JPH1037043A - Reed dents in reed for loom and formation of coating layer on reed dents - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a structure of reed dents for forming a hard carbon layer on these reed dents and a method for forming a coating layer which can form a hard carbon layer of high adhesion on the reed dents. SOLUTION: A plurality of reed dents of which the base material is made of metallic thin plates are arranged in parallel with each other at a prescribed interval in the thickness direction and are firmly held by a frame constituted with a couple of the top blades at the outermost right and left sides and a vertical couple of cope irons and the reed dents has a hard carbon layer 15 formed thereon through the first intermediate layer of titanium 13a and the second intermediate layer 13b of silicon carbide.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a flat wing and a shaped wing in a weaving loom for weaving a cloth, an intermediate layer and a hard carbon film on the wing. And a method for forming a film.

[0002]

2. Description of the Related Art "Osa", a component of a loom, has a function of aligning the warp of the loom and pressing the weft to adjust the weave. The construction of this loom bar will be described with reference to FIG. FIG. 4 is a plan view showing a loom dressing.

[0003] As shown in FIG. 4, a pair of legs 21 are formed by arranging a plurality of blades 11 made of a thin plate of a metal material in parallel with each other at a small interval through which a thread passes. Then, the wing 11 is fixed by the frame body 27 including the main wings 25 provided on both left and right ends and the rims 23 provided on the upper and lower sides to form the hood 21 for the loom.

The wing 11 constituting the wing 21 will be described with reference to the plan views of FIGS. 2 and 3. FIG. The feather 11 shown in FIG.
Is a simple band-like shape called flat wing and is used for water jet looms and air jet looms. The wing 11 shown in FIG. 2 is called a deformed wing, and is used for an air jet loom.

[0005] In the wings 11 of the loom, the stainless steel is often used as a base material. High speed operation of the loom and the emergence of a new material fiber containing glass fiber, carbon fiber, and titanium oxide cause heavy consumption, and the abrasion resistance of the wing 11 is a serious problem.

In other words, if abrasion occurs at the portion of the wing 11 that comes into contact with the yarn, the woven fabric is fluffed, which further causes a thread break.
Has stopped the operation of the loom, removed it from the saw 21, and replaced it with a new one. Since the replacement of the feather 11 requires a great deal of labor and cost, the durability of the feather is the largest factor that determines the work efficiency and cost of the loom.

[0007] In a woven fabric, there is a phenomenon called "weave shrinkage" in which the width dimension of the woven fabric is smaller than the arrangement width of the warp yarns. Therefore, particularly strong frictional force acts on the wings 11 disposed near both side ends of the wing 21, and the durability of the portion in contact with the thread increases the life of the entire wing 21. Is determined.

Therefore, it has been proposed to form a hard carbon film on the upper surface of the base material of the leg 11 in order to improve the durability of the leg 11. This hard carbon film has properties very similar to diamond. That is, the hard carbon film has the features of high mechanical strength, low friction coefficient, better electrical insulation, higher thermal conductivity, and more excellent corrosivity.

For this reason, it has been proposed and put to practical use to coat a hard carbon film on decorative articles, medical equipment, magnetic heads and tools. The hard carbon film is a hydrogenated amorphous carbon film, and has properties similar to diamond as described above, and is therefore called a diamond-like carbon film (DLC) or i-type.
Also called a carbon film.

[0010]

However, if a hard carbon film is formed directly on the upper surface of the substrate of the wing 11, a phenomenon occurs in which the hard carbon film peels from the substrate when the wing 11 is used. . Therefore, it has been proposed to form a hard carbon film via an intermediate layer in order to enhance the adhesion of the hard carbon film. As this intermediate layer, titanium (Ti) and titanium carbide (Ti)
There is a means composed of a two-layer film of (C).

By adopting this means, titanium formed on the base material of the wing 11 can be formed with good adhesion to the base material, and the hard carbon film and the titanium carbide can be formed with good adhesion. The film can be formed with good adhesion without peeling the film.

However, when the intermediate layer and the hard carbon film are formed on the wing 11, the coating is formed while holding both ends of the wing 11 in the longitudinal direction. For this reason, feather 11
In this case, there is a region where the intermediate layer and the hard carbon film are not formed. If the coating is not formed on a part of the wing 11 as described above, the following problems occur.

The yarn is formed by using a kind of glue called an oil agent and twisting a yarn material shorter and thinner than the yarn. This oil agent adheres to the hard carbon film on the surface of the wing 11 in the vicinity of sliding on the thread, and lint also adheres to the surface of the hard carbon film on the surface of the wing 11 near the end of the wing 11. I do. These thread wastes and oils are sludged or carbonized to become brown or black and firmly adhere to the surface.

The carbonized or sludge-formed deposit cannot be removed by mechanical wiping, but is removed by etching using a chemical solution to cause corrosion. As the chemical, sodium hydroxide (NaOH), which is an alkaline solution, is used. The hard carbon film is not etched by this sodium hydroxide.

However, the titanium carbide formed in the lower layer of the hard carbon film is etched by sodium hydroxide penetrating from both sides of the longitudinal edges of the wing 11 at the boundary with the uncoated region. Would. Therefore, the hard carbon film on the upper layer of titanium carbide has a problem that the lower layer film is lifted up and peeled off by etching.

An object of the present invention is to solve the above-mentioned problems and to provide a structure of a wing for forming a hard carbon film with good adhesion to a wing, and a hard carbon film with good adhesion to the wing. And a method for forming a film that can be formed.

[0017]

Means for Solving the Problems In order to achieve the above object, the following means are adopted in the structure of a wing of the present invention and a method of forming a film on the wing.

In the wing for a loom of the present invention, a plurality of wings made of a thin metal material are arranged parallel to each other at a predetermined interval in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame composed of a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of titanium. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide.

The wing for a loom of the present invention is composed of a plurality of wings made of a thin metal material and arranged in parallel with each other at predetermined intervals in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame constituted by a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of chrome. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide.

The feather for a loom of the present invention comprises a plurality of feathers made of a thin metal material made of stainless steel.
For a loom, which is arranged in parallel with each other at a predetermined interval in its thickness direction, and is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims located at the left and right outermost ends. A wing of a wing, wherein the wing is provided with a hard carbon film via a first intermediate layer made of titanium and a second intermediate layer made of silicon carbide.

The feather for a loom of the present invention comprises a plurality of feathers based on a thin metal sheet made of stainless steel.
For a loom, which is arranged in parallel with each other at a predetermined interval in its thickness direction, and is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims located at the left and right outermost ends. The wings of the wings are characterized in that the wings are provided with a hard carbon film via a first intermediate layer made of chromium and a second intermediate layer made of silicon carbide.

In the wing for a loom of the present invention, a plurality of wings made of a thin metal material are arranged parallel to each other at predetermined intervals in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame composed of a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of titanium. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide, and the hard carbon film is provided on a contour including an end face.

The wing for a loom of the present invention comprises a plurality of wings, each of which is made of a thin metal sheet, arranged in parallel with each other at predetermined intervals in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame constituted by a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of chrome. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide, and the hard carbon film is provided on a contour including an end face.

The feather for a loom of the present invention comprises a plurality of feathers made of a metal sheet made of stainless steel as a base material.
For a loom, which is arranged in parallel with each other at a predetermined interval in its thickness direction, and is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims located at the left and right outermost ends. The wings are wings, and the wings are provided with a hard carbon film via a first intermediate layer made of titanium and a second intermediate layer made of silicon carbide. It is characterized in that it is provided on a contour part including the same.

The feather for a loom of the present invention comprises a plurality of feathers based on a thin metal material made of stainless steel.
For a loom, which is arranged in parallel with each other at a predetermined interval in its thickness direction, and is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims located at the left and right outermost ends. The wings are wings, and the wings are provided with a hard carbon film via a first intermediate layer made of chromium and a second intermediate layer made of silicon carbide. It is characterized in that it is provided on a contour part including the same.

