JPH1073604A - Spin polarized scanning microscope and its measuring method - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To detect the degree of magnetization regardless of unevenness of a sample surface when a sample is scanned by a fine movement stage. A shutter is disposed in an optical path between a light irradiation device and a probe, and a controller opens the shutter and alternately switches circularly polarized light between right circularly polarized light and left circularly polarized light;
With the circularly polarized light applied to the probe 20, the fine movement stage is driven to relatively scan the probe 20 in the forward direction by one line on the sample 10. (2) With the shutter closed,
The fine movement stage is driven to cause the probe 20 to relatively scan on the same line in the backward direction. During each of the scans (1) and (2), the position between the probe and the sample is determined for each detection position on the sample. The amount of drive when the drive amount of the fine movement stage in the normal direction of the sample surface is adjusted such that the tunnel current flowing through the sample becomes the set value is detected. The difference from the drive amount obtained in (1) for circularly polarized light is calculated as the magnetization state amount. The probe may be irradiated with linearly polarized light or non-polarized light without using the shutter in (2).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a spin-polarized scanning microscope and a measuring method therefor.

[0002]

2. Description of the Related Art According to a spin-polarized scanning microscope, it is possible to evaluate a magnetic recording medium such as a hard disk with a spatial resolution of the order of atoms. In a spin-polarized scanning microscope, a semiconductor probe is arranged in close proximity to a magnetized film sample, a voltage is applied between the two, and circularly polarized light is incident on the probe. Electrons are generated inside the probe and are injected into the sample by the tunnel effect.
The amount, ie, the current flowing between the probe and the sample, depends on the average spin direction (spin polarization direction) of the electrons injected into the sample and the average spin direction of the electrons in the sample at the injection point. Depends on.

The direction of spin polarization of excited electrons is the traveling direction of incident circularly polarized light or the opposite direction. Therefore, when detecting the magnetization state of a magnetized film sample, the sample is magnetized in the in-plane direction. Sometimes, circularly polarized light traveling in the axial direction of the probe is incident on the probe (Japanese Patent Application Laid-Open No. 6-160501).
When the sample is magnetized in the normal direction of the surface, circularly polarized light traveling in a direction perpendicular to the axial direction of the probe is incident on the probe (Japanese Patent Application Laid-Open No. Sho 62-139240).

[0004] Since the spin polarization directions of electrons excited in the probe are opposite to each other for right circularly polarized light and left circularly polarized light, conventionally, current flowing when right circularly polarized light and current when left circularly polarized light are used. The magnetization state of the sample was detected based on the difference from the flowing current.
Further, a sample is mounted on a fine movement stage driven by a piezo element, and a magnetic domain image of the sample is obtained.

[0005]

Since the current flowing between the probe and the sample is due to the tunnel effect, if the distance between them changes by 1 to 3 angstroms, this current changes by about one digit. For this reason, when the sample is scanned by the fine movement stage, the difference between the currents largely depends on the irregularities of the atomic order on the surface of the sample, and the degree of magnetization is unknown in the conventional method, and only the magnetization direction can be detected. Did not.

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a spin-polarized scanning microscope capable of detecting the degree of magnetization irrespective of unevenness of a sample surface when scanning the sample with a fine movement stage. It is to provide a measuring method.

[0007]

According to the first aspect of the present invention, the spin-polarized electrons excited by the incidence of the circularly polarized light are formed of a semiconductor internally generated, and are arranged in close proximity to the sample. A probe, a current detection circuit that applies a voltage between the probe and the sample, and detects a current flowing between the probe and the sample, and circularly polarized light that irradiates the probe with circularly polarized light. Irradiation device, a fine movement stage to finely move the probe relative to the sample, in a spin-polarized scanning microscope having a circularly polarized light irradiation device and disposed in the optical path between the probe, A shutter that passes or shields the circularly polarized light, a control unit, and a magnetization state detection unit, and the control unit includes:
(1) With the shutter closed, drive the fine movement stage to cause the probe to relatively scan one line on the sample,
(2) In a state where the shutter is opened and the circularly polarized light is applied to the probe, the fine movement stage is driven to relatively scan the probe on the same line as the one line, and the magnetization state is obtained. During the scanning in (1) and (2), the detecting means adjusts the driving amount of the fine movement stage in the normal direction of the sample surface, reads the driving amount or the current as a detection value, and performs the same scanning. The amount of magnetization state is calculated based on the detected value at the point.

