JPH1068672A - Liquid crystal evaluation device - Google Patents
Liquid crystal evaluation deviceInfo
- Publication number
- JPH1068672A JPH1068672A JP22655496A JP22655496A JPH1068672A JP H1068672 A JPH1068672 A JP H1068672A JP 22655496 A JP22655496 A JP 22655496A JP 22655496 A JP22655496 A JP 22655496A JP H1068672 A JPH1068672 A JP H1068672A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- crystal substrate
- minute
- pitch
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 217
- 238000011156 evaluation Methods 0.000 title claims description 28
- 239000000758 substrate Substances 0.000 claims description 98
- 239000000463 material Substances 0.000 claims description 19
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 44
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000035699 permeability Effects 0.000 abstract 2
- 238000002834 transmittance Methods 0.000 description 26
- 239000011521 glass Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 229920000426 Microplastic Polymers 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は液晶材料の特性を評
価するための液晶評価装置に関し、液晶ピッチや透過率
/電圧特性を測定する場合に適用して有用なものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal evaluation device for evaluating characteristics of a liquid crystal material, and is useful when applied to a case where a liquid crystal pitch and a transmittance / voltage characteristic are measured.
【0002】[0002]
【従来の技術】従来より、液晶材料の評価項目として液
晶ピッチの測定がある。この液晶ピッチとは、液晶材料
に固有のものであって、液晶分子鎖が360°ねじれる
のに必要な距離のことである。2. Description of the Related Art Conventionally, there is measurement of a liquid crystal pitch as an evaluation item of a liquid crystal material. The liquid crystal pitch is specific to a liquid crystal material, and is a distance required for a liquid crystal molecular chain to be twisted by 360 °.
【0003】液晶材料メーカーでは、液晶材料の研究開
発、品質管理及び出荷検査において液晶ピッチの測定を
行う。A liquid crystal material manufacturer measures a liquid crystal pitch in the research and development, quality control and shipping inspection of a liquid crystal material.
【0004】液晶表示装置メーカーでは、液晶材料の受
入れ検査で液晶ピッチの測定を行うのみならず、実用に
供せられている15000種類以上の液晶材料の中か
ら、混合して自社の液晶表示パネルに採用する液晶材料
の種類及び混合比を変えて、液晶表示性能を高めるため
の研究開発を行っており、その過程で、混合された液晶
材料の液晶ピッチの測定が不可欠である。[0004] Liquid crystal display device manufacturers not only measure the pitch of the liquid crystal in the acceptance inspection of the liquid crystal material, but also mix and select from more than 15,000 types of liquid crystal materials that are practically used. Research and development are being carried out to improve the liquid crystal display performance by changing the type of liquid crystal material used and the mixing ratio, and in the process, measurement of the liquid crystal pitch of the mixed liquid crystal material is indispensable.
【0005】従来、この液晶ピッチの測定は、図7に示
すようなクサビ型セル1を用いて行われている。同図に
示すように、クサビ型セル1は、上側液晶基板2と下側
液晶基板3とをスペーサ4を介し傾斜して重ね合わせ、
これらの左右両端部を接着剤5,6で固めた上で、上側
液晶基板2と下側液晶基板3との微小間隙7に液晶分子
8を浸透させた構造になっている。上側液晶基板2は、
偏光板9、ガラス板10、配向膜11を積層してなる積
層板となっており、下側液晶基板3は、配向膜12、ガ
ラス板13、偏光板14を積層してなる積層板となって
いる。配向膜11,12は、液晶分子鎖8等の端部の姿
勢を強制する作用を有する。また、説明の便宜のため、
偏光板9,14の偏光方向は一致しているものとする。Conventionally, the measurement of the liquid crystal pitch has been performed using a wedge type cell 1 as shown in FIG. As shown in FIG. 1, the wedge-type cell 1 is configured such that an upper liquid crystal substrate 2 and a lower liquid crystal substrate 3 are inclined and overlapped with a spacer 4 interposed therebetween.
The left and right ends are fixed with adhesives 5 and 6, and liquid crystal molecules 8 are made to penetrate into minute gaps 7 between the upper liquid crystal substrate 2 and the lower liquid crystal substrate 3. The upper liquid crystal substrate 2
The lower liquid crystal substrate 3 is a laminated plate formed by laminating an alignment film 12, a glass plate 13, and a polarizing plate 14. The polarizing plate 9, the glass plate 10, and the alignment film 11 are laminated. ing. The alignment films 11 and 12 have a function of forcing the posture of the end portions of the liquid crystal molecular chains 8 and the like. Also, for convenience of explanation,
It is assumed that the polarization directions of the polarizing plates 9 and 14 match.
【0006】従って、このクサビ型セル1の裏面(下側
液晶基板3側)から白色光15を照射し、図7(a)中
に示すA視の方向から上側液晶基板2を見ると、同図
(b)に示すように一定間隔で黒線として表れるディス
クリミネーションライン16,17,18が観察され
る。これらのディスクリミネーションライン16,1
7,18の発生理由は次の通りである。Accordingly, when the wedge-type cell 1 is irradiated with white light 15 from the back surface (the lower liquid crystal substrate 3 side), and the upper liquid crystal substrate 2 is viewed from the direction A as shown in FIG. As shown in FIG. 3B, discrimination lines 16, 17, and 18 appearing as black lines at regular intervals are observed. These discrimination lines 16, 1
The reasons for the occurrence of 7 and 18 are as follows.
【0007】即ち、偏光板9,14の偏光方向が一致し
ているため、クサビ型セル1を透過する白色光15の透
過率は液晶分子鎖8のねじれ角が90°の偶数倍の場合
に最大となる一方、液晶分子鎖8のねじれ角が90°の
奇数倍の場合に最小となり、ディスクリミネーションラ
イン16,17,18は、後者の場合に相当する。That is, since the polarization directions of the polarizers 9 and 14 match, the transmittance of the white light 15 passing through the wedge-type cell 1 is equal to the case where the twist angle of the liquid crystal molecular chain 8 is an even multiple of 90 °. On the other hand, when the twist angle of the liquid crystal molecular chain 8 is an odd multiple of 90 °, it becomes the minimum, and the discrimination lines 16, 17, and 18 correspond to the latter case.
【0008】そこで、かかるディスクリミネーションラ
イン16,17,18の間隔Lを画像処理やその他の測
定手段で測定すると、クサビ型セル1の上側液晶基板2
と下側液晶基板3とのなす傾き角(クサビ角)Θを与件
として、液晶ピッチPは、次の第1式で計算される。 P=2LtanΘ ・・・・・ (第1式)When the distance L between the discrimination lines 16, 17, and 18 is measured by image processing or other measuring means, the upper liquid crystal substrate 2 of the wedge cell 1 is measured.
