JPH1069625A - Magnetic head slider and method of manufacturing the same - Google Patents

Abstract

(57) An object of the present invention is to make it possible to apply windings to legs on both sides of a magnetic core without projecting the magnetic core from a side surface of a slider, and to reduce inductance. A slider (11) has one side surface,
The step 31 is formed, and the winding groove 16 is formed. The magnetic core 21 has a magnetic gap 20 formed therein and is fixedly attached to a step 31 on the side surface of the slider 11. The surface of the side surface of the slider 11 other than the step 31 and the winding groove 16 and the surface of the magnetic core 21 opposite to the surface attached to the slider 11 are formed to be flush with each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider having a magnetic core attached to a slider and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, with the spread of personal computers, magnetic storage devices such as fixed magnetic disk devices and large-capacity floppy disk devices have been rapidly reduced in capacity and price. In a magnetic head slider that can be regarded as the heart of the MIG (Metal (Metal)), along with an inductive thin film head, an MR head, etc.
A composite magnetic head slider using an (in Gap) core is still a mainstream.

[0003] As one of the composite magnetic head sliders using the MIG core, which is particularly excellent in performance, a side surface-attached magnetic head slider in which a magnetic core is attached to the side surface of a slider has been put to practical use.

FIG. 11 is a perspective view showing such a conventional magnetic head slider.

Referring to FIG. 11, a conventional magnetic head slider 110 includes a slider 111 formed of a non-magnetic material and a magnetic core 121. Skis 112 and 113 are formed on both sides of a surface of the slider 111 facing the medium. Tapered portions 114 and 115 are formed at one end of the skis 112 and 113. Magnetic core 121
Is formed with a magnetic gap 120 and is fixedly mounted on the side surface of the slider 111. A winding groove 116 is formed in the slider 111. A winding groove 122 is also formed in the magnetic core 121. The magnetic core 121 is configured to wind a coil through these winding grooves 116 and 122. The magnetic core 121 has a notch 123 for setting a track width.

A method for manufacturing such a magnetic core will be described below with reference to the drawings.

FIGS. 12 and 13 are explanatory views showing the steps of manufacturing the magnetic head slider shown in FIG.
(A) shows the slider and the magnetic core before integration,
FIG. 12B shows the slider and the magnetic core after being integrated, FIG. 12C shows the processing of the tapered portion, and FIG.
Indicates a winding.

In FIG. 12A, first, a winding groove 1 for winding a winding around a slider 111 made of ceramic or the like is used.
16 and two skis 112 and 113 are formed along the medium sliding direction. Next, a magnetic core 121 on which a glass thin film is formed by a method such as sputtering.
Is brought into close contact with the side surface of the slider 111 and heated to melt the glass thin film, and as shown in FIG.
The two are integrated. After this, the ski 1 of the slider 111
At the same time, the surfaces of the magnetic cores 121 and 113 and the surface of the magnetic core 121 facing the medium are wrapped, and the depth of the magnetic gap 120 of the magnetic core 121 is finished to a predetermined size.
As shown in FIG. 5, the notch 123 for setting the track width is formed by further processing the tip of the magnetic core 121 obliquely to finish the track width to a predetermined size. Thus, a track surface 124 is formed on the magnetic core 121. Then, tapered portions 114, 11 are added to skis 112, 113.
Process No. 5. Thus, the magnetic head slider in the state shown in FIG. 11 is obtained. Thereafter, as shown in FIG. 13, the winding by the coil 130 is applied to the legs 125 and 126 on both sides of the magnetic core 121 (hereinafter, referred to as balance winding).

FIGS. 14 and 15 are a plan view and a front view, respectively, of the magnetic head slider shown in FIG.

As shown in FIGS. 14 and 15, the magnetic core 121 projects from the side surface of the slider 111. For this reason, the track surface of the magnetic core 121 also protrudes from the side surface of the slider 111.

