JPH1060648A - Articles such as mechanical parts and their production - Google Patents
Articles such as mechanical parts and their productionInfo
- Publication number
- JPH1060648A JPH1060648A JP22113396A JP22113396A JPH1060648A JP H1060648 A JPH1060648 A JP H1060648A JP 22113396 A JP22113396 A JP 22113396A JP 22113396 A JP22113396 A JP 22113396A JP H1060648 A JPH1060648 A JP H1060648A
- Authority
- JP
- Japan
- Prior art keywords
- carbon film
- film
- lubricity
- parts
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Toys (AREA)
- Gears, Cams (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、歯車、ガイド部
材、ガイドローラ、ベアリング、シール材等の機械部品
（自動車部品及び画像形成装置部品を除く）、玩具（完
成品の部品を含む）、各種シート、床材、壁材その他の
建材等の建設用及び土木用材、各種パイプ（自動車用ホ
ースを除く）、並びにこれらの製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to mechanical parts such as gears, guide members, guide rollers, bearings, sealing materials (excluding automobile parts and image forming apparatus parts), toys (including finished parts), various types of toys. The present invention relates to construction and civil engineering materials such as sheets, flooring materials, wall materials and other building materials, various pipes (excluding automotive hoses), and methods for producing these.
【０００２】[0002]
【従来の技術】今日、樹脂は様々な物品の材料として多
用されている。例えば、各種歯車、複写機、プリンタ等
の紙ガイドやミシンの糸ガイド等のガイド部材、ガイド
ローラ、ベアリング、シール材、緩衝材等の機械部品、
電気絶縁体や端子等の電機部品、燃料タンク等のタン
ク、レンズやプリズム等の光学部品、水道配管、電線配
管や自動車用その他のホース等を含むパイプ、床材、壁
材その他の建材等の建設用又は土木用材、テントシート
等の各種シート、玩具及びその部品、装飾品、文房具、
各種ケース類、網、各種フィルム類、スポーツ用品、食
器、ボタン、台所用品等の家庭用品、レコード等の材料
又は表面材料として広く用いられている。2. Description of the Related Art Today, resins are widely used as materials for various articles. For example, various gears, guide members such as paper guides of copying machines, printers and thread guides of sewing machines, mechanical parts such as guide rollers, bearings, sealing materials, cushioning materials,
Electric parts such as electrical insulators and terminals, tanks such as fuel tanks, optical parts such as lenses and prisms, water pipes, pipes including electric pipes and other hoses for automobiles, flooring materials, wall materials and other building materials Construction or civil engineering materials, various sheets such as tent sheets, toys and their parts, decorations, stationery,
It is widely used as a material or surface material for various cases, nets, various films, sports goods, tableware, buttons, household goods such as kitchen goods, records, and the like.
【０００３】これらのうち、機械部品、建設土木用材、
パイプ、玩具又はその部品等では、他物品や他部品との
摺動性を向上させ、これらとの接触による摩耗、劣化を
防止するために、表面にオイルを塗布したり、オイルを
浸透させたり、基材にオイルを添加して成形したり等す
る。また、ガスバリア性が要求されるパイプでは、酸
素、水蒸気その他のガスの透過を抑制するために、外表
面にガスバリア性を有する樹脂膜を被覆したり等する。[0003] Of these, mechanical parts, construction materials,
For pipes, toys or parts thereof, apply oil to the surface or infiltrate the oil to improve the slidability with other articles or parts and to prevent wear and deterioration due to contact with them. And molding by adding oil to the base material. Further, in the case of a pipe requiring gas barrier properties, an outer surface is coated with a resin film having gas barrier properties in order to suppress the permeation of oxygen, water vapor and other gases.
【０００４】また、前記シートでは、該シートの支持部
材、シート上に載せる物品や地面、床面その他の接触面
等との摺動性を向上させ、これらとの接触による摩耗、
劣化を防止し、また水滴、雨や泥等の汚れが付着するの
を避けるために、オイルを浸透させたり、基材にオイル
を添加して成形したり等する。Further, in the above-mentioned sheet, the slidability of the sheet with a supporting member of the sheet, an article placed on the sheet, a ground, a floor surface, or other contact surfaces is improved, and wear due to contact with these members is reduced.
In order to prevent deterioration and to prevent attachment of dirt such as water droplets, rain and mud, oil is infiltrated, or the base material is added with oil and molded.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、機械部
品、建設土木用材、パイプ、玩具又は玩具部品等の表面
にオイルを塗布する方法では、使用開始時には比較的良
好な所望特性が得られても、時間とともに表面のオイル
が他部分へ分散したり、吸収されたり、脱落したりして
少なくなり、摺動性が低下し、表面の摩耗、劣化が生じ
やすくなる。 また、オイルを浸透させたり、基材にオ
イルを添加して成形したりする方法では、使用開始時に
は比較的良好な所望特性が得られても、時間とともに表
面部分に含まれるオイルが相手方物品に吸収される等し
て表面に浸出してくるオイルが少なくなり、摺動性が低
下し、表面の摩耗、劣化が生じやすくなる。However, in the method of applying oil to the surface of a machine component, a material for construction and civil engineering, a pipe, a toy, or a toy component, a relatively good desired characteristic can be obtained at the beginning of use, Over time, the oil on the surface disperses, is absorbed, or falls off to other parts and decreases, and the slidability is reduced, and the surface is liable to be worn or deteriorated. In addition, in the method of infiltrating oil or adding oil to a base material and molding, even when relatively good desired characteristics are obtained at the start of use, the oil contained in the surface portion over time can be applied to the counterpart article. The amount of oil that leaks to the surface due to absorption or the like is reduced, the slidability is reduced, and the surface is easily worn or deteriorated.
【０００６】また、機械部品、建設用土木用材、パイプ
は金属からなる物品と接触して用いられることが多く、
前記のような方法では、金属製物品との摩擦による表面
の摩耗や劣化を十分に防止することができない。また、
ガスバリア性を有する樹脂膜を被覆したパイプでも、表
面が樹脂からなるため、同様に長期にわたり他物品との
良好な摺動性が得られず、また金属等の硬い材質からな
る物品との摩擦により表面が摩耗、劣化し易い。[0006] Also, mechanical parts, construction materials and pipes are often used in contact with metal articles.
With the above-described method, it is not possible to sufficiently prevent surface wear or deterioration due to friction with a metal article. Also,
Even pipes coated with a resin film having gas barrier properties, because the surface is made of resin, similarly good sliding properties with other articles cannot be obtained for a long time, and friction with articles made of hard materials such as metal The surface is easily worn and deteriorated.
【０００７】また、前記シートにオイルを浸透させた
り、基材にオイルを添加して成形したりする方法では、
該シートの支持部材、シート上に載置する物品、シート
が保護すべき物品等や地面等との接触により表面が摩
耗、劣化し易くなり、その結果、摺動性、撥水性が低下
する。また、撥水性が低下する結果、水滴、雨や泥等の
汚れが付着し易くなる。Further, in the method of infiltrating oil into the sheet or adding oil to a base material to form the sheet,
The surface is liable to be worn and deteriorated by contact with the support member of the sheet, the article placed on the sheet, the article to be protected, the ground, and the like, and as a result, the slidability and water repellency are reduced. In addition, as a result of a decrease in water repellency, dirt such as water droplets, rain, mud, and the like easily adhere.
【０００８】そこで本発明は、他物品との摺動性、耐摩
耗性、撥水性、ガスバリア性のうち幾つかの点で優れた
機械部品（自動車部品及び画像形成装置部品を除く）等
の物品及びそれらの製造方法を提供することを課題とす
る。特に、他物品との摺動性が良好で、耐摩耗性に優
れ、劣化し難い機械部品（自動車部品及び画像形成装置
部品を除く）、玩具（完成品の部品を含む）、及び、建
設土木用材（建設又は土木又はそれら双方に使用する物
品や材料）、並びにそれらの製造方法を提供することを
課題とする。Accordingly, the present invention provides an article such as a mechanical part (excluding an automobile part and an image forming apparatus part) which is excellent in several points among sliding properties with other articles, abrasion resistance, water repellency, and gas barrier properties. And a method for producing the same. In particular, mechanical parts (excluding automotive parts and image forming apparatus parts), toys (including finished parts), which have good slidability with other articles, excellent wear resistance, and are unlikely to deteriorate, and construction civil engineering It is an object of the present invention to provide materials (articles and materials used for construction and / or civil engineering) and a method for producing them.
【０００９】また特に、他物品との摺動性が良好で、耐
摩耗性に優れ、劣化し難く、さらに撥水性に優れるシー
ト及びその製造方法を提供することを課題とする。また
特に、他物品との摺動性が良好で、耐摩耗性に優れ、劣
化し難く、さらにガスバリア性に優れるパイプ（自動車
部品としてのホースを除く）及びその製造方法を提供す
ることを課題とする。In particular, it is another object of the present invention to provide a sheet having good slidability with other articles, excellent abrasion resistance, hardly deteriorating, and excellent in water repellency, and a method for producing the same. In particular, it is another object of the present invention to provide a pipe (except for a hose as an automobile part) which has good slidability with other articles, has excellent wear resistance, is hardly deteriorated, and has excellent gas barrier properties, and a method for producing the same. I do.
