JPH1084652A - Bearingless rotating machine - Google Patents

Abstract

(57) [Problem] To provide a bearingless rotating machine including a detection unit capable of commonly measuring a rotation speed, a rotation angle, and a radial displacement of a rotating shaft. SOLUTION: m synchronized with a rotation driving magnetic field having m poles
A rotation control magnetic field of ± 2 poles is superimposed to apply a rotational force to the rotor 2, and at the same time, the control magnetic field is increased or decreased based on the displacement of the rotor 2 detected by the displacement detection means of the rotor 2, thereby making the rotor 2 magnetic. In a bearingless rotating machine that rotates while floating,
Disk 2 concentrically fixed to rotating shaft 1 of bearingless rotating machine
0, and at least two detection devices 21X and 21Y arranged in a direction perpendicular to the outer peripheral portion of the disc 20.
0 has the detected parts 22 regularly arranged along the circumferential direction on the outer periphery thereof, and the detecting device measures the number of the detected parts 22 arranged on the outer periphery of the disc body rotating together with the rotating shaft 1. By doing so, the rotation speed and rotation angle of the rotating shaft 1 are detected, and the displacement of the rotating shaft 1 in the orthogonal direction is detected from the degree of approach of the detected portion 22.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for superposing a rotation control magnetic field of m ± 2 poles synchronized with a rotation drive magnetic field of m poles,
The present invention relates to a bearingless rotating machine having both a function of driving a rotating body and a magnetic bearing for controlling a radial position of the rotating body, and in particular, a rotational speed, a rotating angle, and a radial displacement of a rotating shaft required for the control. It relates to the structure of a detection part to be detected.

[0002]

2. Description of the Related Art Japanese Unexamined Patent Publications Nos. 2-193547 and 6-133493 disclose a cylindrical rotor incorporated in a cylindrical stator, and an excitation circuit is formed in the stator. A non-bearing rotating machine is disclosed which applies a rotational driving force to a magnetic bearing and a magnetic bearing control force for maintaining a non-contact floating holding at a predetermined position in a radial direction.

[0003] In this method, a stator is provided with a rotation driving winding and a control winding, and each has a rotating magnetic field having m poles,
By passing a three-phase alternating current that forms a rotating magnetic field having ± 2 poles, a rotating driving magnetic field is formed and a magnetic levitation action is exerted in the radial direction of the cylindrical rotor. Thus, by applying a magnetic levitation force to the rotor to control its position and attitude, it has a function of non-contact levitation positioning with respect to the stator, and imparts a rotational driving force to the rotor. Can be.

[0004] For this reason, the electromagnet and the target portion corresponding to the magnetic bearing conventionally required are not required, so that the length of the rotating shaft can be shortened, and the rotating machine can be reduced in size and weight. In addition, an operation equivalent to a magnetic bearing can be performed by a synergistic effect function of the current of the control winding and the current of the drive winding, so that the rotor levitates with a much smaller control current than a conventional magnetic bearing. Position and orientation can be controlled, and significant energy savings are possible.

However, in the bearingless rotating machine having the above-described structure, information such as the rotating speed of the rotating shaft, the rotating angle, and the radial displacement of the rotating shaft is required for controlling the floating position. FIG. 11 shows a bearingless rotating machine (motor) using a conventional flat disk-type rotor. In the figure, reference numeral 1 denotes a rotating shaft, and reference numeral 2 denotes a disk-type rotor. Similarly, the rotor 2 is driven to rotate and magnetically levitated by forming a rotation drive magnetic field having m poles and a rotation control magnetic field of m ± 2 poles in synchronization with the rotation drive magnetic field having m poles on the disk type stator 3. Is done. A disk 7 that is a target of a rotation speed sensor and a rotation angle sensor is fixed to the rotation shaft 1. A rotation speed sensor 4 and a rotation angle sensor 5 are attached to the casing 10 at a position facing the outer peripheral portion of the disk 7.