In such a magnetic head slider, since the winding can be applied to the legs 125 and 126 on both sides of the magnetic core 121, external induction noise can be reduced to almost zero. For this reason, the S / N is greatly improved as compared with the conventional embedded type MIG core slider which can be wound only on one side.
However, since the magnetic core 121 projects from the side surface of the slider 111, the magnetic gap 120
There is a disadvantage that the contact or distance between the recording medium and the recording medium tends to be unstable. In addition, when used for a removable disk, there has been a problem that the magnetic core is prone to be damaged when the magnetic core protrudes and the magnetic core is damaged when dust enters the track surface 124. Further, it is pointed out that a common problem not only with this type but also with a magnetic head slider using a MIG core is that the inductance is large with respect to an inductive thin film head, which is disadvantageous for a higher and higher recording density in the future. Was.

[0012]

Since the magnetic core of the above-mentioned conventional magnetic core has a shape in which the magnetic core protrudes from the side surface of the slider, the contact or the distance between the magnetic gap and the recording medium becomes unstable. Prone. When used for a removable disk, it has been pointed out that the magnetic core is susceptible to damage when the track surface is dull or dust is mixed. Further, there is a problem that the inductance is large with respect to the inductive thin film head.

The present invention eliminates the above-mentioned problems, and enables the winding to be applied to the legs on both sides of the magnetic core without projecting the magnetic core from the side surface of the slider, and reduces the inductance. It is an object of the present invention to provide a magnetic head slider and a manufacturing method thereof.

[0014]

According to a first aspect of the present invention, there is provided a magnetic head slider comprising: a magnetic core; and a slider having a step formed on one side surface and attaching the magnetic core to the step. A surface other than the step on the side surface of the slider;
The surface of the magnetic core opposite to the surface attached to the slider forms the same plane.

A magnetic head slider according to a second aspect is the magnetic head slider according to the first aspect, wherein the thickness of the magnetic core is set to 30 μm or less.

A method of manufacturing a magnetic head slider according to claim 3, wherein a step is formed on one of the side surfaces of the slider; a step of attaching a magnetic core to the step; and a side surface on which the step of the slider is formed. Finishing the surface of the magnetic core other than the step and the surface opposite to the surface attached to the slider of the magnetic core to the same plane.

According to a fourth aspect of the present invention, in the method of manufacturing a magnetic head slider, a magnetic core bar in which a plurality of the magnetic cores are vertically connected and a slider bar in which a plurality of the sliders are vertically connected are used. The method is characterized in that a plurality of magnetic head sliders are simultaneously processed.

A method of manufacturing a magnetic head slider according to claim 5, wherein a magnetic core bar having a plurality of the magnetic cores connected vertically and a slider wafer having a plurality of the sliders connected vertically and horizontally are used. The method is characterized in that a plurality of magnetic head sliders are simultaneously processed.

According to the first to fifth aspects of the present invention, since the magnetic core is embedded in the side surface of the slider, the winding is formed on both sides of the magnetic core without projecting the magnetic core from the side surface of the slider. As well as
The magnetic core after being integrated with the slider can be made thinner, and the inductance can be reduced.

According to the method of manufacturing a magnetic head slider described in claims 3 to 5, the magnetic head slider described in claims 1 and 2 can be manufactured.

According to the method for manufacturing a magnetic head slider according to the fourth and fifth aspects, the magnetic head slider according to the first and second aspects can be easily mass-produced.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a magnetic head slider according to an embodiment of the present invention in a hard disk drive (HDD).
FIG. 6 is a perspective view showing a case where the present invention is applied to a magnetic head slider for use in the present invention.

In FIG. 1, a magnetic head slider 10
Is a slider 11 formed of a non-magnetic material and a magnetic core. In the case of the embodiment of the present invention, MIG (Metal in G
ap)｝ 21. Skis 12 and 13 are formed on both sides of a surface of the slider 11 facing the medium.
Tapered portions 14, 15 are provided at one end of skis 12, 13.
Are formed. A step 31 is formed on one side surface of the slider 11, and a winding groove 16 is formed on the side surface. The magnetic core 21 has a magnetic gap 20 formed therein and is fixedly attached to a step 31 on the side surface of the slider 11. A surface other than the step 31 and the winding groove 16 on the side surface of the slider 11 and the slider 11 of the magnetic core 21
Is formed so as to be on the same plane as the surface opposite to the surface adhered to. The magnetic core 21 also has a winding groove 22.
Are formed. The magnetic core 21 is provided with these winding grooves 1.
A coil is wound through the first and second coils 6 and 22. The magnetic core 21 has a notch 23 for setting a track width. The slider 11 has a notch 17 formed on the same plane as the notch 23 of the magnetic core 21.

