JPH1064992A - Wafer case - Google Patents

Abstract

(57) [Summary] [PROBLEMS] An unexpected external force may be applied to an engagement projection for holding (locking) a fitting state between cases. SOLUTION: In a wafer case constituted by an inner case 1 and an outer case 2 which can be fitted to the outside thereof, a predetermined number of engaging projections 9 are provided on an opening peripheral portion 8 of the inner case 1 and the engagement is provided. An engaging portion 13 that can be engaged and disengaged from the mating protrusion 9 is provided on the outer case 2 side, and the outer case 2 is fitted to the inner case 1 to lock the engaging protrusion 9 and the engaging portion 13. A lock mechanism for holding the two cases in a fitted state, wherein the case is the same as or larger than the protruding end of the engagement projection 9 when the engagement projection 9 and the engagement portion 13 are locked. The overhanging protection portions 14 and 15 protruding outward are provided on the outer case 2 in the vicinity of the engagement position between the engagement protrusion 9 and the engagement portion 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer case for storing a predetermined number of wafers.

[0002]

2. Description of the Related Art Generally, as a wafer case for storing a semiconductor wafer, a tupper is fitted to a cylindrical case body capable of stacking a predetermined number of wafers in a stacked manner so as to cover an opening portion thereof. What is called a system is known.

[0003]

However, in the case of the above-mentioned tapper type wafer case, since the lid is easily detached from the case body, there is a danger of a wafer jumping out. I couldn't get it. Conventionally, a male / female screw is formed in a fitting portion between the case body and the lid, and a type in which the fitting state of the both is held (locked) by screwing the lid into the case body has also been proposed. However, this method has another problem that the attachment and detachment of the lid is troublesome.

Accordingly, the present applicant has proposed a case structure capable of easily locking the fitting of a wafer case with Japanese Patent Application No. Hei 8-13131.
No. 4 discloses in the specification. In this prior application technology, an inner case (hereinafter, referred to as an inner case) and an outer case (hereinafter, referred to as an outer case) are formed, and an engagement protrusion provided on the inner case is used as a locking portion on the outer case. By locking, the fitted state of the cases can be easily held (locked). However, according to the prior art, when the engaging projection of the inner case is locked to the locking portion of the outer case, the engaging projection protrudes from the outer case. For example, there is a possibility that an unexpected external force is applied to the engagement protrusion.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and comprises a case main body capable of storing a predetermined number of wafers and a cylindrical inner case corresponding to the outer diameter of the wafer. In a wafer case composed of a cylindrical outer case that can be fitted to the outside of the inner case, a predetermined number of engaging protrusions are provided on the outer peripheral portion of the inner case, and the engaging protrusions are disengaged from the engaging protrusions. A locking mechanism is provided on the outer case side, where a possible locking portion is provided, and the outer case is fitted to the inner case to lock the engagement protrusion and the locking portion, thereby holding the fitted state of both cases. In the locked state between the engagement projection and the engagement portion, a projecting protection portion that is the same as or larger than the protruding end of the engagement projection and projects outward from the case is referred to as an engagement projection. Locking position with locking part In close proximity to and it has a configuration provided on the outer case.

In this configuration, the engaging projection provided on the inner case is locked to the locking portion on the outer case side,
As a result, even when the fitting state of the cases is held (locked), the engaging protrusion is protected by the overhanging protection portion without protruding from the outer case, so that careless external force is applied to the engaging protrusion. There is nothing to be done.

[0007]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is an exploded perspective view showing a first embodiment of a wafer case according to the present invention. FIGS. 2 and 3 are three views showing the structure of an inner case and an outer case constituting a case body ((a)). (A plan view, (b) side sectional view, and (c) bottom view).

As shown, the wafer case of the first embodiment mainly includes an inner case 1 and an outer case 2.
, And targets a substantially disk-shaped wafer 3 as a storage article. Of these, inner case 1
Is formed in a cylindrical shape by a circular bottom plate 4 and a peripheral wall 5 rising from a peripheral portion of the bottom plate 4. The inner diameter of the inner case 1 is set slightly larger (for example, about 0.2 to 1.5 mm) than the outer diameter of the wafer 3 to be stored. On the lower surface side of the bottom plate 4, bottom buttocks 6 a and 6 b are formed so as to protrude concentrically from the center of the case. The bottom buttocks 6a and 6b are formed such that the protrusion amounts thereof are uniform with respect to the lower surface of the bottom plate 4.