The wing for a loom of the present invention is composed of a plurality of wings made of a thin metal material as a base material, which are arranged parallel to each other at predetermined intervals in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame composed of a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of titanium. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide, and the cross section of the saw blade is formed in an arc shape or a corner portion is formed in an arc shape.

In the wing for a loom of the present invention, a plurality of wings made of a thin metal material are arranged in parallel with each other at predetermined intervals in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame constituted by a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of chrome. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide, and the cross section of the saw blade is formed in an arc shape or a corner portion is formed in an arc shape.

The feather for a loom of the present invention comprises a plurality of feathers based on a thin metal plate made of stainless steel.
For a loom, which is arranged in parallel with each other at a predetermined interval in its thickness direction, and is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims located at the left and right outermost ends. The wing is a wing which is provided with a hard carbon film via a first intermediate layer made of titanium and a second intermediate layer made of silicon carbide. It is characterized in that the shape is an arc shape or the corner portion is an arc shape.

The feather for a loom of the present invention comprises a plurality of feathers based on a thin metal sheet made of stainless steel.
For a loom, which is arranged in parallel with each other at a predetermined interval in its thickness direction, and is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims located at the left and right outermost ends. The wings of the wings are provided with a hard carbon film via a first intermediate layer made of chromium and a second intermediate layer made of silicon carbide. It is characterized in that the shape is an arc shape or the corner portion is an arc shape.

The wing for a loom of the present invention comprises a plurality of wings, each of which is made of a thin metal material, arranged in parallel with a predetermined interval in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame composed of a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of titanium. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide, and the hard carbon film is provided on a contour including an end face. Are arc-shaped.

The wing for a loom of the present invention is composed of a plurality of wings made of a thin metal material and arranged parallel to each other at predetermined intervals in the thickness direction. A first feather of a loom for a loom, which is fixedly held by a frame constituted by a pair of main feathers located at the outermost end and a pair of upper and lower rims, wherein the first feather is made of chrome. A hard carbon film is provided via an intermediate layer and a second intermediate layer made of silicon carbide, and the hard carbon film is provided on a contour including an end face. Are arc-shaped.

In the feather for a loom of the present invention, a plurality of feathers made of a metal sheet made of stainless steel as a base material are arranged in parallel with each other at predetermined intervals in the thickness direction. It is a wing in a loom wing that is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims located at both left and right side ends, and the wing is titanium. A hard carbon film is provided via a first intermediate layer made of silicon carbide and a second intermediate layer made of silicon carbide, and the hard carbon film is provided on a contour including an end face. It is characterized in that an arc or a corner is formed in an arc.

In the feather for a loom of the present invention, a plurality of feathers made of a thin metal plate made of stainless steel are arranged in parallel with each other at predetermined intervals in the thickness direction. It is a wing in a loom wing that is fixedly held by a frame composed of a pair of main wings located at both left and right side ends and a pair of upper and lower rims. A hard carbon film is provided via a first intermediate layer made of silicon carbide and a second intermediate layer made of silicon carbide, and the hard carbon film is provided on a contour including an end face. It is characterized in that an arc or a corner is formed in an arc.

According to the method for forming a film on a wing of the present invention, a wing is arranged in a vacuum chamber so as to face a target,
After evacuating the vacuum chamber, argon gas was introduced into the vacuum chamber from a gas inlet, a first intermediate layer made of titanium was formed by a sputtering method, and then the first wing formed the first intermediate layer. Is placed in a vacuum chamber so as to face the target, and after evacuation of the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet, and a second intermediate layer made of a silicon carbide film is formed by a sputtering method. After that, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and The method is characterized in that a DC voltage is applied to the wing, a DC voltage is applied to the anode, an AC voltage is applied to the filament to generate plasma, and a hard carbon film is formed on the wing.

According to the method for forming a film on a wing of the present invention, the wing is arranged in a vacuum chamber so as to face a target,
After evacuating the vacuum chamber, argon gas was introduced into the vacuum chamber from a gas inlet, a first intermediate layer made of titanium was formed by a sputtering method, and then the first wing formed the first intermediate layer. Is placed in a vacuum chamber so as to face the target, and after evacuation of the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet, and a second intermediate layer made of a silicon carbide film is formed by a sputtering method. After that, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and A high-frequency voltage is applied to the wing to generate plasma, and a hard carbon film is formed on the wing.

According to the method for forming a film on a wing of the present invention, a wing is arranged in a vacuum chamber so as to face a target,
After evacuating the vacuum chamber, argon gas was introduced into the vacuum chamber from a gas inlet, a first intermediate layer made of titanium was formed by a sputtering method, and then the first wing formed the first intermediate layer. Is placed in a vacuum chamber so as to face the target, and after evacuation of the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet, and a second intermediate layer made of a silicon carbide film is formed by a sputtering method. After that, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and Apply DC voltage to Saba,
It is characterized in that a hard carbon film is formed on a wing by generating plasma.

According to the method for forming a film on a wing of the present invention, a wing is arranged in a vacuum chamber so as to face a target,
After evacuating the vacuum chamber, argon gas was introduced into the vacuum chamber from a gas inlet, and a first intermediate layer made of chromium was formed by a sputtering method, and then the first wing formed the first intermediate layer. Is placed in a vacuum chamber so as to face the target, and after evacuation of the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet, and a second intermediate layer made of a silicon carbide film is formed by a sputtering method. After that, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and The method is characterized in that a DC voltage is applied to the wing, a DC voltage is applied to the anode, an AC voltage is applied to the filament to generate plasma, and a hard carbon film is formed on the wing.

In the method for forming a film on a wing of the present invention, the wing is arranged in a vacuum chamber so as to face a target,
After evacuating the vacuum chamber, argon gas was introduced into the vacuum chamber from a gas inlet, and a first intermediate layer made of chromium was formed by a sputtering method, and then the first wing formed the first intermediate layer. Is placed in a vacuum chamber so as to face the target, and after evacuation of the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet, and a second intermediate layer made of a silicon carbide film is formed by a sputtering method. After that, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and A high-frequency voltage is applied to the wing to generate plasma, and a hard carbon film is formed on the wing.

According to the method for forming a film on a wing of the present invention, the wing is arranged in a vacuum chamber so as to face a target,
After evacuating the vacuum chamber, argon gas was introduced into the vacuum chamber from a gas inlet, and a first intermediate layer made of chromium was formed by a sputtering method, and then the first wing formed the first intermediate layer. Is placed in a vacuum chamber so as to face the target, and after evacuation of the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet, and a second intermediate layer made of a silicon carbide film is formed by a sputtering method. After that, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and Apply DC voltage to Saba,
It is characterized in that a hard carbon film is formed on a wing by generating plasma.

According to the method of forming a film on a wing of the present invention, a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are vacuumed so as to face a target. After arranging in a tank and evacuating the vacuum tank, an argon gas was introduced into the vacuum tank from a gas inlet, and a first intermediate layer made of titanium was formed by sputtering, and then the first intermediate layer was formed. Is formed, and a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are arranged in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Argon gas is introduced into the vacuum chamber from a gas inlet, a second intermediate layer made of a silicon carbide film is formed by a sputtering method, and then a second intermediate layer is formed, and a contour including an end face is formed. Spacer so that it is exposed A plurality of wings stacked in the thickness direction are placed in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and direct current is applied to the wings. It is characterized by applying a voltage, applying a DC voltage to the anode, applying an AC voltage to the filament to generate plasma, and forming a hard carbon film on the saw blade.

