JPH1054784A - Gas sensor mounting structure - Google Patents
Gas sensor mounting structureInfo
- Publication number
- JPH1054784A JPH1054784A JP22767796A JP22767796A JPH1054784A JP H1054784 A JPH1054784 A JP H1054784A JP 22767796 A JP22767796 A JP 22767796A JP 22767796 A JP22767796 A JP 22767796A JP H1054784 A JPH1054784 A JP H1054784A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas sensor
- valve
- corrosive
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000009972 noncorrosive effect Effects 0.000 claims abstract description 7
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 61
- 238000010586 diagram Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
(57)【要約】
【課題】腐食性ガスを使用する装置のガスセンシングに
於いて、ガスセンサを腐食から防護する。
【解決手段】ガスセンサ３をバルブ４を介して構造物１
に設け、前記バルブが非腐食性ガスが流通する場合に
開、腐食性ガス流通する場合に閉となる様開閉される構
成とし、腐食性ガスがガスセンサに到達することを防止
する。
(57) [Problem] To protect a gas sensor from corrosion in gas sensing of a device using a corrosive gas. A gas sensor (3) is connected to a structure (1) via a valve (4).
The valve is configured to be opened and closed so that the valve opens when a non-corrosive gas flows and closes when a corrosive gas flows, thereby preventing the corrosive gas from reaching the gas sensor.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は腐食性ガスを流すこ
とのある配管に設けられるガスセンサの取付け構造に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas sensor mounting structure provided on a pipe through which a corrosive gas can flow.
【０００２】[0002]
【従来の技術】各種プラント或は処理装置に於いて、配
管にはガス成分の検出、圧力の検出等を行う為の各種セ
ンサが設けられる。2. Description of the Related Art In various plants or processing apparatuses, various sensors for detecting a gas component, a pressure, and the like are provided in a pipe.
【０００３】従来のガスセンサの取付け構造は図２に示
される様に、配管１に分岐管２を介してガス成分検出
器、圧力検出器等のガスセンサ３が設けられたものであ
り、配管１中を流れるガスを前記分岐管２によりガスセ
ンサ３に導きガスセンサ３に於いて、ガスの成分、圧力
等を検出するというものである。As shown in FIG. 2, a conventional gas sensor mounting structure is such that a gas sensor 3 such as a gas component detector and a pressure detector is provided on a pipe 1 via a branch pipe 2. Is introduced into the gas sensor 3 by the branch pipe 2, and the gas sensor 3 detects a gas component, a pressure, and the like.
【０００４】[0004]
【発明が解決しようとする課題】ところが半導体製造装
置では腐食性ガス、例えばＣｌＦ3 ガスの様に強い腐食
性を有するガスも使用しており、又装置に必要なガスセ
ンサとしてピラニ真空計等腐食性ガスにより腐食される
ガスセンサも取付ける必要がある。上記した従来のガス
センサの取付け構造では、流通する腐食性ガスが前記ガ
スセンサ３に到達し、前記ガスセンサ３が腐食性ガスに
より腐食されるという問題があった。However, in a semiconductor manufacturing apparatus, a corrosive gas, for example, a gas having a strong corrosiveness such as ClF 3 gas is used, and a corrosive gas such as a Pirani vacuum gauge is used as a gas sensor required for the apparatus. A gas sensor that is corroded by gas must also be installed. The above-described conventional gas sensor mounting structure has a problem that the corrosive gas flowing through reaches the gas sensor 3 and the gas sensor 3 is corroded by the corrosive gas.
【０００５】本発明は斯かる実情に鑑み、腐食性ガスが
流通する場合は腐食性ガスがガスセンサに到達すること
を防止し、ガスセンサを腐食から防護しようとするもの
である。The present invention has been made in view of the above circumstances, and aims to prevent a corrosive gas from reaching a gas sensor when the corrosive gas flows, thereby protecting the gas sensor from corrosion.
【０００６】[0006]
【課題を解決するための手段】本発明は、ガスセンサを
バルブを介して構造物に設け、前記バルブが非腐食性ガ
スが流通する場合に開、腐食性ガス流通する場合に閉と
なる様開閉される構成とし、腐食性ガスがガスセンサに
到達することを防止する。According to the present invention, a gas sensor is provided on a structure via a valve, and the valve is opened and closed so as to be opened when a non-corrosive gas flows and closed when a corrosive gas flows. To prevent the corrosive gas from reaching the gas sensor.
【０００７】[0007]
【発明の実施の形態】以下、図面を参照しつつ本発明の
実施の形態を説明する。Embodiments of the present invention will be described below with reference to the drawings.
【０００８】尚、図１中図２中で示したものと同一のも
のには同符号を付してある。In FIG. 1, the same components as those shown in FIG. 2 are denoted by the same reference numerals.
【０００９】配管１より分岐させた分岐管２を介して配
管１にガス成分検出器、圧力検出器等のガスセンサ３を
設け、前記分岐管２にはバルブ４を設け、該バルブ４は
制御器５に接続する。又、前記ガスセンサ３は前記制御
器５に接続され、ガスセンサ３で検出した結果が制御器
５に入力され、ガス成分コントロール或は圧力コントロ
ール等の制御信号として使用される。又、前記制御器５
からは前記バルブ４に開閉信号が出力され、前記バルブ
４の開閉状態がコントロールされる。A gas sensor 3 such as a gas component detector and a pressure detector is provided in the pipe 1 through a branch pipe 2 branched from the pipe 1, and a valve 4 is provided in the branch pipe 2, and the valve 4 is a controller. Connect to 5. The gas sensor 3 is connected to the controller 5, and the result detected by the gas sensor 3 is input to the controller 5 and used as a control signal for gas component control or pressure control. In addition, the controller 5
An open / close signal is output to the valve 4 to control the open / close state of the valve 4.