A method for manufacturing such a magnetic core will be described below with reference to the drawings.

FIGS. 2 and 3 are explanatory views showing a first manufacturing process of the magnetic head slider shown in FIG.
2A shows the slider before the notch is formed, and FIG.
(B) shows the slider and the magnetic core before being integrated,
FIG. 2C shows the slider and the magnetic core after integration, FIG. 3A shows processing for setting the depth of the magnetic gap, and FIG. 3B shows the processing of the track width of the magnetic gap. Processing is shown.

In FIG. 2A, first, a winding groove 16 for winding a winding on a slider 11 made of ceramic or the like is formed, and two skis 12, 13 are moved along the medium sliding direction. Form. Next, in FIG. 2B, a step 31 is formed on the side surface of the slider 11, and the magnetic core 21 on which the glass thin film is formed by sputtering or the like is brought into close contact with the step 31 of the slider 11 and heated to heat the glass thin film. And the magnetic core 21 is attached to the step 31 as shown in FIG. After this, FIG.
As shown in (a), the surface of the magnetic core 21 other than the step 31 and the winding groove 16 on the side surface of the slider 11 and the surface of the magnetic core 21 opposite to the surface attached to the slider 11 are ground or wrapped to a predetermined size. The magnetic core 21 is finished in the same plane by pushing in only the dimensions, and is finished so as to have a predetermined thickness (30 μm or less in the embodiment of the present invention). Thereafter, the surfaces of the skis 12 and 13 of the slider and the surface of the magnetic core 21 facing the medium are simultaneously wrapped, and the depth of the magnetic gap 20 of the magnetic core 21 is finished to a predetermined size, as shown in FIG. Further, the notch 17 coplanar with the notch 23 for setting the track width is formed by diagonally processing the tip of the magnetic core 21 and the medium side of the side surface of the slider 11 to finish the track width to a predetermined size. . Thus, a track surface 24 is formed on the magnetic core 21. Thereafter, tapered portions 14 and 15 are formed on the skis 12 and 13, respectively. A magnetic head slider in the state shown in FIG. 1 is obtained. Thereafter, although not shown, the winding by the coil is connected to the leg portions 25 on both sides of the magnetic core 21,
26.

FIGS. 4 and 5 are a plan view and a front view, respectively, of the magnetic head slider shown in FIG.

As shown in FIG. 4 and FIG.
Is embedded in the side surface of the slider 11.
For this reason, the track surface 24 of the magnetic core 21 does not protrude from the medium sliding surface of the magnetic head slider slider shown by oblique lines. Further, since the magnetic core 21 can be made thinner after being integrated with the slider 11, the thickness of the magnetic core 21 can be reduced by 30%.
It can be easily set to μm or less. As a result, the drawbacks of the magnetic head slider attached to the side surface due to the protrusion of the magnetic core, such as unstable contact with the recording medium or the amount of floating, the surface deviation of the track surface, and damage to the magnetic core due to dust mixing. Is eliminated at once. As a matter of course, it is conventional that the balance winding cancels the external induction noise and obtains a high S / N. Further, the magnetic core 21
And the inductance can be reduced to half or less of the conventional one, and even a composite magnetic core slider using a MIG core can have a low inductance equivalent to or less than that of an inductive thin film head.

As described above, according to the embodiment of the present invention, since the magnetic core is embedded in the side surface of the slider, the winding can be formed without projecting the magnetic core from the side surface of the slider. It can be applied to the legs on both sides of the magnetic core, so that the contact with the recording medium or the unstable amount of floating, the surface of the track surface, the damage of the magnetic core when dust is mixed in, etc. can be eliminated at once. Thus, the thickness of the magnetic core after being integrated with the slider can be reduced, the inductance can be reduced, and the magnetic recording density can be increased.

