JPH1087326A - Rare earth metal oxide with coating film of rare earth metal fluoride - Google Patents
Rare earth metal oxide with coating film of rare earth metal fluorideInfo
- Publication number
- JPH1087326A JPH1087326A JP8243341A JP24334196A JPH1087326A JP H1087326 A JPH1087326 A JP H1087326A JP 8243341 A JP8243341 A JP 8243341A JP 24334196 A JP24334196 A JP 24334196A JP H1087326 A JPH1087326 A JP H1087326A
- Authority
- JP
- Japan
- Prior art keywords
- rare earth
- oxide
- earth metal
- fluoride
- lanthanum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001404 rare earth metal oxide Inorganic materials 0.000 title claims abstract description 25
- 239000011248 coating agent Substances 0.000 title claims abstract description 18
- 238000000576 coating method Methods 0.000 title claims abstract description 16
- -1 rare earth metal fluoride Chemical class 0.000 title claims abstract description 14
- 229910052761 rare earth metal Inorganic materials 0.000 title claims abstract description 13
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims abstract description 51
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000006104 solid solution Substances 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract description 13
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical group F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 abstract description 11
- XRADHEAKQRNYQQ-UHFFFAOYSA-K trifluoroneodymium Chemical compound F[Nd](F)F XRADHEAKQRNYQQ-UHFFFAOYSA-K 0.000 abstract description 6
- 229910000040 hydrogen fluoride Inorganic materials 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000007654 immersion Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 description 19
- 238000002441 X-ray diffraction Methods 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 239000012153 distilled water Substances 0.000 description 6
- YXEUGTSPQFTXTR-UHFFFAOYSA-K lanthanum(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[La+3] YXEUGTSPQFTXTR-UHFFFAOYSA-K 0.000 description 6
- 239000000243 solution Substances 0.000 description 4
- RCYIWFITYHZCIW-UHFFFAOYSA-N 4-methoxybut-1-yne Chemical compound COCCC#C RCYIWFITYHZCIW-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000001941 electron spectroscopy Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004042 decolorization Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000003826 tablet Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、フッ化物被膜を有
するランタンまたはネオジムの酸化物に関し、さらに詳
細には、該フッ化物被膜によって耐湿性を付与された希
土類酸化物に関する。[0001] The present invention relates to a lanthanum or neodymium oxide having a fluoride film, and more particularly to a rare earth oxide provided with moisture resistance by the fluoride film.
【０００２】[0002]
【従来の技術】酸化ランタンおよび酸化ネオジムは、高
い屈折率を利用して光学ガラスの成分としてレンズなど
に用いられ、また光学レンズの反射防止コーティング剤
としても用いられる。さらに、酸化ランタンは、蛍光体
原料として用いられるほか、チタン酸バリウムやチタン
酸ストロンチウムに添加して、誘電特性を向上させるの
に用いられる。一方、酸化ネオジムは、ガラスの物理消
色、レーザーなどに用いられる。2. Description of the Related Art Lanthanum oxide and neodymium oxide are used as components of optical glass for lenses and the like by utilizing a high refractive index, and are also used as antireflection coating agents for optical lenses. Further, lanthanum oxide is used not only as a raw material of a phosphor, but also added to barium titanate or strontium titanate to improve dielectric properties. On the other hand, neodymium oxide is used for physical decolorization of glass, laser, and the like.
【０００３】しかしながら、酸化ランタンや酸化ネオジ
ム、またはこれらを主成分として含む希土類酸化物固溶
体は、吸湿性が著しく、空気に接すると、空気中の水分
と反応して、酸化物が水酸化物に変化し、あるいはさら
に空気中の炭酸ガスと反応して炭酸塩を形成するに至
る。そのため、これらの希土類酸化物は、保存中に空気
中の水分との接触を避ける必要があるばかりでなく、秤
量中に重量が増加して必要量の正確な秤り取りが困難で
あり、また、酸化物粉末が湿気によって凝集して塊状に
なるので、作業性を損ねる。あるいは、薄膜として使用
する場合、湿気によって変質して、本来の物性を発揮で
きなくなる。[0003] However, lanthanum oxide, neodymium oxide, or a rare earth oxide solid solution containing these as a main component has a remarkable hygroscopic property, and when in contact with air, reacts with moisture in the air to convert the oxide to hydroxide. It changes or even reacts with carbon dioxide in the air to form carbonates. Therefore, these rare earth oxides not only need to avoid contact with moisture in the air during storage, but also increase the weight during weighing, making it difficult to accurately weigh the required amount. In addition, the oxide powder agglomerates due to moisture to form a lump, thereby impairing workability. Alternatively, when it is used as a thin film, it is denatured by moisture and cannot exhibit its original physical properties.