FIG. 12 shows an example of a conventional bearingless rotating machine provided with a thrust magnetic bearing. A cylindrical rotor 2 is fixed to the rotating shaft 1. The rotor 2 is driven to rotate by the superposition of a rotation control magnetic field of m ± 2 poles synchronized with a rotation drive magnetic field of m poles on the stator 3 and the floating position is controlled in the radial direction. Since the floating position control of the bearingless rotating machines 2 and 3 is performed only in the radial direction, the floating position control in the axial direction (thrust direction) is required. Therefore, a thrust disk 8 is fixed to the rotating shaft 1, and electromagnets 9 as magnetic bearings are disposed on both sides of the thrust disk 8, and the floating position in the axial direction is controlled by a signal from a thrust displacement sensor 11. Also in the bearingless rotating machine equipped with this thrust magnetic bearing, the disc body 7 is fixed to the rotating shaft 1 for controlling the driving magnetic field and the control magnetic field, and the rotational speed sensor 4 and the The rotation speed and the rotation angle are measured by the rotation angle sensor 5. The radial displacement of the rotating shaft is measured by radial displacement sensors 6 disposed on both sides of the rotor 2.

As the radial displacement sensor 6, an eddy current sensor or an inductance type sensor is usually used, and the distance between the magnetic material fixed to the rotating shaft as a target and the detection surface of the displacement sensor fixed to the casing side is determined. The displacement of the rotating shaft is measured by grasping as a change in eddy current or a change in inductance generated on the sensor side. The rotation speed sensor and the rotation angle sensor are provided with a number of slits, for example, on the outer periphery of the disk body 7, and use an optical sensor including a light emitting element and a light receiving element whose optical axes interlink with the slits. The number of slits that pass along with the rotation of the rotating shaft is measured as a pulse, and the rotation speed or rotation angle is determined from this.

[0008]

As described above, even in the conventional bearingless rotating machine, information such as the rotation speed, rotation angle, and radial displacement of the rotating shaft is required for the control thereof. It must be mounted on the rotating shaft and the sensor itself located near it. For this reason, a space for the sensor target portion or a space for the sensor itself is required for the rotation axis, and there is a problem that the rotation axis becomes longer accordingly. In addition, when the rotating shaft becomes longer, the critical speed decreases, and the stability of the bearingless rotating machine is impaired.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a bearingless rotating machine having a detection unit capable of commonly measuring the rotation speed, rotation angle, and radial displacement of a rotating shaft. With the goal.

[0010]

The bearingless rotating machine of the present invention superimposes a rotation control magnetic field of m ± 2 poles synchronized with a rotation drive magnetic field of m poles to apply a rotational force to a rotor, The control magnetic field is increased or decreased from the displacement of the rotor detected by the displacement detection means of the rotor, and in a bearingless rotating machine that rotates and drives the rotor while magnetically levitating, the rotating shaft of the bearingless rotating machine is A disc body fixed concentrically, and at least two detection devices arranged in a direction perpendicular to the outer periphery of the disc body, wherein the disc body has a regular outer periphery along the circumferential direction. The detection device detects the rotation speed and the rotation angle of the rotating shaft by measuring the number of the detected portions arranged on the outer periphery of the disc body that rotates together with the rotating shaft. At the same time, based on the degree of approach of the detected part, And detecting a displacement in the orthogonal direction of the axis.

In the bearingless rotating machine, the rotor or the thrust disk also serves as the disk, and the magnetic unevenness is provided on an outer peripheral portion of the rotor or the thrust disk. A magnetic detector is provided in the vicinity of the outer periphery of the plate body, and the rotation speed and the rotation angle of the rotating shaft are detected from the number of detections of the unevenness rotating together with the rotating shaft. Is characterized by detecting the displacement of.

According to the configuration of the present invention described above, the detection target regularly arranged on the outer periphery of the disk fixed to the rotating shaft and the detection portion arranged near the outer periphery of the disk are detected. By having a device, by measuring the number of detected parts,
The rotation speed and rotation angle of the rotation shaft can be detected. At the same time, the displacement of the rotating shaft in the radial direction can be detected from the degree of approach of the detected portion to the detection device.