According to the first invention, (1) and (2)
During the scanning in, the drive amount of the fine movement stage in the normal direction to the sample surface is adjusted, and the drive amount or the current is read as a detection value, and the magnetization state amount is determined based on the detection value at the same scanning point. Since it is calculated, when the sample is scanned by the fine movement stage, it is possible to detect the degree of magnetization regardless of the unevenness of the sample surface.

Further, since one line is scanned by opening the shutter in (1) and the same line is scanned by closing the shutter in (2), the shutter is opened and closed at each detection point during one scan. As compared with the case, it is possible to prevent the vibration at the time of opening and closing the shutter from being transmitted to the probe or the like, thereby preventing the magnetization state detection on the atomic scale from being inaccurate. According to the second invention, a spin-polarized electron excited by the incidence of circularly polarized light is formed of a semiconductor internally generated, and a probe arranged close to and opposed to the sample, and a probe is disposed between the probe and the sample. A current detection circuit that applies a voltage to the probe and detects a current flowing between the probe and the sample, and a light irradiation device that has a variable polarization state of output light and irradiates the probe with the output light. And a fine movement stage for finely moving the probe with respect to the sample, wherein the control means and the magnetization state detecting means are provided, wherein the control means comprises: While the output light is unpolarized or linearly polarized and the output light is irradiated to the probe, the fine movement stage is driven to relatively scan the probe by one line on the sample, (2 The fine movement stage in a state where the output light is circularly polarized and the output light is irradiated on the probe; When the probe is driven, the probe is relatively scanned on the same line as the one line, and the magnetization state detecting means performs normal scanning on the sample surface of the fine movement stage during the scanning in (1) and (2). The direction drive amount is adjusted, the drive amount or the current is read as a detection value, and the magnetization state amount is calculated based on the detection value at the same scanning point.

According to the second aspect, similarly to the first aspect, during the scanning in (1) and (2), the driving amount of the fine movement stage in the normal direction of the sample surface is adjusted, and the driving is substantially performed. The amount or the current is read as a detection value, and the magnetization state amount is calculated based on the detection value at the same scanning point. Therefore, when the sample is scanned by the fine movement stage, the degree of magnetization is independent of the unevenness of the sample surface. Is detected.

Further, since light is constantly radiated to the probe during scanning without opening and closing the shutter, it is possible to prevent the temperature of the probe from fluctuating due to the irradiation on / off and to prevent the thermal expansion from changing. Further, it is possible to prevent the vibration of the opening and closing of the shutter from being transmitted to the probe or the like, thereby providing an effect that the detection of the magnetization state on the atomic scale becomes more accurate. In the first aspect of the first or second aspect of the present invention, the magnetization state detecting means is configured to adjust the drive amount when the drive amount of the fine movement stage in the normal direction of the sample surface is adjusted such that the current becomes a constant set value. Is the detected value.

[0012] In the second aspect of the first or second aspect of the present invention, the control means executes the above (2) after executing the above (1), and the magnetization state detecting means executes the detection in the above (1). The value is defined as the drive amount when the drive amount of the fine movement stage in the normal direction of the sample surface is adjusted so that the current becomes a constant set value, and the detection value in the above (2) is obtained in the above (1). And the above-mentioned current at the drive amount corresponding to the scanning position.

In the third aspect of the first or second invention, the circularly polarized light is only one of a right circularly polarized light and a left circularly polarized light, and the magnetization state detecting means performs the above-mentioned detection for each detection position on the sample. An amount corresponding to the difference between the detection value obtained in (2) and the detection value obtained in (1) is calculated as the magnetization state amount.

