JPH105657A - Coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve productivity of a PZT type ink jet head or the like by realizing stable precision coating, shortening a tact time and improving a yield. A vertical syringe (3) is connected to a dispenser (not shown), and is fixed to the apparatus by a syringe fixing blanket (6). The vertical needle 5 is attached to the vertical syringe 3, and the tip of the vertical needle 5 is fixed by a vertical needle fixing bracket 4. The oblique needle 10 is fixed by the oblique needle fixing bracket 9 so as to be within the field of view of the CCD camera 1. The sensors 18 and 19 are sensors for confirming the presence or absence of these syringes when fixing the syringes 3 and 8 to the syringe fixing bracket 6, and include two sensors, a sensor 18 for the vertical syringe 3 and a sensor 19 for the oblique syringe 8. The sensor is installed on the syringe fixing bracket 6 to check the mounting state of the syringes 3 and 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus, and more particularly, to a silver paste coating apparatus for precisely coating a silver paste used for forming electrodes and conducting electrodes. In other words, the present invention relates to a coating device capable of precisely performing a precise application of an adhesive or cream solder, particularly, a wire drawing application.

[0002]

2. Description of the Related Art There are several coating apparatuses using a dispenser, but a coating apparatus used for forming electrodes of minute components such as a PZT type ink jet head, that is, detecting a work position of 50 [μm]. There is no precision coating device that can realize precise coating with high precision. Current,
It is applied by hand and has a long tact time.
There are problems such as a decrease in yield.

[0003]

SUMMARY OF THE INVENTION As described above, PZT
There is no coating device such as a system inkjet head used for forming electrodes of minute components, specifically, a precise coating device capable of realizing precise coating of a work position with a position detection accuracy of 50 [μm]. For this reason, application is currently performed manually, and there are problems such as a long tact time and a decrease in yield.

SUMMARY OF THE INVENTION The present invention aims to solve the above-mentioned problems of the coating apparatus by realizing stable and precise coating and improving the productivity of the PZT type ink jet head by shortening the tact time and improving the yield. It was made for the purpose of.

[0005]

According to a first aspect of the present invention, there is provided a work support mechanism comprising a three-axis stage of X, Y, and θ capable of high-precision positioning drive, and a Z-axis movement mechanism, and A sensor for detecting whether or not the syringe is attached to a mounting portion of the syringe in a coating device including a syringe with a needle supported by a bracket capable of freely setting an angle and discharging a material to be discharged such as a fluid or a liquid. By having a sensor in the mounting part of the syringe for discharge,
This makes it possible to check whether or not the syringe is attached, and to prevent malfunction due to improper attachment.

According to a second aspect of the present invention, a work supporting mechanism constituted by a three-axis stage of X, Y, and θ capable of high-precision positioning drive and a Z-axis moving mechanism, and the angle can be freely set. And a needle-attached syringe that discharges a material to be discharged, such as a fluid or a liquid, supported by a bracket that is capable of automatically exchanging the syringe. Eliminates the need to manually replace the syringe when the amount of discharged material is low,
This is to improve productivity.

According to a third aspect of the present invention, there is provided a work supporting mechanism constituted by a three-axis stage of X, Y, and θ capable of high-precision positioning driving, and a Z-axis moving mechanism, wherein the angle is freely set. A coating device comprising a needle-attached syringe supported by a bracket capable of discharging a material to be discharged such as a fluid or a liquid, wherein the syringe is provided with a function of automatically filling the material to be discharged with the syringe. This eliminates the work of exchanging a syringe due to a decrease in the amount of discharge material, thereby shortening the process and improving the productivity.

According to a fourth aspect of the present invention, there is provided a work supporting mechanism constituted by a three-axis stage of X, Y, and θ capable of high-precision positioning driving, and a Z-axis moving mechanism, wherein the angle is freely set. A syringe attached to a needle supported by a bracket capable of discharging a material to be discharged such as a fluid or a liquid, wherein a shutter is provided at a tip end outlet of a needle attached to the syringe; The opening and closing of the shutter is controlled, and the opening and closing of the shutter prevents dripping.