As described above, the detection target (target) for detecting the rotation speed, rotation angle, and radial displacement of the rotation shaft can be shared, so that the target or rotation speed of the displacement sensor of the rotation shaft, which has been conventionally required, can be shared. Further, a disk for detecting the rotation angle is not required. As a result, the number of parts can be reduced, and the length of the rotating shaft can be reduced, so that the critical speed is increased and the stability of the bearingless rotating machine is increased.
The device can be reduced in size and cost.

Further, by using a rotor or a thrust disk itself as a disk body having a detected portion on the outer periphery, a target of a radial displacement sensor and a rotating disk for detecting a rotation speed and a rotation angle are formed. It becomes unnecessary, and furthermore, the length of the rotating shaft is shortened to enhance the stability,
Cost reduction can be achieved.

[0015]

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows an outline of a detecting device for measuring a rotation speed, a rotation angle, and a radial displacement of a rotating shaft according to an embodiment of the present invention and a detected portion. As shown in FIG. 1A, a rotating body 1 of a bearingless rotating machine is provided with a disk body 20 having slits 22 arranged concentrically and regularly along a circumferential direction as a part to be detected. Is fixed. FIG. 1C shows a partially enlarged view of the slit 22. The opening of the slit 22 changes in the radial direction. That is, as although the radius r _a portion near the outermost circumference opening is La, the radius r _b portion of the inner peripheral side thereof, the degree of opening thereof is Lb, and the the radius r decreases its opening becomes smaller Has become.

Further, detecting devices 21X and 21Y are provided on the outer peripheral portion of the disk body in the orthogonal direction. Detector 21
For X and 21Y, an optical sensor 23 is used as shown in FIG. This sensor 23 includes an LED 24
When light passes through the slit portion 22 of the disc body 20,
When the transistor 25 is turned on and light is blocked by the disk, the transistor 25 is turned off. In this way, a pulse signal of the slit passing through the optical sensor 25 is generated.

FIGS. 2A, 2B and 2C show examples of output waveforms of the phototransistor. FIG.
The disk body 20 shown in (A) is rotating along with the rotation of the rotating shaft 1, and at this time, the reference pulse waveform is detected by the optical sensor. By defining the total number of slits on the outer periphery of the disc 20 in advance as, for example, 360, if, for example, 10 pulses are detected along with the rotation of the rotating shaft, the rotation angle is set to 10 °. Can be detected.

The time Ta is the elapsed time between the rising pulses, and is the total time required to pass one slit portion and the shielding portion. The time Tb is the time from the rise to the fall of the pulse in the slit portion. This corresponds to the rotation angle of the slit portion.

FIG. 2B shows a state where the rotation speed of the rotating shaft is reduced. In this case, the ratio of Ta '/ Tb' is Ta
/ Tb, but the pulse times Ta 'and Tb' are longer than Ta and Tb. From such a relationship,
By measuring the number of pulses per unit time, the rotation speed of the rotating shaft can be obtained.

FIG. 2C shows a pulse waveform when the rotating shaft is displaced in the radial direction. It is assumed that the disk body 20 has changed in the Y direction from the state shown in FIG. In this case, if the rotation speed of the rotating shaft is not different from that of FIG.
In the pulse waveform detected in step (1), the time Ta of one cycle from the rise of one slit to the rise of the next slit does not change. The time Tb from the rise of the slit to the fall is:
Since the opening degree of the slit becomes small, the opening degree becomes small as shown in FIG. For example, if the relationship is La / Lb = r _a / r _b , the displacement of the rotation axis in the Y direction can be calculated from the relationship Tb ′ / Tb.