【００１０】[0010]
【課題を解決するための手段】前記課題を解決するため
に本発明は、表面の一部又は全部に耐摩耗性、潤滑性の
ある炭素膜が形成されていることを特徴とする機械部品
（自動車部品及び画像形成装置部品を除く）、玩具（完
成品の部品を含む）及び建設土木用材を提供する。また
本発明は、表面の一部又は全部に耐摩耗性、潤滑性のあ
る炭素膜を形成する工程を含むことを特徴とする機械部
品（自動車部品及び画像形成装置部品を除く）の製造方
法、玩具（完成品の部品を含む）の製造方法及び建設土
木用材の製造方法を提供する。According to the present invention, there is provided a mechanical component comprising a carbon film having wear resistance and lubricity formed on a part or the entire surface thereof. It provides automotive parts and image forming apparatus parts), toys (including finished parts), and construction civil engineering materials. The present invention also provides a method for producing mechanical parts (excluding automobile parts and image forming apparatus parts), which comprises a step of forming a carbon film having wear resistance and lubricity on part or all of the surface. A method for manufacturing toys (including finished parts) and a method for manufacturing materials for construction and civil engineering are provided.
【００１１】また、本発明は、表面の一部又は全部に耐
摩耗性、潤滑性、撥水性のある炭素膜が形成されている
ことを特徴とするシートを提供する。また本発明は、表
面の一部又は全部に耐摩耗性、潤滑性、撥水性のある炭
素膜を形成する工程を含むことを特徴とするシートの製
造方法を提供する。また、本発明は、表面の一部又は全
部に耐摩耗性、潤滑性、ガスバリア性のある炭素膜が形
成されていることを特徴とするパイプ（自動車部品とし
てのホースを除く）を提供する。また本発明は、表面の
一部又は全部に耐摩耗性、潤滑性、ガスバリア性のある
炭素膜を形成する工程を含むことを特徴とするパイプ
（自動車部品としてのホースを除く）の製造方法を提供
する。Further, the present invention provides a sheet characterized in that a carbon film having abrasion resistance, lubricity and water repellency is formed on part or all of the surface. The present invention also provides a method for producing a sheet, comprising a step of forming a carbon film having abrasion resistance, lubricity, and water repellency on part or all of the surface. Further, the present invention provides a pipe (except for a hose as an automobile part), wherein a carbon film having abrasion resistance, lubricity and gas barrier properties is formed on a part or all of the surface. Further, the present invention provides a method for producing a pipe (excluding a hose as an automobile part), which comprises a step of forming a carbon film having abrasion resistance, lubricity, and gas barrier properties on a part or all of the surface. provide.
【００１２】なお、前記機械部品、玩具、シート、建設
土木用材、パイプにおける炭素膜を形成する表面の一部
又は全部としては、特に他物品との接触面や外表面を挙
げることができる。なお、前記の他物品には、通常の物
品の他、地面等の面、人等が含まれる。本発明に係る機
械部品、玩具、建設土木用材は、表面の一部又は全部に
耐摩耗性、潤滑性を有する炭素膜が形成されているた
め、その部分での他物品との滑りが良く、またその部分
は他物品との摩擦により摩耗、劣化し難い。さらに、該
炭素膜が摩耗し難いことから良好な潤滑性が長期にわた
り維持される。Part or all of the surface on which the carbon film is formed in the mechanical parts, toys, sheets, construction materials, and pipes may be, in particular, a contact surface with another article or an outer surface. In addition, the other articles include a surface such as the ground, a person, and the like, in addition to a normal article. Machine parts, toys, materials for construction civil engineering according to the present invention, since a carbon film having abrasion resistance and lubricity is formed on part or all of the surface, good slip with other articles in that part, Further, the portion is hardly worn or deteriorated by friction with other articles. Further, since the carbon film is hard to be worn, good lubricity is maintained for a long time.
【００１３】本発明に係るシートは、表面の一部又は全
部に耐摩耗性、潤滑性、撥水性を有する炭素膜が形成さ
れているため、その部分での他物品との滑りが良く、ま
たその部分は他物品との摩擦により摩耗、劣化し難い。
さらに、該炭素膜が摩耗し難いことから良好な潤滑性が
長期にわたり維持される。また、該炭素膜が撥水性を有
することから、その部分には水滴、雨滴や泥等の汚れが
付着し難い。In the sheet according to the present invention, a carbon film having abrasion resistance, lubricity, and water repellency is formed on a part or the whole of the surface, so that the part has good slip with other articles. The part is hardly worn or deteriorated by friction with other articles.
Further, since the carbon film is hard to be worn, good lubricity is maintained for a long time. Further, since the carbon film has water repellency, dirt such as water droplets, raindrops, and mud hardly adheres to the portion.
【００１４】本発明に係るパイプは、表面の一部又は全
部に耐摩耗性、潤滑性を有する炭素膜が形成されている
ため、その部分での他物品との滑りが良く、またその部
分は他物品との摩擦により摩耗、劣化し難い。さらに、
該炭素膜が摩耗し難いことから良好な潤滑性が長期にわ
たり維持される。また、該炭素膜はガスバリア性を有し
ているため、本発明にかかるパイプは、パイプの該炭素
膜形成部分では外部から内部へ或いは内部から外部へガ
スが透過し難い。In the pipe according to the present invention, a carbon film having abrasion resistance and lubricity is formed on a part or all of the surface, so that the part has good slip with other articles, and the part has Hard to wear and deteriorate due to friction with other articles. further,
Good lubricity is maintained over a long period of time because the carbon film is hardly worn. Further, since the carbon film has a gas barrier property, in the pipe according to the present invention, the gas hardly permeates from the outside to the inside or from the inside to the outside at the carbon film forming portion of the pipe.
【００１５】本発明に係る機械部品（自動車部品及び画
像形成装置部品を除く）としては、歯車、ガイド部材、
ガイドローラ、ベアリング、シール材等を例示できる。
また、本発明にかかるシートとしては、物品の敷物用シ
ート、机や天板等の上に敷くシート、外壁保護シート、
テント用のシートのようなレジャー用シート等を例示で
きる。The mechanical parts (excluding automobile parts and image forming apparatus parts) according to the present invention include gears, guide members,
Guide rollers, bearings, sealing materials, and the like can be exemplified.
Further, as the sheet according to the present invention, a rug sheet for articles, a sheet laid on a desk or a top plate, an outer wall protection sheet,
An example is a leisure sheet such as a tent sheet.
【００１６】また、本発明にかかる建設土木用材として
は、襖用レール材、家具スライド用ガイド材、床材、壁
材、土木工事用各種スライド部材、仮設壁部材等の各種
仮設材などを例示できる。また、本発明にかかるパイプ
は、柔軟性を有するホース（自動車部品としてのホース
を除く）を含むものである。Examples of the construction civil engineering materials according to the present invention include rail materials for sliding doors, guide materials for sliding furniture, floor materials, wall materials, various sliding members for civil engineering work, and various temporary materials such as temporary wall members. it can. Further, the pipe according to the present invention includes a flexible hose (excluding a hose as an automobile part).
【００１７】本発明における機械部品基体、玩具基体、
シート基体、建設土木用材基体、パイプ基体は、それぞ
れ少なくとも膜形成面が熱硬化性樹脂、熱可塑性樹脂及
びゴムから選ばれた少なくとも１種の材料からなるもの
であることが考えられる。熱硬化性樹脂としては、フェ
ノール・ホルムアルデヒド樹脂、尿素樹脂、メラミン・
ホルムアルデヒド樹脂、エポキシ樹脂、フラン樹脂、キ
シレン樹脂、不飽和ポリエステル樹脂、シリコン樹脂、
ジアリルフタレート樹脂等を例示できる。The machine component base, the toy base,
It is conceivable that the sheet substrate, the construction civil engineering material substrate, and the pipe substrate each have at least a film forming surface made of at least one material selected from a thermosetting resin, a thermoplastic resin, and a rubber. Phenol / formaldehyde resin, urea resin, melamine /
Formaldehyde resin, epoxy resin, furan resin, xylene resin, unsaturated polyester resin, silicone resin,
Examples include diallyl phthalate resin.