According to the third aspect, since the magnetization state amount is calculated from such a difference, there is an effect that the degree of magnetization can be detected more accurately regardless of the unevenness of the sample surface. In the fourth aspect of the first or second invention, the control means switches the output light between right circularly polarized light and left circularly polarized light at each of the detection positions in (2), and the magnetization state detecting means For each detection position on the sample, the detection value obtained in the above (2) when the output light is right circularly polarized light and the detection value obtained in the above (1) when the output light is left circularly polarized light Is calculated as a magnetization state quantity.

Since this switching is performed electrically, no mechanical vibration occurs during the switching. Further, since the magnetization state amount is calculated by an amount corresponding to such a difference, there is an effect that the degree of magnetization can be more accurately detected regardless of the unevenness of the sample surface. In a fifth aspect of the first or second invention,
The control means, after performing the above (1) and (2) once, (3) driving the probe in a direction substantially perpendicular to the one line and substantially parallel to the sample surface, (1)-
(3) is repeated.

According to the fifth aspect, since the same line is continuously scanned in (1) and (2), the driving of the fine movement stage in the direction perpendicular to this line is stopped during this period. Compared to the case where the area is scanned once and the processing of (1) is executed, and then the entire area is scanned again and the processing of (2) is executed, the positional deviation of the same measurement point in (1) and (2) is reduced. As a result, there is an effect that the atomic scale magnetization state quantity calculated based on the detection value at the same scanning point can be measured more accurately.

In the sixth aspect of the first or second invention, the circularly polarized light irradiating device or the light irradiating device irradiates the probe with circularly polarized light having a traveling direction substantially parallel or substantially perpendicular to the surface of the sample. It is arranged to be. According to the sixth aspect, the magnetization state of the sample magnetized parallel or perpendicular to the sample surface can be detected.

In the measurement method of the spin-polarized scanning microscope according to the third invention, the spin-polarized electrons excited by the incidence of the circularly polarized light are formed of a semiconductor generated inside, and are arranged close to and opposed to the sample. A current detection circuit that applies a voltage between the probe and the sample, detects a current flowing between the probe and the sample, and a polarization state of output light is variable; A light irradiation device that irradiates the probe with the output light, a fine movement stage that relatively finely moves the probe with respect to the sample,
Using a spin-polarized scanning microscope equipped with: (1) driving the fine movement stage in a state where the output light is made unpolarized or linearly polarized and the output light is irradiated on the probe; The needle is relatively scanned by one line on the sample, and (2) the output light is circularly polarized, the output light is irradiated on the probe, and the fine movement stage is driven to drive the probe. Relatively scanning on the same line as the one line, and (3) adjusting the amount of driving of the fine movement stage in the normal direction of the sample surface during the scanning in (1) and (2), thereby substantially The driving amount or the current is read as a detection value, and the magnetization state amount is calculated based on the detection value at the same scanning point.

[0019]

Embodiments of the present invention will be described below with reference to the drawings. The sample 10 is a magnetized film used for a magnetic recording medium such as a hard disk, for example, and is mounted on a coarse movement stage 12 via a fine movement stage 11. The fine movement stage 11 has a configuration in which, for example, a voltage is applied to a piezo element, and the piezo element is finely moved by expanding and contracting the piezo element with an accuracy of 0.1 angstroms. The coarse movement stage 12 is configured to coarsely move by a pulse motor.
The fine movement stage 11 and the coarse movement stage 12 are controlled by a controller 13 having a driver at the output stage.

The probe 20 is arranged so as to approach the sample 10 and face it. The probe 20 internally generates spin-polarized electrons excited by incident circularly polarized light.
A compound semiconductor having a zinc blend structure, such as As, is cleaved and the sharp corners are used as the tips. The probe 20 includes a holder 21
It is held and fixed. Between the sample 10 and the probe 20, a voltage of a DC voltage source 22 for flowing a tunnel current is applied. This tunnel current is detected by the current detection unit 23 and converted into a voltage.
The signal is amplified at 4 and supplied to the controller 13.