The liquid crystal pitch P is calculated by the following first formula given the inclination angle (wedge angle) と formed between the liquid crystal and the lower liquid crystal substrate 3. P = 2LtanΘ (1)
【0009】そして、液晶表示装置メーカーでは、上式
によって液晶ピッチPを求めた後、図7に示す上下の液
晶基板2,3を平行に配設し、これらの隙間にマイクロ
プラスティックボールと液晶材料とを混合して充満さ
せ、このマイクロプラスティックボールの径を設定隙間
として選定し、液晶基板2,3の4辺を接着して、図示
しないフッラト型セルを製作し、このフッラト型セルを
用いて透過率/電圧特性(詳細後述)などの評価、即
ち、点灯ON/OFF時の応答性、コントラスト比、視
野角などを評価するが、このときのフッラト型セルにお
ける上側液晶基板2と下側液晶基板3との液晶封入隙間
(セルギャップ)は、液晶ピッチ測定の結果に基づくも
のである。従って、液晶ピッチ測定の精度は、液晶表示
性能評価試験の信頼性に重大な影響を与える。After obtaining the liquid crystal pitch P by the above equation, the liquid crystal display device maker arranges the upper and lower liquid crystal substrates 2 and 3 shown in FIG. 7 in parallel, and places a micro plastic ball and a liquid crystal material in these gaps. Are mixed and filled, the diameter of the microplastic ball is selected as a set gap, and four sides of the liquid crystal substrates 2 and 3 are bonded to produce a flat cell (not shown), and the flat cell is used by using the flat cell. Evaluation of transmittance / voltage characteristics (details will be described later) and the like, that is, responsiveness at the time of lighting ON / OFF, contrast ratio, viewing angle, and the like are evaluated. At this time, the upper liquid crystal substrate 2 and the lower liquid crystal in the flat cell are evaluated. The liquid crystal sealing gap (cell gap) with the substrate 3 is based on the result of the liquid crystal pitch measurement. Therefore, the accuracy of the liquid crystal pitch measurement has a significant effect on the reliability of the liquid crystal display performance evaluation test.
【0010】[0010]
【発明が解決しようとする課題】しかしながら、上記ク
サビ型セル1を用いる従来の液晶ピッチ測定方法では、
次のような数多くの不具合があり、このため、作業効率
や評価の信頼性の点で問題が多い。However, in the conventional liquid crystal pitch measuring method using the wedge type cell 1 described above,
There are a number of inconveniences as follows, and therefore, there are many problems in terms of work efficiency and reliability of evaluation.
【0011】(1) 測定の準備に手間がかかる。即
ち、クサビ型セル1の組立・接着は手作業であり、時間
がかかる。(1) Preparation for measurement takes time and effort. That is, the assembly and bonding of the wedge-type cell 1 are manual and time-consuming.
【0012】(2) 液晶ピッチの測定精度劣化要因が
多い。例えば、図7のクサビ型セル1におけるスペーサ
4の取付位置誤差は、傾き角Θの誤差となり、上記第1
式から分かるように、液晶ピッチPの計算誤差となる。
また、一般にガラス板10,13には反りがあり、これ
も誤差要因となる。特にSTN液晶では液晶ピッチが小
さくなるため、従来のクサビ型セル1による方法では、
液晶ピッチの高精度測定は困難である。(2) There are many factors that deteriorate the measurement accuracy of the liquid crystal pitch. For example, the mounting position error of the spacer 4 in the wedge-type cell 1 of FIG.
As can be seen from the equation, a calculation error of the liquid crystal pitch P occurs.
Generally, the glass plates 10 and 13 are warped, which also causes an error. In particular, since the liquid crystal pitch is small in the STN liquid crystal, the method using the conventional wedge-type cell 1
It is difficult to measure the liquid crystal pitch with high accuracy.
【0013】(3) 点灯ON/OFF時の応答性、コ
ントラスト比、視野角等の液晶表示性能評価の信頼性を
低下させる。即ち、液晶封入隙間(セルギャップ)は液
晶ピッチの測定結果に基づいて決定されるため、上記の
如く液晶ピッチの測定精度が悪いと、セルギャップの設
定が不適切なものとなり、このことによって液晶表示性
能評価試験そのものの信頼性が低下する。(3) The reliability of the liquid crystal display performance evaluation such as the response at the time of lighting ON / OFF, the contrast ratio, and the viewing angle is reduced. That is, since the liquid crystal enclosing gap (cell gap) is determined based on the measurement result of the liquid crystal pitch, if the accuracy of the measurement of the liquid crystal pitch is poor as described above, the setting of the cell gap becomes inappropriate. The reliability of the display performance evaluation test itself decreases.
【0014】(4) 液晶ピッチの測定と透過率/電圧
特性の測定とを個別の装置(クサビ型セルとフラット型
セル)によって行うため、両測定が別行程となり、作業
効率が悪い。(4) Since the measurement of the liquid crystal pitch and the measurement of the transmittance / voltage characteristics are performed by separate devices (wedge-type cell and flat-type cell), both measurements are performed in different steps, resulting in poor work efficiency.
【0015】従って本発明は上記従来技術に鑑み、液晶
ピッチ測定及び透過率/電圧特性測定を精度よく効率的
に行うことができる液晶評価装置を提供することを課題
とする。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a liquid crystal evaluation device capable of accurately and efficiently measuring a liquid crystal pitch and a transmittance / voltage characteristic in view of the above prior art.
【0016】[0016]
【課題を解決するための手段】上記課題を解決する本発
明の液晶評価装置の第1の構成は、評価対象の液晶材料
を入れる微小隙間を有して対面する第1及び第2の液晶
基板と、これら第1又は第2の液晶基板を略平行に微小
移動して前記微小隙間を変化せしめる平行移動手段と、
この移動手段によって略平行に微小移動される前記第1
又は第2の液晶基板の移動量を測定する移動量測定手段
と、前記第1又は第2の液晶基板側から光を照射する光
源と、この光源による光の照射側と反対側に位置する前
記第2又は第1の液晶基板の微小特定エリアの輝度を測
定する輝度測定手段とを備えたことを特徴とする。According to a first aspect of the present invention, there is provided a liquid crystal evaluation apparatus for solving the above-mentioned problems, comprising first and second liquid crystal substrates facing each other with a minute gap for accommodating a liquid crystal material to be evaluated. Translation means for finely moving the first or second liquid crystal substrate substantially in parallel to change the minute gap;
The first means, which is slightly moved substantially in parallel by the moving means,
Or a movement amount measuring means for measuring a movement amount of the second liquid crystal substrate, a light source for irradiating light from the first or second liquid crystal substrate side, and the light source irradiating the light source with the light source. A luminance measuring means for measuring the luminance of a minute specific area of the second or first liquid crystal substrate.