FIG. 3 shows an example of a circuit for processing the output signal of the detection device. The pulse output signals of the optical sensors 21X and 21Y are discriminated by a pulse discrimination circuit. Here the sensor 21
The rotation direction is detected by giving the X and 21Y signals a phase difference in advance. The signal discriminated by the pulse discrimination circuit is counted by a counter, and the rotation angle is detected. or,
The number of pulse inputs per unit time is counted, and the rotation speed of the rotating shaft is detected by the f / V converter. Output signals corresponding to the duty ratio of the pulse are obtained from the output signals of the sensors 21X and 21Y by the low-pass filter and the peak detection circuit.
A directional displacement is detected.

FIG. 4 shows the rotation speed and the rotation speed of the second embodiment of the present invention.
3 shows a device for detecting a rotation angle and a radial displacement. In this embodiment, magnetic irregularities made of permanent magnets having NS poles arranged alternately are provided on the outer peripheral end surface of the disk 30 fixed to the rotating shaft of a bearingless rotating machine (not shown). And the magnetic detectors 31X, 31X,
31Y and 31Y are respectively arranged in a direction orthogonal to the rotation axis. The outputs of the magnetic detectors 31X, 31X are
It is input to the differential amplifier 32X, and the displacement in the X direction is detected from this output. Similarly, the outputs of the magnetic detectors 31Y and 31Y are respectively input to a differential amplifier 32Y, from which the displacement in the Y direction is detected.

FIG. 5 shows the principle of detecting the displacement of the rotating shaft in the radial direction by this detecting device. When the rotating shaft is assumed to move in the X direction, the strength of the magnetic field detected by the detector 31X is increases from alpha ₀ for poles of the permanent magnet is close to alpha _1. On the other hand, in the detector 31X arranged on the opposite side, since the magnetic poles of the permanent magnets of the disk are in the direction away from each other,
The detection output decreases from α ₀ to α ₂ . That is, it is possible to detect that the rotating shaft has been displaced by the same principle as that of a normal displacement sensor. By calibrating the change in the magnetic field intensity corresponding to the displacement of the rotating shaft in advance, it is possible to calculate the absolute displacement in the X and Y directions from the differential output of the detector.

When the disk fixed to the rotating shaft rotates,
Each of the magnetic detectors 31X and 31Y detects a sinusoidal waveform as shown in FIG. When this is shaped by the comparator, a rectangular pulse waveform as shown in FIG. 6 is obtained. In the counter, the magnetic detectors 31X, 31
The pulses detected in Y are counted, and the rotation angle is obtained from the counted number. Also, by counting the number of pulses per unit time, the rotation speed of the rotating shaft can be obtained.

FIG. 7 shows a longitudinal section of a disk-type bearingless rotating machine (motor) according to a third embodiment of the present invention. This is because the disk-shaped rotor 35 is supported in a non-contact floating manner by driving an m-pole drive current and an m ± 2-pole control current in a superimposed manner on the opposing stator 3, and is also driven to rotate. It is a motor. As shown in FIG.
As shown in (B), the unevenness 36 of the magnetic material is formed. Then, as shown in FIG. 8 (A), the displacement sensors 37X, 37X, 37Y, 37Y,.
37θ and 37S are arranged. Six displacement sensors provided on the outer periphery of the rotor 2 detect magnetic irregularities 36 arranged on the outer peripheral end face of the rotor, respectively.

The displacement sensor 37θ can calculate the rotation angle of the rotating shaft by measuring the number of magnetic irregularities as the number of pulses. Similarly, the displacement sensor 37
S can calculate the rotation speed of the rotating shaft by measuring the number of pulses per unit time. The sensor 3
7θ and 37S may be common. One of them may be used for the reset pulse. Also, the opposed displacement sensor 37
By taking the differential outputs of X and 37X, the displacement in the X direction can be taken out, and the displacement sensors 37Y and 37
By extracting the Y differential output, the displacement in the Y direction can be detected.