【０００４】そのため、疎水性の有機物や撥水性を付与
するシラン化合物などによる処理も考えられるが、操作
が煩雑であり、また使用目的によっては、このような有
機物の存在が望ましくない。したがって、酸化ランタ
ン、酸化ネオジムおよびこれらを主成分として含む希土
類酸化物であって、耐湿性に優れるものが求められてい
る。[0004] For this reason, treatment with a hydrophobic organic substance or a silane compound imparting water repellency can be considered, but the operation is complicated, and depending on the purpose of use, the presence of such an organic substance is not desirable. Therefore, lanthanum oxide, neodymium oxide and rare earth oxides containing these as a main component and having excellent moisture resistance are required.
【０００５】[0005]
【発明が解決しようとする課題】本発明の目的は、この
ような要求にこたえて、耐湿性に優れた上記の希土類酸
化物を提供することである。SUMMARY OF THE INVENTION It is an object of the present invention to provide such a rare earth oxide having excellent moisture resistance in response to such a demand.
【０００６】[0006]
【課題を解決するための手段】本発明者は、上記の課題
を解決するために研究を重ねた結果、これらの希土類酸
化物の表面に、希土類フッ化物の被膜を形成することに
よってその目的を達成しうることを見出して、本発明を
完成するに至った。Means for Solving the Problems As a result of repeated studies to solve the above problems, the present inventor has achieved the purpose by forming a rare earth fluoride film on the surface of these rare earth oxides. Having found what can be achieved, the present invention has been completed.
【０００７】すなわち本発明は、酸化ランタン、酸化ネ
オジムまたはこれらを主成分として含む希土類酸化物固
溶体からなる群より選ばれた希土類酸化物であって、希
土類フッ化物からなる被膜を有する希土類酸化物に関す
る。That is, the present invention relates to a rare earth oxide selected from the group consisting of lanthanum oxide, neodymium oxide or a rare earth oxide solid solution containing these as a main component, wherein the rare earth oxide has a coating made of a rare earth fluoride. .
【０００８】[0008]
【発明の実施の態様】本発明において、被膜を形成させ
る対象の希土類酸化物は、酸化ランタン、酸化ネオジ
ム、これら相互の固溶体、およびこれらを主成分とす
る、すなわち、上記の酸化物の１種または２種を合計５
０重量％以上含む希土類酸化物固溶体である。以下、特
にことわらない限り、「希土類酸化物」とは、上記の範
囲内の酸化物をいう。BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, the rare earth oxide on which a film is to be formed is lanthanum oxide, neodymium oxide, a mutual solid solution thereof, or a mixture containing these as main components. Or 2 kinds, total 5
It is a rare earth oxide solid solution containing 0% by weight or more. Hereinafter, "rare earth oxide" refers to an oxide within the above range, unless otherwise specified.
【０００９】形状は特に限定されず、任意の粒子径を有
する粉末、粒状物、錠剤、基材表面に形成された析出物
や任意の膜厚を有する膜、成形品などが例示されるが、
本発明の効果を特に顕著に発揮するのは、空気中の水分
の影響を受けやすい粉末および薄膜である。The shape is not particularly limited, and examples thereof include powders, granules, tablets having an arbitrary particle size, precipitates formed on the surface of a substrate, films having an arbitrary thickness, molded articles, and the like.
Particularly effective are the powders and thin films which are susceptible to moisture in the air.