【0017】また第2の構成は、上記第1の構成におい
て、前記第1又は第2の液晶基板を傾斜せしめる傾動手
段と、この傾動手段により前記第1又は第2の液晶基板
を傾斜せしめることによって生起する前記第1の液晶基
板と第2の液晶基板とのなす傾き角を測定する傾き角測
定手段と、前記光源による光の照射側と反対側の前記第
2又は第1の液晶基板に生起するディスクリミネーショ
ンラインの間隔を測定する間隔測定手段とを備えたこと
を特徴とする。According to a second configuration, in the first configuration, a tilting means for tilting the first or second liquid crystal substrate, and the first or second liquid crystal substrate is tilted by the tilting means. Angle measuring means for measuring the angle of inclination between the first liquid crystal substrate and the second liquid crystal substrate caused by the first and second liquid crystal substrates, and the second or first liquid crystal substrate on the side opposite to the light irradiation side of the light source. And an interval measuring means for measuring an interval between the generated discrimination lines.
【0018】また第3の構成は、上記第1又は第2の構
成において、前記第1の液晶基板と第2の液晶基板の透
明電極に可変の直流電圧を印加する電圧印加手段を備え
たことを特徴とする。According to a third aspect, in the first or second aspect, voltage applying means for applying a variable DC voltage to the transparent electrodes of the first liquid crystal substrate and the second liquid crystal substrate is provided. It is characterized by.
【0019】従って、上記第1の構成の液晶評価装置に
よれば、光源により第1又は第2の液晶基板側から光を
照射すると共に平行移動手段により第1又は第2の液晶
基板を略平行に微小移動し、このときの第1又は第2の
液晶基板の移動量と第2又は第1の液晶基板の微小特定
エリアの輝度とを移動量測定手段と輝度測定手段とによ
って各々測定する。そして、この結果得られる前記輝度
(透過率)の極大値と極大値との間隔(又は極小値と極
小値との間隔)から、液晶基板の反りや厚みのばらつき
等を除去した高精度な液晶ピッチを求めることができ
る。Therefore, according to the liquid crystal evaluation device having the first configuration, the light source irradiates light from the first or second liquid crystal substrate side and the first or second liquid crystal substrate is moved in substantially parallel by the parallel moving means. Then, the movement amount of the first or second liquid crystal substrate and the luminance of the minute specific area of the second or first liquid crystal substrate at this time are measured by the movement amount measuring means and the luminance measuring means, respectively. Then, a high-precision liquid crystal in which the warpage and thickness variation of the liquid crystal substrate are removed from the interval between the maximum value (or the minimum value) of the luminance (transmittance) obtained as a result. The pitch can be determined.
【0020】また、上記第2の構成の液晶評価装置によ
れば、上記のようにして高精度に液晶ピッチを測定する
前に、予め液晶ピッチの近似値を求め、この近似値に基
づいて、液晶ピッチの高精度測定を効率よく行うことが
できる。以下に、その手順を説明する。Further, according to the liquid crystal evaluation apparatus of the second configuration, before measuring the liquid crystal pitch with high accuracy as described above, an approximate value of the liquid crystal pitch is obtained in advance, and based on this approximate value, High precision measurement of the liquid crystal pitch can be performed efficiently. The procedure will be described below.
【0021】 傾動手段により第1又は第2の液晶基
板を傾斜せしめてこれらの液晶基板に傾き角Θを与える
と共に、光源により第1又は第2の液晶基板側から光を
照射し、このときに第2又は第1の液晶基板に生起する
ディスクリミネーションラインの間隔Lを間隔測定手段
によって測定する。そして、前記間隔Lと前記傾き角Θ
とから、次の第2式によって液晶ピッチの近似値P1 を
算出する。 P1 =2LtanΘ ・・・・・ (第2式)The first or second liquid crystal substrate is tilted by tilting means to give an inclination angle Θ to these liquid crystal substrates, and light is irradiated from the first or second liquid crystal substrate side by a light source. The distance L between the discrimination lines occurring on the second or first liquid crystal substrate is measured by the distance measuring means. Then, the interval L and the inclination angle Θ
From, to calculate the approximate value P 1 of the liquid crystal pitch by a second equation below. P 1 = 2LtanΘ (Formula 2)
【0022】 次に、傾動手段により第1の液晶基板
と第2の液晶基板とを平行にした後、平行移動手段によ
り両液晶基板の間隔を除々に小さくしていき、このとき
に第2又は第1の液晶基板の微小特定エリアの輝度を輝
度測定手段によって測定する。この輝度の測定は、次の
ように3段階に分けて行う。Next, after the first liquid crystal substrate and the second liquid crystal substrate are made parallel by the tilting means, the distance between the two liquid crystal substrates is gradually reduced by the parallel moving means. The luminance of the minute specific area of the first liquid crystal substrate is measured by the luminance measuring means. The measurement of the luminance is performed in three stages as follows.
【0023】第1段階では、平行移動手段による第1又
は第2の液晶基板の移動速度を大きくして、輝度レベル
が最大(又は最小)となる概略位置を把握する。第2段
階では、平行移動手段による第1又は第2の液晶基板の
移動速度を小さくして、輝度レベルが最大(又は最小)
となる位置を正確に把握する。第3段階では、液晶ピッ
チの近似値P1 のデータに基づき、平行移動手段により
第1又は第2の液晶基板を移動速度を大きくしてP1 だ
け移動させた後、この位置の前後に移動速度を小さくし
て移動させ、輝度レベルが最大(又は最小)となる位置
を正確に把握する。輝度レベルが最大(又は最小)とな
る位置から、再び最大(又は最小)となる位置までの第
1又は第2の液晶基板の移動距離、即ち隙間の変化量が
正確な液晶ピッチの値となる。In the first stage, the moving speed of the first or second liquid crystal substrate by the parallel moving means is increased to grasp the approximate position where the luminance level becomes maximum (or minimum). In the second stage, the moving speed of the first or second liquid crystal substrate by the parallel moving means is reduced so that the luminance level is maximum (or minimum).
Know exactly where it will be. In the third stage, based on the data of the approximate value P 1 of the liquid crystal pitch, after moving only P 1 by increasing the first or the moving speed of the second liquid crystal substrate by translating means, moves back and forth in this position Move at a reduced speed to accurately grasp the position where the luminance level is maximum (or minimum). The moving distance of the first or second liquid crystal substrate from the position where the luminance level is maximum (or minimum) to the position where it is maximum (or minimum) again, that is, the amount of change in the gap becomes an accurate value of the liquid crystal pitch. .
【0024】また、上記第3の構成の液晶評価装置によ
れば、液晶ピッチ測定後、引き続いて同一装置により、
以下のようにして透過率/電圧特性を測定することがで
きる。Further, according to the liquid crystal evaluation device of the third configuration, after the liquid crystal pitch is measured, the same device continues to measure the pitch of the liquid crystal.
The transmittance / voltage characteristics can be measured as follows.
【0025】 平行移動手段により第1又は第2の液
晶基板を移動させて微小特定エリアの輝度が極小値とな
る位置に設定する。 電圧印加手段により直流電圧(可変)を印加し、こ
の電圧値を除々に上昇させていく。 輝度測定手段により微小特定エリアの輝度を測定
し、この輝度(透過率)と印加電圧値との関係を求め、
透過率/電圧特性を得る。 この透過率/電圧特性から、コントラスト比等を求
める。The first or second liquid crystal substrate is moved by the parallel moving means, and is set at a position where the luminance of the minute specific area has a minimum value. A DC voltage (variable) is applied by the voltage applying means, and this voltage value is gradually increased. The luminance of the minute specific area is measured by the luminance measuring means, and the relationship between this luminance (transmittance) and the applied voltage value is obtained.