According to the method of forming a film on a wing of the present invention, a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are vacuumed so as to face a target. After arranging in a tank and evacuating the vacuum tank, an argon gas was introduced into the vacuum tank from a gas inlet, and a first intermediate layer made of titanium was formed by sputtering, and then the first intermediate layer was formed. Is formed, and a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are arranged in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Argon gas is introduced into the vacuum chamber from a gas inlet, a second intermediate layer made of a silicon carbide film is formed by a sputtering method, and then a second intermediate layer is formed, and a contour including an end face is formed. Spacer so that it is exposed A plurality of wings stacked in the thickness direction are placed in a vacuum chamber, and after evacuation of the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and high-frequency waves are applied to the wings. The method is characterized in that a hard carbon film is formed on a sasa feather by applying a voltage to generate plasma.

According to the method of forming a film on a wing of the present invention, a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are vacuumed so as to face a target. After arranging in a tank and evacuating the vacuum tank, an argon gas was introduced into the vacuum tank from a gas inlet, and a first intermediate layer made of titanium was formed by sputtering, and then the first intermediate layer was formed. Is formed, and a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are arranged in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Argon gas is introduced into the vacuum chamber from a gas inlet, a second intermediate layer made of a silicon carbide film is formed by a sputtering method, and then a second intermediate layer is formed, and a contour including an end face is formed. Spacer so that it is exposed A plurality of wings stacked in the thickness direction are placed in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and direct current is applied to the wings. The method is characterized in that a hard carbon film is formed on a sasa feather by applying a voltage to generate plasma.

According to the method for forming a film on a wing of the present invention, a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are vacuumed so as to face a target. After arranging in a tank and evacuating the vacuum tank, an argon gas was introduced into the vacuum tank from a gas inlet, and a first intermediate layer made of chromium was formed by a sputtering method. Is formed, and a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are arranged in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Argon gas is introduced into the vacuum chamber from a gas inlet, a second intermediate layer made of a silicon carbide film is formed by a sputtering method, and then a second intermediate layer is formed, and a contour including an end face is formed. Spacer so that it is exposed A plurality of wings stacked in the thickness direction are placed in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and direct current is applied to the wings. It is characterized by applying a voltage, applying a DC voltage to the anode, applying an AC voltage to the filament to generate plasma, and forming a hard carbon film on the saw blade.

According to the method of forming a film on a wing of the present invention, a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour including an end face are vacuum-coated so as to face a target. After arranging in a tank and evacuating the vacuum tank, an argon gas was introduced into the vacuum tank from a gas inlet, and a first intermediate layer made of chromium was formed by a sputtering method. Is formed, and a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are arranged in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Argon gas is introduced into the vacuum chamber from a gas inlet, a second intermediate layer made of a silicon carbide film is formed by a sputtering method, and then a second intermediate layer is formed, and a contour including an end face is formed. Spacer so that it is exposed A plurality of wings stacked in the thickness direction are placed in a vacuum chamber, and after evacuation of the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and high-frequency waves are applied to the wings. The method is characterized in that a hard carbon film is formed on a sasa feather by applying a voltage to generate plasma.

According to the method of forming a film on a wing of the present invention, a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are vacuumed so as to face a target. After arranging in a tank and evacuating the vacuum tank, an argon gas was introduced into the vacuum tank from a gas inlet, and a first intermediate layer made of chromium was formed by a sputtering method. Is formed, and a plurality of wings stacked in the thickness direction via a spacer so as to expose a contour portion including an end face are arranged in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Argon gas is introduced into the vacuum chamber from a gas inlet, a second intermediate layer made of a silicon carbide film is formed by a sputtering method, and then a second intermediate layer is formed, and a contour including an end face is formed. Spacer so that it is exposed A plurality of wings stacked in the thickness direction are placed in a vacuum chamber, and after evacuating the vacuum chamber, a gas containing carbon is introduced into the vacuum chamber through a gas inlet, and direct current is applied to the wings. The method is characterized in that a hard carbon film is formed on a sasa feather by applying a voltage to generate plasma.

The wing for a loom of the present invention is provided with a first intermediate layer made of titanium or chromium, a second intermediate layer made of silicon carbide, and a hard carbon film on a base material. Adopt structure. Silicon carbide, which is the second intermediate layer, has a characteristic that it is hardly etched by an alkaline solution.

For this reason, when forming the intermediate layer and the hard carbon film on the wing, the film is formed by holding both ends of the wing in the longitudinal direction. Even if the alkaline solution enters from the boundary with the region where the hard carbon film is not formed, the silicon carbide film is not corroded. Therefore, the hard carbon film can be formed with good adhesion without removing the carbonized or sludge-formed deposit by etching.

Further, silicon carbide used as the second intermediate layer has the following excellent properties as compared with titanium carbide used in the prior art. That is, silicon and carbon that constitute silicon carbide are:
Both are elements of group IVa of the periodic table, and the hard carbon film is made of carbon. As described above, the silicon carbide and the hard carbon film are composed of the elements of Group IVa of the same periodic table, and both have a diamond structure. As a result, the silicon carbide and the hard carbon film are covalently bonded, and the two films are bonded with high adhesion. As described above, the wing of the present invention using silicon carbide as the second intermediate layer has the effect that the hard carbon film does not peel off and the wear resistance is further improved. For this reason, the reliability of the feather for long-term use can be improved.

Further, in the present invention, means for providing a hard carbon film on a contour portion including an end face with which the yarn comes into contact is employed, and further, a configuration in which the cross-sectional shape of the wing is arc-shaped or the corner portion is arc-shaped is also employed. . When the cross-sectional shape is arc-shaped as described above, the edge effect can be reduced and the intermediate layer and the hard carbon film having uniform film quality can be formed when the intermediate layer and the hard carbon film are formed.

The edge effect means that if the cross-sectional shape is rectangular and the corners are at right angles or acute angles, the charges are likely to concentrate at the corners, and the charges are in a high state compared to other regions. It is. For this reason, the plasma intensity at the corners is higher than in other regions, and becomes unstable.
For this reason, the film quality of the intermediate layer and the hard carbon film is deteriorated at the corners, resulting in a problem that the film thickness is reduced, pinholes are generated, cracks are generated, and peeling is caused. This problem can be solved by setting the cross-sectional shape of the wing to an arc shape or the arc shape at the corner.

Further, when the intermediate layer and the hard carbon film are simultaneously formed on a plurality of wings, the wings and the spacers are alternately overlapped to form a film so as to be sandwiched by the spacers. At this time, the outer shape of the spacer is made smaller than that of the wing so that the contour including the end face of the wing is exposed. When a film is formed in this manner, a large number of wings can be simultaneously processed in a single film forming process.

Further, since the wings are arranged so as to protrude from the end face of the spacer with a slight dimension, and because the wings have a circular cross section or a circular arc at the corner, the intermediate layer can When forming the hard carbon film, the plasma becomes uniform. This is because plasma can be formed flat because the surface step in the film formation region is small, it can be regarded as the same plane for plasma, and since there are no sharp corners, there is no concentration of electric charge, so that the plasma is uniform. Therefore, the intermediate layer and the hard carbon film formed by the uniform plasma have uniform film quality.

[0053]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the structure of a wing in the best mode for carrying out the present invention with reference to the drawings, and a method of forming an intermediate layer and a hard carbon film on the wing will be described. explain.

Before describing the structure of the wing in the embodiment of the present invention and the method of forming the hard carbon film on the wing, FIG. 4 showing the wing to which the wing is applied will be described with reference to FIG. The configuration of the sasa to which the sasa feather is applied is described. As shown in FIG. 4, the leg 21 arranges a plurality of blades 11 made of a thin plate of a metal material in parallel with each other with a small interval between the threads. And the main feather 2 provided at the left and right side end positions
The upper blade 11 is fixed at both upper and lower ends by a frame body 27 composed of a frame 5 and a frame 23 provided at the upper and lower positions to form a leg 21 for a loom.