【００１８】また、熱可塑性樹脂としては、ビニル系樹
脂（ポリ塩化ビニル、ポリ２塩化ビニル、ポリビニルブ
チラート、ポリビニルアルコール、ポリ酢酸ビニル、ポ
リビニルホルマール等）、ポリ塩化ビニリデン、塩素化
ポリエーテル、ポリエステル系樹脂（ポリスチレン、ス
チレン・アクリロニトリル共重合体等）、ＡＢＳ、ポリ
エチレン、ポリプロピレン、ポリアセタール、アクリル
系樹脂（ポリメチルメタクリレート、変性アクリル
等）、ポリアミド系樹脂（ナイロン６、６６、６１０、
１１等）、セルロース系樹脂（エチルセルロース、酢酸
セルロース、プロピルセルロース、酢酸・酪酸セルロー
ス、硝酸セルロース等）、ポリカーボネート、フェノキ
シ系樹脂、フッ素系樹脂（３フッ化塩化エチレン、４フ
ッ化エチレン、４フッ化エチレン・６フッ化プロピレ
ン、フッ化ビニリデン等）、ポリウレタン等を例示でき
る。Examples of the thermoplastic resin include vinyl resins (polyvinyl chloride, polyvinyl dichloride, polyvinyl butyrate, polyvinyl alcohol, polyvinyl acetate, polyvinyl formal, etc.), polyvinylidene chloride, chlorinated polyether, polyester Resin (polystyrene, styrene / acrylonitrile copolymer, etc.), ABS, polyethylene, polypropylene, polyacetal, acrylic resin (polymethyl methacrylate, modified acrylic, etc.), polyamide resin (nylon 6, 66, 610, etc.)
11), cellulosic resins (ethylcellulose, cellulose acetate, propylcellulose, acetic acid / butyrate, cellulose nitrate, etc.), polycarbonate, phenoxy resins, fluororesins (ethylene trifluoride chloride, tetrafluoroethylene, tetrafluoride) Ethylene / propylene hexafluoride, vinylidene fluoride, etc.), polyurethane and the like.
【００１９】また、ゴムとしては、天然ゴム、ブチルゴ
ム、エチレンプロピレンゴム、クロロプレンゴム、塩素
化ポリエチレンゴム、エピクロルヒドリンゴム、アクリ
ルゴム、ニトリルゴム、ウレタンゴム、シリコンゴム、
フッ素ゴム等を例示できる。また、本発明における炭素
膜としては、代表例としてＤＬＣ(Diamond Like Carbo
n) （ダイアモンド状炭素）膜を挙げることができる。
ＤＬＣ膜は、潤滑性良好であり、また、他物品との摩擦
により摩耗し難く、且つ、その厚さを調整することによ
り、該膜で被覆された基体が柔軟性を有するものである
場合にも該基体本来の柔軟性を損なわないようにするこ
とができる程度の適度な硬度を有する炭素膜である。ま
た、撥水性、ガスバリア性及び電気絶縁性が良好であ
る。さらに、比較的低温で形成できる等、成膜を容易に
行うことができる。The rubber includes natural rubber, butyl rubber, ethylene propylene rubber, chloroprene rubber, chlorinated polyethylene rubber, epichlorohydrin rubber, acrylic rubber, nitrile rubber, urethane rubber, silicone rubber,
Fluororubber and the like can be exemplified. As a typical example of the carbon film in the present invention, DLC (Diamond Like Carbo
n) (diamond-like carbon) film.
The DLC film has good lubricity, is hardly worn due to friction with other articles, and has a thickness adjusted so that the substrate coated with the film has flexibility. Is a carbon film having an appropriate hardness to such an extent that the intrinsic flexibility of the substrate is not impaired. Further, it has good water repellency, gas barrier properties and electrical insulation properties. Further, the film can be easily formed, for example, the film can be formed at a relatively low temperature.
【００２０】また、いずれにしても前記炭素膜の膜厚
は、各基体上に密着性良好に形成でき、さらに基体の保
護膜として十分機能できるとともに、基体が柔軟性を有
するものである場合にも該基体本来の柔軟性を損なわな
い範囲内であればよい。また、本発明方法において、前
記炭素膜形成に先立ち、前処理として、前記各基体の膜
形成面を前処理用ガス、例えばフッ素（Ｆ）含有ガス、
水素（Ｈ2 ）ガス及び酸素（Ｏ2 ）ガスから選ばれた少
なくとも１種の前処理用ガスのプラズマに曝すことが考
えられる。この場合、本発明の機械部品、玩具、シー
ト、建設土木用材及びパイプにおいて、前記各基体は、
このような前処理を施されたものとなる。In any case, the thickness of the carbon film is such that it can be formed with good adhesion on each substrate, can function sufficiently as a protective film for the substrate, and has flexibility. May be within a range that does not impair the original flexibility of the substrate. In the method of the present invention, prior to the formation of the carbon film, a pretreatment gas such as a fluorine (F) -containing gas may be used as a pretreatment.
Exposure to plasma of at least one pretreatment gas selected from hydrogen (H 2 ) gas and oxygen (O 2 ) gas is considered. In this case, in the mechanical parts, toys, sheets, construction materials and pipes of the present invention, each of the bases is
Such pre-processing is performed.
【００２１】前記フッ素含有ガスとしては、フッ素（Ｆ
2 ）ガス、３フッ化窒素（ＮＦ3 ）ガス、６フッ化硫黄
（ＳＦ6 ）ガス、４フッ化炭素（ＣＦ4 ）ガス、４フッ
化ケイ素（ＳｉＦ4 ）ガス、６フッ化２ケイ素（Ｓｉ2
Ｆ6 ）ガス、３フッ化塩素（ＣｌＦ3 ）ガス、フッ化水
素（ＨＦ）ガス等を挙げることができる。前記各基体
を、前記前処理用ガスのプラズマに曝すことにより、基
体表面が清浄化され、又はさらに基体表面粗度が向上す
る。これらは、炭素膜の密着性向上に寄与し、高密着性
炭素膜を得ることができる。As the fluorine-containing gas, fluorine (F
2 ) gas, nitrogen trifluoride (NF 3 ) gas, sulfur hexafluoride (SF 6 ) gas, carbon tetrafluoride (CF 4 ) gas, silicon tetrafluoride (SiF 4 ) gas, disilicon hexafluoride ( Si 2
F 6 ) gas, chlorine trifluoride (ClF 3 ) gas, hydrogen fluoride (HF) gas and the like. By exposing each of the substrates to the plasma of the pretreatment gas, the substrate surface is cleaned, or the substrate surface roughness is further improved. These contribute to the improvement of the adhesion of the carbon film, and a high adhesion carbon film can be obtained.
【００２２】また、前記各基体の膜形成面が樹脂、ゴム
等の有機材料からなる場合、前処理にフッ素含有ガスプ
ラズマを採用するときは、これによって基体表面がフッ
素終端され、水素ガスプラズマを採用するときはこれに
よって基体表面が水素終端される。フッ素−炭素結合及
び水素−炭素結合は安定であるため、前記のように終端
処理することで膜中の炭素原子が基体表面部分のフッ素
原子又は水素原子と安定に結合を形成する。そしてこれ
らのことから、その後形成する炭素膜と前記基体との密
着性を向上させることができる。In the case where the film-forming surface of each substrate is made of an organic material such as resin or rubber, when the fluorine-containing gas plasma is used for the pretreatment, the substrate surface is terminated with fluorine and the hydrogen gas plasma is generated. When employed, this terminates the substrate surface with hydrogen. Since the fluorine-carbon bond and the hydrogen-carbon bond are stable, by performing the termination treatment as described above, the carbon atoms in the film form a stable bond with the fluorine atoms or the hydrogen atoms on the substrate surface portion. From these facts, it is possible to improve the adhesion between the carbon film formed thereafter and the substrate.
【００２３】また、酸素ガスプラズマを採用するとき
は、基体表面に付着した有機物等の汚れを特に効率良く
除去でき、これらのことからその後形成する炭素膜と前
記基体との密着性を向上させることができる。本発明に
おいて、炭素膜形成に先立って行うプラズマによる基体
の前処理は、同種類のプラズマを用いて或いは異なる種
類のプラズマを用いて複数回行っても構わない。例え
ば、該基体を酸素ガスプラズマに曝した後、フッ素含有
ガスプラズマ又は水素ガスプラズマに曝し、その上に炭
素膜を形成するときには、基体表面がクリーニングされ
た後、該面がフッ素終端又は水素終端されて、その後形
成する炭素膜と該基体表面との密着性は非常に良好なも
のとなる。When oxygen gas plasma is employed, dirt such as organic substances adhering to the surface of the substrate can be particularly efficiently removed, and from these facts, the adhesion between the carbon film formed thereafter and the substrate can be improved. Can be. In the present invention, the pretreatment of the substrate with the plasma performed prior to the formation of the carbon film may be performed a plurality of times using the same type of plasma or using different types of plasma. For example, after exposing the substrate to oxygen gas plasma, and then exposing the substrate to fluorine-containing gas plasma or hydrogen gas plasma and forming a carbon film thereon, after the substrate surface is cleaned, the surface may be terminated with fluorine or hydrogen. As a result, the adhesion between the carbon film formed thereafter and the substrate surface becomes very good.
