the sample holder (47a) at the tip of the first arm (44a) moves to an intermediate position of the vacuum pipe (8), a holder exchange member ( 37) receives the sample holder (H) detachably held by the holder holding portion (47a) of the first arm (44a). In this state, the slider (42)
When the arm moves to the first approach position, the arm tip of the second arm (44b) moves to an intermediate position of the vacuum pipe (8), and the arm tip of the first arm (44a) moves to the first arm. Move into the sample exchange chamber (6). In this state, the sample holder (H) is transferred from the holder exchange member (37) to the holder holding portion (48a) of the second arm (44b) that does not hold the sample holder (H).

As described above, when the slider (42) moves within the vacuum pipe (8) connecting the two sample exchange chambers whose interior is kept in a vacuum, the tip of each arm moves into the sample exchange chamber. The slider (42) does not have to move between the two sample exchange chambers. Therefore, the slider (4
The movement distance in 2) may be shorter by the length from the slider (42) to the tip of the arm, and the guide member (39) for guiding the movement of the slider (42) may be shorter than the distance between the two sample exchange chambers. Therefore, the sample holder (H) can be transported for a longer distance than the moving distance of the slider (42) without being exposed to the atmosphere.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION

Next, examples (embodiments) of the embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments. (Embodiment) FIG. 1 is a plan view of a high vacuum type analyzer equipped with an embodiment of the holder transfer device of the present invention. FIG. 2 is a cross-sectional view of the high vacuum analyzer provided with the above embodiment, FIG. 2A is a cross-sectional view taken along the line IIA-IIA of FIG. 1, and FIG.
It is a IIB sectional view. FIG. 3 is a sectional view taken along the line III-III of FIG. FIG. 4 is a perspective view of the holder conveying member of the embodiment. In the description of the embodiment of the holder transfer device of the present invention shown in FIGS. 1, 2, and 3, the same components as those of the conventional high vacuum analyzer shown in FIGS. The reference numerals used in FIG. 5 and FIG. 6 except for the first 0 are attached, and the detailed description is omitted.

In FIGS. 1, 2 and 3, the upper side (Z-direction surface) of the vacuum pipe 8 connecting the first sample exchange chamber 6 and the second sample exchange chamber 7 has a peeping opening 8a (FIG. 2B). A holder replacement member mounting hole 8b (see FIG. 2B) is formed at an intermediate position of the front side surface (X direction surface), and actuating member mounting holes 8c, 8c (FIG. 2B) are formed on both sides thereof. 2A) is formed. Further, support members 8d, 8d (FIG. 2) are provided on the lower side surface (-Z direction surface) of the vacuum pipe 8.
A) is formed. The peeping opening 8a is closed by a peeping closing member 36 so that an observer can peek inside the vacuum pipe 8.
A holder exchange member 37 is attached to the outer end of the holder exchange member attachment hole 8b, and the configuration of the holder exchange member 37 is the same as that of the conventional sample exchange members 012 and 012 '. At the outer ends of the operating member mounting holes 8c, 8c, a rotation introducing member 38 for rotating the slider to be described later is supported. The rotation introducing member 38 has a rotatable operation part 38a on the outer end side, and the operation part 3 on the inner end side.
The shaft 38b rotates integrally with the shaft 8a. A gear G0 is fixed to the shaft 38b.

2 and 3, the lower end surfaces of the support member support portions 8d, 8d are provided with leg portions 39 of a slider support member 39.
a, 39a are supported, and a support member main body 39b extending in the longitudinal direction (Y-axis direction) of the vacuum pipe 8 is supported on the upper end surfaces of the legs 39a, 39a. Shaft support portions 39c (see FIG. 3) extending upward (Z direction) are integrally formed at both ends in the longitudinal direction (Y-axis direction) of the support member main body 39b. The shaft support portion 39c has two shaft fitting holes 39d separated in the front-rear direction (X-axis direction).
Are formed. Each shaft fitting hole 39d has 2
The guide shafts (guide members) 41 are fitted and fixed.