Obtain transmittance / voltage characteristics. From this transmittance / voltage characteristic, a contrast ratio and the like are obtained.
【0026】[0026]
【発明の実施の形態】以下、本発明の実施の形態を図面
に基づき詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【0027】図1は本発明の実施の形態に係る液晶評価
装置の構成を示す断面図、図2は図1に示す液晶評価装
置に備えた液晶基板の構成図、図3は液晶ピッチの近似
値測定の説明図、図4及び図5は液晶ピッチの高精度測
定の説明図、図6は透過率/電圧特性測定の説明図であ
る。FIG. 1 is a sectional view showing the structure of a liquid crystal evaluation apparatus according to an embodiment of the present invention, FIG. 2 is a view showing the configuration of a liquid crystal substrate provided in the liquid crystal evaluation apparatus shown in FIG. 1, and FIG. 4 and 5 are explanatory diagrams of high-precision measurement of liquid crystal pitch, and FIG. 6 is an explanatory diagram of transmittance / voltage characteristic measurement.
【0028】図1に示すように、下側液晶基板3と上側
液晶基板2とは、微小隙間δを有して対面している。下
側液晶基板3は、排気穴21,22を介して真空引きさ
れている凹部23,24にて吸着されることにより、微
動ステージ20に固定されている。上側液晶基板2は、
排気穴25,26を介して真空引きされている凹部2
7,28にて吸着されることにより、上側保持部材29
に固定されている。As shown in FIG. 1, the lower liquid crystal substrate 3 and the upper liquid crystal substrate 2 face each other with a small gap δ. The lower liquid crystal substrate 3 is fixed to the fine movement stage 20 by being sucked by the concave portions 23 and 24 evacuated through the exhaust holes 21 and 22. The upper liquid crystal substrate 2
Recess 2 evacuated through exhaust holes 25 and 26
7 and 28, the upper holding member 29
It is fixed to.
【0029】ここで図2(a)に基づいて液晶基板2,
3の構造を説明する。なお同図は液晶基板2,3の構造
を拡大・誇張して示したものである。同図に示すよう
に、上側液晶基板2は、偏光板9、ガラス板10、透明
電極膜55及び配向膜11を積層してなる積層板となっ
ており、下側液晶基板3は、配向膜12、ガラス板1
3、透明電極膜56及び偏光板14を積層してなる積層
板となっている。ここでは説明の便宜のために、偏光板
9,14の偏光方向は同一とし、また配向膜11,12
の配向方向も同一とする。そして、上側液晶基板2と下
側液晶基板3との微小隙間δには、液晶材料30が表面
張力によって流出することなく充満しており、液晶基板
2,3と液晶材料30とでテストセル31を構成してい
る。Here, referring to FIG.
The structure of No. 3 will be described. FIG. 1 shows the structure of the liquid crystal substrates 2 and 3 in an enlarged and exaggerated manner. As shown in the figure, the upper liquid crystal substrate 2 is a laminated plate formed by laminating a polarizing plate 9, a glass plate 10, a transparent electrode film 55 and an alignment film 11, and the lower liquid crystal substrate 3 is formed of an alignment film. 12. Glass plate 1
3. A laminated plate in which the transparent electrode film 56 and the polarizing plate 14 are laminated. Here, for convenience of explanation, the polarization directions of the polarizing plates 9 and 14 are assumed to be the same, and the alignment films 11 and 12 are
Are also the same. The small gap δ between the upper liquid crystal substrate 2 and the lower liquid crystal substrate 3 is filled with the liquid crystal material 30 without flowing out due to surface tension. Is composed.
【0030】図1に示すように、微動ステージ20に
は、y軸方向に可撓性のあるばね部32,33と34,
35とが左右対称に設けられると共に、y軸方向に多数
の圧電素子を積層してなる圧電アクチュエータ38と4
1とがx軸方向に可撓性のあるばね部36,37と3
9,40とを介して左右対称に組み込まれている。As shown in FIG. 1, fine movement stage 20 has spring portions 32, 33 and 34, which are flexible in the y-axis direction.
35 are provided symmetrically and piezoelectric actuators 38 and 4 are formed by laminating a large number of piezoelectric elements in the y-axis direction.
1 are spring portions 36, 37 and 3 which are flexible in the x-axis direction.
9 and 40, and are symmetrically assembled.
【0031】従って、圧電アクチュエータ38,41の
両端部に電圧を印加すると、x軸方向に可撓性のあるば
ね部36,37又は39、40を介して微動ステージ2
0にy軸方向の力が伝達され、このy軸方向に可撓性の
あるばね部32,33又は34,35が弾性変形するこ
とによって、微動ステージ20(下側液晶基板3)が、
平行に上下方向に微小移動し又は微回動して傾斜するよ
うになっている。つまり、圧電アクチュエータ38,4
1に印加する電圧の値が、等しいときには平行移動し、
異なるときには傾斜する。また微動ステージ20(下側
液晶基板3)の微小移動量又は傾き角は、左右対称に配
設された一対の静電容量式又は渦電流式の変位計42,
43によって検出されるようになっている。Therefore, when a voltage is applied to both ends of the piezoelectric actuators 38, 41, the fine movement stage 2 is moved through the spring portions 36, 37 or 39, 40 which are flexible in the x-axis direction.
0, the force in the y-axis direction is transmitted, and the spring portion 32, 33 or 34, 35, which is flexible in the y-axis direction, is elastically deformed, so that the fine movement stage 20 (lower liquid crystal substrate 3)
It moves slightly in the vertical direction in parallel or tilts by fine rotation. That is, the piezoelectric actuators 38, 4
When the values of the voltages applied to 1 are equal, they translate in parallel,
Tilt when different. The minute movement amount or the inclination angle of the fine movement stage 20 (the lower liquid crystal substrate 3) is determined by a pair of capacitance type or eddy current type displacement meters 42 symmetrically arranged.
43.
【0032】また、微動ステージ20は基盤部材44に
設置される一方、上側保持部材29は、ストッパー板4
5,46及び47,48を介して、基盤部材44の上部
に位置決めされている。更に、上側保持部材29の左右
両端部には、ボールブッシュ49,50が嵌着されてお
り、これらのボールブッシュ49,50には基盤部材4
4に立設された案内軸51,52がy軸方向に摺動自在
に挿通されている。従って、上側保持部材29は、図示
しないエアーシリダーに駆動されると共に案内軸51,
52に案内されて、矢印a,b方向に上下移動する。The fine movement stage 20 is set on the base member 44, while the upper holding member 29 is
It is positioned above the base member 44 via 5, 46 and 47, 48. Further, ball bushes 49, 50 are fitted to both left and right end portions of the upper holding member 29, and the base members 4 are attached to the ball bushes 49, 50.