The wing 11 constituting the wing 21 will be described with reference to the plan views of FIGS. The feather 11 shown in FIG. 3 is called a flat feather, and has a roughly long rectangular plane shape, and is used for a water jet loom or an air jet loom. The wing 11 shown in FIG. 2 is called a deformed wing, and is provided with two chevron-shaped convex portions and a concave portion between them in its planar shape, and is used for an air jet loom. Monkey feather for loom 1
In No. 1, a stainless steel thin plate is preferably used as a base material.

Next, the structure of the wing in the embodiment of the present invention will be described with reference to FIG. FIG. 1 is a sectional view showing the structure of the wing of the present invention. As shown in FIG.
Titanium (Ti) as a first intermediate layer 13a on one base material
Is provided. The thickness of the first intermediate layer 13a is set to about 0.5 μm. Further, a second intermediate layer 13 made of silicon carbide (SiC) is formed on the upper surface of the first intermediate layer 13a.
b is provided. The thickness of the second intermediate layer 13b is also 0.5 μm.
About.

Further, a hard carbon film 15 is provided on the upper surface of the second intermediate layer 13b. This hard carbon film 15
The film thickness may be adjusted depending on the application.
The thickness is set to about 5 to 5 μm.

The hard carbon film 15 may be provided on the entire surface except for the upper and lower ends which are held during the formation of the film. However, the hard carbon film 15 may be in contact with the thread shown in the plan view of FIG. 5 and the sectional views of FIGS. May be provided only in the region where That is, wing 1
The first intermediate layer 13a, the second intermediate layer 13b, and the hard carbon film 15 are provided on the contour portion 11a including the first end face.

As described above, the feather 11 for the loom in the embodiment of the present invention is formed by sequentially forming the first titanium
, A second intermediate layer 13b made of silicon carbide, and a hard carbon film 15 are provided. The silicon carbide serving as the second intermediate layer 13b has a characteristic that it is hardly etched by an alkaline solution.

For this reason, the first intermediate layer 13 a
When the hard carbon film 15 and the second intermediate layer 13b are formed, the first intermediate layer 13a and the second intermediate layer 1
Even if an alkaline solution enters from the boundary between 3b and the region where the hard carbon film 15 is not formed, the silicon carbide film is not corroded. Therefore, the hard carbon film 15 is not peeled off by the etching treatment using a sodium hydroxide solution to remove the carbonized or sludge-formed deposits of the oil agent and the lint, and have good adhesion to the wings 11. Can be formed.

Further, the silicon carbide used as the second intermediate layer 13b has a characteristic that it has better adhesion than titanium carbide used in the prior art. This is for the following reasons. That is, both silicon and carbon constituting silicon carbide are elements of Group IVa of the periodic table, and the hard carbon film 15 is composed of carbon. As described above, the silicon carbide and the hard carbon film 15 are composed of the elements of Group IVa of the same periodic table, and both have a diamond structure. As a result, the silicon carbide and the hard carbon film are covalently bonded, and the two films are bonded with high adhesion. As described above, the wing 11 of the present invention in which silicon carbide is used as the second intermediate layer 13b has the effect that the hard carbon film 15 does not peel off and the wear resistance is further improved. For this reason, the reliability of the feather for long-term use can be improved.

Here, the wear resistance of the feather of the structure of the present invention, the structure of the prior art and the feather of the prior art were compared with a wear tester.
The abrasion tester used is a trade name N of Suga Tester Co., Ltd.
A wear test was performed using US-ISO-2. The configuration of the wear tester will be described with reference to FIG. FIG. 14 is a side view showing the wear tester.

As shown in FIG. 14, the test piece 33 on which the coating was formed was placed with the coating forming surface facing downward.
7 and the test piece holding screw 39 are fixed to the opening of the test piece mounting base 35. Further, abrasive paper (not shown) is applied to the wear wheel 31.
Paste. Further, an upward load is applied to the wear wheel 31 so as to press the abrasive paper against the test piece 33 by using a balance mechanism (not shown).

Further, the test piece mounting table 35 is reciprocated by a motor (not shown), and the wear wheel 33 is rotated by an angle of 0.9 ° every time the test piece mounting table 35 reciprocates. Therefore, the test piece 33 always comes into contact with a new unworn area of the abrasive paper attached to the drive wheel 31. Further, the number of reciprocations can be automatically set, and the wear tester automatically stops at the set number of times.

According to the present invention, the first intermediate layer 13a is formed of titanium and the second intermediate layer 13b is formed of silicon carbide.
A hard carbon film 15 was provided thereon. In comparison with this, the prior art coating configuration is such that the first intermediate layer 13a is made of titanium,
The intermediate layer 13b is formed of titanium carbide, and the hard carbon film 15 is provided on the second intermediate layer 13b. The thickness of the intermediate layer is determined by the first intermediate layer 13a and the second intermediate layer 13a.
b) was 0.5 μm, the thickness of the hard carbon film 15 was 1.0 μm, and the thickness was the same in the present invention and the prior art. These coatings were formed as a test piece 33 on stainless steel (SUS304) having a plate thickness of 1 mm and a mirror-finished surface.

Further, the abrasive paper to be attached to the wear wheel 33 is as follows.
SiC of mesh No. 600 was used, the contact load between the abrasive paper and the test piece 33 was 830 g, and the number of reciprocating motions of the test piece mounting table 35 was 200 times. The test was performed.

As a result of the abrasion test, the test piece 33 having the coating structure of the present invention hardly peeled off the coating, and the surface condition of the hard carbon film 15 did not change. On the other hand, in the test piece 33 having the coating structure of the prior art, the coating is peeled off and the surface of the test piece 33 can be visually observed, and the hard carbon film 15, the second intermediate layer 13b, and the second intermediate layer 13a It turned out that it peeled.

The difference between the coating structure of the present invention and the prior art is only the difference in the coating material of the second intermediate layer 13b of silicon carbide and titanium carbide. And, as described above, the silicon carbide of the second intermediate layer 13b in the present invention has higher adhesion to the hard carbon film than titanium carbide. Thereby, the wear resistance of the coating is improved in the wing 11 of the present invention.

In the embodiment of the present invention, as shown in FIGS. 5, 6 and 7, the first intermediate layer 13a and the second intermediate layer 13a are formed on the contour 11a including the end face with which the thread comes into contact. Of the intermediate layer 13b and the hard carbon film. Furthermore, the sectional shape of the wing 11 is shown in FIG.
And a configuration in which a corner portion is formed in an arc shape as shown in FIG.
When the cross-sectional shape is arc-shaped as described above, the edge effect can be reduced and the intermediate layer and the hard carbon film having uniform film quality can be formed when the intermediate layer and the hard carbon film are formed.

The edge effect means that if the cross-sectional shape is rectangular and the corner is a right angle or an acute angle, the charge tends to concentrate on the corner, and the charge becomes high compared to other regions. It is. For this reason, the plasma intensity at the corners is higher than in other regions, and becomes unstable.
For this reason, the film quality of the intermediate layer and the hard carbon film is deteriorated at the corners, resulting in a problem that the film thickness is reduced, pinholes are generated, cracks are generated, and peeling is caused.

As shown in FIGS. 6 and 7, this problem can be solved by setting the cross-sectional shape of the wing 11 to an arc shape or an arc at a corner. This is because there is no sharp corners in the film formation region and there is no concentration of electric charge, so that the plasma becomes uniform. The intermediate layer and the hard carbon film formed by the uniform plasma have uniform film quality.