In FIG. 4, a slider 42 supported by the guide shaft 41 has two shaft through holes 4.
2a are formed, and slide smoothly along the guide shaft 41 passing through the shaft through hole 42a. The shaft through hole 42
By disposing a linear motion bearing or the like inside a, it is possible to make the movement of the slider 42 sliding on the guide shaft 41 smoother. A support member fixing groove 42b is provided on the upper end surface of the slider 42.
A rack 43 is integrally connected to one side surface of the slider 42 in the short direction. The rack 43
Is designed to mesh with the gear G0 of the rotation introducing member 38 in the vacuum pipe 8.

An arm 44 is disposed in the support member fixing groove 42b.
It is fixed by a fixing screw 46 screwed to b. The arm 44 includes a first arm 44a on a left side (Y side).
And the second arm 44b on the right side (−Y side). The first arm 44a and the second arm 44b on the right side (-Y side) can be formed separately instead of being formed integrally. A first holder holding part 47 and a second holder 44 are provided at the distal ends of the arms 44a and 44b.
The holder holding part 48 is fixed. The first and second holder holding portions 47 and 48 have U-shaped holder support portions 47a and 48a on the distal end side.
48a is the lower supported portion 34b of the sample holder H (see FIG. 6).
Can be held.

(Operation of the present embodiment) In FIG. 1, in the holder transfer apparatus of the present embodiment having the above-described configuration, the first sample measuring chamber 1 and the second sample measuring chamber 2 are evacuated.
Open the gate valve 3 and operate the sample exchange member 12,
The sample holder H at the measurement position P1 of the first sample measurement chamber 1 is transferred to the exchange position P2, and the gate valve 3 is closed.
By rotating the rotation introducing member 38, the slider 42 is moved toward the first sample exchange chamber 6, and the first arm 44a of the slider 42 is moved to the exchange position P2 (first approach position). The sample holder H is moved from the sample exchange member 12 to the first position so that the holder support portion 47a of the first arm 44a supports the lower supported portion 34b of the sample holder H held by the sample exchange member 12. Transfer to arm 44a.

With the sample holder H held by the holder holding portion 47 of the first arm 44a, the rotation introducing member 38 is rotated to move the slider 42 to the second sample exchange chamber 7, and the first arm 44a The holder holding portion 47 is brought to the position of the holder replacing member 37 supported at the middle position of the vacuum pipe 8. By holding the upper supported portion 34a of the sample holder H by the holder replacing member 37, the holder holding portion 4 is held.
Remove from 7. After removing the sample holder H, the slider 42 is moved to the first sample exchange chamber 6 side, and the second arm 44b fixed to the slider 42 is moved to a position where the holder exchange member 37 is supported. The second
The sample holder H is transferred from the holder exchanging member 37 to the second arm 44b so that the lower supported portion 34b of the sample holder H is supported by the holder support portion 48a of the arm 44b.

With the sample holder H held by the holder holding portion 48 of the second arm 44b, the rotation introducing member 38 is rotated to move the slider 42 to the second sample exchange chamber 7 side. The second arm 44b is moved to the exchange position Q1 (second approach position). Sample holder H held by holder holder 48 of second arm 44b that has moved
Is transferred to the sample exchange member 12 'of the second sample exchange chamber 7 while operating the rotation introducing member 38 and the sample exchange member 12' on the second sample exchange chamber 7 side. The rotation introduction member 38 and the sample exchange member 12 'on the second sample exchange chamber 7 side are arranged at close positions, and the operation position of the rotation introduction member 38 and the exchange position of the sample holder H are easy to see. Transfer work can be performed easily.

After transferring the sample holder H to the sample exchange member 12 'of the second sample exchange chamber 7, the gate valve 4 is opened, and the sample holder H is mounted on the sample stage 9' of the second sample measurement chamber 2. . The sample holder H is placed on the sample stage 9 '.
After that, the sample exchange member 12 'of the second sample exchange chamber 7 is returned to the original position, the gate valve 4 is closed, and the microscopic analysis of the sample S is started. When the sample holder H is transported from the second sample measurement chamber 2 to the first sample measurement chamber 1, the reverse operation is performed.