On the other hand, an opening 7 for taking in and out the wafer 3 is provided on the opposite side of the bottom plate 4. further,
A predetermined number (four in the illustrated example) of engaging projections 9, 9,... Each of the engaging projections 9 protrudes upward along the peripheral wall 5 of the inner case 1, and has a notch 9 a substantially parallel to the opening peripheral edge 8 by being bent at the tip end along the opening peripheral edge 8. doing. The vertical width of the cut groove 9a is set to be substantially the same as the thickness of the outer case 2 fitted to the inner case 1. Further, a projection 9b that projects toward the cut groove 9a is integrally formed at the tip of each engagement projection 9. This protrusion 9b
As shown in the figure, not only one but also a plurality may be formed toward the inner side of the cut groove 9a.

The above-mentioned engaging projection 9 is
In order to increase the strength, the inner case 1 may be formed to be thicker than the wall thickness, or may be formed so as to be displaced inward or outward of the case from the peripheral wall 5.

The outer case 2 is formed in a cylindrical shape by a circular top plate 10 for closing the opening 7 of the inner case 1 and a peripheral wall 11 hanging down from a peripheral edge of the top plate 10. The inner diameter of the outer case 2 is set slightly larger (for example, about 0.2 to 1.5 mm) than the outer diameter of the inner case 1 to be fitted. Further, through holes 12, 12,... Through which the engaging projections 9 on the inner case 1 side can be inserted are formed in the peripheral edge of the top plate 10, and are located at one end side of each through hole 12. A part of the top plate 10 constitutes a locking portion 13 that can be engaged with and disengaged from the engaging projection 9.

Further, on the top plate 10 of the outer case 2, a first overhanging protection portion 14 is formed so as to protrude from the peripheral portion thereof, and the second overhanging protection portion 14 is formed inside the second overhanging hole 12 through the through hole 12. The projection protection part 15 is formed so as to protrude. The overhanging protection portions 14 and 15 are formed by the engagement protrusion 9 and the locking portion 1.
The distance between them is set to be as narrow as possible so as to be as close as possible to the locking position with the locking member 3 (the position of the locking portion 13 is the locking position as it is in the illustrated example). The projecting dimension of each of the overhanging protection portions 14 and 15 with respect to the top plate 10 is such that the engagement projection 9 on the inner case 1 side is inserted into the through hole 12 of the top plate 10 and the engagement projection 9 is Under the state of being locked to the locking portion 13, it is set so as to protrude outward from the case (in this case, above the case), which is the same as or larger than the protruding end of the engaging protrusion 9 protruding from the top plate 10. ing.

In addition to this, the top plate 10 of the outer case 2
On the upper side, a projecting portion 16 concentric with the second projecting protection portion 15 is formed so as to protrude inside the second projecting protection portion 15. In addition, four notches 17 are formed on the peripheral wall 11 serving as the case outer cylinder so as to face each other. These notches 17 are used for passing a simple jig (tweezers or the like) used for transferring the wafer 3 or an arm of a transfer robot when the wafer 3 is taken in and out of the outer case 2.

By the way, the bottom buttocks 6a and 6b provided on the inner case 1 and the overhang protection portion 1 provided on the outer case 2 are provided.
The projections 4, 15 and the overhanging portion 16 also have a function of reinforcing the respective cases. Further, as a material of the inner case 1 and the outer case 2, a pure synthetic resin, such as polypropylene, which has appropriate elasticity and does not affect the wafer 3, is preferable.

Next, the usage of the wafer case having the above configuration will be described. First, a cushioning material such as a sponge is placed on the bottom plate 4 of the inner case 1 as necessary.
A predetermined number (for example, 25 or 50) of wafers 3 are stacked and stored in the inner case 1. At this time, a cushioning material similar to the above may be placed on the uppermost surface of the wafer 3.

Next, the outer case 2 is pushed over the inner case 1 from above, whereby the inner case 1 and the outer case 2 are fitted together. At this time, the peripheral wall 5 of the inner case 1 and the peripheral wall 11 of the outer case 2
So that they are fitted while compressing and expanding
The inner case 1 and the outer case 2 can be fitted without looseness by forming the openings of both cases slightly open. Further, if the notch 17 is appropriately provided in the peripheral wall 11 of the outer case 2 as described above, the two cases can be fitted more smoothly without applying excessive force.