FIGS. 6 to 8 are explanatory views showing a second manufacturing process of the magnetic head slider shown in FIG.
6A shows a slider bar, and FIG. 6B shows a slider bar and a magnetic core bar before integration, and FIG.
7B shows the slider bar and the magnetic core bar after being integrated, FIG. 7B shows processing of the slider bar and the magnetic core bar after being integrated, and FIG. 8A shows the magnetic head slider after being divided. FIG. 8 (b) shows ski processing.

In the second manufacturing process, first, as shown in FIG. 6A, a slider bar 41 is formed by forming a plurality of winding grooves 16 in a ceramic having a size corresponding to a plurality of sliders. . Thereafter, as shown in FIG. 6B, a step 42 is formed on the slider bar 41. After this,
A magnetic core bar 43 in which magnetic cores are vertically connected at the same pitch as the winding groove 16 is fitted into the step 42, and the glass thin film is melted by heating. As shown in FIG. The core bar 43 is attached. Thereafter, as shown in FIG. 7B, the slider bar 41 was attached to the slider bar 41 of the magnetic core bar 43 and the surface other than the step 42 and the winding groove 16 on one side surface (the upper surface in the figure). The surface opposite to the surface is finished by grinding or lapping by a predetermined size to finish it on the same plane, and finish so that the magnetic core bar 43 has a predetermined thickness. Thereafter, by cutting along the one-dot chain line in the figure, a magnetic head slider 50 in which the magnetic core 21 is attached to the step 31 of the slider bar 41 shown in FIG. 8A is obtained. Thereafter, by grinding the slider bar 40 while leaving the medium sliding contact surface on both sides, a magnetic head slider having skis 12 and 13 formed on the slider 11 shown in FIG. 8B is obtained.
The magnetic head slider in this case is the same as that shown in FIG. 3A, and the magnetic head slider is completed in the same steps as those shown in FIG.

According to such an embodiment of the present invention, a plurality of magnetic cores and a slider can be attached at a time and the side surfaces of the slider and the magnetic core can be finished to the same plane. It can be easily mass-produced.

FIGS. 9 and 10 are explanatory views showing a manufacturing process of the magnetic head slider according to the second embodiment of the present invention. FIG. 9A shows a slider wafer, and FIG.
FIG. 10B shows a slider wafer and a magnetic core bar before integration, FIG. 10A shows a magnetic head slider after division, FIG. 10B shows ski processing, and FIG.
(B) shows the processing of the track width of the magnetic gap.

In the manufacturing process, first, as shown in FIG. 9A, a plurality of winding grooves 51 connected to the front and back are formed in ceramics of a corresponding size in which a plurality of sliders are arranged vertically and horizontally. Form a slider wafer 52 that is connected in multiple rows and columns. Thereafter, as shown in FIG. 9B, a plurality of steps 53 are formed, and then a plurality of magnetic cores are vertically connected to the plurality of steps 53 at the same pitch as the winding groove 51. The glass thin film is melted by inserting the core bar 54 and heating, and a plurality of magnetic core bars 54 are attached to the plurality of steps 53, respectively. Thereafter, a surface other than the step 53 and the winding groove 51 on one side of the slider wafer 52 and a surface opposite to the surface of the magnetic core bar 54 attached to the slider wafer 52 are ground or lapped to a predetermined size. And the magnetic core bar 54 is finished so as to have a predetermined thickness. After that, by cutting, FIG.
A magnetic head slider 60 shown in FIG. In this case, the winding groove 62 of the slider 61 is formed so as to extend back and forth on one side surface of the slider 61. A magnetic core 65 is attached to the step 64. After this, the slider 61
By grinding while leaving both sides of the medium sliding contact surface of FIG.
A magnetic head slider 70 in which skis 66 and 67 are formed on the slider 61 shown in FIG. After this, FIG.
As shown in (c), the notch 69 is formed on the same side as the notch 68 for setting the track width by processing the tip of the magnetic core 65 and the medium side of the side surface of the slider 61 obliquely. Is finished to predetermined dimensions. Thus, a track surface 80 is formed on the magnetic core 65.
Thereafter, the tapered portions 71 and 72 are machined on the skis 66 and 67.