Further, the hard carbon film 15 provided on the surface of the present invention has excellent characteristics as described below. (A) Excellent surface smoothness. For this reason, it is possible to suppress the occurrence of fluffing of the yarn, and to suppress the occurrence of cutting of a thinner and shorter yarn material than the yarn twisted by using an oil agent. improves. (B) The oil agent twisting the yarn material does not easily adhere to the hard carbon film. For this reason, in order to remove the oil agent adhering to the wings, the number of times the loom is stopped can be reduced, and the operating time can be greatly extended. (C) The coefficient of friction is small. The friction coefficient of the hard carbon film is about 0.1, and the loom can be operated at high speed. (D) Hardness is high. The hard carbon film having a Vickers hardness Hv = 4000 has high hardness, and the wear resistance to special fibers such as glass fibers, carbon-containing fibers, and titanium oxide (TiO) -containing fibers is dramatically improved.

Next, a method of forming a coating of the intermediate layer and the hard carbon film for forming the coating structure shown in FIG. 1 will be described. First, a method for forming an intermediate layer between the first intermediate layer and the second intermediate layer will be described with reference to FIG. FIG. 11 is a cross-sectional view illustrating a method for forming an intermediate layer according to the embodiment of the present invention. Hereinafter, description will be made with reference to FIG. 11 and FIG. 1 alternately.

As shown in FIG. 11, a target 55 made of a titanium material, which is a material of the first intermediate layer 13a, is placed near the wall surface of the vacuum chamber 61. And this target 5
The wing 11 that forms the first intermediate layer 13a is disposed so as to face the wing 5. The wing 11 is connected to a DC power supply 73. Further, the target 55 is a target power supply 5
Connect to 7.

Then, the vacuum chamber 6 is evacuated by exhaust means (not shown).
1 so that the degree of vacuum is 3 × 10 ⁻⁵ torr or less.
Vacuum is exhausted from the exhaust port 65. Then, the gas inlet 63
Then, an argon (Ar) gas is introduced as a sputter gas, and the degree of vacuum in the vacuum chamber 61 is adjusted to 3 × 10 ⁻³ torr.

Thereafter, the DC power supply 7
A DC negative voltage of 3 to -50 V is applied. Also, the target 55 has a minus 50 from the target power supply 57.
A DC voltage of 0 V to 600 V is applied. Then, plasma is generated in the vacuum chamber 61, and the surface of the target 55 is sputtered by ions in the plasma. The material of the first intermediate layer 13a made of titanium that has been beaten from the surface of the target 55 adheres to the wing 11 and forms an intermediate layer 13a made of a titanium film on the surface of the wing 11. The intermediate layer 13a made of the titanium film has a thickness of 0.5
It is formed with a thickness of about μm.

At this time, the first intermediate layer 13a may be formed while holding both ends of the blade 11 in the longitudinal direction, or a film may be formed by the method shown in FIGS. 12 and 13. . FIG. 12 and FIG. 13 show a method of simultaneously forming a film on a plurality of feathers, and are a plan view and a sectional view, respectively. In this case, an embodiment is shown in which a film is formed on the contour including the end face of the wing.

As shown in FIG. 12 and FIG.
The wings 11 are overlapped between the spacers 41 whose outer shape is small so that the end face 1 and the contour are exposed. When the first intermediate layer 13a is formed in this manner, a film can be formed on the end face and the contour exposed from the spacer 41. The width of the contour is 0.2 mm to 1.0 mm.

Further, when the first intermediate layer 13a is simultaneously formed on a plurality of wings 11, the wings and the spacers are alternately overlapped so as to sandwich the spacers 41 so as to form a film. At this time, the outer shape of the spacer 41 is made smaller than that of the wing 11 so that a contour including the end face of the wing 11 is exposed. When a film is formed in this manner, a large number of wings can be simultaneously processed in a single film forming process.

Further, since the wing 11 is disposed so as to protrude from the end face of the spacer 41 with a small dimension, and because the wing 11 has an arc-shaped cross section or an arc-shaped corner, When forming the first intermediate layer 13a, the plasma becomes uniform. This is because plasma can be formed flat because the surface step in the film formation region is small, it can be regarded as the same plane for plasma, and since there are no sharp corners, there is no concentration of electric charge, so that the plasma is uniform. Therefore, the titanium film as the first intermediate layer 13a formed by the uniform plasma has a uniform film quality.

The titanium formed as the first intermediate layer 13a can be formed with good adhesion to the stainless steel material of the wing 11 base material. Chromium (Cr) can also be used as the first intermediate layer 13a, and has the same function as titanium.

The method of forming the second intermediate layer 13b formed on the upper surface of the first intermediate layer 13a can be formed by the same method as the method of forming the film of the first intermediate layer 13a. A film is formed of a one-to-one alloy material of (Si) and carbon (C). The intermediate layer 13b made of a silicon carbide film is formed to have a thickness of about 0.5 μm. The second intermediate layer 13b made of silicon carbide is used as the first intermediate layer 13a
And it can be formed with high adhesion to the hard carbon film 15. At this time, the second intermediate layer 13b may be formed by holding both ends of the wing 11 and the second intermediate layer 13b may be formed by the method shown in FIGS. .

Next, a method of forming a hard carbon film on the wing 11 on which the first intermediate layer 13a and the second intermediate layer 13b are formed will be described with reference to FIGS. 8, 9 and 10. FIG. .
That is, there are three means for forming the hard carbon film in the embodiment of the present invention. First, a method for forming a hard carbon film will be described with reference to FIG. FIG. 5 is a cross-sectional view showing a method for forming a hard carbon film on a wing in the embodiment of the present invention. Hereinafter, a description will be given with reference to FIG. 8 showing an apparatus for forming a hard carbon film and FIG.

As shown in FIG. 8, in a vacuum chamber 61 having a gas introduction port 63 and an exhaust port 65, a wing 11 for forming a hard carbon film on the upper surface of the second intermediate layer is disposed. Then, the inside of the vacuum chamber 61 is evacuated from the exhaust port 65 by an exhaust means (not shown) so that the degree of vacuum becomes 3 × 10 ⁻⁵ torr or less. Thereafter, benzene (C6 H6) as a gas containing carbon is introduced into the vacuum chamber 61 from the gas inlet 63, and the pressure in the vacuum chamber 61 is controlled to be 5 × 10 ^-3 torr.

Thereafter, a DC voltage is applied to the wing 11 from the DC power supply 73, a DC voltage is applied to the anode 79 from the anode power supply 75, and
, An AC voltage is applied from a filament power supply 77.

At this time, a DC voltage applied from the DC power supply 73 to the wing 11 is −3 kV, and a DC voltage applied from the anode power supply 75 to the anode 79 is +50 V. Further, a voltage applied from the filament power supply 77 to the filament 81 is an AC voltage of 10 V so that a current of 30 A flows. Then, plasma is generated in a region around the wing 11 in the vacuum chamber 61,
A hard carbon film is formed on the wing 11. The formed film thickness of the hard carbon film 15 is 1 μm to 5 μm. Also when the hard carbon film 15 is formed, as shown in FIGS.
A film is formed such that the spacer 41 and the wing 11 overlap. Alternatively, the hard carbon film 15 may be formed while holding both ends of the wing 11.

Next, a method of forming a hard carbon film on a wing on which an intermediate layer is formed in an embodiment different from the above description will be described with reference to FIG. FIG. 9 is a cross-sectional view illustrating a method for forming a hard carbon film according to an embodiment of the present invention. Hereinafter, a method of forming a hard carbon film on a sasa feather using FIG. 9 and FIG. 1 alternately will be described.

As shown in FIG. 9, in a vacuum chamber 61 having a gas inlet 63 and an exhaust port 65, a wing 11 for forming a hard carbon film on the upper surface of the second intermediate layer is arranged. Then, the inside of the vacuum chamber 61 is exhausted by an exhaust unit (not shown in FIG. 9).
After evacuating from the exhaust port 65 so that the degree of vacuum is 3 × 10 ⁻⁵ torr or less, methane gas (CH 4) as a gas containing carbon is introduced from the gas inlet port 63 into the vacuum chamber 61 to form a vacuum. Adjust the degree to 0.1 torr.