【００１０】上記の希土類酸化物の表面に形成される被
膜は、該酸化物に対応する希土類フッ化物、すなわちフ
ッ化ランタンおよび／またはフッ化ネオジムである。被
膜の厚さは任意であって、該酸化物を防湿性にする厚さ
があれば十分であり、Ｘ線回折（ＸＲＤ）によって希土
類フッ化物のピークが確認されるか、電子分光法（ＥＳ
ＣＡ）によって酸化物の表面に希土類フッ化物の存在が
確認される厚さであれば、その耐湿性を発揮できる。The film formed on the surface of the rare earth oxide is a rare earth fluoride corresponding to the oxide, that is, lanthanum fluoride and / or neodymium fluoride. The thickness of the coating is arbitrary, and it is sufficient if the thickness is such that the oxide is moisture-proof. A peak of rare earth fluoride is confirmed by X-ray diffraction (XRD), or electron spectroscopy (ES
If the thickness of the oxide confirms the presence of the rare-earth fluoride on the surface of the oxide according to CA), the oxide can exhibit its moisture resistance.
【００１１】希土類フッ化物の形成方法は特に限定され
ない。代表的には、希土類酸化物をフッ化水素酸溶液に
浸漬し、またはフッ化水素ガスに暴露することにより、
酸化物の表面をフッ素化して、希土類フッ化物被膜を形
成できる。The method of forming the rare earth fluoride is not particularly limited. Typically, by immersing the rare earth oxide in a hydrofluoric acid solution or exposing it to hydrogen fluoride gas,
The surface of the oxide can be fluorinated to form a rare earth fluoride coating.
【００１２】上記の方法による場合、フッ化水素の量
は、用いる希土類酸化物の表面積によっても異なり、該
表面積から計算される量よりも過剰に用いるが、該酸化
物に対して、通常５モル％以上であればよい。フッ化水
素酸溶液を用いる場合、濃度は高いほど好ましく、たと
えば２０〜５１重量％で用いられる。In the above method, the amount of hydrogen fluoride depends on the surface area of the rare earth oxide to be used, and is used in excess of the amount calculated from the surface area. % Or more. When a hydrofluoric acid solution is used, the higher the concentration, the better, for example, the concentration is 20 to 51% by weight.
【００１３】浸漬は常温付近、たとえば５〜５０℃の範
囲でよく、たとえば３０℃で撹拌しつつ３０分以上、た
とえば２４時間行えばよい。The immersion may be performed at around normal temperature, for example, in the range of 5 to 50 ° C., and may be carried out, for example, at 30 ° C. with stirring for 30 minutes or more, for example, 24 hours.
【００１４】[0014]
【発明の効果】本発明の希土類フッ化物被覆を有する希
土類酸化物は、耐湿性に優れ、したがって保存性および
作業性がよく、正確に他の成分に配合でき、また湿気の
存在下においても安定して使用できる。したがって、本
発明の希土類酸化物は、光学ガラス、そのコーティング
剤、蛍光体、誘電体などの原料として使用でき、またレ
ーザー物質などとして広範囲の用途に用いられる。The rare earth oxide having a rare earth fluoride coating of the present invention is excellent in moisture resistance, therefore, has good preservability and workability, can be accurately blended with other components, and is stable even in the presence of moisture. Can be used. Therefore, the rare earth oxide of the present invention can be used as a raw material for optical glass, its coating agent, phosphor, dielectric, and the like, and is used for a wide range of applications as a laser substance.
【００１５】[0015]
【実施例】以下、実施例および比較例によって、本発明
をさらに詳細に説明する。本発明は、これらの実施例に
よって限定されるものではない。これらの実施例および
比較例において、酸化ランタンおよび酸化ネオジムは、
いずれも試薬級のものを用いた。The present invention will be described in more detail with reference to the following Examples and Comparative Examples. The present invention is not limited by these examples. In these examples and comparative examples, lanthanum oxide and neodymium oxide are:
All were reagent grade.