【００２４】また、本発明における炭素膜形成方法とし
ては、樹脂、ゴム等の比較的耐熱性に劣る材料を用いた
基体に熱的損傷を与えない温度範囲で膜形成できる方法
として、プラズマＣＶＤ法、スパッタリング法、イオン
プレーティング法等を挙げることができるが、特にプラ
ズマＣＶＤ法を用いる場合は、被成膜基体のプラズマに
よる前処理と炭素膜形成とを同一の装置で行うことがで
きる。As a method of forming a carbon film in the present invention, a method of forming a film in a temperature range that does not cause thermal damage to a substrate made of a material having relatively low heat resistance such as resin and rubber includes a plasma CVD method. In particular, when a plasma CVD method is used, the pretreatment of the substrate to be formed with plasma and the formation of a carbon film can be performed by the same apparatus.
【００２５】プラズマＣＶＤ法により炭素膜を形成する
場合のプラズマ原料ガスとしては、炭素膜形成に一般に
用いられるメタン（ＣＨ4 ）、エタン（Ｃ2 Ｈ6 ）、プ
ロパン（Ｃ3 Ｈ8 ）、ブタン（Ｃ4 Ｈ10）、アセチレン
（Ｃ2 Ｈ2 ）、ベンゼン（Ｃ 6 Ｈ6 ）、４フッ化炭素
（ＣＦ4 ）、６フッ化２炭素（Ｃ2 Ｆ6 ）等の炭素化合
物ガス、及び必要に応じて、これらの炭素化合物ガスに
キャリアガスとして水素ガス、不活性ガス等を混合した
ものを用いることができる。A carbon film is formed by a plasma CVD method.
In this case, the plasma source gas is generally used for carbon film formation.
Methane used (CHFour), Ethane (CTwoH6),
Lopin (CThreeH8), Butane (CFourHTen),acetylene
(CTwoHTwo), Benzene (C 6H6) Carbon tetrafluoride
(CFFour), Dicarbon hexafluoride (CTwoF6) Etc.
Gas and, if necessary, these carbon compound gases
Hydrogen gas, inert gas, etc. were mixed as carrier gas
Can be used.
【００２６】[0026]
【発明の実施の形態】以下、本発明の実施の形態を図面
を参照して説明する。図１は本発明に係る機械部品の製
造、玩具の製造、シートの製造、建設土木用材（建設又
は土木又はそれら双方に使用できる物品や材料）の製造
及びパイプの製造にそれぞれ用いることができる成膜装
置の１例の概略構成を示す図である。また、図３（Ａ）
は本発明に係る機械部品の１例（ガイドローラ）の断面
図であり、図３（Ｂ）は本発明に係る玩具の１例（水鉄
砲の水ポンプ部）の断面図であり、図３（Ｃ）は本発明
に係るシートの１例の断面図であり、図３（Ｄ）は本発
明に係る建設土木用材の１例（壁材）の断面図であり、
図３（Ｅ）は本発明に係るパイプの１例の断面図であ
る。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing a structure which can be used for manufacturing mechanical parts, manufacturing toys, manufacturing sheets, manufacturing construction and civil engineering materials (articles and materials usable for construction and / or civil engineering), and manufacturing pipes according to the present invention. It is a figure showing the schematic structure of an example of a membrane device. FIG. 3 (A)
FIG. 3B is a cross-sectional view of one example (a guide roller) of a mechanical part according to the present invention, and FIG. 3B is a cross-sectional view of one example (a water pump part of a water gun) of the toy according to the present invention. C) is a cross-sectional view of one example of the sheet according to the present invention, and FIG. 3D is a cross-sectional view of one example (wall material) of the construction civil engineering material according to the present invention.
FIG. 3E is a sectional view of an example of the pipe according to the present invention.
【００２７】図１に示す装置は、排気装置１１が付設さ
れた真空チャンバ１を有し、チャンバ１内には電極２及
びこれに対向する位置に電極３が設置されている。電極
３は接地され、電極２にはマッチングボックス２２を介
して高周波電源２３が接続されている。また、電極２に
はその上に支持される被成膜基体を成膜温度に加熱する
ためのヒータ２１が付設されている。また、チャンバ１
にはガス供給部４が付設されて、内部にプラズマ原料ガ
スを導入できるようになっている。ガス供給部４には、
マスフローコントローラ４１１、４１２・・・及び弁４
２１、４２２・・・を介して接続された１又は２以上の
プラズマ原料ガスのガス源４３１、４３２・・・が含ま
れる。The apparatus shown in FIG. 1 has a vacuum chamber 1 provided with an exhaust device 11, in which an electrode 2 and an electrode 3 are installed at a position facing the electrode. The electrode 3 is grounded, and a high frequency power supply 23 is connected to the electrode 2 via a matching box 22. Further, the electrode 2 is provided with a heater 21 for heating the substrate on which the film is to be formed to a film forming temperature. Also, chamber 1
Is provided with a gas supply section 4 so that a plasma source gas can be introduced into the inside. In the gas supply unit 4,
.. And the valve 4
, 432,... Connected via the first, second,.
【００２８】この装置を用いて本発明に係る機械部品を
製造するにあたっては、機械部品基体Ｓ１を他物品との
接触面Ｓ１´を対向する電極３の方に向けて電極２上に
配置し、排気装置１１の運転にてチャンバ１内部を所定
の真空度にする。次いで、ガス供給部４からチャンバ１
内にフッ素含有ガス、水素ガス及び酸素ガスのうち１種
以上のガスを前処理用ガスとして導入するとともに高周
波電源２３からマッチングボックス２２を介して電極２
に高周波電力を供給し、これにより前記導入した前処理
用ガスをプラズマ化し、該プラズマの下で基体Ｓ１の表
面処理を行う。なお、この表面処理（前処理）は行うこ
とが望ましいが、必ずしも要しない。In manufacturing the mechanical component according to the present invention using this apparatus, the mechanical component substrate S1 is placed on the electrode 2 with the contact surface S1 'with another article facing the electrode 3 facing the other component. The inside of the chamber 1 is set to a predetermined degree of vacuum by the operation of the exhaust device 11. Next, from the gas supply unit 4 to the chamber 1
At least one of a fluorine-containing gas, a hydrogen gas, and an oxygen gas is introduced as a pretreatment gas into the inside of the electrode 2, and a high-frequency power source 23 is connected to the
Is supplied with high-frequency power, thereby converting the introduced pretreatment gas into plasma, and performing the surface treatment of the substrate S1 under the plasma. Note that this surface treatment (pretreatment) is desirably performed, but is not necessarily required.
【００２９】次いで、必要に応じてチャンバ１内を再び
真空引きした後、ガス供給部４からチャンバ１内に成膜
用原料ガスとして炭素化合物ガスを導入するとともに高
周波電源２３から電極２に高周波電力を供給し、これに
より前記導入した炭素化合物ガスをプラズマ化し、該プ
ラズマの下で基体Ｓ１表面に炭素膜を形成する。機械部
品基体Ｓ１の前記表面処理及び成膜を行う間、該基体が
例えばガイドローラのような立体構造物である場合、例
えば基体Ｓ１の一部を電極２に接触させて、図示しない
回転駆動手段にて基体Ｓ１を回転させ、基体Ｓ１の外表
面（他物品との接触面）にほぼ均一に表面処理及び成膜
が行われるようにする。Next, if necessary, the inside of the chamber 1 is evacuated again. Then, a carbon compound gas is introduced from the gas supply unit 4 into the chamber 1 as a raw material gas for film formation. Is supplied, whereby the introduced carbon compound gas is turned into plasma, and a carbon film is formed on the surface of the substrate S1 under the plasma. During the surface treatment and film formation of the mechanical component substrate S1, if the substrate is a three-dimensional structure such as a guide roller, for example, a part of the substrate S1 is brought into contact with the electrode 2 to rotate the driving member (not shown). The substrate S1 is rotated in such a manner that the surface treatment and the film formation are performed substantially uniformly on the outer surface of the substrate S1 (the contact surface with other articles).