A high-frequency voltage is applied to the wing 11 from a high-frequency power source 69 having an oscillation frequency of 13.56 MHz via a matching circuit 67. At this time, since the plasma is generated on the outer periphery of the wing 11,
The hard carbon film 15 can be formed on the surface of the wing 11. When the hard carbon film 15 is formed, a film is formed by overlapping the spacer 41 and the wing 11 as shown in FIGS. 12 and 13 where the end face and the contour of the wing 11 are exposed. Alternatively, the hard carbon film 15 may be formed while holding both ends of the wing 11.

Next, a method of forming a hard carbon film on the upper surface of an intermediate layer of a wing in a different embodiment from the above description will be described with reference to FIG. FIG. 10 is a cross-sectional view illustrating a method for forming a hard carbon film according to an embodiment of the present invention. Hereinafter, a method of forming a hard carbon film on a saw blade using FIGS. 10 and 1 alternately will be described.

As shown in FIG. 10, in a vacuum chamber 61 having a gas introduction port 63 and an exhaust port 65, a wing 11 for forming a hard carbon film is disposed. Then, the inside of the vacuum chamber 61 is evacuated from the exhaust port 65 by exhaust means (not shown) so that the degree of vacuum is 3 × 10 ⁻⁵ torr or less. Thereafter, methane gas (CH4) as a gas containing carbon is introduced into the vacuum chamber 61 from the gas inlet 63 to adjust the degree of vacuum to 0.1 torr.

The wing 11 is connected to a DC power supply 73.
From which a DC voltage of -600 V is applied to generate plasma. At this time, since the plasma is generated on the outer periphery of the wing 11, the hard carbon film 15 can be formed on the surface of the wing 11. When the hard carbon film 15 is formed, the spacer 41 is exposed as shown in FIGS.
A film is formed such that the feather 11 and the feather 11 overlap. Alternatively, the hard carbon film 15
May be formed.

In the description of the embodiment of the method of forming the hard carbon film 15 of the present invention described with reference to FIGS. 8 to 10, the embodiment using methane gas or benzene gas as the gas containing carbon has been described. It is also possible to use a gas containing carbon such as ethylene in addition to methane, or a vapor of a liquid containing carbon such as hexane.

In the formation of the first intermediate layer 13a and the second intermediate layer 13b in the embodiment described with reference to FIG. 11, the wing 11 may be rotated.

[0095]

As apparent from the above description, the feather for a loom of the present invention comprises a first intermediate layer made of titanium or chromium and a second intermediate layer made of silicon carbide on a base material. And a structure in which a hard carbon film is provided. This second intermediate layer, silicon carbide,
It has the property of not being etched by an alkaline solution.

For this reason, when the intermediate layer and the hard carbon film are formed on the wings, the film is formed while holding both ends in the longitudinal direction of the wings. Even if the alkaline solution enters from the boundary with the region where the hard carbon film is not formed, the silicon carbide film is not corroded. Therefore, the hard carbon film can be formed with good adhesion without removing the carbonized or sludge-formed deposit by etching.

Further, silicon carbide used as the second intermediate layer has the following excellent properties as compared with titanium carbide used in the prior art. That is, silicon and carbon that constitute silicon carbide are:
Both are elements of group IVa of the periodic table, and the hard carbon film is made of carbon. As described above, the silicon carbide and the hard carbon film are composed of the elements of Group IVa of the same periodic table, and both have a diamond structure. As a result, the silicon carbide and the hard carbon film are covalently bonded, and the two films are bonded with high adhesion. As described above, the wing of the present invention using silicon carbide as the second intermediate layer has the effect that the hard carbon film does not peel off and the wear resistance is further improved. For this reason, the reliability of the feather for long-term use can be improved.

Further, in the present invention, means for providing a hard carbon film on the contour including the end face with which the yarn comes into contact is employed, and further, a configuration in which the cross-sectional shape of the wing is arc-shaped or the corner is arc-shaped is also employed. . When the cross-sectional shape is arc-shaped as described above, the edge effect can be reduced and the intermediate layer and the hard carbon film having uniform film quality can be formed when the intermediate layer and the hard carbon film are formed.

Further, when the intermediate layer and the hard carbon film are simultaneously formed on a plurality of wings, the wings and the spacers are alternately overlapped to form a film so as to be sandwiched by the spacers. At this time, the outer shape of the spacer is made smaller than that of the wing so that the contour including the end face of the wing is exposed. When a film is formed in this manner, a large number of wings can be simultaneously processed in a single film forming process.

Further, since the wings are arranged so as to protrude from the end face of the spacer with a slight dimension, and because the wings have a circular cross section or a circular arc at the corner, the intermediate layer and When forming the hard carbon film, the plasma becomes uniform.

This is because plasma can be formed flat because the surface step in the film formation region is small, it can be regarded as the same plane for the plasma, and since there is no sharp corner, there is no concentration of electric charge and the plasma is uniform. Become Therefore, the intermediate layer and the hard carbon film formed by the uniform plasma have uniform film quality.

[Brief description of the drawings]

FIG. 1 is an enlarged cross-sectional view showing the surface of a feather in a weaving loom according to an embodiment of the present invention.

FIG. 2 is a plan view showing an odd-shaped wing of a wing in a weaving machine according to an embodiment of the present invention and a conventional technique;

FIG. 3 is a plan view showing a flat wing among the wings of the embodiment of the present invention and the conventional looms for a loom;

FIG. 4 is a plan view showing an embodiment of the present invention and a conventional technique, in which a plurality of feathers are fixedly configured.

FIG. 5 is a plan view showing a state in which a coat is formed on a feather in a weaving loom according to an embodiment of the present invention.

FIG. 6 is a cross-sectional view showing a state in which a film is formed on a feather in a weaving loom according to an embodiment of the present invention.

FIG. 7 is a cross-sectional view showing a state in which a film is formed on a feather in a weaving loom according to an embodiment of the present invention.

FIG. 8 is a cross-sectional view showing a method of forming a hard carbon film in a method of forming a film on a wing of a loom of the embodiment of the present invention.

FIG. 9 is a cross-sectional view illustrating a method of forming a hard carbon film in a method of forming a film on a wing of a loom according to an embodiment of the present invention.

FIG. 10 is a cross-sectional view showing a method of forming a hard carbon film in a method of forming a film on a wing of a loom of the embodiment of the present invention.

FIG. 11 is a cross-sectional view showing a method of forming a coating of an intermediate layer in a method of forming a coating on a wing of a loom of the embodiment of the present invention.

FIG. 12 is a plan view showing a method for forming a coating film of an intermediate layer and a hard carbon film on a wing of a loom for looms according to an embodiment of the present invention.

FIG. 13 is a cross-sectional view showing a method of forming a coating of an intermediate layer and a hard carbon film on a wing of a loom for looms according to an embodiment of the present invention.

FIG. 14 is a side view showing the structure of a wear tester for testing the wear resistance of a coating.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Osa feather 13a 1st intermediate layer 13b 2nd intermediate layer 15 Hard carbon film 21 Osa 61 Vacuum tank 63 Gas inlet

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takashi Toida 840 Takeno, Shimotomi, Tokorozawa-shi, Saitama Citizen Watch Co., Ltd.