At the time of fitting the cases, as shown in FIG. 4, the engaging projections 9 of the inner case 1 are inserted into the through holes 12 of the outer case 2 and the upper end of the peripheral wall 5 of the inner case 1 is connected to the outer case. It hits the top plate 2 of the case 2. As a result, as shown in FIG. 5A, the engagement protrusion 9 of the inner case 1 projects on the top plate 2 of the outer case 2 through the through hole 12.

Subsequently, the outer case 2 is rotated clockwise, and as shown in FIG.
The locking portions 13 on the two sides are fitted and locked in the cut grooves 9a of the engagement protrusions 9. At this time, as described above, the vertical width of the notch 9a of the engaging projection 9 is set to be substantially the same as the thickness of the locking portion 3 corresponding to the thickness of the outer case 2. For example, the presence of the projection 9b formed in the engagement projection 9 causes the notch 9a to be expanded by the locking portion 13, and a reaction force (a pinching force) due to this is applied to the locking portion 13. Thus, a more reliable locking state can be obtained.

In this state, the engagement between the inner case 1 and the outer case 2 is maintained (locked) by the engagement between the engagement projection 9 on the inner case 1 side and the engagement portion 13 on the outer case 2 side. Therefore, it is possible to prevent the wafer 3 from jumping out due to the cases being detached from each other and the wafer 3 from being damaged. Also,
In the above-mentioned locked state, overhanging protection portions 14 and 15 are provided on both sides of the locking position between the engagement protrusion 9 and the locking portion 13.
Are arranged close to each other, the engaging protrusion 9 does not protrude from the upper end of the outer case 2, and the engaging protrusion 9 is protected by the overhanging protection parts 14 and 15. Accordingly, since no careless external force is applied to the engagement projection 9, the fitting state of the two cases can be more reliably maintained. Furthermore, since the overhang protection portions 14 and 15 are simply formed integrally on the top plate 10 of the outer case 2, the structure can be implemented at extremely low cost.

Incidentally, when taking out the wafer 3 from the wafer case transported to the destination or the like, the case body is placed at a predetermined position so that the outer case 2 is on the lower side, and the inner case 1 is rotated counterclockwise in this state. Rotate in the direction. As a result, the engagement state between the engagement protrusion 9 and the engagement part 13, that is, the engagement lock state is released, and the inner case 1 is passed through the through hole 12 as it is.
Is pulled out right above, a predetermined number of wafers 3 remain in the outer case 2 side. At this time, a necessary and sufficient clearance is secured between the peripheral wall 11 of the outer case 2 and the wafer 3 due to a difference in inner diameter between the two cases.
Collision can be avoided with certainty.

By the way, as described above, the protruding protection portions 14 and 15 are located close to the locking position between the engaging projection 9 and the locking portion 13.
Is provided, there is a concern that the overhanging protection portions 14 and 15 may hinder the locked state of the two from the outside. Therefore, in the present embodiment, the above configuration is adopted to solve the above-mentioned concerns.

That is, a locked state in which the locking portion 13 is locked by the engagement protrusion 9 and an unlocked state in which the locking portion 13 is not locked by the engagement protrusion 9. As a mark for visual confirmation, for example, a mark of a warning color (red or the like) different from that of the peripheral portion is provided on the top surface of the top plate 10 of the outer case 2 and at a portion corresponding to the locking portion 13. Then, in a state where the locking portion 13 is locked to the engagement protrusion 9, the mark is hidden by the engagement protrusion 9,
The mark is made visible only when the locked state is released (including incomplete).

Accordingly, even when the overhanging protection portions 14 and 15 are provided close to the locking position as described above, whether the mark is visible or not, the fitting lock state or the fitting unlock state is determined. Can be easily visually checked from outside. As a result, it is possible to prevent a serious accident in which the wafer case is lifted by erroneously recognizing that the locked state is the locked state even though the locked state is in the unlocked state. Becomes possible.