According to the disk-type bearingless rotating machine configured as described above, the outer peripheral portion of the rotor 35 itself is a detected portion for detecting the rotation speed, rotation angle, and radial displacement of the rotating shaft. This eliminates the need for a space in which a rotating disk is mounted on a conventional rotating shaft and a rotation angle sensor and a rotation speed sensor are disposed near the rotating disk, and the length of the rotating shaft can be reduced. Also, as compared with the conventional motor as shown in FIG.
Since the displacement in the radial direction can be measured, the vibration in the radial direction can be monitored, and the vibration can be damped. In the above-described embodiment, one disk-type rotor is illustrated. However, a multi-stage configuration in which a plurality of disk-type rotors are attached to a rotating shaft may be used.

FIG. 9 shows a bearingless rotating machine according to another embodiment of the present invention. This bearingless rotating machine supplies a rotating force to the rotor by supplying an exciting current for generating a magnetic field in which a rotation control magnetic field of m ± 2 poles synchronized with a rotating driving magnetic field having m poles is generated to the stator. At the same time, two pairs of a rotor and a stator for supporting the rotor in a non-contact floating manner by magnetic force are provided. A thrust disk made of a magnetic material is fixed substantially at the center of the rotating shaft, and the magnetic pole surfaces of an electromagnet constituting a magnetic bearing are arranged on both sides of the thrust disk so as to face each other. The bearingless rotating machine of the above-described principle only gives a floating position control force in the radial direction to the rotating shaft, but cannot control the floating position in the rotating shaft direction. For this reason, a thrust magnetic bearing is constituted by the thrust disk fixed to substantially the center of the rotating shaft and the control electromagnet, whereby the floating position control in the axial direction is performed.

In this embodiment, irregularities of a magnetic material are provided on the outer peripheral surface of the thrust disk as shown in FIG. A displacement sensor is provided near the outer peripheral end surface of the thrust disk as shown in FIG. Then, in the same manner as described above, the displacement sensor can detect the rotation speed, the rotation angle, and the displacement of the rotation shaft.

According to this embodiment, the rotation speed, the rotation angle and the displacement can be detected by using the outer peripheral portion of the thrust disk. A disk equivalent is not required. For this reason, the number of parts can be reduced, the rotating shaft can be shortened, and the device can be reduced in size and size. or,
The structure in which the thrust magnetic bearing is arranged substantially at the center of the rotating shaft allows the shaft displacement to be detected at a place where the shaft runout is small between the two radial bearings, and improves the stability of the rotating shaft at high speed rotation. be able to.

FIG. 9B shows a longitudinal section of a modification of the above embodiment. FIG. 10A shows an arrangement of a thrust disk and a displacement sensor, and FIG. 10B is an enlarged view of an outer peripheral portion of the thrust disk. In this embodiment, the outer peripheral surface 38A of the thrust disk 38 made of a magnetic material is a flat surface, and the displacement sensors 39X, 39X, 39
Y and 39Y are arranged to detect the displacement of the rotating shaft 1 in the radial direction. Then, a large number of recesses or voids 40 are regularly arranged in the circumferential direction in a portion inside the outer peripheral end face of the thrust disk. Further, one recess or void 41 is arranged on the inner peripheral side. Then, displacement sensors 42 and 43 are arranged at positions facing the recesses or voids 40 and 41. The displacement sensor 42 detects magnetic unevenness due to a concave portion or a gap 40 provided in the thrust disk 38, and detects the rotation angle of the rotating shaft from the number of detected pulses. The displacement sensor 43 is
The inner peripheral concave portion or gap 41 provided in the thrust disk 38 is detected, and the rotational speed is detected from the number of pulses per unit time. Note that the displacement sensor 43 may be used for a reset pulse.

In the second embodiment, the example in which the magnetic poles of the NS poles of the permanent magnets are alternately arranged on the outer periphery of the disk body as the magnetic unevenness has been described. Needless to say, a surface may be used.
Similarly, as the magnetic irregularities on the outer peripheral surface of the rotor or the thrust disk of the third or fourth embodiment, the magnetic poles of the NS pole of the permanent magnet may be alternately arranged. In addition, in the example described above, the sensor for the forward / reverse rotation determination is not particularly provided,
Of course, it can be attached if necessary.