The linearly polarized light L1 emitted from the laser 30
Is irradiated on the probe 20 through the Pockels cell 31, the quarter-wave plate 32 and the shutter 33. The preferred wavelength of the linearly polarized light L1 is determined by the material of the probe 20, for example, the probe 2
When 0 is p-type GaAs, near infrared rays of 830 nm are used. The polarization plane of the linearly polarized light L2 emitted from the laser 30 differs by 90 ° between when the voltage applied to the electrodes of the Pockels cell 31 is at a low level (0 V) and when it is at a predetermined high level. The polarized light L2 is called first and second linearly polarized light, respectively. The linearly polarized light L2 is １ ／
The light passes through the wave plate 32 and becomes circularly polarized light L3. The circularly polarized light L3 is
For example, when the linearly polarized light L2 is the first linearly polarized light, it becomes right circularly polarized light, and when the linearly polarized light L2 is the second linearly polarized light, it becomes left circularly polarized light. The traveling direction of the circularly polarized light L3 is perpendicular to the axis of the probe 20 and parallel to the surface of the sample 10.

The shutter 33 opens and closes mechanically, and its opening and closing are controlled by the controller 13. The input / output unit of the computer 40 includes an A / D converter and a D / A converter. The output of the amplifier circuit 24 and the drive output from the controller 13 to the fine movement stage 11 are supplied to the computer 40. Coarse movement stage 12, Pockels cell 3
The control information of the controller 13 for the shutter 1 and the shutter 33 is supplied, and the position coordinates of the measurement center on the sample 10 are supplied from the manual input device 41. Computer 4
0 processes the input data as described later, and causes the display device 42 to display a surface unevenness image near the designated measurement center on the sample 10 and an image of the magnetization state.

Next, the operation when the circularly polarized light L3 incident on the probe 20 is right circularly polarized light will be described with reference to FIG.
In this case, as shown in FIG.
Is excited and injected into the sample 10 by the tunnel effect. The spin polarization direction of the electron e0 matches the traveling direction of the circularly polarized light L3. The controller 13 servo-controls the fine movement stage 11 in the Z direction so that the output voltage of the amplifier circuit 24 proportional to the tunnel current becomes a preset constant value V0. The fine movement stage drive voltage in the Z direction corresponds to the Z direction position of fine movement stage 11. Hereinafter, the fine movement stage drive voltage when the output voltage of the amplifier circuit 24 is stabilized at V0 is referred to as a constant current position Z of the fine movement stage 11.

The tunnel current has a spin polarization direction:
When the spin direction of the electron e1 existing at a point (measurement point) on the sample 10 corresponding to the probe 20 coincides with the spin polarization direction of the electron e1, there is less room to enter the sample 10 by the selection rule, and the circularly polarized light L3 is probed. The tunnel current is smaller than in the case where the light is not irradiated on 20. When the spin polarization direction of the tunnel current is opposite to the spin polarization direction of the electron e2 present at the measurement point on the sample 10, the tunnel current becomes larger than when the probe 20 is not irradiated with the circularly polarized light L3. .

When the probe 20 is not irradiated with the circularly polarized light L3,
The constant current position Z of fine movement stage 11 is ZN in FIG.
Becomes On the other hand, when the probe 20 is irradiated with right-handed circularly polarized light, when the spin in the sample 10 is polarized as shown in FIG. It becomes like ZR in (B). FIG. 2 shows the operation when the circularly polarized light L3 incident on the probe 20 is the left circularly polarized light, corresponding to FIG. The constant current position Z of fine movement stage 11 in this case is shown as ZL in FIG.

Next, referring to FIG. 3, the relative scanning of the probe 20 with respect to the sample 10 and the measurement sequence during the scanning will be described. The coarse movement stage 12 is driven such that the set measurement center point P is directly below the probe 20 with the fine movement stage 11 in-plane direction drive amount set to 0. Next, as the measurement point scans on the line shown in FIG.
The fine movement stage 11 is step-driven.

That is, the measurement point is first set to the start point A on the scan line 51. The shutter 33 is opened, and the process shown in FIG. 3B is performed in this state. (60) The controller 13 sets the voltage applied to the Pockels cell 31 to the low level described above to change the circularly polarized light L3 to right circularly polarized light. (61) The controller 13 servo-controls the Z-direction drive of the fine movement stage 11 so that the output voltage of the amplifier circuit 24 becomes the set value V0. The computer 40 receives the coordinates (X, Y) of the measurement point from the controller 13, and in a state where the output voltage of the amplifier circuit 24 is stabilized at V0,
The drive voltage of fine movement stage 11 is measured as constant current position ZR.