Thus, a magnetic head slider having a function equivalent to that of FIG. 1 is obtained.

According to such an embodiment of the present invention, a plurality of magnetic cores and sliders are attached at once at a time more than the manufacturing steps shown in FIGS. 6 to 8, and the side surfaces of the slider and the magnetic cores are flush with each other. Since the magnetic head slider can be finished, it can be mass-produced more easily.

Although the MIG core is used as the magnetic core in the embodiment of the present invention shown in FIGS. 1 to 10, the same effect can be obtained by using another magnetic core such as a ferrite core or a laminated core. Is obtained.

[0039]

According to the present invention, the winding can be applied to the legs on both sides of the magnetic core without projecting the magnetic core from the side surface of the slider, and the inductance can be reduced. Instability of the contact or the floating amount of the recording medium, drifting of the track surface, damage to the magnetic core due to dust mixing, etc. can be eliminated at once, and the magnetic recording density can be increased.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a magnetic head slider according to the present invention;

FIG. 2 is a first explanatory view showing a first manufacturing process of the magnetic head slider of FIG. 1;

FIG. 3 is a second explanatory view showing a first manufacturing process of the magnetic head slider of FIG. 1;

FIG. 4 is a plan view of the magnetic head slider shown in FIG. 1;

FIG. 5 is a front view of the magnetic head slider shown in FIG. 1;

FIG. 6 is a first explanatory view showing a second manufacturing process of the magnetic head slider of FIG. 1;

FIG. 7 is a second explanatory view showing a second manufacturing process of the magnetic head slider of FIG. 1;

FIG. 8 is a seventh explanatory view showing the manufacturing process of the magnetic head slider of FIG. 1;

FIG. 9 is a first explanatory view showing a manufacturing process of the magnetic head slider according to the second embodiment of the present invention;

FIG. 10 is a second explanatory view showing the manufacturing process of the magnetic head slider according to the second embodiment of the present invention;

FIG. 11 is a perspective view showing a conventional magnetic head slider.

FIG. 12 is an explanatory view showing a first manufacturing process of the magnetic head slider shown in FIG. 11;

FIG. 13 is an explanatory view showing a second manufacturing process of the magnetic head slider shown in FIG. 11;

FIG. 14 is a plan view of the magnetic head slider shown in FIG. 11;

FIG. 15 is a front view of the magnetic head slider shown in FIG. 11;

[Explanation of symbols]

 Reference Signs List 10 magnetic head slider 11 slider 21 magnetic core 31 step

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Akio Onuki 33 Shinisogocho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Inside Toshiba Production Technology Research Institute (72) Inventor Kunio Omi 33 shares in Shinisogocho, Isogo-ku, Yokohama-shi, Kanagawa (72) Inventor Shin Arai 3-3-9, Shimbashi, Minato-ku, Tokyo Inside Toshiba AV EE Co., Ltd.

Claims (5)

[Claims] A slider having a magnetic core; and a slider having a step formed on one of its side surfaces, and attaching the magnetic core to the step, and a surface other than the step on the side surface of the slider.
A magnetic head slider, wherein a surface of the magnetic core opposite to a surface attached to the slider forms the same plane. 2. The magnetic head slider according to claim 1, wherein the thickness of the magnetic core is set to 30 μm or less. A step of forming a step on one side surface of the slider; a step of attaching a magnetic core to the step; a surface other than the step of the side surface on which the step of the slider is formed; Finishing the surface opposite to the surface affixed to the slider to the same plane. 4. The magnetic head slider according to claim 3, wherein a plurality of magnetic cores are vertically connected to each other and a plurality of sliders are vertically connected to a slider bar. A method for manufacturing a magnetic core slider. 5. The magnetic head slider according to claim 3, wherein a plurality of magnetic cores are connected vertically and a slider wafer is used in which a plurality of sliders are connected vertically and horizontally. A method for manufacturing a magnetic core slider.