The guide shafts 51 and 52 erected at 4 are slidably inserted in the y-axis direction. Therefore, the upper holding member 29 is driven by an air cylinder (not shown), and the guide shaft 51,
The guide 52 moves up and down in the directions of arrows a and b.
【0033】上側保持部材29の中央部の貫通穴には、
ガラスフランジ53が嵌着され、微動ステージ20の中
央部の上部貫通穴には、ガラスフランジ54が嵌着され
ている。ガラスフランジ53,54は、それぞれ隙間を
介して下或いは上の液晶基板2と3とに対面している。
なお、図2(a)で示すガラス板10,13に施工され
ている偏光板9,14は、図2(b)に示す如く、それ
ぞれガラスフランジ53,54に施工してもよく、図1
は後者の場合で示している。また、上側液晶基板2と下
側液晶基板3のそれぞれの透明電極55,56は、取付
け時に配向膜を介して直流電源57とスイッチ58に接
続された電極91,92に接続されるようになってい
る。In the through hole at the center of the upper holding member 29,
A glass flange 53 is fitted, and a glass flange 54 is fitted in an upper through hole at the center of fine movement stage 20. The glass flanges 53 and 54 respectively face the lower or upper liquid crystal substrates 2 and 3 with gaps therebetween.
The polarizing plates 9 and 14 installed on the glass plates 10 and 13 shown in FIG. 2A may be installed on the glass flanges 53 and 54, respectively, as shown in FIG. 2B.
Indicates the latter case. The transparent electrodes 55 and 56 of the upper and lower liquid crystal substrates 2 and 3 are connected to electrodes 91 and 92 connected to a DC power supply 57 and a switch 58 via an alignment film at the time of mounting. ing.
【0034】ガラスフランジ54の下方には、レンズ5
9、絞り板60、レンズ61、光源62が設置されてい
る。光源62の光63は、レンズ61によって絞り板6
0の穴64に集光される。レンズ59の焦点位置は穴6
4の位置になるように設定されているため、この穴64
を近似点光源として発せられる光は、レンズ59によっ
て平行光に近くなり、上下の液晶基板2,3を透過し
て、CCDカメラ65で受光されるようになっている。
CCDカメラ65の出力は画像処理装置66で処理さ
れ、この画像処理データがパソコン67に転送されるよ
うになっている。The lens 5 is provided below the glass flange 54.
9, an aperture plate 60, a lens 61, and a light source 62 are provided. The light 63 of the light source 62 is transmitted by the lens 61 to the aperture plate 6.
The light is condensed on the zero hole 64. The focal position of lens 59 is hole 6
4 so that the hole 64
Is approximated to a parallel light by the lens 59, passes through the upper and lower liquid crystal substrates 2 and 3, and is received by the CCD camera 65.
The output of the CCD camera 65 is processed by an image processing device 66, and the image processing data is transferred to a personal computer 67.
【0035】次に、本液晶評価装置の使用方法と作用と
を、(1)測定準備、(2)液晶ピッチの近似測定、
(3)液晶ピッチの高精度測定、(4)透過率/電圧特
性の測定、の順に従って説明する。Next, the method of use and operation of the present liquid crystal evaluation apparatus will be described in (1) preparation for measurement, (2) approximate measurement of liquid crystal pitch,
The description will be made in the order of (3) high-precision measurement of liquid crystal pitch, and (4) measurement of transmittance / voltage characteristics.
【0036】(1) 測定準備 初期状態:上部保持部材29は、矢印a方向に移動
されて、上昇端にある。 テストサンプルのセット:上下の液晶基板2,3を
上部保持部材29と微動ステージ20とにセットする。
このとき、排気穴25,26,21,22を介して真空
引きすることより、液晶基板2,3を吸着する。次に、
下側液晶基板3の表面に液晶材料30を滴下する。 液晶基板の重ね合せ:上部保持部材29を矢印b方
向に移動させて下降端とする。このとき、液晶基板2,
3は微小隙間(ギャップ)δで対面し、液晶材料30は
表面張力によって微小隙間δ内を充満したまま保持され
る。(1) Preparation for Measurement Initial state: The upper holding member 29 has been moved in the direction of arrow a and is at the rising end. Setting of test sample: The upper and lower liquid crystal substrates 2 and 3 are set on the upper holding member 29 and the fine movement stage 20.
At this time, the liquid crystal substrates 2 and 3 are sucked by evacuating through the exhaust holes 25, 26, 21 and 22. next,
The liquid crystal material 30 is dropped on the surface of the lower liquid crystal substrate 3. Lamination of liquid crystal substrates: The upper holding member 29 is moved in the direction of arrow b to be a lower end. At this time, the liquid crystal substrates 2,
3 faces at a minute gap (gap) δ, and the liquid crystal material 30 is held by filling the inside of the minute gap δ by the surface tension.
【0037】(2) 液晶ピッチの近似値測定 後述する「液晶ピッチの高精度測定」の測定効率を高め
るために、以下の手順で液晶ピッチの近似値測定を行
う。(2) Measurement of Approximate Value of Liquid Crystal Pitch In order to increase the measurement efficiency of “high-precision measurement of liquid crystal pitch” described later, the approximate value of liquid crystal pitch is measured in the following procedure.
【0038】 微動ステージの微回動(傾動):圧電
アクチュエータ38又は40の何れか一方に電圧を印加
して、微動ステージ20を微小傾き角Θとなるまで傾斜
させる。この傾き角Θは、変位計42,43の検出値か
ら算出される。 ディスクリミネーションライン間隔の測定:図3に
示すように、液晶分子鎖68のねじれ角が90°の奇数
倍となる位置で透過率が最小となるため、16,17等
のディスクリミネーションラインが発生する。このディ
スクリミネーションラインの間隔Lは、CCDカメラ6
5の映像を画像処理装置66で濃淡画像処理を施すこと
によって算出される。液晶ピッチの近似値P1 は、前記
第2式で算出される。この第2式の右辺の傾き角Θにお
いては、ガラス板10,13の反りや初期角度設定誤差
も含まれている。Fine rotation of the fine movement stage (tilt): A voltage is applied to one of the piezoelectric actuators 38 and 40, and the fine movement stage 20 is tilted to a small tilt angle Θ. The tilt angle Θ is calculated from the detection values of the displacement meters 42 and 43. Measurement of discrimination line interval: As shown in FIG. 3, since the transmittance is minimized at a position where the twist angle of the liquid crystal molecular chain 68 is an odd multiple of 90 °, the discrimination lines such as 16, 17 are formed. Occur. The distance L between the discrimination lines is determined by the CCD camera 6
The image No. 5 is calculated by subjecting the image No. 5 to gray-scale image processing by the image processing device 66. Approximation P 1 of the liquid crystal pitch is calculated by the second equation. The inclination angle の on the right side of the second equation includes the warpage of the glass plates 10 and 13 and the initial angle setting error.