(62) The controller 13 sets the voltage applied to the Pockels cell 31 to the high level described above to change the circularly polarized light L3 into left circularly polarized light. (63) The controller 13 servo-controls the Z-direction drive of the fine movement stage 11 so that the output voltage of the amplifier circuit 24 becomes the set value V0. The computer 40 measures the drive voltage of the fine movement stage 11 as the constant current position ZL with the output voltage of the amplifier circuit 24 stabilized at V0.

(64) The controller 13 drives the fine movement stage 11 to move the measuring point in the X direction by ΔX. The X axis in FIG. 1 is fixed to fine movement stage 11. The above steps 61 to 64 are repeated along the scanning line 51 up to the point B.

Next, the shutter 33 is closed, and FIG.
Is performed. (70) The controller 13 servo-controls the Z-direction drive of the fine movement stage 11 so that the output voltage of the amplifier circuit 24 becomes the set value V0. The computer 40 receives the coordinates (X, Y) of the measurement point from the controller 13, and in a state where the output voltage of the amplifier circuit 24 is stabilized at V0,
The drive voltage of fine movement stage 11 is measured as constant current position ZN.

(71) The controller 13 drives the fine movement stage 11 to move the measurement point in the X direction by -ΔX. The processing of the above steps 71 and 72 is repeated from point B to point A along the scanning line 51.
As described above, since the shutter 33 is opened on the outward path of the same scanning line and the shutter 33 is closed on the return path, the vibration at the time of opening and closing the shutter can be detected more than when the shutter 33 is opened and closed every time ΔX is moved only on the outward path. It is possible to prevent the magnetization state detection on the atomic scale from being inaccurate by being transmitted to a needle or the like.

Further, since the shutter 33 is opened and closed for each scanning line, the Y-direction driving is stopped on the forward path and the backward path, and after the shutter 33 shown in FIG. Compared with the case where the shutter 33 is closed and the entire area is scanned again, the displacement of the same measurement point when the shutter is opened and when the shutter is closed can be reduced, and as a result, the difference is calculated as described above. The amount of magnetization on the atomic scale can be measured more accurately.

Next, the controller 13 moves the measuring point by ΔY. Next, the above processing is performed on the scanning line 52. Hereinafter, the same processing as described above is repeatedly performed, for example, scanning of 512 × 512 pixels is performed. The computer 40 controls the constant current position ZN in the scanning area.
(X, Y) is displayed on the display device 42 as an uneven image. At the same time, ZR
A value proportional to (X, Y) -ZL (X, Y) is displayed on the display device 42 as a magnetization state quantity.

Since the magnetization state amount is calculated from such a difference, it is possible to detect a magnetization state (magnetic domain structure) independent of the unevenness of the sample surface, and it is possible to detect the degree of magnetization. The present invention also includes various modified examples. For example, in the above embodiment, the case where the magnetization direction of the sample 10 is in the direction of the film surface has been described. However, the present invention is also applicable to the case where the magnetization direction is the normal direction of the film surface.
In this case, the circularly polarized light L3 is incident along the axis of the probe 20. The incident direction may be from above to below the probe 20 or vice versa.

Steps 60 and 61 in FIG.
May be omitted, and a value proportional to ZL (X, Y) -ZN (X, Y) may be displayed as an image on the display device 42 as a magnetization state quantity. Similarly, step 62 in FIG.
And 63 may be omitted, and a value proportional to ZR (X, Y) -ZN (X, Y) may be displayed on the display device 42 as a magnetization state quantity. Even in this case, it is possible to detect the magnetization state without depending on the unevenness of the sample surface, and it is possible to detect the degree of magnetization.