【００１０】装置の作動シーケンスにより前記配管１に
流されるガスが決定され、ガスの種類に応じて前記制御
器５から前記バルブ４に開閉信号が入力される。即ち、
配管１中を流通するガスが窒素ガス（Ｎ2 ガス）の様に
非腐食性のガスの場合は、前記バルブ４に開信号が入力
され、該バルブ４が開かれ、ガスセンサ３により検出が
行われる。The gas flowing through the pipe 1 is determined by the operation sequence of the apparatus, and an open / close signal is input from the controller 5 to the valve 4 according to the type of gas. That is,
If the gas flowing through the pipe 1 is a non-corrosive gas such as nitrogen gas (N 2 gas), an open signal is input to the valve 4, the valve 4 is opened, and detection is performed by the gas sensor 3. Will be
【００１１】次に、配管１に腐食性ガスを流す場合は、
前記制御器５より前記バルブ４に閉信号が発せられ、バ
ルブ４が閉塞され、ガスセンサ３へ腐食性ガスが到達す
るのを遮断する。而して、ガスセンサ３の腐食が防止さ
れる。Next, when flowing a corrosive gas through the pipe 1,
The controller 5 issues a close signal to the valve 4, closes the valve 4, and blocks the corrosive gas from reaching the gas sensor 3. Thus, corrosion of the gas sensor 3 is prevented.
【００１２】配管１に非腐食性ガスが流される状態とな
ったら再び前記配管１が開かれ、前記ガスセンサ３によ
りガスに関する情報の検出が行われる。When the non-corrosive gas flows into the pipe 1, the pipe 1 is opened again, and information on the gas is detected by the gas sensor 3.
【００１３】尚、前記分岐管２に滞留する腐食性ガスに
よるガスセンサ３の腐食を防止する為、配管１を流通す
るガスが腐食性ガスから、非腐食性ガスに切替わった場
合にも直ちにバルブ４を開とすることなく、分岐管２内
のガスが非腐食性ガスに置換される迄時間を考慮したバ
ルブ４の開閉動作とする等してもよい。又、ガスセンサ
３の設けられる構造物は配管１に限らず腐食性ガスが使
用される処理室であっても同様に実施可能であることは
言う迄もない。Incidentally, in order to prevent the gas sensor 3 from being corroded by the corrosive gas staying in the branch pipe 2, even if the gas flowing through the pipe 1 is switched from a corrosive gas to a non-corrosive gas, the valve is immediately opened. Instead of opening the valve 4, the valve 4 may be opened and closed in consideration of time until the gas in the branch pipe 2 is replaced with a non-corrosive gas. Further, it goes without saying that the structure in which the gas sensor 3 is provided is not limited to the pipe 1, but can be similarly implemented in a processing chamber in which a corrosive gas is used.
【００１４】[0014]
【発明の効果】以上述べた如く本発明によれば、腐食性
ガスによるガスセンサの腐食を防止でき、長期間安定し
てセンシングを行え、ガスセンサの保守点検、或は交換
等の作業間隔が大幅に長期化でき、保守性が向上すると
共に装置全体の稼働率が向上する等の優れた効果を発揮
する。As described above, according to the present invention, the gas sensor can be prevented from being corroded by corrosive gas, stable sensing can be performed for a long period of time, and the interval between maintenance and inspection or replacement of the gas sensor is greatly reduced. It can be prolonged, exhibiting excellent effects such as improvement of maintainability and improvement of the operation rate of the entire apparatus.
【図１】本発明の実施の形態を示す概略構成図である。FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention.
【図２】従来例を示す概略構成図である。FIG. 2 is a schematic configuration diagram showing a conventional example.
１ 配管 ２ 分岐管 ３ ガスセンサ ４ バルブ ５ 制御器 DESCRIPTION OF SYMBOLS 1 Piping 2 Branch pipe 3 Gas sensor 4 Valve 5 Controller
Claims (1)
け、前記バルブが非腐食性ガスが流通する場合に開、腐
食性ガス流通する場合に閉となる様開閉される構成とし
たことを特徴とするガスセンサの取付け構造。1. A gas sensor is provided on a structure via a valve, and the valve is opened and closed so as to be opened when a non-corrosive gas flows and closed when a corrosive gas flows. Gas sensor mounting structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22767796A JPH1054784A (en) | 1996-08-09 | 1996-08-09 | Gas sensor mounting structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22767796A JPH1054784A (en) | 1996-08-09 | 1996-08-09 | Gas sensor mounting structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1054784A true JPH1054784A (en) | 1998-02-24 |
| JPH1054784A5 JPH1054784A5 (en) | 2004-08-19 |
Family
ID=16864608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22767796A Pending JPH1054784A (en) | 1996-08-09 | 1996-08-09 | Gas sensor mounting structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1054784A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001214888A (en) * | 2000-02-01 | 2001-08-10 | Matsushita Electric Ind Co Ltd | Vacuum exhaust device and method |
-
1996
- 1996-08-09 JP JP22767796A patent/JPH1054784A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001214888A (en) * | 2000-02-01 | 2001-08-10 | Matsushita Electric Ind Co Ltd | Vacuum exhaust device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Effective date: 20041012 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20041026 |
|
| A02 | Decision of refusal |
Effective date: 20050308 Free format text: JAPANESE INTERMEDIATE CODE: A02 |