Claims (28)

[Claims] 1. A pair of parent wings, which are arranged in parallel with each other at predetermined intervals in the thickness direction thereof, and a plurality of wings made of a thin metal material as a base material. A wing of a loom for a loom which is fixed and held by a frame composed of a wing and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of titanium and a second layer made of silicon carbide. And a hard carbon film provided between the second intermediate layer and the second intermediate layer. 2. A pair of parent wings, which are arranged in parallel with each other at predetermined intervals in the thickness direction of a plurality of wings made of a metal material thin plate as a base material, and which are located at both left and right extreme ends. A wing of a loom for a loom fixedly held by a frame composed of wings and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of chromium and a second made of silicon carbide. And a hard carbon film provided between the second intermediate layer and the second intermediate layer. 3. A plurality of wings made of a thin metal material made of stainless steel as a base material are arranged in parallel with each other at a predetermined interval in a thickness direction thereof, and are arranged at both left and right outermost ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, wherein the first wing comprises a first intermediate layer made of titanium and a silicon car. A wing of a loom for a loom, wherein a hard carbon film is provided via a second intermediate layer made of a cutting tool. 4. A plurality of feathers made of a metal sheet made of stainless steel as a base material are arranged in parallel with each other at predetermined intervals in a thickness direction thereof, and are located at both left and right outermost ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, the wing being a first intermediate layer made of chrome and a silicon car. A wing of a loom for a loom, wherein a hard carbon film is provided via a second intermediate layer made of a cutting tool. 5. A pair of parent wings, which are arranged in parallel with each other at predetermined intervals in the thickness direction thereof, and a plurality of wings made of a metal material thin plate as a base material. A wing of a loom for a loom which is fixed and held by a frame composed of a wing and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of titanium and a second layer made of silicon carbide. And a hard carbon film provided on the contour portion including the end face, with the hard carbon film interposed between the second intermediate layer and the second intermediate layer. 6. A pair of parent wings, which are arranged in parallel with each other at predetermined intervals in the thickness direction of a plurality of wings made of a metal material thin plate as a base material, and which are located at both left and rightmost ends. A wing of a loom for a loom fixedly held by a frame composed of wings and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of chromium and a second made of silicon carbide. And a hard carbon film provided on the contour portion including the end face, with the hard carbon film interposed between the second intermediate layer and the second intermediate layer. 7. A plurality of feathers made of a metal sheet made of stainless steel as a base material are arranged in parallel with each other at a predetermined interval in a thickness direction thereof, and are disposed at both left and right outermost ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, wherein the first wing comprises a first intermediate layer made of titanium and a silicon car. A feather for a loom for a loom, characterized in that a hard carbon film is provided through a second intermediate layer made of a cutting tool, and the hard carbon film is provided on a contour including an end face. 8. A plurality of feathers, each of which is made of a thin metal material made of stainless steel as a base material, are arranged parallel to each other at predetermined intervals in a thickness direction thereof, and are located at both left and right extreme ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, the wing being a first intermediate layer made of chrome and a silicon car. A feather for a loom for a loom, characterized in that a hard carbon film is provided through a second intermediate layer made of a cutting tool, and the hard carbon film is provided on a contour including an end face. 9. A pair of parent wings, each of which is arranged in parallel with each other at predetermined intervals in the thickness direction of a plurality of wings made of a thin metal material as a base material, A wing of a loom for a loom which is fixed and held by a frame composed of a wing and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of titanium and a second layer made of silicon carbide. A hard carbon film interposed between the second intermediate layer and the second intermediate layer, and further, the cross section of the blade is formed in an arc shape or a corner portion is formed in an arc shape. 10. A pair of parent wings, which are arranged in parallel with each other at predetermined intervals in the thickness direction of a plurality of feathers made of a metal material thin plate, A wing of a loom for a loom fixedly held by a frame composed of wings and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of chromium and a second made of silicon carbide. A hard carbon film interposed between the second intermediate layer and the second intermediate layer, and further, the cross section of the blade is formed in an arc shape or a corner portion is formed in an arc shape. 11. A plurality of feathers made of a thin metal plate made of stainless steel as a base material are arranged in parallel with each other at a predetermined interval in a thickness direction thereof, and are disposed at both left and right outermost ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, wherein the first wing comprises a first intermediate layer made of titanium and a silicon car. A hard carbon film is provided via a second intermediate layer made of a cutting tool, and further, the cross section of the blade is formed in an arc shape or a corner portion is formed in an arc shape. . 12. A plurality of feathers made of a metal sheet made of stainless steel as a base material are arranged in parallel with each other at predetermined intervals in the thickness direction thereof, and are located at both left and right outermost ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, the wing being a first intermediate layer made of chrome and a silicon car. A hard carbon film is provided via a second intermediate layer made of a cutting tool, and further, the cross section of the blade is formed in an arc shape or a corner portion is formed in an arc shape. . 13. A pair of parent wings, which are arranged in parallel with each other at predetermined intervals in the thickness direction of a plurality of wings made of a metal material thin plate, A wing of a loom for a loom which is fixed and held by a frame composed of a wing and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of titanium and a second layer made of silicon carbide. A hard carbon film is provided via the intermediate layer of No. 2 and the hard carbon film is provided on a contour including an end face,
The wing of a loom for a loom, wherein the wing has an arc-shaped cross section or an arc at a corner. 14. A pair of parent wings, which are arranged in parallel with each other at predetermined intervals in the thickness direction of a plurality of wings made of a thin metal material substrate, A wing of a loom for a loom fixedly held by a frame composed of wings and a pair of upper and lower rims, wherein the wing is a first intermediate layer made of chromium and a second made of silicon carbide. A hard carbon film is provided via the intermediate layer of No. 2 and the hard carbon film is provided on a contour including an end face,
The wing of a loom for a loom, wherein the wing has an arc-shaped cross section or an arc at a corner. 15. A plurality of feathers made of a thin metal plate made of stainless steel as a base material are arranged parallel to each other at predetermined intervals in a thickness direction thereof, and are arranged at both left and right outermost ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, wherein the first wing comprises a first intermediate layer made of titanium and a silicon car. A hard carbon film is provided via a second intermediate layer made of a cutting tool, and the hard carbon film is provided on a contour including an end face,
The wing of a loom for a loom, wherein the wing has an arc-shaped cross section or an arc at a corner. 16. A plurality of wings made of a metal sheet made of stainless steel as a base material are arranged in parallel with each other at a predetermined interval in a thickness direction thereof, and are arranged at both left and right outermost ends. Of a loom for a loom, which is fixedly held by a frame composed of a pair of main wings and a pair of upper and lower rims, the wing being a first intermediate layer made of chrome and a silicon car. A hard carbon film is provided via a second intermediate layer made of a cutting tool, and the hard carbon film is provided on a contour including an end face,
The wing of a loom for a loom, wherein the wing has an arc-shaped cross section or an arc at a corner. 17. A wing is disposed in a vacuum chamber so as to face a target, and after evacuating the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet and is made of titanium by a sputtering method. After forming the first intermediate layer, the wings on which the first intermediate layer is formed are placed in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Into the vacuum chamber,
A second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and the inside of the vacuum chamber is evacuated. A gas containing carbon is introduced into the vacuum chamber, a DC voltage is applied to the wings, a DC voltage is applied to the anode, and an AC voltage is applied to the filament to generate plasma, and a hard carbon film is formed on the wings. A method of forming a film on a rabbit feather, characterized by forming the film. 18. A wing is arranged in a vacuum chamber so as to face a target, and after evacuating the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet and is made of titanium by a sputtering method. After forming the first intermediate layer, the wings on which the first intermediate layer is formed are placed in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Into the vacuum chamber,