【００３０】このようにして、図３（Ａ）に示すよう
に、機械部品基体Ｓ１（図示の例ではガイドローラ）の
他物品との接触面（外表面）Ｓ１´にほぼ均一に炭素膜
Ｆが形成された炭素膜被覆機械部品が得られる。また、
この装置を用いて本発明に係る玩具（完成品の部品を含
む）を製造するにあたっても、前記機械部品の製造と同
様にして、玩具基体Ｓ２の他物品との接触面Ｓ２´に前
記表面処理及び炭素膜形成を行い、図３（Ｂ）に示すよ
うに、玩具基体Ｓ２（図示の例では水鉄砲ポンプ部のピ
ストン）の他物品との接触面（図示例ではシリンダＣの
内面）Ｓ２´にほぼ均一に炭素膜Ｆが形成された炭素膜
被覆玩具が得られる。また、成膜中は、基体の膜形成し
ない部分を必要に応じ適当な遮蔽手段で覆った状態とし
ておく。In this manner, as shown in FIG. 3A, the carbon film F is almost uniformly formed on the contact surface (outer surface) S1 'of the mechanical component substrate S1 (guide roller in the illustrated example) with another article. Is obtained. Also,
In manufacturing the toy (including finished parts) according to the present invention using this apparatus, the surface treatment is performed on the contact surface S2 'of the toy base S2 with another article in the same manner as in the manufacture of the mechanical part. Then, as shown in FIG. 3 (B), a toy base S2 (in the illustrated example, a piston of a water gun pump unit) is brought into contact with another article (the inner surface of the cylinder C in the illustrated example) S2 ′ as shown in FIG. A toy coated with a carbon film on which the carbon film F is formed almost uniformly is obtained. During the film formation, a portion of the substrate where the film is not formed is covered with a suitable shielding means as necessary.
【００３１】また、この装置を用いて本発明に係るシー
トを製造するにあたっても、前記機械部品の製造と同様
にして、シート基体Ｓ３の外表面Ｓ３´に前記表面処理
及び炭素膜形成を行い、図３（Ｃ）に示すように、シー
ト基体Ｓ３の外表面Ｓ３´にほぼ均一に炭素膜Ｆが形成
された炭素膜被覆シートが得られる。また、この装置を
用いて本発明に係る建設土木用材を製造するにあたって
も、前記機械部品の製造と同様にして、建設土木用材基
体Ｓ４の他物品との接触面（外表面）Ｓ４´に前記表面
処理及び炭素膜形成を行い、図３（Ｄ）に示すように、
建設土木用材基体Ｓ４（図示の例では壁材）の他物品と
の接触面（外表面）Ｓ４´にほぼ均一に炭素膜Ｆが形成
された炭素膜被覆建設土木用材が得られる。In manufacturing the sheet according to the present invention using this apparatus, the surface treatment and the carbon film formation are performed on the outer surface S3 'of the sheet base S3 in the same manner as in the manufacture of the mechanical parts. As shown in FIG. 3C, a carbon film-coated sheet in which the carbon film F is formed substantially uniformly on the outer surface S3 'of the sheet substrate S3 is obtained. Further, when manufacturing the construction civil engineering material according to the present invention using this apparatus, the contact surface (outer surface) S4 'of the construction civil engineering material base S4 with another article is formed in the same manner as in the manufacture of the mechanical parts. After performing surface treatment and carbon film formation, as shown in FIG.
A carbon film-coated construction civil material having a substantially uniform carbon film F on the contact surface (outer surface) S4 'of the construction civil engineering material base S4 (wall material in the illustrated example) with another article is obtained.
【００３２】また、この装置を用いて本発明に係るパイ
プを製造するにあたっても、前記機械部品の製造と同様
にして、パイプ基体Ｓ５の外表面Ｓ５´に前記表面処理
及び炭素膜形成を行い、図３（Ｅ）に示すようにパイプ
基体Ｓ５の外表面Ｓ５´にほぼ均一に炭素膜Ｆが形成さ
れた炭素膜被覆パイプが得られる。また、本発明方法を
実施するにあたり、図１の装置に代えて図２に示す成膜
装置を用いることができ、この場合、基体が立体構造物
であるときにも該基体の表面に効率よく膜形成すること
ができる。When manufacturing the pipe according to the present invention using this apparatus, the surface treatment and the carbon film formation are performed on the outer surface S5 'of the pipe base S5 in the same manner as in the manufacture of the mechanical parts. As shown in FIG. 3 (E), a carbon film-coated pipe in which the carbon film F is formed substantially uniformly on the outer surface S5 'of the pipe base S5 is obtained. In carrying out the method of the present invention, a film forming apparatus shown in FIG. 2 can be used instead of the apparatus shown in FIG. 1. In this case, even when the substrate is a three-dimensional structure, the surface of the substrate can be efficiently placed on the substrate. A film can be formed.
【００３３】図２の装置は、誘導結合型のプラズマＣＶ
Ｄ装置であり、真空容器１´を有しており、容器１´の
外周には誘導コイル電極５が巻回して設けられ、該電極
５両端にはマッチングボックス５１及び高周波電源５２
が接続されている。また、真空容器１´の外側には、被
成膜基体Ｓ１を成膜温度に加熱するためのヒータ２１´
が設けられている。The apparatus shown in FIG. 2 is an inductively coupled plasma CV
D device, which has a vacuum container 1 ′, and an induction coil electrode 5 is wound around the outer periphery of the container 1 ′, and a matching box 51 and a high-frequency power supply 52 are provided at both ends of the electrode 5.
Is connected. A heater 21 ′ for heating the deposition target substrate S 1 to a deposition temperature is provided outside the vacuum vessel 1 ′.
Is provided.
【００３４】また、真空容器１´には排気装置１１´を
配管接続してあるとともに、成膜用原料ガスのガス供給
部４´を配管接続してある。ガス供給部４´には、マス
フローコントローラ４１１´、４１２´・・・・及び弁
４２１´、４２２´・・・・を介して接続された１又は
２以上の成膜用原料ガスを供給するガス源４３１´、４
３２´・・・・が含まれている。An evacuation device 11 'is connected to the vacuum vessel 1' by a pipe, and a gas supply section 4 'of a film forming material gas is connected by a pipe. A gas for supplying one or more film-forming source gases connected to the gas supply unit 4 'via mass flow controllers 411', 412 ',... And valves 421', 422 ',. Source 431 ', 4
32 ′... Are included.
【００３５】この装置を用いて本発明に係る物品を製造
するにあたっては、図１の装置を用いた物品基体Ｓ１の
表面処理及び炭素膜形成と同様にし、但し、原料ガスの
プラズマ化を誘導コイル電極５への高周波電力印加によ
り行う。この場合も、表面処理（前処理）は行うことが
望ましいが、必ずしも要しない。次に、図１の装置を用
いて、機械部品、玩具、シート、建設土木用材、パイプ
の材料として用いられる、フェノールホルムアルデヒド
樹脂からなる試験片の表面にＤＬＣ膜を形成した実験例
１、ポリアセタールからなる試験片の表面にＤＬＣ膜を
形成した実験例２、ポリカーボネイトからなる試験片の
表面にＤＬＣ膜を形成した実験例３を説明する。 実験例１ 試験片材質 フェノールホルムアルデヒド樹脂 サイズ １００ｍｍ×１００ｍｍ×厚さ５ｍｍ 高周波電極２サイズ 直径２８０ｍｍ 成膜条件 成膜用原料ガス メタン（ＣＨ4 ） ５０ｓｃｃｍ 高周波電力 周波数１３．５６ＭＨｚ、１５０Ｗ 自己バイアス電圧 −８０Ｖ 成膜真空度 ０．１Ｔｏｒｒ 成膜温度 ２５°Ｃ 成膜時間 ６０ｍｉｎ 実験例２ 試験片材質 ポリアセタール サイズ １００ｍｍ×１００ｍｍ×厚さ５ｍｍ 高周波電極２サイズ 直径２８０ｍｍ 成膜条件 成膜用原料ガス メタン（ＣＨ4 ） ５０ｓｃｃｍ 高周波電力 周波数１３．５６ＭＨｚ、１５０Ｗ 自己バイアス電圧 −８０Ｖ 成膜真空度 ０．１Ｔｏｒｒ 成膜温度 ２５°Ｃ 成膜時間 ６０ｍｉｎ 実験例３ 試験片材質 ポリカーボネイト サイズ １００ｍｍ×１００ｍｍ×厚さ５ｍｍ 高周波電極２サイズ 直径２８０ｍｍ 成膜条件 成膜用原料ガス メタン（ＣＨ4 ） ５０ｓｃｃｍ 高周波電力 周波数１３．５６ＭＨｚ、１５０Ｗ 自己バイアス電圧 −８０Ｖ 成膜真空度 ０．１Ｔｏｒｒ 成膜温度 ２５°Ｃ 成膜時間 ６０ｍｉｎ 次に、前記実験例１、２、３により得られたＤＬＣ膜被
覆試験片、及び各実験例で用いたＤＬＣ膜を形成してい
ない未処理の同様の試験片にシリコンオイルを塗布した
もの（比較実験例１、２、３）について、アルミニウム
材との摩擦係数をそれぞれ評価した。摩擦係数は、試験
片表面に先端曲率Ｒ１８のアルミニウムからなるピン状
物品の先端部を当接させ、且つ、該ピン状物品に１０ｇ
の荷重をかけた状態でこのピンを２０ｍｍ／ｓｅｃの速
度で移動させたときの値を測定した。The production of the article according to the present invention using this apparatus is the same as the surface treatment and carbon film formation of the article substrate S1 using the apparatus shown in FIG. This is performed by applying high-frequency power to the electrode 5. Also in this case, surface treatment (pretreatment) is desirably performed, but is not necessarily required. Next, using the apparatus of FIG. 1, an experimental example 1 in which a DLC film was formed on the surface of a test piece made of phenol formaldehyde resin, which was used as a material for mechanical parts, toys, sheets, construction materials, and pipes, from polyacetal Experimental Example 2 in which a DLC film was formed on the surface of a test piece, and Experimental Example 3 in which a DLC film was formed on the surface of a test piece made of polycarbonate, will be described. Experimental Example 1 Test piece Material phenol formaldehyde resin size 100 mm × 100 mm × 5mm thick high-frequency electrode 2 Size Diameter 280mm film forming conditions for film formation raw material gas of methane (CH 4) 50 sccm High frequency power: 13.56 MHz, 150 W self-bias voltage -80V Deposition vacuum degree 0.1 Torr Deposition temperature 25 ° C Deposition time 60 min Experimental example 2 Specimen material Polyacetal size 100 mm × 100 mm × thickness 5 mm High-frequency electrode 2 size 280 mm diameter Deposition conditions Source gas for deposition methane (CH 4 ) 50 sccm High-frequency power Frequency 13.56 MHz, 150 W Self-bias voltage -80 V Deposition degree of vacuum 0.1 Torr Deposition temperature 25 ° C Deposition time 60 min Experimental example 3 Test piece material Polycarbonate size 100 mm x 100 mm x thickness mm high-frequency electrode 2 Size Diameter 280mm film forming conditions for film formation raw material gas of methane (CH 4) 50 sccm High frequency power: 13.56 MHz, 150 W self-bias voltage -80V deposition vacuum 0.1Torr film forming temperature 25 ° C deposition time 60 min Next, silicon oil was applied to the DLC film-coated test pieces obtained in the above-described Experimental Examples 1, 2, and 3, and the untreated similar test pieces without forming the DLC film used in each of the experimental examples. (Comparative Examples 1, 2, and 3) were evaluated for the friction coefficient with the aluminum material. The coefficient of friction was such that the tip of a pin-shaped article made of aluminum having a tip curvature of R18 was brought into contact with the surface of the test piece, and the pin-shaped article was 10 g.