[0034]

According to the present invention as described above,
The detection of the rotation speed, the rotation angle, and the displacement of the rotation shaft of the rotation shaft can be performed by a combination of one disk body sharing the detection target and the detection device. Therefore, the number of parts can be reduced, and the rotating shaft can be shortened, compared with the conventional case where the rotating speed and the rotating angle of the rotating shaft and the displacement of the rotating shaft are different from each other using the detected part and the detecting device. Thus, the device can be made compact and compact.

Further, by using the detected part for measuring the rotational speed, the rotational angle and the displacement also as the rotor or the thrust disk, the rotating shaft can be further shortened, and the stability of the bearingless rotating machine is improved. Can be enhanced.

[Brief description of the drawings]

FIG. 1A is an explanatory diagram showing the relationship between the arrangement of a disk body and an optical sensor according to a first embodiment of the present invention, FIG. 1B is an explanatory diagram showing an optical sensor, and FIG. () Is an enlarged view of the outer peripheral portion of the disk body.

FIG. 2 shows a pulse detection waveform of the optical sensor in FIG.

FIG. 3 is a block diagram illustrating an outline of a device for detecting a rotation speed, a rotation angle, and a radial displacement of a rotation shaft.

FIG. 4 is an explanatory diagram showing the relationship between the arrangement of a magnetic body and a disk having magnetic irregularities provided on an outer peripheral portion thereof according to a second embodiment of the present invention.

FIG. 5 is an explanatory diagram showing the principle of detecting axial displacement by the magnetic sensor shown in FIG.

FIG. 6 is an explanatory diagram for converting a detection waveform of the magnetic sensor shown in FIG. 4 into a pulse waveform.

FIG. 7 is a longitudinal sectional view of a bearingless rotating machine according to a third embodiment of the present invention.

FIG. 8A is an explanatory view showing the arrangement of a rotor outer periphery and a displacement sensor, and FIG. 8B is a partially enlarged view of the rotor outer periphery.

FIGS. 9A and 9B are longitudinal sectional views of a bearingless rotating machine according to a fourth embodiment of the present invention.

10A is an explanatory view showing the arrangement of a thrust disk and a displacement sensor of the bearingless rotating machine shown in FIG. 9B, and FIG. 10B is a partially enlarged view of the outer peripheral portion of the thrust disk.

FIG. 11 is a longitudinal sectional view showing an example of a conventional disk-type bearingless rotating machine.

FIG. 12 is a longitudinal sectional view showing an example of a bearingless rotating machine provided with a conventional thrust magnetic bearing.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Rotation axis 2 Rotor 3 Stator 20 Disc body 21X, 21Y Optical detector 22 Slit (detected part) 30 Disc body having permanent magnet magnetic pole on outer periphery 31X, 31Y Magnetic sensor 35 Magnetic material on outer periphery Rotors 37X, 37Y, 37θ, 37S, 39X, 39Y, 4
2,43 Displacement sensor 38 Thrust disk having magnetic material irregularities on outer periphery

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Kazuki Sato 4-2-1 Motofujisawa, Fujisawa City, Kanagawa Prefecture Inside Ebara Research Institute, Ltd. (72) Inventor Tadashi Sato 4-2-2 Motofujisawa, Fujisawa City, Kanagawa Prefecture No. 1 Inside EBARA Research Institute

Claims (10)