In the first embodiment, the engaging projection 9 is provided on the peripheral edge 8 of the opening of the inner case 1, and the through hole 12 is provided on the peripheral edge of the top plate 10 of the outer case 2. Although the configuration described above has been described as an example, the wafer case according to the present invention is not limited to this. For example, as shown in FIGS.
A predetermined number of engagement projections 18 (with cut grooves) are provided on the outer peripheral surface of the peripheral wall 5 and slits 17a are formed in the longitudinal sides of the cutouts 17 of the outer case 2 corresponding to the engagement projections 18.
In contrast to a configuration in which the slit 17a is configured to be disengageable from the engagement protrusion 18, a flange-like tension is applied to the outer peripheral surface of the peripheral wall 11 of the outer case 2 in a form close to the locking position. The outgoing protection units 19a and 19b may be provided.

In this configuration, the engaging projection 18 projecting from the peripheral wall 11 of the outer case 2 is
a, 19b, and a brim-like overhanging protection unit 1
Since the wafer case can be lifted by using the hooks 9a and 19b as a catching portion, the safety in carrying the case is also ensured.

FIG. 7 shows a second example of the wafer case according to the present invention.
FIGS. 8 and 9 are exploded perspective views showing the embodiment, and FIGS. 8 and 9 are three views ((a) plan view, (b) side sectional view) showing the structure of an inner case and an outer case constituting a case body.
(C) a bottom view), and FIG. 10 is a three-view ((a) plan view, (b) side sectional view, and (c) bottom view) showing the structure of the lock key mounted on the outer case.

As shown in the drawing, the wafer case of the second embodiment mainly includes an inner case 20, an outer case 21, and a lock key 22, and is intended for a substantially disk-shaped wafer 23 as an article to be stored. I have. Among these, the inner case 20 is formed in a cylindrical shape by a circular bottom plate 24 and a peripheral wall 25 rising from the peripheral edge of the bottom plate 24. The inner diameter of the inner case 20 is slightly smaller (for example, 0.2 mm) than the outer diameter of the wafer 23 to be stored.
(About 1.5 mm). Also bottom plate 2
4, a bottom butt 26 is formed concentrically from the center of the case.
a and 26b are formed to protrude. This bottom butt 26a, 2
6b are formed such that the protrusion amounts thereof are uniform with respect to the lower surface of the bottom plate 24.

On the other hand, on the opposite side of the bottom plate 24, the wafer 23
The opening 27 for taking in and out is provided. Further, a predetermined number (4 in the illustrated example) is
) Are provided.
Each engagement protrusion 29 is provided on the peripheral wall 2 of the inner case 20.
5 and projecting upward along the opening edge portion
Is formed along the opening peripheral edge portion 28 so as to have a cut groove 29a substantially parallel to the opening peripheral edge portion 28. The vertical width of this cut groove 29a is
The thickness is set to be substantially the same as the thickness of the lock key 22 mounted on the outer case 21. In addition, the engagement protrusion 2
9, a step H (FIG. 8) is provided between the cut groove 29a and the opening peripheral edge 28, and the step H
The thickness is set to be substantially the same as that of the thickness of No. 1. Although not shown, a protrusion that protrudes toward the incision 29a may be provided at the distal end position of each engagement protrusion 29, as in the first embodiment.

The outer case 21 includes a circular top plate 30 for closing the opening 27 of the inner case 20 described above,
The top plate 30 is formed in a tubular shape by a peripheral wall 31 hanging down from a peripheral portion thereof. The inner diameter of the outer case 21 is set slightly larger (for example, about 0.2 to 1.5 mm) than the outer diameter of the inner case 20 to be fitted. In the peripheral portion of the top plate 30, through holes 32, 32, through which the engagement projections 29 on the inner case 20 side can be inserted.
・ ・ Is drilled.

Further, on the top plate 30 of the outer case 21, a projecting edge 33 corresponding to the above-mentioned projecting protection portion is formed so as to protrude from the peripheral edge thereof. The overhanging edge 33 is provided so as to be close to the engagement position between the engagement protrusion 2 and an engagement portion (described later) on the outer case 21 side which is engaged with the engagement protrusion 2. The projecting dimension of the overhanging edge 33 with respect to the top plate 30 is such that the engagement projection 29 on the inner case 20 side is inserted into the through hole 32 of the top plate 30 and locked with the locking portion. The projection is set to be the same as or larger than the protruding end of the engagement protrusion 29 protruding from the top plate 30 and protrude outside the case (in this case, above the case).