According to a fifth aspect of the present invention, in the coating apparatus of the fourth aspect, the inside of the syringe is maintained at a constant pressure. This function enables precise coating that achieves high-precision ejection and high-speed response.

The invention according to claims 6 to 12 is a work supporting mechanism constituted by a three-axis stage of X, Y, and θ capable of high-precision positioning drive, and is supported by a Z-axis moving mechanism, and
In a coating apparatus comprising a needle-attached syringe supported by a bracket capable of freely setting an angle and discharging a material to be discharged such as a fluid or a liquid, the invention according to claim 6 is for extruding the material to be discharged in the syringe. The invention according to claim 7 is characterized in that the piston shaft drive mechanism is constituted by a rotation drive mechanism that can be positioned at an arbitrary position and a ball screw.
The invention according to claim 9, wherein the drive mechanism of the piston shaft is constituted by a friction drive mechanism including a rotary drive mechanism and a slider capable of positioning at an arbitrary position. The invention according to claim 9, wherein the piston shaft drive mechanism is positioned at an arbitrary position. The present invention according to claim 10 is that a pulse motor is used for the rotation drive mechanism, wherein the rotation drive mechanism is constituted by a rotation shaft and a rack that constitute a pinion gear (gear).
The present invention is characterized in that a servomotor is used for the rotation drive mechanism, and the invention of claim 12 is characterized in that the piston shaft drive device is configured using a linear actuator. If the material to be discharged in the piston is discharged by a method such as air pressure, it is quite difficult to perform stable discharge, and if the discharge amount is not precisely controlled, it is difficult to assemble the inkjet head, When the material to be discharged is pushed out and discharged mechanically using the structure of a piston in the discharge method of the dispenser using an unstable material called air, only the volume change is discharged as the discharge amount, Discharge can be performed with stable accuracy.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a side view showing a basic structure of a coating apparatus according to the present invention, and FIG. 2 is a front view (a view of FIG. 1 taken along line II-II) connected to a dispenser (not shown). A vertical syringe 3 is fixed to the apparatus by a syringe fixing blanket 6, a vertical needle 5 is attached to the vertical syringe 3, and the tip of the vertical needle 5 is fixed by a vertical needle fixing bracket 4. Have been. Further, the syringe fixing bracket 6 has a configuration in which the oblique syringe 8 can be arranged, and its angle θ
Can be set to 20, 30, and 40 degrees. The oblique needle 10 fits within the field of view of the CCD camera 1,
It is fixed by the oblique needle fixing bracket 9.

A Z-axis stage 7 is used to drive the needle up and down. The resolution of the Z-axis stage 7 is 6 [μ
m], and the positioning accuracy is ± 6 [μm]. The CCD camera 1 is fixed to the apparatus by a CCD camera fixing bracket 2. The camera illumination 16 is fixed by the illumination bracket 15, and its angle and position are configured so as to obtain necessary and sufficient luminance for performing image processing.

A work 17 to be coated (for example, a PZT type ink jet head) 17 is fixed on the θ-axis stage 11 by vacuum suction. A Y-axis stage 12 is disposed below the θ-axis stage 11, and an X-axis stage 13 is disposed below the Y-axis stage 12, and is fixed to a base 14.
It can be driven in the directions of Y and θ. Each axis stage uses a stage capable of high-resolution and high-precision positioning. Resolution and positioning accuracy are each θ = 3.6
[Sec] ± 5 [sec], X = 0.5 [μm] ± 0.
5 [μm], Y = 0.25 [μm] ± 0.25 [μm]
It is. The work is precisely moved on the above stages.

With respect to the coating apparatus having the above-described basic configuration, claims 1 to 12 will be described in detail below with embodiments.