[Claims] 1. An m synchronous with a rotational drive magnetic field having m poles.
A rotation control magnetic field of ± 2 poles is superimposed to apply a rotational force to the rotor. At the same time, the control magnetic field is increased / decreased from the displacement of the rotor detected by the displacement detection means of the rotor, and the rotor is magnetized. In a bearingless rotating machine that rotates and floats while floating, a disc body fixed concentrically to a rotating shaft of the bearingless rotating machine, and at least two detection members arranged in a direction orthogonal to an outer peripheral portion of the disc body A detection unit disposed on the outer periphery of the disk body at regular intervals along the circumferential direction, and the detection device is provided on the outer periphery of the disk body that rotates with a rotating shaft. By measuring the number of the detection units, the rotation speed and the rotation angle of the rotation shaft are detected, and the displacement of the rotation shaft in the orthogonal direction is detected from the degree of approach of the detected portion. Bearingless rotating machine. 2. The disk body is provided with a number of slits whose degree of opening changes in the radial direction on an outer periphery thereof, and an optical detector whose optical axis is interlinked with the slit is provided near the disk body. Prepared,
The rotation speed and rotation angle of the rotation shaft are detected from the number of detections of the slit rotating with the rotation shaft, and the displacement of the rotation shaft is detected from the amount of light passing through the slit whose opening changes in the radial direction. The bearingless rotating machine according to claim 1, wherein 3. The disk body is provided with magnetic irregularities on the outer periphery thereof, a magnetic detector is provided near the outer periphery of the disk body, and the rotation axis is determined based on the number of detections of the irregularities rotating with the rotation axis. 2. The bearingless rotating machine according to claim 1, wherein the rotational speed and the rotational angle of the rotating shaft are detected, and the displacement of the rotating shaft is detected from a change in the magnetic amount of the irregularities. 4. The bearingless rotary machine according to claim 3, wherein the magnetic irregularities are irregularities of a magnetic material disposed on an outer peripheral end surface of the disk body. 5. The bearingless rotation according to claim 3, wherein the magnetic irregularities are made of permanent magnets in which NS poles arranged on an outer peripheral end face of the disk are alternately arranged. machine. 6. The bearingless rotating machine, wherein the rotor also serves as the disk body, the magnetic unevenness is provided on an outer peripheral portion of the rotor, and the rotor is provided near an outer periphery of the disk body. Comprises a magnetic detector, and detects the rotation speed and rotation angle of the rotating shaft from the number of detections of the unevenness that rotates together with the rotating shaft, and detects the displacement of the rotating shaft from a change in the magnetic amount of the unevenness. The bearingless rotating machine according to claim 1, wherein: 7. The bearingless rotating machine further includes a thrust disk on the rotating shaft, and a thrust magnetic bearing for controlling a floating position of the thrust disk in an axial direction, wherein the thrust disk also serves as the disk body. A magnetic detector is provided near the outer periphery of the thrust disk, and a rotation speed and a rotation angle of the rotation shaft are determined based on the number of detections of the protrusions and recesses rotating with the rotation shaft. 2. The bearingless rotating machine according to claim 1, wherein a displacement of the rotating shaft is detected from a change in a magnetic amount of the irregularities. 8. The bearingless rotating machine according to claim 6, wherein the magnetic unevenness is an unevenness of a magnetic material disposed on an outer peripheral end surface of the rotor or the thrust disk. 9. An outer peripheral end surface of the rotor or the thrust disk is a magnetically flat surface, and irregularities of a magnetic material are arranged on a flat plate surface on an inner peripheral side of the outer peripheral end surface of the rotor or the thrust disk. The bearingless rotating machine according to claim 6 or 7, wherein: 10. A rotor which is superimposed with a rotation control magnetic field of m ± 2 poles synchronized with a rotation drive magnetic field having m poles to apply a rotational force to the rotor and at the same time detect the rotor by a displacement detecting means of the rotor. In the bearingless rotating machine that rotates the rotor while magnetically levitating by increasing or decreasing the control magnetic field from the displacement of at least two rotations, the floating position of which is controlled in the radial direction on the rotating shaft and the rotary is driven And a thrust disk disposed between the rotors, a stator that radially floats and supports the rotor around the rotation shaft and drives the rotor, and a thrust disk that floats in the axial direction. A thrust magnetic bearing for controlling the position, and the magnetic unevenness is provided on the outer peripheral portion of the thrust disk, and a magnetic detector for detecting the magnetic unevenness is provided in the vicinity of the magnetic unevenness,
While counting this to measure the rotation speed and rotation angle,
The bearingless rotating machine according to claim 7, 8 or 9, wherein the displacement of the rotating shaft is measured.