【0039】(3) 液晶ピッチの高精度測定 液晶基板の平行設定:圧電アクチュエータ38,4
1に電圧を印加して、微動ステージ20を初期平行状態
に戻す。即ち、図2に示すように、上側液晶基板2と下
側液晶基板3とを平行にする。但し、ここでいう「平
行」とは、厳密な意味での平行ではなく、ガラス板1
0,13の反りや厚みのばらつきや初期角度設定誤差も
含んでいる。 下側液晶基板の高精度平行移動:圧電アクチュエー
タ38,41の印加電圧を除々に変え、且つ微動ステー
ジ20の微動量を変位計42,43でモニターしなが
ら、微動ステージ20を左右の不同差0.1μm以下の
精度でy軸方向に平行移動させる。但し、この微動ステ
ージ20の微動制御は、図示しない制御装置とパソコン
67によって行うものとする。(3) High precision measurement of liquid crystal pitch Parallel setting of liquid crystal substrates: piezoelectric actuators 38, 4
1 to return the fine movement stage 20 to the initial parallel state. That is, as shown in FIG. 2, the upper liquid crystal substrate 2 and the lower liquid crystal substrate 3 are made parallel. However, the term “parallel” here is not strictly parallel, but rather the glass plate 1.
It also includes the warpage of 0, 13 and the variation of the thickness, and the initial angle setting error. High-precision parallel movement of the lower liquid crystal substrate: While gradually changing the applied voltage of the piezoelectric actuators 38 and 41 and monitoring the amount of fine movement of the fine movement stage 20 with the displacement meters 42 and 43, the fine movement stage 20 is moved to the right and left with no inequality 0. Translate in the y-axis direction with an accuracy of 1 μm or less. However, the fine movement control of the fine movement stage 20 is performed by a control device (not shown) and the personal computer 67.
【0040】 透過光の輝度の極値測定:図2に示す
状態の下側液晶基板3をy軸方向に平行移動したとき
の、図4に示す上側液晶基板2の微小特定エリアS1 の
透過光の輝度レベルを、CCDカメラ65及び画像処理
装置66で測定する。その結果、図5に示すように、液
晶基板2,3間の微小隙間δの変化、即ち微動ステージ
20の移動量に応じて、極大値と極小値とをもって変化
する輝度レベルが測定される。 液晶ピッチ測定:図5に示す極大値と極大値との間
又は極小値と極小値との間の微動ステージ20の移動量
は、液晶ピッチの1/2を表す。Extreme value measurement of the luminance of transmitted light: transmission of the minute specific area S 1 of the upper liquid crystal substrate 2 shown in FIG. 4 when the lower liquid crystal substrate 3 shown in FIG. 2 is moved in parallel in the y-axis direction. The brightness level of the light is measured by the CCD camera 65 and the image processing device 66. As a result, as shown in FIG. 5, a luminance level that changes with a maximum value and a minimum value according to a change in the minute gap δ between the liquid crystal substrates 2 and 3, that is, a movement amount of the fine movement stage 20, is measured. Liquid crystal pitch measurement: The amount of movement of the fine movement stage 20 between the maximum value and the minimum value or between the minimum value and the minimum value shown in FIG. 5 represents の of the liquid crystal pitch.
【0041】図4に示す上側液晶基板2の微小特定エリ
アS1 と微小特定エリアS2 とにおける液晶基板2,3
の隙間は、ガラス板10,13の反りや初期角度設定誤
差等が原因となって、必ずしも一致しない。このため図
5に実線と破線とで示すように、微小特定エリアS1 と
微小特定エリアS2 とでは輝度の極大値(極小値)の位
相はずれるものの、極大値と極大値との間(又は極小値
と極小値との間)の微動ステージ20の移動量は等しく
なる。従って、微動ステージ20を高精度でy軸方向に
平行移動したときの、上側液晶基板2の特定微小エリア
の輝度の極大値から極大値までの間(又は極小値から極
小値までの間)の移動量を把握すれば、ガラス板10,
13の反りや初期角度設定誤差等の影響を除去して、液
晶ピッチを高精度で測定することができる。The liquid crystal substrate 2 and 3 in the upper small specific area S 1 of the liquid crystal substrate 2 and the minute specific area S 2 Metropolitan shown in FIG. 4
Are not always the same due to the warpage of the glass plates 10 and 13 and the initial angle setting error. Therefore, as shown by the solid line and the broken line in FIG. 5, although the phase deviates brightness maximum value in the small specific area S 1 and the minute specific area S 2 (minimum value), between the maximum value and the maximum value (or The movement amount of the fine movement stage 20 (between the minimum value and the minimum value) becomes equal. Therefore, when the fine movement stage 20 is translated in the y-axis direction with high accuracy, the brightness of the specific minute area of the upper liquid crystal substrate 2 is from the maximum value to the maximum value (or from the minimum value to the minimum value). If the amount of movement is grasped, the glass plate 10,
The liquid crystal pitch can be measured with high accuracy by removing the effects of the warpage of 13 and the initial angle setting error.
【0042】ところで、液晶ピッチを高精度、例えば
0.1μmの誤差で測定しようとする場合、粗くても
0.05μmピッチで微動ステージ20を平行移動させ
たときの微小特定エリアの輝度を評価する必要があり、
従って単に微動ステージ20を0.05μmピッチで平
行移動させるだけでは測定時間が長くなってしまう。When the liquid crystal pitch is to be measured with high precision, for example, with an error of 0.1 μm, the luminance of a minute specific area when the fine movement stage 20 is translated at a coarse pitch of 0.05 μm is evaluated. Need
Therefore, simply moving the fine movement stage 20 in parallel at a pitch of 0.05 μm increases the measurement time.
【0043】しかし、液晶基板2,3の厚さ、初期設定
隙間δを与件として、液晶ピッチの近似値P1 を用いる
ことによって、輝度の極大値(又は極小値)を与える微
動ステージ20の移動座標値を予測することができる。
従って、この予測された移動座標直の前後で、0.05
ピッチで平行移動させて極大値(又は極小値)探索を行
うことにより、測定時間を短縮することができる。即
ち、次のように3段階に分けて輝度の測定を行う。However, given the thickness of the liquid crystal substrates 2 and 3 and the initial setting gap δ, the approximate value P 1 of the liquid crystal pitch is used to obtain the maximum value (or minimum value) of the fine movement stage 20 of the fine movement stage 20. The movement coordinate value can be predicted.
Therefore, before and after the predicted movement coordinates, 0.05
By performing the maximum value (or minimum value) search by performing parallel movement at the pitch, the measurement time can be reduced. That is, the luminance is measured in three stages as follows.