As described above, the first sample exchange chamber 6
When transferring the sample holder H to the sample exchange chamber 7, the first
Since the first arm 44a receives the sample holder H at the exchange position P1 of the sample exchange chamber 6, the slider 42 supporting the first arm 44a does not have to move to the exchange position P1. Further, since the second arm 44b holding the sample holder H only needs to reach the exchange position Q1 of the second sample exchange chamber 7 on the transfer side, the slider 42 does not have to move to the exchange position Q1. Therefore, the moving distance of the slider 42 that moves within the vacuum pipe 8 maintained in a vacuum can be shortened by the length of the first arm 44a and the second arm 44b. Thus, the sample holder H can be transported over a longer distance than the moving distance of the slider 42 without being exposed to the atmosphere, and a holder transport device smaller than the transport distance of the sample holder H can be obtained. Further, since the holder transfer device of the present invention is disposed in the vacuum pipe 8, the holder transfer member 023 projects outward as in the prior art shown in FIGS. 5 to 8 and obstructs the observer during operation. do not become.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below. (H01) Instead of the rack 43 and the gear G0, it is possible to move the slider 42 by connecting to the rotation introducing member 38 using a mini-wire rope and a pulley. (H02) In this embodiment, the case of the holder transfer device of the XPS (X-ray photoelectron spectroscopy) analyzer and the AES (Auger electron spectroscopy) analyzer has been exemplified. However, the present invention is not limited to the scanning electron microscope and other charged particle beams. The present invention is applicable to a holder transfer device of the apparatus and other various holder transfer devices.

[0029]

The holder conveying apparatus of the present invention described above has the following effects. (E01) The sample holder that holds the sample without being exposed to the atmosphere can be transported over a long distance, and the transfer of the sample holder can be performed near the operation.

[Brief description of the drawings]

FIG. 1 is a plan view of a high vacuum analyzer provided with an embodiment of a holder transfer device of the present invention.

2 is a cross-sectional view of the high vacuum analyzer provided with the embodiment, FIG. 2A is a cross-sectional view taken along line IIA-IIA of FIG. 1, and FIG. 2B is a cross-sectional view taken along line IIB-IIB of FIG. FIG.

FIG. 3 is a sectional view taken along line III-III of FIG.

FIG. 4 is a perspective view of the holder conveying member of the embodiment.

FIG. 5 is an explanatory diagram of a high vacuum analyzer provided with a conventional holder transfer device.

FIG. 6 is a perspective view of a sample holder and a tip end of a sample exchange member (sample exchange rod) of the high vacuum analyzer.

FIG. 7 is an enlarged explanatory view of a sample stage.

FIG. 8 is a partial cross-sectional view of a holder support of the sample stage.

[Explanation of symbols]

H: sample holder 6: first sample exchange chamber, 7: second sample exchange chamber, 8: vacuum pipe, 37: holder exchange member, 41: guide member,
42 slider, 44a first arm, 44b second arm, (47a, 48a) holder holder

Claims (1)

[Claims] 1. A holder transfer device (A) having the following requirements:
01) A vacuum pipe whose interior connecting between the first sample exchange chamber and the second sample exchange chamber is kept at a vacuum, and (A02) the first pipe is moved along a guide member arranged in the vacuum pipe. A first approach position approaching the sample exchange chamber and the second approach position;
(A03) a first arm having a holder holding portion for detachably holding a sample holder at a tip end thereof and being supported by the slider; And (A04) when the slider moves to the first approach position, the tip of the arm moves into the first sample exchange chamber, and when the slider moves to the second approach position, (A05) the first arm whose tip moves to an intermediate position of the vacuum pipe; (A05) the tip of the arm moves into the second sample exchange chamber when the slider moves to the second approach position; (A06) the second arm, which is provided at an intermediate position of the vacuum pipe, wherein the tip end of the arm moves to an intermediate position of the vacuum pipe when the slider moves to the first approach position; 1 arm and the holder-exchange member for exchanging the sample holder between said respective holder holding portion of the second arm tip portion.