In addition to this, the top plate 3 of the outer case 21
A projecting portion 34 concentric with the projecting edge 33 is formed on the inside of the projecting edge 33. Also, on the inner peripheral surface of the overhanging edge 33, a pair of pressing pieces 35, 35 and a pair of operation supporting pieces 36, located between the above-described through holes 32, 32,.
36 are formed so as to face each other. Among these, the pair of pressing pieces 35 are for restricting the lifting of the lock key 22 on the top plate 30, and the above-mentioned tension is set at a height separated from the upper surface of the top plate 10 by the thickness of the lock key 22. It is formed so as to protrude slightly (about 1 to 2 mm) from the inner peripheral surface of the protruding edge 33, and an engagement slit 37 is provided directly below the protruding edge 33. In addition, four notches 38 are formed on the peripheral wall 31 serving as the case outer cylinder so as to face each other. These notches 38 are, as mentioned above,
When the wafer 23 is taken in and out of the outer case 21, a simple jig (tweezers or the like) used for transferring the wafer 23 or an arm of a transfer robot is passed through.

The lock key 22 has a thin plate-like ring structure, and is rotatably mounted on the top plate 30 of the outer case 21 with the above-mentioned overhanging edge 33 as a guide. The lock key 22 may be rotatably mounted on the outer case 21 by using the protruding portion 4 inside the lock key 22 as a guide instead of the protruding edge 33, or simply formed in a disk shape without a hole. You may. In the peripheral portion of the lock key 22, cutouts 39, 39,... Corresponding to the through holes 32, 32,. Are formed. Further, small projections 41, 41 corresponding to the engagement slits 37, 37 on the outer case 21 side are provided on the lower peripheral edge of the lock key 22.
Is provided.

The notch 39 is used to project the engaging projection 29 inserted through the through hole 32 onto the top plate 30 of the outer case 21. The lock key 22 located at one end of the notch 39 is provided. A part of the locking part 42 is detachable from the engaging protrusion 29. On the other hand, the notch recess 40
Has a size capable of accommodating the operation support piece 35, and in a state in which the operation support piece 35 is accommodated, the lock key 22 can be rotated within a predetermined angle range. From both ends of each cutout recess 40, clasps 43, 43 for rotating the lock key 22 are formed in an upright state, and are connected by a connecting portion 44 therebetween. Small protrusion 3
Reference numeral 1 denotes a lock key which is fitted into the engagement slit 37 in a state where the lock key 22 is mounted on the outer case 21.
When the lock key 22 is rotated counterclockwise, the lock key 22 abuts against the edge of the engagement slit 37 to regulate the rotation stop position of the lock key 22.

Next, the usage of the wafer case having the above configuration will be described. First, the inner case 20
A cushioning material such as a sponge is placed on the bottom plate 24 as necessary, and the wafers 23 are stacked and stored inside the inner case 20. At this time, a cushioning material similar to the above may be placed on the uppermost surface of the wafer 23.

Next, with the through hole 32 of the outer case 21 and the notch 39 of the lock key 22 aligned with each other, the outer case 21 with the lock key 22 is put on from above the inner case 20 and pushed in. The case 20 and the outer case 21 are fitted. At this time, similarly to the first embodiment, the inner case 20
The inner case 20 and the outer case 21 are formed by slightly opening the opening portions of both cases so that the peripheral wall 25 of the outer case 21 and the peripheral wall 31 of the outer case 21 are fitted together while being compressed and expanded. Can be fitted without rattling. In addition, if the notch 38 is appropriately provided in the peripheral wall 11 of the outer case 21 as described above, the two cases can be fitted more smoothly without applying excessive force.

When fitting the cases together, see FIG.
As shown in FIG. 5, the engagement protrusion 29 of the inner case 20 is inserted through the through hole 32 of the outer case 21,
The upper end of the peripheral wall 25 of the inner case 29 is attached to the outer case 2
It hits the top plate 30 of one. As a result, as shown in FIG. 12A, the engagement projection 29 of the inner case 20 is inserted through the through hole 32, and further protrudes above the top plate 2 of the outer case 2 through the notch 39 of the lock key 22. Become. In this state, as shown in FIG. 13A, the lock key 22 can be rotated clockwise as described below.
The outer case 21 is inserted into the cutout recess 40 of the lock key 22.
The operation support pieces 35 are arranged in one direction.