【0044】第1段階では、微動ステージ20(下側液
晶基板3)の移動速度を大きくして、輝度レベルが最大
(又は最小)となる概略位置を把握する。第2段階で
は、微動ステージ20(下側液晶基板3)の移動速度を
小さくして(0.05以下のピッチで)、輝度レベルが
最大(又は最小)となる位置を正確に把握する。第3段
階では、液晶ピッチの近似値P1 のデータに基づき、微
動ステージ20(下側液晶基板3)を移動速度を大きく
してP1 だけ移動させた後、この位置の前後に移動速度
を小さくして移動させ、輝度レベルが最大(又は最小)
となる位置を正確に把握する。輝度レベルが最大(又は
最小)となる位置から、再び最大(又は最小)となる位
置までの微動ステージ20(下側液晶基板3)の移動距
離、即ち微小隙間δの変化量が正確な液晶ピッチの値と
なる。In the first stage, the moving speed of the fine movement stage 20 (lower liquid crystal substrate 3) is increased to grasp the approximate position where the luminance level is maximum (or minimum). In the second stage, the moving speed of the fine movement stage 20 (lower liquid crystal substrate 3) is reduced (at a pitch of 0.05 or less), and the position where the luminance level becomes maximum (or minimum) is accurately grasped. In the third stage, based on the data of the approximate value P 1 of the liquid crystal pitch, after moving only P 1 and the fine movement stage 20 (lower side liquid crystal substrate 3) to increase the moving speed, the moving speed before and after this position Move it to a smaller size to maximize (or minimize) the brightness level
Know exactly where it will be. The moving distance of the fine movement stage 20 (lower liquid crystal substrate 3) from the position where the luminance level is the maximum (or minimum) to the position where the luminance level is the maximum (or the minimum) again, that is, the change amount of the minute gap δ is an accurate liquid crystal pitch. Value.
【0045】(4) 透過率/電圧特性の測定 従来、透過率/電圧特性の測定は、図7に示したような
クサビ型セル1を用いて液晶ピッチを測定した後に、図
2に示すものと同様な構成のフラット型セルを作成して
行っている。即ち、前述の如く、図2に示す微小隙間δ
に等しい径のプラスティックボールを液晶材料に混入し
て、微小隙間δの均一化を図った後に、透過率/電圧特
性の測定を行っている。そして、この場合には、液晶ピ
ッチの測定誤差のために、微小隙間δの設定が適切でな
く、透過率/電圧特性の測定そのものの信頼性が低下す
る。また、液晶ピッチ測定と透過率/電圧特性測定とが
別行程となる。(4) Measurement of Transmittance / Voltage Characteristics Conventionally, the measurement of the transmittance / voltage characteristics is shown in FIG. 2 after measuring the liquid crystal pitch using a wedge type cell 1 as shown in FIG. A flat cell having the same configuration as that described above is created and performed. That is, as described above, the minute gap δ shown in FIG.
After a plastic ball having a diameter equal to the diameter is mixed into the liquid crystal material to make the minute gap δ uniform, the transmittance / voltage characteristics are measured. In this case, the setting of the minute gap δ is not appropriate due to a measurement error of the liquid crystal pitch, and the reliability of the measurement of the transmittance / voltage characteristic itself is reduced. Further, the liquid crystal pitch measurement and the transmittance / voltage characteristic measurement are separate processes.
【0046】これに対し、本液晶評価装置では、液晶ピ
ッチ測定後、同一行程で、同一の液晶評価装置によって
引き続き透過率/電圧特性の測定を行うことができる。
以下に、その測定手順を説明する。On the other hand, in the present liquid crystal evaluation device, after the liquid crystal pitch is measured, the transmittance / voltage characteristics can be continuously measured by the same liquid crystal evaluation device in the same process.
Hereinafter, the measurement procedure will be described.
【0047】 微動ステージの座標設定:図4に示す
微小特定エリアS1 の輝度が極小値となる位置、例えば
図5のCの座標に微動ステージ20を設定する。 電圧印加:図1に示すスイッチ58を導通させ、電
源57の直流電圧(可変)を徐々に上昇させていく。 輝度の測定:印加電圧を上昇させたときの微小特定
エリアS1 の輝度を測定して、印加電圧(V)と微小特
定エリアS1 の輝度との対応をグラフ化し、図6に示す
ような透過率/電圧特性を得る。図6の縦軸の透過率
は、輝度と対応する。 透過率/電圧特性の評価:得られた透過率/電圧特
性から、次のようにコントラスト比等を評価する。 TON/TOFF :コントラスト比 勾配α :シャープネスCoordinate setting of fine movement stage: The fine movement stage 20 is set at a position where the luminance of the minute specific area S 1 shown in FIG. 4 is a minimum value, for example, the coordinates of C in FIG. Voltage application: The switch 58 shown in FIG. 1 is turned on, and the DC voltage (variable) of the power supply 57 is gradually increased. Measurement of Brightness: by measuring the luminance of a small specific area S 1 when increasing the applied voltage, graphed corresponding applied voltage (V) and the luminance of the small specific area S 1, as shown in FIG. 6 Obtain transmittance / voltage characteristics. The transmittance on the vertical axis in FIG. 6 corresponds to the luminance. Evaluation of transmittance / voltage characteristics: From the obtained transmittance / voltage characteristics, a contrast ratio and the like are evaluated as follows. T ON / T OFF : Contrast ratio Gradient α: Sharpness
【0048】[0048]
【発明の効果】以上発明の実施の形態と共に具体的に説
明したように、本発明の液晶評価装置によれば、第1及
び第2の液晶基板と、平行移動手段と、移動量測定手段
と、光源と、輝度測定手段とを備えることにより、クサ
ビ型セル等の作成が不要となって作業が容易になるのは
勿論のこと、ガラス板の反りや角度設定誤差等の影響を
除外して液晶ピッチを高精度で測定することができる。As described above in detail with the embodiments of the present invention, according to the liquid crystal evaluation apparatus of the present invention, the first and second liquid crystal substrates, the parallel moving means, the moving amount measuring means, By providing the light source and the luminance measuring means, it is not necessary to prepare a wedge-type cell or the like, so that the work becomes easy, and the influence of the warp of the glass plate or the angle setting error is excluded. The liquid crystal pitch can be measured with high accuracy.
【0049】また、傾動手段と、傾き角測定手段と、間
隔測定手段とを備えることにより、高精度な液晶ピッチ
の測定を効率よく行うことができる。Further, by providing the tilting means, the tilt angle measuring means, and the interval measuring means, it is possible to efficiently measure the liquid crystal pitch with high accuracy.
【0050】また、一対の透明電極と、電圧印加手段と
を備えることにより、液晶ピッチ測定後、引き続いて同
一の液晶評価装置によって透過率/電圧特性を測定する
ことができる。このため透過率/電圧特性の測定を効率
よく行うことができる。By providing a pair of transparent electrodes and a voltage applying means, the transmittance / voltage characteristics can be measured by the same liquid crystal evaluation device after the liquid crystal pitch measurement. Therefore, the transmittance / voltage characteristics can be measured efficiently.
【0051】そして、上記のような効果によって、液晶
材料特性及び液晶表示性能の評価の信頼性を高めること
ができ、また、液晶材料及び液晶表示装置の開発工数を
低減して開発期間の短縮を図ることができる。With the above-described effects, the reliability of the evaluation of the characteristics of the liquid crystal material and the liquid crystal display performance can be improved, and the development man-hour of the liquid crystal material and the liquid crystal display device can be reduced to shorten the development period. Can be planned.