The value when this pin was moved at a speed of 20 mm / sec under a load of.
【００３６】結果を次表に示す。 摩擦係数 １回摩擦後 １０００回摩擦後 実験例１ ２．６４ ２．６６ 比較実験例１ ２．５６ １０．４ 実験例２ １．２２ １．３５ 比較実験例２ １．５４ ６．８ 実験例３ ２．２９ ２．３３ 比較実験例３ ２．４４ ５．０４ このように、比較実験例１、２、３では摩擦開始直後は
本発明実験例と同様に摩擦係数が小さく良好な潤滑性
（摺動性）を示したが、１０００回摩擦後には摩擦係数
が増大した。一方、本発明実験例１、２、３では、１０
００回摩擦後にも摩擦係数の増大は見られず、良好な潤
滑性（摺動性）が維持された。The results are shown in the following table. Coefficient of friction After 1 rub After 1000 rubs Experimental example 1 2.64 2.66 Comparative experimental example 1 2.56 10.4 Experimental example 2 1.22 1.35 Comparative experimental example 2 1.54 6.8 Experimental example 3 2.29 2.33 Comparative Experimental Example 3 2.44 5.04 As described above, in Comparative Experimental Examples 1, 2, and 3, immediately after the start of friction, the friction coefficient was small and good lubricity (like the Experimental Example of the present invention). Slidability), but the friction coefficient increased after 1000 rubs. On the other hand, in Experimental Examples 1, 2, and 3 of the present invention, 10
No increase in the coefficient of friction was observed even after the 00th rub, and good lubricity (slidability) was maintained.
【００３７】次に、前記実験例１、２、３により得られ
たＤＬＣ膜被覆試験片、及び各実験例で用いたＤＬＣ膜
を形成していない未処理の同様の試験片（比較実験例
４、５、６）について、それぞれ硬度を測定した。本発
明実験例の試験片は２ｇヌープ硬度を測定し、各比較実
験例の試験片は０．５ｇヌープ硬度を測定した。結果を
次表に示す。 このように、ＤＬＣ膜を被覆した本発明実験例１、２、
３の試験片は、ＤＬＣ膜を被覆していない比較実験例
４、５、６の試験片より硬度が高いことが分かる。Next, the DLC film-coated test pieces obtained in Examples 1, 2 and 3 and the untreated similar test pieces having no DLC film used in each of the Examples (Comparative Example 4) , 5 and 6), the hardness was measured. The test piece of the experimental example of the present invention measured 2 g Knoop hardness, and the test piece of each comparative experimental example measured 0.5 g Knoop hardness. The results are shown in the following table. Thus, Experimental Examples 1 and 2 of the present invention coated with the DLC film,
It can be seen that the test piece of No. 3 has higher hardness than the test pieces of Comparative Experimental Examples 4, 5 and 6 not coated with the DLC film.
【００３８】次に、前記実験例１、２、３の試験片と同
様の材質でそれぞれ作成したＭ１００サイズの歯車（比
較実験例Ａ、Ｂ、Ｃ）、及び、さらにこれらの歯車の外
表面に引き続き実験例１、２、３と同様の方法でＤＬＣ
膜を形成した歯車（実験例Ａ、Ｂ、Ｃ）について、黄銅
からなる同サイズの歯車とかみ合わせて、２０ｒｐｍの
回転速度で１０００回回転させた後の摩耗深さを測定し
た。Next, M100 size gears (Comparative Experimental Examples A, B, and C) made of the same materials as the test pieces of Experimental Examples 1, 2, and 3, and the outer surfaces of these gears, respectively. Subsequently, DLC was performed in the same manner as in Experimental Examples 1, 2, and 3.
The gears (Experimental Examples A, B, and C) on which the film was formed were engaged with gears of the same size made of brass, and the wear depth after 1000 rotations at a rotation speed of 20 rpm was measured.
【００３９】結果を次表に示す。 このように、ＤＬＣ膜を被覆した実験例Ａ、Ｂ、Ｃの歯
車は耐摩耗性が優れることが分かる。The results are shown in the following table. Thus, it can be seen that the gears of Experimental Examples A, B, and C coated with the DLC film have excellent wear resistance.
【００４０】次に、本発明実験例１のＤＬＣ膜被覆試験
片、及び実験例１において成膜に先立ち次の各条件でプ
ラズマによる前処理を施したＤＬＣ膜被覆試験片（実験
例１−１、１−２、１−３、１−４、１−５）につい
て、それぞれ膜密着性を評価した。膜密着性は、ステン
レススチール（ＳＵＳ３０４）からなる直径５ｍｍの円
柱状部材を接着剤を用いてＤＬＣ膜に接合させ、該円柱
状部材を膜に対して垂直方向に引っ張って該膜を試験片
本体から剥離させ、剥離に要した力を測定する引っ張り
ジグ法により評価した。 前処理条件 実験例１−１ 前処理用ガス 水素（Ｈ2 ） ５０ｓｃｃｍ 高周波電力 周波数１３．５６ＭＨｚ、１５０Ｗ 自己バイアス電圧 −８０Ｖ 処理真空度 ０．１Ｔｏｒｒ 処理温度 ２５°Ｃ 処理時間 ６０ｍｉｎ 実験例１−２ 前処理用ガス ６フッ化硫黄（ＳＦ6 ） ５０ｓｃｃｍ 高周波電力 周波数１３．５６ＭＨｚ、１５０Ｗ 自己バイアス電圧 −８０Ｖ 処理真空度 ０．１Ｔｏｒｒ 処理温度 ２５°Ｃ 処理時間 ６０ｍｉｎ 実験例１−３ 前処理用ガス 酸素（Ｏ2 ） ５０ｓｃｃｍ 高周波電力 周波数１３．５６ＭＨｚ、１５０Ｗ 自己バイアス電圧 −８０Ｖ 処理真空度 ０．１Ｔｏｒｒ 処理温度 ２５°Ｃ 処理時間 ６０ｍｉｎ 実験例１−４ 実験例１−３のＯ2 ガスプラズマによる前処理の後、実
験例１−１のＨ2 ガスプラズマによる前処理を行った。Next, the DLC film-coated test piece of Experimental Example 1 of the present invention and the DLC film-coated test piece subjected to plasma pretreatment under the following conditions prior to film formation in Experimental Example 1 (Experimental Example 1-1) , 1-2, 1-3, 1-4, and 1-5), the film adhesion was evaluated. The film adhesion was measured by joining a cylindrical member having a diameter of 5 mm made of stainless steel (SUS304) to a DLC film using an adhesive, pulling the cylindrical member in a direction perpendicular to the film, and attaching the film to the test piece body. And was evaluated by a tensile jig method for measuring a force required for the peeling. Pretreatment conditions Experimental example 1-1 Pretreatment gas Hydrogen (H 2 ) 50 sccm High frequency power Frequency 13.56 MHz, 150 W Self-bias voltage −80 V Processing vacuum degree 0.1 Torr Processing temperature 25 ° C. Processing time 60 min Experimental example 1-2 Pretreatment gas Sulfur hexafluoride (SF 6 ) 50 sccm High frequency power Frequency 13.56 MHz, 150 W Self-bias voltage −80 V Degree of vacuum 0.1 Torr Processing temperature 25 ° C. Processing time 60 min Experimental example 1-3 Pretreatment gas oxygen (O 2 ) 50 sccm High frequency power Frequency 13.56 MHz, 150 W Self-bias voltage −80 V Processing vacuum degree 0.1 Torr Processing temperature 25 ° C. Processing time 60 min Experimental example 1-4 Pretreatment with O 2 gas plasma of experimental example 1-3 after the pretreatment with H 2 gas plasma in experiment 1-1 Was Tsu.
