JPH1050579A5 - - Google Patents

Info

Publication number
JPH1050579A5
JPH1050579A5 JP1996207100A JP20710096A JPH1050579A5 JP H1050579 A5 JPH1050579 A5 JP H1050579A5 JP 1996207100 A JP1996207100 A JP 1996207100A JP 20710096 A JP20710096 A JP 20710096A JP H1050579 A5 JPH1050579 A5 JP H1050579A5
Authority
JP
Japan
Prior art keywords
acousto
light
beams
detection device
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1996207100A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1050579A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP20710096A priority Critical patent/JPH1050579A/ja
Priority claimed from JP20710096A external-priority patent/JPH1050579A/ja
Priority to EP19970113575 priority patent/EP0823667A2/de
Publication of JPH1050579A publication Critical patent/JPH1050579A/ja
Publication of JPH1050579A5 publication Critical patent/JPH1050579A5/ja
Withdrawn legal-status Critical Current

Links

JP20710096A 1996-08-06 1996-08-06 位置検出装置及び該装置を備えた露光装置 Withdrawn JPH1050579A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP20710096A JPH1050579A (ja) 1996-08-06 1996-08-06 位置検出装置及び該装置を備えた露光装置
EP19970113575 EP0823667A2 (de) 1996-08-06 1997-08-06 Ausrichtvorrichtung und eine damit versehene Belichtungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20710096A JPH1050579A (ja) 1996-08-06 1996-08-06 位置検出装置及び該装置を備えた露光装置

Publications (2)

Publication Number Publication Date
JPH1050579A JPH1050579A (ja) 1998-02-20
JPH1050579A5 true JPH1050579A5 (de) 2004-11-11

Family

ID=16534206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20710096A Withdrawn JPH1050579A (ja) 1996-08-06 1996-08-06 位置検出装置及び該装置を備えた露光装置

Country Status (1)

Country Link
JP (1) JPH1050579A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU7552298A (en) 1997-06-09 1998-12-30 Nikon Corporation Sensor and method for sensing the position of the surface of object, aligner provided with the sensor and method of manufacturing the aligner, and method of manufacturing devices by using the aligner
IL194580A0 (en) * 2007-10-09 2009-08-03 Asml Netherlands Bv Alignment method and apparatus, lithographic apparatus, metrology apparatus and device manufacturing method

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