Subsequently, the lock key 22 is rotated clockwise, and as shown in FIG. 12B and FIG. It is fitted into the groove 29a and locked. At this time, a fingertip (for example, a thumb and a forefinger) is hooked between the operation support piece 35 on the outer case 21 side and the cue 43 on the lock key 22 side, and if the fingertip is pinched, the lock key 22 on the outer case 21 can be held. Can be smoothly rotated. In addition, when the engaging protrusion 29 is locked to the locking portion 42, the dimensions of the respective portions may be appropriately set so that the cut groove 29 a of the engaging protrusion 29 is expanded by the locking portion 42. Since a reaction force (a pinching force) due to this is applied to the locking portion 42, a more secure locking state can be obtained between the two.

In this state, the engagement between the inner case 20 and the outer case 21 is maintained (locked) by the engagement between the engagement protrusion 29 of the inner case 20 and the engagement portion 42 of the lock key 22. For this reason, it is possible to prevent the accident of popping out the wafer 23 due to the detachment of the cases, the damage accident of the wafer 23 accompanying the accident, and the like.
Further, in the above-mentioned locked state, the overhanging edge 33 corresponding to the overhang protection portion is arranged close to the engagement position between the engagement protrusion 29 and the engagement portion 42, so that the outer case 2
The engaging projection 29 does not protrude from the upper end of 1, and the engaging projection 29 is protected by the overhanging edge 33. Therefore,
Since no careless external force is applied to the engagement projection 29, the fitted state of the two cases can be maintained more reliably. Further, the top plate 30 of the outer case 21
Since the lock key 22 is rotatably mounted on the upper part and the locked state can be obtained only by rotating the lock key 22, the handling of the wafer case itself becomes extremely simple.

In addition, also in the second embodiment, the locked state in which the locking portion 42 is locked to the engagement projection 29 and the locking portion 42 is locked to the engagement projection 29. For example, as a mark for visually confirming that the fitting and unlocking state is not completed, the upper surface of the top plate 30 of the outer case 21 and the vicinity of the operation support side 36, or the upper surface of the lock key 22 and corresponds to the locking portion 42 A mark of a warning color (red or the like) different from that of the peripheral portion is provided on the portion to be locked, and when the locking portion 42 is locked by the engagement projection 29, the mark is locked by the lock key 22 or the engagement projection 29. By making the mark visible only in a state where the mark is hidden and the locked state is released (including an incomplete state), it is possible to easily visually check whether the locked state or the unlocked state is fitted from the outside. become.

When removing the wafer 23 from the wafer case transported to the destination or the like, the lock key 22 is rotated counterclockwise in the reverse procedure to release the fitting lock state. , Outer case 21
Place the case body at a predetermined location so that At this time, since the pressing piece 35 is provided on the inner peripheral surface of the overhanging edge 33 of the outer case 21, the lock key 22 is prevented from falling off while being hooked on the pressing piece 35.

Next, when the inner case 20 is pulled out right above so that the engaging projections 29 pass through the through holes 32, a predetermined number of wafers 23 remain in the outer case 21 side. At this time, the peripheral wall 3 of the outer case 21
As in the first embodiment, a necessary and sufficient clearance is secured between the wafer 1 and the wafer 23, so that the collision with the peripheral wall 31 can be reliably avoided when the wafer 23 is taken out. .

[0042]

As described above, according to the wafer case of the present invention, when the engagement projection of the inner case and the engagement portion of the outer case are locked, the projection is the same as the protruding end of the engagement projection. An overhanging protection portion that protrudes outward from the case larger than that is provided close to the locking position between the engagement protrusion and the locking portion, so that the fitting state between the cases is maintained (locked). Even in this state, the engaging projections are protected by the overhanging protection portions without protruding from the outer case. Thereby, no careless external force is applied to the engagement protrusion, so that the fitting state between the inner case and the outer case can be more reliably maintained. Further, since the outer case has a simple structure in which only the overhanging protection portion is provided, it can be implemented at extremely low cost.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a first embodiment of a wafer case according to the present invention.

FIG. 2 is an explanatory diagram of a structure of an inner case according to the first embodiment.

FIG. 3 is an explanatory diagram of a structure of an outer case according to the first embodiment.

FIG. 4 is a side sectional view showing a case fitting state in the first embodiment.