(Syringe installation sensor of claim 1) FIG.
FIGS. 3A and 3B are views for explaining an example of a syringe setting sensor according to the first embodiment of the present invention. In the drawing, reference numerals 18 and 19 confirm the presence or absence of the syringe when fixing the syringe to the syringe fixing bracket 6. The two sensors, the sensor 18 for the vertical syringe 3 and the sensor 19 for the oblique syringe 8, are installed on the syringe fixing bracket 6 as shown in FIG. To make sure.

(Syringe Automatic Exchange Function of Claim 2) FIG.
Is a schematic configuration diagram for explaining a syringe automatic exchange function according to claim 2, wherein a robot 20 having a hand 20a capable of grasping a syringe 3 (or 8) as shown in FIG.
Is used as a syringe exchange robot to move back and forth between the apparatus and the pallet 21 on which the exchange syringe is mounted, and to automatically exchange the syringe.

(Automatic Filling Function of Claim 3) FIG. 5 is a schematic structural view for explaining the automatic filling mechanism of claim 3, and as shown in FIG. Attach the cap 22 that can be extracted using 23,
The syringe 3 is connected to the liquid feed tank 24 from which the material to be discharged can be extracted, and this configuration allows the syringe 3 to be automatically filled with the material to be discharged in the liquid feed tank 24.

(Needle with Shutter of Claim 4) FIG. 6 is a schematic structural view for explaining an example of the needle with shutter of claim 4, wherein the example shown in FIG. FIG. 6 shows a shutter 25 having a plurality of doors, and the shutter 25 is opened and closed.
In the example shown in (B), a shutter 27 is provided at the needle outlet.
Is provided, and the shutter 27 is covered with the cover to open and close. By controlling the opening and closing of such a shutter, ejection control is performed to prevent dripping.

In the above-described coating apparatus, the discharge amount of the material to be discharged can be precisely controlled only by controlling the opening and closing of the shutter that pressurizes the inside of the syringe to a predetermined pressure. In addition, it is possible to control the ejection and to obtain the response of the ejection following the opening / closing response of the shutter.

(Piston Configuration of Claim 6) Next, a description will be given of a discharge device using the piston configuration shown in claim 6 and subsequent claims. As shown in FIG. 7, the syringe 3 (or 8)
The piston shaft 2
The extruding plunger 28 is attached to 7, and the material to be discharged in the syringe is extruded by the plunger 28. In order to obtain the pushing force, the driving device 29 is connected to the piston shaft 27, and by driving the piston shaft 27 up and down or back and forth, the pushing force of the material to be discharged can be obtained.

FIG. 8 is a schematic structural view for explaining an example of a drive transmitting mechanism to the piston shaft according to the seventh aspect of the present invention. It can be driven by the configuration. Using a ball screw 30 for the piston shaft, the rotation drive mechanism 3
1 and the coupling using a coupling, a thrust for pushing the pushing plunger 28 can be obtained, and the material to be ejected can be ejected.

FIG. 9 is a schematic structural view for explaining an example of a drive transmission mechanism to a piston shaft according to claim 8. The drive transmission mechanism includes a friction transmission mechanism. The force transmission shaft 34 is
2 and the rotation drive roller 35, the shaft 34 is driven by frictional force, and a thrust for ejection is obtained.

FIG. 10 is a schematic structural view for explaining an example of a drive transmission mechanism for a piston shaft according to a ninth aspect of the present invention. A rack shaft 34 having a rack gear 37 attached to the shaft and a pinion rotation mechanism having a pinion gear 36 attached to a drive section of the rotation drive mechanism enable the rack shaft 35 to be driven and ejected.

In the above configuration, in order to control the ejection, it is necessary to employ a mechanism capable of multipoint positioning in the rotary drive mechanism. Therefore, it is not effective to use a motor whose positioning is difficult, such as an induction motor, as the driving mechanism. However, if a pulse motor is used, arbitrary positioning can be performed and control can be relatively easily performed. Further, fine driving can be performed by making the pitch of the ball screw fine. However, the stepping out of the pulse motor may occur.