【００４１】実験例１−５ 実験例１−３のＯ2 ガスプラズマによる前処理の後、実
験例１−２のＳＦ6 ガスプラズマによる前処理を行っ
た。結果を次表に示す。 次に、実験例１、２、３により得られたＤＬＣ膜被覆試
験片、各実験例で用いたＤＬＣ膜を形成していない未処
理の同様の試験片（比較実験例４、５、６）について、
それぞれ撥水性を測定した。撥水性は、試験片上に水滴
をおき、その接触角を測定することで評価した。Experimental Example 1-5 After the pretreatment with O 2 gas plasma in Experimental Example 1-3, the pretreatment with SF 6 gas plasma in Experimental Example 1-2 was performed. The results are shown in the following table. Next, DLC film-coated test pieces obtained in Experimental Examples 1, 2, and 3, and untreated similar test pieces without forming a DLC film used in each of the experimental examples (Comparative Experimental Examples 4, 5, and 6) about,
The water repellency was measured for each. The water repellency was evaluated by placing a water drop on the test piece and measuring the contact angle.
【００４２】なお、接触角は、空気中にある固体面上に
液体があるとき、固体、液体、気体の３相の接触点で液
体に引いた切線と固体面のなす角のうち、液体を含む方
の角をいい、大きいほど撥水性が良いことを示す。結果
を次表に示す このように、ＤＬＣ膜を被覆した実験例１、２、３の各
試験片では、ＤＬＣ膜を被覆していない比較実験例１、
２、３の試験片より水の接触角がそれぞれ大きく、撥水
性が良いことが分かる。When a liquid is present on a solid surface in the air, the contact angle is defined as the angle between the solid line and the cut line drawn at the three-phase contact point of the solid, liquid, and gas. The larger the included corner, the larger the water repellency. The results are shown in the following table Thus, in each of the test pieces of Experimental Examples 1, 2, and 3 in which the DLC film was coated, Comparative Test Example 1, in which the DLC film was not coated,
It can be seen that the contact angles of water are larger than those of a few test pieces, respectively, and the water repellency is good.
【００４３】次に、前記実験例１と同様にして、ポリ塩
化ビニリデンからなるフィルム（柔軟剤として脂肪酸誘
導体を、安定剤としてエポキシ化植物油を添加したも
の）の一方の表面上にＤＬＣ膜を形成したフィルム状の
試験片（実験例１−６）及びＤＬＣ膜を形成していない
未処理の同様のフィルム状の試験片（比較実験例７）に
ついて、透湿度（水蒸気透過率）及び酸素透過率をそれ
ぞれ測定した。Next, a DLC film was formed on one surface of a film made of polyvinylidene chloride (containing a fatty acid derivative as a softener and an epoxidized vegetable oil as a stabilizer) in the same manner as in Experimental Example 1. Moisture permeability (water vapor transmission rate) and oxygen transmission rate for the film-shaped test piece (Experimental Example 1-6) and the untreated similar film-shaped test piece (Comparative Experimental Example 7) on which the DLC film was not formed. Was measured respectively.
【００４４】透湿度は、Ｍｏｃｏｎ社製ガス透過率測定
装置を用い、２５℃の温度下で、フィルムの一方の空間
の相対湿度を１００％とし、フィルムの他方の空間の相
対湿度をほぼ０％として、水蒸気の透過速度を測定する
ことで評価した。また、酸素透過率は、同様にＭｏｃｏ
ｎ社製ガス透過率測定装置を用い、２５℃の温度下で、
フィルムの一方の空間の酸素濃度を１００％とし、フィ
ルムの他方の空間の酸素濃度を０％として、酸素の透過
速度を測定することで評価した。The relative humidity of one space of the film was set to 100% and the relative humidity of the other space of the film was set to approximately 0% at a temperature of 25 ° C. using a gas permeability measuring device manufactured by Mocon, Inc. Was evaluated by measuring the permeation rate of water vapor. In addition, the oxygen transmission rate is similarly determined by Moco.
Using a gas permeability measurement device manufactured by n company, at a temperature of 25 ° C.,
The oxygen concentration in one space of the film was set to 100%, and the oxygen concentration in the other space of the film was set to 0%.
【００４５】結果を次表に示す。 透 湿 度 酸素透過率 （cc/m2/day) （cc/m2/day) 実験例１−６ ０．９ １．２ 比較実験例７ １２．５ １４．０ このように、ＤＬＣ膜を被覆した実験例１─６の試験片
ではＤＬＣ膜を被覆していない比較実験例７の試験片よ
り、水蒸気及び酸素のいずれの透過も抑制されているこ
とが分かる。The results are shown in the following table. Moisture permeability Oxygen permeability (cc / m 2 / day) (cc / m 2 / day) Experimental Example 1-6 0.9 1.2 Comparative Experimental Example 7 12.5 14.0 It can be seen that the coated test pieces of Experimental Examples 1-6 show that both the water vapor and oxygen permeation are suppressed as compared with the test piece of Comparative Experimental Example 7 not coated with the DLC film.
【００４６】以上のことから、機械部品基体の表面の一
部又は全部に炭素膜（特にＤＬＣ膜）を形成した本発明
の機械部品、玩具（完成品の部品を含む）基体の表面の
一部又は全部に炭素膜（特にＤＬＣ膜）を形成した本発
明の玩具、シート基体の表面の一部又は全部に炭素膜
（特にＤＬＣ膜）を形成した本発明のシート、建設土木
用材基体の表面の一部又は全部に炭素膜（特にＤＬＣ
膜）を形成した本発明の建設土木用材、パイプの表面の
一部又は全部に炭素膜（特にＤＬＣ膜）を形成した本発
明のパイプはそれぞれ潤滑性、耐摩耗性、撥水性、ガス
バリア性に優れることが分かる。なお、炭素膜とこれと
接触する他物品との摺動性は、炭素膜とアルミニウム材
との摺動性とほぼ同様であるため、本発明の各物品は他
の物品との摺動性が優れると考えられる。As described above, a part of the surface of the machine component or toy (including finished product) substrate of the present invention in which a carbon film (particularly a DLC film) is formed on a part or the entire surface of the machine component substrate. Alternatively, the toy of the present invention in which a carbon film (particularly, a DLC film) is formed on the entire surface, the sheet of the present invention in which a carbon film (particularly, a DLC film) is formed on a part or all of the surface of the sheet substrate, and the surface of the construction civil engineering material substrate Part or all of the carbon film (particularly DLC
The present invention has a lubricating property, abrasion resistance, water repellency, and gas barrier properties, respectively. It turns out that it is excellent. Since the slidability between the carbon film and other articles in contact with the carbon film is almost the same as the slidability between the carbon film and the aluminum material, each article of the present invention has a slidability with other articles. Considered excellent.
【００４７】また、前処理を施した後形成した炭素膜は
密着性が優れることが分かる。It can also be seen that the carbon film formed after the pre-treatment has excellent adhesion.
【００４８】[0048]
【発明の効果】以上のように本発明によると、他物品と
の摺動性が良好で、耐摩耗性に優れ、劣化し難い機械部
品（自動車部品及び画像形成装置部品を除く）、玩具
（完成品の部品を含む）、及び、建設土木用材、並びに
それらの製造方法を提供することができる。As described above, according to the present invention, mechanical parts (excluding automobile parts and image forming apparatus parts), toys (excluding automobile parts and image forming apparatus parts) having good slidability with other articles, excellent wear resistance, and hardly deteriorating. (Including finished parts), and materials for construction and civil engineering, and methods for producing them.