【図1】本発明の実施の形態に係る液晶評価装置の構成
を示す断面図である。FIG. 1 is a cross-sectional view illustrating a configuration of a liquid crystal evaluation device according to an embodiment of the present invention.
【図2】図1に示す液晶評価装置に備えた液晶基板の構
成図である。FIG. 2 is a configuration diagram of a liquid crystal substrate provided in the liquid crystal evaluation device shown in FIG.
【図3】液晶ピッチの近似値測定の説明図である。FIG. 3 is an explanatory diagram of measuring an approximate value of a liquid crystal pitch.
【図4】液晶ピッチの高精度測定の説明図である。FIG. 4 is an explanatory diagram of high-precision measurement of a liquid crystal pitch.
【図5】液晶ピッチの高精度測定の説明図である。FIG. 5 is an explanatory diagram of high-precision measurement of a liquid crystal pitch.
【図6】透過率/電圧特性測定の説明図である。FIG. 6 is an explanatory diagram of transmittance / voltage characteristic measurement.
【図7】従来の液晶ピッチ測定に供せられるクサビ型セ
ルの構成と従来の液晶ピッチ測定法の説明図である。FIG. 7 is a diagram illustrating a configuration of a wedge-type cell used for a conventional liquid crystal pitch measurement and a conventional liquid crystal pitch measurement method.
2 上側液晶基板 3 下側液晶基板 9,14 偏光板 10,13 ガラス板 11,12 配向膜 16,17,18 ディスクリミネーションライン 20 微動ステージ 23,24,27,28 凹部 25,26 排気穴 29 上側保持部材 30 液晶材料 31 テストセル 32,33,34,35 y軸方向に可撓性のあるばね
部 36,37,39、40 x軸方向に可撓性のあるばね
部 38,41 圧電アクチュエータ 42,43 変位計 44 基盤部材 45,46,47,48 ストッパー板 49,50 ボールブッシュ 51,52 案内軸 53,54 ガラスフランジ 55,56 透明電極膜 57 直流電源 58 スイッチ 59,61 レンズ 60 絞り板 62 光源 63 光 64 穴 65 CCDカメラ 66 画像処理装置 67 パソコン δ 上側液晶基板と下側液晶基板との隙間 S1 ,S2 微小特定エリア2 upper liquid crystal substrate 3 lower liquid crystal substrate 9,14 polarizing plate 10,13 glass plate 11,12 alignment film 16,17,18 discrimination line 20 fine movement stage 23,24,27,28 concave portion 25,26 exhaust hole 29 Upper holding member 30 Liquid crystal material 31 Test cell 32, 33, 34, 35 Spring portion flexible in y-axis direction 36, 37, 39, 40 Spring portion flexible in x-axis direction 38, 41 Piezoelectric actuator 42, 43 Displacement gauge 44 Base member 45, 46, 47, 48 Stopper plate 49, 50 Ball bush 51, 52 Guide shaft 53, 54 Glass flange 55, 56 Transparent electrode film 57 DC power supply 58 Switch 59, 61 Lens 60 Aperture plate 62 light source 63 light 64 hole 65 CCD camera 66 image processing device 67 personal computer δ upper liquid crystal substrate Clearance with lower liquid crystal substrate S 1 , S 2 Micro specific area
Claims (3)
有して対面する第1及び第2の液晶基板と、 これら第1又は第2の液晶基板を略平行に微小移動して
前記微小隙間を変化せしめる平行移動手段と、 この移動手段によって略平行に微小移動される前記第1
又は第2の液晶基板の移動量を測定する移動量測定手段
と、 前記第1又は第2の液晶基板側から光を照射する光源
と、 この光源による光の照射側と反対側に位置する前記第2
又は第1の液晶基板の微小特定エリアの輝度を測定する
輝度測定手段とを備えたことを特徴とする液晶評価装
置。1. A first and a second liquid crystal substrate facing each other with a minute gap for receiving a liquid crystal material to be evaluated, and the first or second liquid crystal substrate is minutely moved substantially in parallel to form the minute gap. A parallel moving means for changing the distance;
Or a movement amount measuring means for measuring a movement amount of the second liquid crystal substrate; a light source for irradiating light from the first or second liquid crystal substrate side; Second
Alternatively, a liquid crystal evaluation device comprising: a luminance measuring means for measuring luminance of a minute specific area of the first liquid crystal substrate.
て、 前記第1又は第2の液晶基板を傾斜せしめる傾動手段
と、 この傾動手段により前記第1又は第2の液晶基板を傾斜
せしめることによって生起する前記第1の液晶基板と第
2の液晶基板とのなす傾き角を測定する傾き角測定手段
と、 前記光源による光の照射側と反対側の前記第2又は第1
の液晶基板に生起するディスクリミネーションラインの
間隔を測定する間隔測定手段とを備えたことを特徴とす
る液晶評価装置。2. The liquid crystal evaluation device according to claim 1, wherein the tilting means tilts the first or second liquid crystal substrate, and the tilting means tilts the first or second liquid crystal substrate. Tilt angle measuring means for measuring a tilt angle between the first liquid crystal substrate and the second liquid crystal substrate that occurs; and the second or first liquid crystal light source being opposite to the light irradiation side of the light source.
And an interval measuring means for measuring an interval between the discrimination lines generated on the liquid crystal substrate.
において、 前記第1の液晶基板と第2の液晶基板の透明電極に可変
の直流電圧を印加する電圧印加手段を備えたことを特徴
とする液晶評価装置。3. The liquid crystal evaluation device according to claim 1, further comprising: voltage applying means for applying a variable DC voltage to the transparent electrodes of the first liquid crystal substrate and the second liquid crystal substrate. Liquid crystal evaluation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22655496A JPH1068672A (en) | 1996-08-28 | 1996-08-28 | Liquid crystal evaluation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22655496A JPH1068672A (en) | 1996-08-28 | 1996-08-28 | Liquid crystal evaluation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1068672A true JPH1068672A (en) | 1998-03-10 |
Family
ID=16846987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22655496A Withdrawn JPH1068672A (en) | 1996-08-28 | 1996-08-28 | Liquid crystal evaluation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1068672A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000333047A (en) * | 1999-05-25 | 2000-11-30 | Rohm Co Ltd | Optical image pickup device and optical image pickup method |
| JP2002365162A (en) * | 2001-06-12 | 2002-12-18 | Seiko Epson Corp | Optical property evaluation device |
-
1996
- 1996-08-28 JP JP22655496A patent/JPH1068672A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000333047A (en) * | 1999-05-25 | 2000-11-30 | Rohm Co Ltd | Optical image pickup device and optical image pickup method |
| JP2002365162A (en) * | 2001-06-12 | 2002-12-18 | Seiko Epson Corp | Optical property evaluation device |
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