(Servo motor of claim 11) In this respect, the servo motor is always positioned, and there is no problem such as loss of synchronism even when a large thrust is required. Also,
Fine drive positioning is also possible, and it is possible to provide the piston shaft with an amount of movement sufficient for precise ejection.

FIG. 11 shows the linear actuators 38 and 39 attached to the piston shaft 34. In this case, the movement of the actuator 39 is directly performed by driving the shaft 39.
And driving for precise ejection can be performed.

[0027]

【The invention's effect】

(Function and Effect of Claim 1) According to the coating apparatus of claim 1,
Since the sensor was installed on the mounting part of the discharge syringe,
It is possible to confirm whether or not the syringe is attached, thereby preventing malfunction due to improper attachment.

(Function and Effect of Claim 2) According to the coating apparatus of claim 2, the function of automatically changing the syringe is provided, so that the syringe can be changed automatically without manually changing the syringe. It is possible to reduce the work and improve the productivity by shortening the tact time.

(Function and Effect of Claim 3) According to the coating apparatus of claim 3, since the liquid feeding unit is mounted so that the material to be discharged can be automatically filled in the syringe, the step of replacing the syringe is eliminated, and the tact time is shortened. Productivity improvement is expected due to shortening.

According to the fourth aspect of the present invention, since the opening / closing device such as a shutter is provided at the needle portion, the ON / OFF of the shutter is controlled so that the liquid from the tip portion of the needle can be controlled. Who can be prevented.

(Function and Effect of Claim 5) According to the coating apparatus of claim 5, by applying a constant pressure to the syringe, high-precision control of the discharge amount only by opening and closing the shutter and discharge with high responsiveness are achieved. realizable.

(Effects of Claims 6 to 12) If the material to be discharged in the piston is discharged by a method such as air pressure, it is extremely difficult to perform stable discharge, and unless the discharge amount is precisely controlled. Although it is difficult to realize the assembly of the inkjet head, it is difficult to mechanically extrude and eject the material to be ejected by using a piston structure in the dispensing method of a dispenser using an unstable material such as air. In addition, only the volume change is discharged as the discharge amount, and the discharge can be performed with stable accuracy. According to the coating apparatus of claims 6 to 12, since the material to be discharged is discharged by driving the piston shaft using the structure of the piston, the material to be discharged can be mechanically extruded, and the driving distance can be reduced. It is possible to obtain a proportional discharge amount, and it is possible to perform stable and precise quantitative coating.

[Brief description of the drawings]

FIG. 1 is a configuration diagram (side view) of a silver paste coating device.

FIG. 2 is a configuration diagram of a silver paste coating apparatus (front view: FIG. 1)
FIG. 2 as viewed from the direction of the line II-II).

FIG. 3 is a diagram for explaining a syringe installation sensor.

FIG. 4 is a diagram for explaining a syringe automatic exchange function.

FIG. 5 is a diagram for explaining automatic filling.

FIG. 6 is a view for explaining a shutter needle.

FIG. 7 is a drive configuration diagram of a piston shaft.

FIG. 8 is a configuration diagram of a piston shaft driven by a ball screw.

FIG. 9 is a configuration diagram of a piston shaft driven by friction drive.

FIG. 10 is a configuration diagram of a piston shaft driven by a rack and pinion.

FIG. 11 is a configuration diagram of a piston shaft driven by a linear actuator.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... CCD camera, 2 ... CCD camera fixing bracket, 3 ... Vertical syringe, 4 ... Vertical syringe fixing bracket, 5 ... Vertical needle, 6 ... Syringe fixing bracket, 7 ... Z axis stage, 8 ... Diagonal syringe, 9 ... bracket for fixing the oblique syringe, 10 ... oblique needle, 11 ...
θ-axis stage, 12: Y-axis stage, 13: X-axis stage, 14: Base, 15: Lighting fixing bracket, 16
... Illumination light, 17 ... Work, 18 ... Sensor for vertical syringe, 19 ... Sensor for diagonal syringe, 20 ... Robot for syringe replacement, 21 ... Pallet, 22 ... Cap, 23 ...
Liquid feeding tube, 24 ... Liquid feeding tank, 25, 26 ... Shutter, 27 ... Piston shaft, 28 ... Extruding plunger, 29 ... Driving device, 30 ... Ball screw, 31 ... Rotation driving mechanism, 32 ... Pressure roller, 33 ... Rotary drive roller, 34 ... Friction force transmission shaft, 35 ... Rack shaft, 36 ... Pinion rotation mechanism, 37 ... Rack, 38 ... Linear actuator.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification number Agency reference number FI Technical display location H05K 3/34 504 H05K 3/34 504C