A second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and the inside of the vacuum chamber is evacuated. A carbon-containing gas is introduced into a vacuum chamber, a high-frequency voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Method. 19. A wing is disposed in a vacuum chamber so as to face a target, and after evacuating the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet and is made of titanium by a sputtering method. After forming the first intermediate layer, the wings on which the first intermediate layer is formed are placed in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Into the vacuum chamber,
A second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and the inside of the vacuum chamber is evacuated. A gas containing carbon is introduced into a vacuum chamber, a DC voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Method. 20. A wing is arranged in a vacuum chamber so as to face a target, and after evacuating the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet and is made of chromium by a sputtering method. After forming the first intermediate layer, the wings on which the first intermediate layer is formed are placed in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Into the vacuum chamber,
A second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and the inside of the vacuum chamber is evacuated. A gas containing carbon is introduced into the vacuum chamber, a DC voltage is applied to the wings, a DC voltage is applied to the anode, and an AC voltage is applied to the filament to generate plasma, and a hard carbon film is formed on the wings. A method of forming a film on a rabbit feather, characterized by forming the film. 21. A wing is arranged in a vacuum chamber so as to face a target, and after evacuating the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet and is made of chromium by a sputtering method. After forming the first intermediate layer, the wings on which the first intermediate layer is formed are placed in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Into the vacuum chamber,
A second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and the inside of the vacuum chamber is evacuated. A carbon-containing gas is introduced into a vacuum chamber, a high-frequency voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Method. 22. A wing is arranged in a vacuum chamber so as to face a target, and after evacuating the vacuum chamber, an argon gas is introduced into the vacuum chamber from a gas inlet and is made of chromium by a sputtering method. After forming the first intermediate layer, the wings on which the first intermediate layer is formed are placed in a vacuum chamber so as to face the target, and the inside of the vacuum chamber is evacuated. Into the vacuum chamber,
A second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, the wings on which the second intermediate layer is formed are arranged in a vacuum chamber, and the inside of the vacuum chamber is evacuated. A gas containing carbon is introduced into a vacuum chamber, a DC voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Method. 23. A plurality of wings stacked in the thickness direction via a spacer so as to expose a contour including an end face are arranged in a vacuum chamber so as to face a target, and the inside of the vacuum chamber is evacuated. Thereafter, an argon gas is introduced into the vacuum chamber from a gas inlet, a first intermediate layer made of titanium is formed by a sputtering method, and then a first intermediate layer is formed, and a contour including an end face is exposed. A plurality of wings stacked in the thickness direction via a spacer are placed in a vacuum chamber so as to face the target, and after evacuating the vacuum chamber, argon gas is introduced into the vacuum chamber from the gas inlet. And a second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, a second intermediate layer is formed, and the second intermediate layer is formed in a thickness direction via a spacer so as to expose a contour including an end face. Pile of multiple pieces It was placed in a vacuum chamber, after evacuating the vacuum chamber,
A gas containing carbon is introduced into the vacuum chamber from the gas inlet, a DC voltage is applied to the wing, a DC voltage is applied to the anode, an AC voltage is applied to the filament, and a plasma is generated. A method for forming a film on a wing, comprising forming a carbon film. 24. A plurality of wings stacked in the thickness direction via a spacer so as to expose a contour including an end face are arranged in a vacuum chamber so as to face a target, and the inside of the vacuum chamber is evacuated. Thereafter, an argon gas is introduced into the vacuum chamber from a gas inlet, a first intermediate layer made of titanium is formed by a sputtering method, and then a first intermediate layer is formed, and a contour including an end face is exposed. A plurality of wings stacked in the thickness direction via a spacer are placed in a vacuum chamber so as to face the target, and after evacuating the vacuum chamber, argon gas is introduced into the vacuum chamber from the gas inlet. And a second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, a second intermediate layer is formed, and the second intermediate layer is formed in a thickness direction via a spacer so as to expose a contour including an end face. Pile of multiple pieces It was placed in a vacuum chamber, after evacuating the vacuum chamber,
A gas containing carbon is introduced into the vacuum chamber from a gas inlet, a high-frequency voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Film formation method. 25. A plurality of wings stacked in the thickness direction via a spacer so as to expose a contour including an end face are arranged in a vacuum chamber so as to face a target, and the inside of the vacuum chamber is evacuated. Thereafter, an argon gas is introduced into the vacuum chamber from a gas inlet, a first intermediate layer made of titanium is formed by a sputtering method, and then a first intermediate layer is formed, and a contour including an end face is exposed. A plurality of wings stacked in the thickness direction via a spacer are placed in a vacuum chamber so as to face the target, and after evacuating the vacuum chamber, argon gas is introduced into the vacuum chamber from the gas inlet. And a second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, a second intermediate layer is formed, and the second intermediate layer is formed in a thickness direction via a spacer so as to expose a contour including an end face. Pile of multiple pieces It was placed in a vacuum chamber, after evacuating the vacuum chamber,
A gas containing carbon is introduced into the vacuum chamber from a gas inlet, a DC voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Film formation method. 26. A plurality of wings stacked in the thickness direction via a spacer so as to expose a contour including an end face are arranged in a vacuum chamber so as to face a target, and the inside of the vacuum chamber is evacuated. Thereafter, an argon gas is introduced into the vacuum chamber through a gas inlet, a first intermediate layer made of chromium is formed by a sputtering method, and then a first intermediate layer is formed, and a contour including an end face is exposed. A plurality of wings stacked in the thickness direction via a spacer are placed in a vacuum chamber so as to face the target, and after evacuating the vacuum chamber, argon gas is introduced into the vacuum chamber from the gas inlet. And a second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, a second intermediate layer is formed, and the second intermediate layer is formed in a thickness direction via a spacer so as to expose a contour including an end face. Pile of multiple pieces It was placed in a vacuum chamber, after evacuating the vacuum chamber,
A gas containing carbon is introduced into the vacuum chamber from the gas inlet, a DC voltage is applied to the wing, a DC voltage is applied to the anode, an AC voltage is applied to the filament, and a plasma is generated. A method for forming a film on a wing, comprising forming a carbon film. 27. A plurality of wings stacked in the thickness direction via a spacer so as to expose a contour including an end face are arranged in a vacuum chamber so as to face a target, and the inside of the vacuum chamber is evacuated. Thereafter, an argon gas is introduced into the vacuum chamber through a gas inlet, a first intermediate layer made of chromium is formed by a sputtering method, and then a first intermediate layer is formed, and a contour including an end face is exposed. A plurality of wings stacked in the thickness direction via a spacer are placed in a vacuum chamber so as to face the target, and after evacuating the vacuum chamber, argon gas is introduced into the vacuum chamber from the gas inlet. And a second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, a second intermediate layer is formed, and the second intermediate layer is formed in a thickness direction via a spacer so as to expose a contour including an end face. Pile of multiple pieces It was placed in a vacuum chamber, after evacuating the vacuum chamber,
A gas containing carbon is introduced into the vacuum chamber from a gas inlet, a high-frequency voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Film formation method. 28. A plurality of wings stacked in a thickness direction via a spacer so as to expose a contour including an end face are arranged in a vacuum chamber so as to face a target, and the inside of the vacuum chamber is evacuated. Thereafter, an argon gas is introduced into the vacuum chamber through a gas inlet, a first intermediate layer made of chromium is formed by a sputtering method, and then a first intermediate layer is formed, and a contour including an end face is exposed. A plurality of wings stacked in the thickness direction via a spacer are placed in a vacuum chamber so as to face the target, and after evacuating the vacuum chamber, argon gas is introduced into the vacuum chamber from the gas inlet. And a second intermediate layer made of a silicon carbide film is formed by a sputtering method. Thereafter, a second intermediate layer is formed, and the second intermediate layer is formed in a thickness direction via a spacer so as to expose a contour including an end face. Pile of multiple pieces It was placed in a vacuum chamber, after evacuating the vacuum chamber,
A gas containing carbon is introduced into the vacuum chamber from a gas inlet, a DC voltage is applied to the wings, plasma is generated, and a hard carbon film is formed on the wings. Film formation method.