For each scanning line, (a) the process of FIG. 3C is performed first with the shutter 33 closed to measure the constant current position ZN (X, Y) of the fine movement stage 11. This is stored in a storage means such as a memory, and (b)
Next, when the same scanning line is turned back and scanned with the shutter 33 opened, the fine movement stage 11 is set to the constant current position ZN (X, Y), and the amplification circuit 2 for right circularly polarized light is set.
Amplifying circuit 24 for output voltage ZNR of 4 and left-handed circularly polarized light
(C) ZNL (X, Y)
A configuration in which a value proportional to −ZNR (X, Y) is detected as the magnetization state amount may be employed. Even in this case, it is possible to detect the magnetization state without depending on the unevenness of the sample surface, and it is possible to detect the degree of magnetization.

As a modification of this case, step (b)
Read only one of the output voltages ZNR or ZNL, and in step (c), ZNR (X, Y) -ZN (X, Y) or Z
A configuration in which a value proportional to NL (X, Y) -ZN (X, Y) is detected as the magnetization state amount may be employed. Even in this case, it is possible to detect the magnetization state without depending on the unevenness of the sample surface, and it is possible to detect the degree of magnetization.

Further, without providing the shutter 33, the controller 13 may apply a voltage to the Pockels cell 31 so that the light L3 becomes linearly polarized light in the step (a). Since the linearly polarized light can be considered to be a superposition of right circularly polarized light and left circularly polarized light, even if the linearly polarized light is irradiated on the probe 20, no spin polarization occurs in the probe 20, and the shutter during scanning is not affected. Probe 2 without opening and closing
Since the light is always radiated to 0, it is possible to prevent the temperature of the probe 20 from fluctuating due to the irradiation on / off and to prevent the thermal expansion from changing. Further, the vibration of opening and closing the shutter is transmitted to the probe and the like. This is effective in that the detection of the magnetization state on the atomic scale becomes more accurate. In step (a), the light L3 may be unpolarized instead of being linearly polarized.

Furthermore, it is sufficient that the probe 20 can be scanned relative to the sample 10, and a configuration in which the sample 10 is fixed and the holder 21 is driven may be adopted, contrary to the above embodiment.

[Brief description of the drawings]

FIG. 1 is an operation explanatory diagram when right circularly polarized light is applied to a probe.

FIG. 2 is an explanatory diagram of an operation in a case where a probe is irradiated with left circularly polarized light.

FIG. 3 is a diagram showing fine movement stage scanning and a measurement sequence during scanning.

FIG. 4 is a schematic configuration diagram of a spin-polarized scanning microscope according to one embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 sample 11 fine movement stage 12 coarse movement stage 13 controller 20 probe 21 holder 22 DC voltage source 23 current detector 24 amplifier circuit 30 laser 31 Pockels cell 32 1/4 wavelength plate 33 shutter 40 computer

Claims (9)