【００４９】また本発明によると、他物品との摺動性が
良好で、耐摩耗性に優れ、劣化し難く、さらに撥水性に
優れるシート及びその製造方法を提供することができ
る。また本発明によると、他物品との摺動性が良好で、
耐摩耗性に優れ、劣化し難く、さらにガスバリア性に優
れるパイプ（自動車部品としてのホースを含む）及びそ
の製造方法を提供することができる。Further, according to the present invention, it is possible to provide a sheet having good slidability with other articles, excellent abrasion resistance, hardly deteriorating, and excellent in water repellency, and a method for producing the same. In addition, according to the present invention, good slidability with other articles,
It is possible to provide a pipe (including a hose as an automobile part) excellent in abrasion resistance, hardly deteriorated, and further excellent in gas barrier properties, and a method for producing the same.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明に係る機械部品、玩具、シート、建設土
木用材、パイプの製造にそれぞれ用いることができる成
膜装置の１例の概略構成を示す図である。FIG. 1 is a diagram showing a schematic configuration of an example of a film forming apparatus that can be used for manufacturing a mechanical part, a toy, a sheet, a material for construction and a pipe, and a pipe according to the present invention.
【図２】本発明に係る機械部品、玩具、シート、建設土
木用材、パイプの製造にそれぞれ用いることができる成
膜装置の他の例の概略構成を示す図である。FIG. 2 is a diagram showing a schematic configuration of another example of a film forming apparatus that can be used for manufacturing mechanical parts, toys, sheets, materials for construction and pipes, respectively, according to the present invention.
【図３】図（Ａ）は本発明に係る機械部品の１例の断面
図であり、図（Ｂ）は本発明に係る玩具の１例の断面図
であり、図（Ｃ）は本発明に係るシートの１例の断面図
であり、図（Ｄ）は本発明に係る建設土木用材の１例の
断面図であり、図（Ｅ）は本発明に係るパイプの１例の
断面図である。FIG. 3A is a cross-sectional view of one example of a mechanical part according to the present invention, FIG. 3B is a cross-sectional view of one example of a toy according to the present invention, and FIG. FIG. 1D is a cross-sectional view of one example of a sheet according to the present invention, FIG. 1D is a cross-sectional view of one example of a construction civil engineering material according to the present invention, and FIG. 1E is a cross-sectional view of one example of a pipe according to the present invention. is there.
１、１´ 真空チャンバ １１、１１´ 排気装置 ２ 高周波電極 ２１、２１´ ヒータ ２２、５１ マッチングボックス ２３、５２ 高周波電源 ３ 接地電極 ４、４´ プラズマ原料ガス供給部 ５ 誘導コイル電極 Ｓ１ 被成膜機械部品 Ｓ１´ 基体Ｓ１の他物品との接触面 Ｓ２ 被成膜玩具 Ｓ２´ 基体Ｓ２の他物品との接触面 Ｓ３ 被成膜シート基体 Ｓ３´ 基体Ｓ３の外表面 Ｓ４ 被成膜建設土木用材基体 Ｓ４´ 基体Ｓ４の外表面 Ｓ５ 被成膜パイプ Ｓ５´ 基体Ｓ５の外表面 Ｆ 炭素膜 DESCRIPTION OF SYMBOLS 1, 1 'Vacuum chamber 11, 11' Exhaust device 2 High frequency electrode 21, 21 'Heater 22, 51 Matching box 23, 52 High frequency power supply 3 Ground electrode 4, 4' Plasma raw material gas supply part 5 Induction coil electrode S1 Film formation Mechanical parts S1 'Contact surface of substrate S1 with other articles S2 Deposition toy S2' Contact surface of substrate S2 with other articles S3 Deposition sheet substrate S3 'Outer surface of substrate S3 S4 Film deposition construction civil engineering substrate S4 ′ Outer surface of substrate S4 S5 Deposition pipe S5 ′ Outer surface of substrate S5 F carbon film
Claims (10)
のある炭素膜が形成されていることを特徴とする機械部
品（自動車部品及び画像形成装置部品を除く）。1. A mechanical part (excluding an automobile part and an image forming apparatus part), wherein a carbon film having wear resistance and lubricity is formed on part or all of the surface.
のある炭素膜が形成されていることを特徴とする玩具。2. A toy characterized in that a carbon film having wear resistance and lubricity is formed on part or all of the surface.
性、撥水性のある炭素膜が形成されていることを特徴と
するシート。3. A sheet characterized in that a carbon film having abrasion resistance, lubricity and water repellency is formed on part or all of the surface.
のある炭素膜が形成されていることを特徴とする建設土
木用材。4. A material for construction and civil engineering, wherein a carbon film having wear resistance and lubricity is formed on a part or all of the surface.
性、ガスバリア性のある炭素膜が形成されていることを
特徴とするパイプ（自動車部品としてのホースを除
く）。5. A pipe (except for a hose as an automobile part), wherein a carbon film having abrasion resistance, lubricity and gas barrier properties is formed on part or all of the surface.
のある炭素膜を形成する工程を含むことを特徴とする機
械部品（自動車部品及び画像形成装置部品を除く）の製
造方法。6. A method for producing mechanical parts (excluding automobile parts and image forming apparatus parts), comprising a step of forming a carbon film having wear resistance and lubricity on part or all of the surface.
のある炭素膜を形成する工程を含むことを特徴とする玩
具の製造方法。7. A method for manufacturing a toy, comprising a step of forming a carbon film having wear resistance and lubricity on a part or the entire surface.
性、撥水性のある炭素膜を形成する工程を含むことを特
徴とするシートの製造方法。8. A method for producing a sheet, comprising a step of forming a carbon film having abrasion resistance, lubricity and water repellency on part or all of the surface.
のある炭素膜を形成する工程を含むことを特徴とする建
設土木用材の製造方法。9. A method for producing a material for construction and civil engineering, comprising a step of forming a carbon film having wear resistance and lubricity on a part or all of a surface.
性、ガスバリア性のある炭素膜を形成する工程を含むこ
とを特徴とするパイプ（自動車部品としてのホースを除
く）の製造方法。10. A method for producing a pipe (excluding a hose as an automobile part), comprising a step of forming a carbon film having abrasion resistance, lubricity, and gas barrier properties on a part or all of the surface.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22113396A JP3355950B2 (en) | 1996-08-22 | 1996-08-22 | Machine parts and manufacturing method thereof |
| CA002208718A CA2208718C (en) | 1996-06-27 | 1997-06-26 | Object coated with carbon film and method of manufacturing the same |
| EP97110500A EP0821077A3 (en) | 1996-06-27 | 1997-06-26 | Object coated with carbon film and method of manufacturing the same |
| EP03012938A EP1340835B1 (en) | 1996-06-27 | 1997-06-26 | Object coated with carbon film and method of manufacturing the same |
| DE69736790T DE69736790T2 (en) | 1996-06-27 | 1997-06-26 | Carbon film coated article and method of making the same |
| US08/884,554 US6136386A (en) | 1996-06-27 | 1997-06-27 | Method of coating polymer or glass objects with carbon films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22113396A JP3355950B2 (en) | 1996-08-22 | 1996-08-22 | Machine parts and manufacturing method thereof |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002166208A Division JP2003000959A (en) | 2002-06-06 | 2002-06-06 | Toy and production method thereof |
| JP2002166214A Division JP2003071955A (en) | 2002-06-06 | 2002-06-06 | Pipe and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1060648A true JPH1060648A (en) | 1998-03-03 |
| JP3355950B2 JP3355950B2 (en) | 2002-12-09 |
Family
ID=16761982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22113396A Expired - Lifetime JP3355950B2 (en) | 1996-06-27 | 1996-08-22 | Machine parts and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3355950B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007231781A (en) * | 2006-02-28 | 2007-09-13 | Tocalo Co Ltd | Compressor blade, method for manufacturing the same, and gas turbine for thermal power generation |
| JP2007327349A (en) * | 2006-06-06 | 2007-12-20 | Tocalo Co Ltd | Member for feed pump and method for manufacturing same |
| JP2012111984A (en) * | 2010-11-22 | 2012-06-14 | Kojima Press Industry Co Ltd | Apparatus for forming surface coat of resin substrate |
| US8528889B2 (en) | 2009-03-31 | 2013-09-10 | Tokyo Electron Limited | Device and method for supporting a substrate |
-
1996
- 1996-08-22 JP JP22113396A patent/JP3355950B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007231781A (en) * | 2006-02-28 | 2007-09-13 | Tocalo Co Ltd | Compressor blade, method for manufacturing the same, and gas turbine for thermal power generation |
| JP2007327349A (en) * | 2006-06-06 | 2007-12-20 | Tocalo Co Ltd | Member for feed pump and method for manufacturing same |
| US8528889B2 (en) | 2009-03-31 | 2013-09-10 | Tokyo Electron Limited | Device and method for supporting a substrate |
| JP2012111984A (en) * | 2010-11-22 | 2012-06-14 | Kojima Press Industry Co Ltd | Apparatus for forming surface coat of resin substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3355950B2 (en) | 2002-12-09 |
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