Claims (12)

[Claims] 1. X, Y, θ capable of high-precision positioning drive
Work support mechanism constituted by a three-axis stage of
In a coating apparatus comprising a needle-attached syringe supported by a shaft moving mechanism and supported by a bracket capable of freely setting an angle and discharging a material to be discharged such as a fluid or a liquid, the syringe is attached to a mounting portion of the syringe. A coating device comprising a sensor for detecting the presence or absence of the attachment. 2. X, Y, θ capable of high-precision positioning drive
Work support mechanism constituted by a three-axis stage of
A function of automatically changing the syringe in an application device comprising a syringe with a needle supported by a shaft moving mechanism and supported by a bracket capable of freely setting an angle and discharging a material to be discharged such as a fluid or a liquid. A coating device, comprising: 3. X, Y, θ capable of high-precision positioning drive
Work support mechanism constituted by a three-axis stage of
In a coating apparatus, which is supported by a shaft moving mechanism and supported by a bracket capable of freely setting an angle, and which is provided with a needle-attached syringe for discharging a material to be discharged such as a fluid or a liquid, the material to be discharged is automatically transferred to the syringe A coating device having a filling function. 4. X, Y, θ capable of high-precision positioning drive
Work support mechanism constituted by a three-axis stage of
In a coating apparatus comprising a needle-attached syringe supported by a shaft moving mechanism and supported by a bracket capable of freely setting an angle and discharging a material to be discharged such as a fluid or a liquid, a tip end outlet of a needle attached to the syringe A coating device having a shutter in a part. 5. The coating apparatus according to claim 4, wherein the inside of the syringe is maintained at a constant pressure. 6. X, Y, θ capable of high-precision positioning drive
Work support mechanism constituted by a three-axis stage of
In a coating apparatus, which is supported by a shaft moving mechanism, and supported by a bracket capable of freely setting an angle, and a needle-attached syringe that discharges a material to be discharged such as a fluid or a liquid, the material to be discharged in the syringe is An application device having a piston for extruding. 7. The coating apparatus according to claim 6, further comprising a piston shaft drive mechanism for driving a shaft of the piston, wherein the piston shaft drive mechanism is provided with a rotary drive mechanism and a ball screw which can be positioned at an arbitrary position. A coating apparatus characterized by comprising: 8. The coating apparatus according to claim 6, further comprising a piston shaft driving mechanism for driving the shaft of the piston, wherein the driving mechanism for the piston shaft is made up of a rotary driving mechanism and a slider capable of positioning the piston shaft at an arbitrary position. A coating apparatus characterized by comprising a friction drive mechanism. 9. The coating apparatus according to claim 6, further comprising a piston shaft drive mechanism for driving the shaft of the piston, wherein the piston shaft drive mechanism is provided with a pinion gear as a rotation drive mechanism that can be positioned at an arbitrary position. A coating device, comprising a rotating shaft and a rack configured. 10. The coating apparatus according to claim 7, wherein a pulse motor is used for the rotation drive mechanism. 11. The coating apparatus according to claim 7, wherein a servo motor is used for the rotation drive mechanism. 12. The coating apparatus according to claim 6, further comprising a piston shaft driving mechanism for driving the shaft of the piston, wherein the piston shaft driving mechanism is constituted by a linear actuator.