FIG. 5 is a sectional view of a main part showing a locked / released state in the first embodiment.

FIG. 6 is a diagram illustrating a modification of the first embodiment.

FIG. 7 is an exploded perspective view showing a second embodiment of the wafer case according to the present invention.

FIG. 8 is a structural explanatory view of an inner case according to a second embodiment.

FIG. 9 is a structural explanatory view of an outer case according to a second embodiment.

FIG. 10 is a structural explanatory view of a lock key according to a second embodiment.

FIG. 11 is a side sectional view showing a case fitting state in the second embodiment.

FIG. 12 is a sectional view of a main part showing a locked / removed state in the second embodiment.

FIG. 13 is a perspective view showing a locked / removed state in the second embodiment.

[Explanation of symbols]

1,20 Inner case 2,21 Outer case 3,23 Wafer 4,24 Bottom plate 5,25 Peripheral wall 7,27 Opening 8,28 Opening peripheral rim 9,1
8, 29 Engagement projections 10, 30 Top plate 11, 31 Peripheral wall 12, 32
Through holes 13, 42 Locking parts 14, 15, 19a, 19b
Projection protection part 22 Lock key 33 Projection edge 35 Presser piece
36 Operation support piece 40 Notch recess 43 Cue

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Minori Shibuya, Inventor Sony 7-35, Kita-Shinagawa, Shinagawa-ku, Tokyo (72) Inventor Hitoshi Kazama 42 Hinohara, Tamagawa-mura, Hiki-gun, Hiki-gun, Saitama Prefecture (72) Inventor Haruji Tatebe 2-10-12 Minamisuna, Koto-ku, Tokyo Yamato Glass Co., Ltd.

Claims (8)

[Claims] 1. A case body capable of storing a predetermined number of wafers, comprising a cylindrical inner case corresponding to the outer diameter of the wafer and a cylindrical outer case fittable outside the inner case. In the wafer case, a predetermined number of engaging projections are provided on the outer peripheral portion of the inner case, and a locking portion that can be engaged with and disengaged from the engaging projections is provided on the outer case side. A lock mechanism that holds an engagement state of both cases by fitting an outer case and locking the engagement protrusion and the locking portion, wherein the engagement protrusion and the lock In the locked state with the locking portion, a projecting protection portion that projects outward from the case, which is the same as or larger than the protruding end of the engagement projection, is provided at a locking position between the engagement projection and the locking portion. Close to Wafer case characterized by comprising providing a coater case. 2. The wafer case according to claim 1, wherein the overhanging protection portions are provided on both sides of the locking position. 3. A fitting locked state in which the locking portion is locked to the engagement protrusion, and a fitting unlocked state in which the locking portion is not locked to the engagement protrusion. 2. The wafer case according to claim 1, further comprising a mark for visual confirmation. 4. A circular bottom plate and a peripheral wall rising from a peripheral portion of the bottom plate are formed so as to be able to store a predetermined number of wafers, and have an opening on the opposite side of the bottom plate, and the opening peripheral portion. A cylindrical inner case having a predetermined number of engaging projections provided on the outer surface of the inner case, a circular top plate closing an opening of the inner case, and a peripheral wall hanging down from a peripheral edge of the top plate. A cylindrical outer case formed at the periphery of the top plate and formed with a through hole through which the engagement protrusion is inserted when fitted with the inner case; and the outer case. A locking portion which is rotatably mounted on the top plate and which can be disengaged from the engaging protrusions which are inserted through the through holes and protrude on the top plate. By locking to the engagement protrusion, the Wafer case, characterized in that a locking key for holding the fitting state between N'nakesu and the outer case. 5. An overhanging edge is formed on a top plate of the outer case along a peripheral edge thereof, and the lock key is rotatably mounted in the overhanging edge. Item 5. The wafer case according to Item 4. 6. The wafer case according to claim 4, wherein the lock key is provided with a cue for a rotation operation. 7. The wafer case according to claim 5, wherein a presser piece is provided on the inner peripheral surface of the overhanging edge of the outer case to control the lifting of the lock key. 8. An operation support piece protruding from a peripheral edge of a top plate of the outer case, a notch recess capable of accommodating the operation support piece is formed at a peripheral edge of the lock key, and the notch recess is formed. 7. The wafer case according to claim 6, wherein the cue portion is formed in a state of standing from both ends.