[Claims] 1. A probe formed of a semiconductor in which spin-polarized electrons excited by the incidence of circularly polarized light are formed inside, and are arranged in close proximity to a sample and between the probe and the sample. A current detection circuit for applying a voltage to the probe to detect a current flowing between the probe and the sample; a circularly polarized light irradiating device for irradiating the probe with circularly polarized output light; A fine-movement stage for relatively finely moving the needle; and a spin-polarized scanning microscope having: a micro-movement stage that is disposed in an optical path between the circularly polarized light irradiation device and the probe;
A shutter for passing or blocking the circularly polarized light; a control unit; and a magnetization state detecting unit. The control unit includes: (1) driving the fine movement stage with the shutter closed; The probe is caused to relatively scan one line on the sample, and (2) the shutter is opened to irradiate the probe with the circularly polarized light, and the fine movement stage is driven to relatively move the probe. The scanning is performed on the same line as the one line, and the magnetization state detecting means adjusts the driving amount of the fine movement stage in the normal direction of the sample surface during the scanning in (1) and (2),
Substantially reading the drive amount or the current as a detection value,
A spin-polarized scanning microscope, wherein a magnetization state quantity is calculated based on a detection value at the same scanning point. 2. A probe formed of a semiconductor in which spin-polarized electrons excited by the incidence of circularly polarized light are formed inside, and are arranged in close proximity to a sample, and between the probe and the sample. A current detection circuit that applies a voltage to the probe and detects a current flowing between the probe and the sample; a light irradiation device that has a variable polarization state of output light and irradiates the probe with the output light. And a fine movement stage for finely moving the probe with respect to the sample. A spin-polarized scanning microscope comprising: a control means; and a magnetization state detecting means, wherein the control means comprises: (1) While the output light is unpolarized or linearly polarized and the output light is irradiated on the probe, the fine movement stage is driven to relatively scan the probe by one line on the sample, (2) ) The output light is made to be circularly polarized light, and the output light is irradiated to the probe. And driving the probe to cause the probe to relatively scan on the same line as the one line. The magnetization state detecting means performs the scanning of the fine movement stage during the scanning in (1) and (2). Adjust the surface normal direction drive amount,
Substantially reading the drive amount or the current as a detection value,
A spin-polarized scanning microscope, wherein a magnetization state quantity is calculated based on a detection value at the same scanning point. 3. The method according to claim 1, wherein the magnetizing state detecting means adjusts a driving amount of the fine movement stage in a normal direction of the sample surface so that the current has a constant set value, and uses the driving amount as the detection value. The spin-polarized scanning microscope according to claim 1 or 2, wherein: 4. The control means executes the above (2) after the execution of the above (1), and the magnetization state detecting means changes the detected value in the above (1) to a set value in which the current is constant. The drive amount when adjusting the drive amount in the normal direction of the sample surface of the fine movement stage so that
3. The spin-polarized scanning microscope according to claim 1, wherein the detected value in (2) is the current at the driving amount corresponding to the scanning position in (1). 5. The method according to claim 2, wherein the circularly polarized light is only one of right-handed circularly polarized light and left-handed circularly polarized light, and the magnetization state detecting means obtains each of the detection positions on the sample in the above (2). The spin-polarized scanning microscope according to claim 3 or 4, wherein an amount corresponding to a difference between the detected value and the detected value obtained in (1) is calculated as the magnetization state amount. 6. The control means switches the output light between right-handed circularly polarized light and left-handed circularly polarized light at each of the detection positions in (2), and wherein the magnetization state detecting means controls each of the detection positions on the sample. And the amount corresponding to the difference between the detection value obtained in (2) above when the output light is right circularly polarized light and the detection value obtained in above (1) when the output light is left circularly polarized light, The spin-polarized scanning microscope according to claim 3, wherein the calculated value is calculated as a magnetization state quantity. 7. The control means, after performing the above (1) and the above (2) once, (3) a direction in which the probe is relatively perpendicular to the one line and substantially parallel to the sample surface. The spin-polarized scanning microscope according to any one of claims 1 to 6, wherein (1) to (3) are repeatedly performed. 8. The circularly polarized light irradiating device or the light irradiating device is arranged such that circularly polarized light having a traveling direction substantially parallel or substantially perpendicular to the surface of the sample is irradiated on the probe. The spin-polarized scanning microscope according to any one of claims 1 to 7, wherein: 9. A probe formed of a semiconductor in which spin-polarized electrons excited by the incidence of circularly polarized light are formed, and are disposed in close proximity to a sample, and between the probe and the sample. A current detection circuit that applies a voltage to the probe and detects a current flowing between the probe and the sample; a light irradiation device that has a variable polarization state of output light and irradiates the probe with the output light. And a fine movement stage for finely moving the probe relative to the sample, using a spin-polarized scanning microscope comprising: (1) making the output light non-polarized or linearly polarized; In a state where the probe is irradiated, the fine movement stage is driven to relatively scan the probe by one line on the sample. (2) The output light is circularly polarized, and the output light is converted to the probe. The fine movement stage is driven and the probe is relatively moved on the same line as the one line in a state where the laser beam is irradiated. (3) During the scanning in (1) and (2), the amount of drive of the fine movement stage in the normal direction to the sample surface is adjusted, and the amount of drive or the current is substantially read as a detection value; A method for measuring a spin-polarized scanning microscope, comprising calculating a magnetization state amount based on a detection value at the same scanning point.