【００１６】実施例１ 酸化ランタン粉末１．５ｇを４６重量％のフッ化水素酸
水溶液４００ml中に入れて、３０℃で２４時間撹拌し
た。その後、溶液中の粉末をろ別し、２日間風乾した。
得られた試料は、外観上は当初の酸化ランタン粉末から
変化していなかった。該試料のＸＲＤを測定したとこ
ろ、図１（ａ）に示すように、大部分が酸化ランタンの
ピークであり、微量のフッ化ランタンのピークが認めら
れた。また、電子分光法（ＥＳＣＡ）によって試料表面
を分析したところ、表面にフッ素原子の存在が認められ
た。以上のことから、該試料は表面にフッ化ランタン被
膜を有する酸化ランタン粉末であることが確認された。Example 1 1.5 g of lanthanum oxide powder was placed in 400 ml of a 46% by weight aqueous solution of hydrofluoric acid and stirred at 30 ° C. for 24 hours. Thereafter, the powder in the solution was separated by filtration and air-dried for 2 days.
The obtained sample had no change in appearance from the original lanthanum oxide powder. When the XRD of the sample was measured, as shown in FIG. 1 (a), most of the peaks were lanthanum oxide peaks, and traces of lanthanum fluoride peaks were observed. When the sample surface was analyzed by electron spectroscopy (ESCA), the presence of fluorine atoms on the surface was confirmed. From the above, it was confirmed that the sample was a lanthanum oxide powder having a lanthanum fluoride coating on the surface.
【００１７】このようにして得られた試料０．７５ｇを
蒸留水２００ml中に入れて、３０℃で２４時間撹拌し
た。その後、粉末をろ別し、１日間風乾した。ついで、
粉末のＸＲＤを測定したところ、図１（ｂ）に示すよう
に、フッ化ランタン被膜を形成した直後の試料のＸＲＤ
と変わらず、大部分が酸化ランタンのピークで、微量の
フッ化ランタンのピークがあり、水酸化ランタンのピー
クは認められなかった。0.75 g of the sample thus obtained was placed in 200 ml of distilled water and stirred at 30 ° C. for 24 hours. Thereafter, the powder was filtered off and air-dried for one day. Then
When the XRD of the powder was measured, as shown in FIG. 1 (b), the XRD of the sample immediately after forming the lanthanum fluoride coating was obtained.
In most cases, the peak was lanthanum oxide, a trace of lanthanum fluoride was present, and no lanthanum hydroxide peak was observed.
【００１８】以上の実験結果から、表面に形成されたフ
ッ化ランタン被膜によって酸化ランタンが保護されてい
ることは明瞭である。From the above experimental results, it is clear that lanthanum oxide is protected by the lanthanum fluoride coating formed on the surface.
【００１９】比較例１ 酸化ランタン粉末１．５ｇを試料瓶から取出して、空気
中に１時間放置した。その後、ＸＲＤを測定したとこ
ろ、酸化ランタンのピーク以外に、多量の水酸化ランタ
ンのピークが観測された。さらに空気中に１日間放置し
た後にＸＲＤを測定したところ、水酸化ランタンのピー
クのみが観察された。Comparative Example 1 1.5 g of lanthanum oxide powder was taken out of a sample bottle and left in the air for 1 hour. After that, when XRD was measured, a large amount of lanthanum hydroxide peak was observed in addition to the peak of lanthanum oxide. When XRD was measured after further standing in the air for one day, only the peak of lanthanum hydroxide was observed.
【００２０】比較例２ 酸化ランタン粉末１．５ｇを蒸留水４００ml中に入れ
て、３０℃で２４時間撹拌した。その後、粉末をろ別
し、２日間風乾した。得られた試料のＸＲＤを測定した
ところ、図１（ｃ）に示すように、水酸化ランタンのピ
ークのみが観察された。すなわち、酸化ランタンは完全
に水と反応して、水酸化ランタンになっていた。Comparative Example 2 1.5 g of lanthanum oxide powder was placed in 400 ml of distilled water and stirred at 30 ° C. for 24 hours. Thereafter, the powder was filtered off and air-dried for 2 days. When the XRD of the obtained sample was measured, only the peak of lanthanum hydroxide was observed as shown in FIG. That is, lanthanum oxide completely reacted with water to form lanthanum hydroxide.
【００２１】実施例２ 酸化ネオジム粉末１．５ｇを４６重量％のフッ化水素酸
水溶液４００ml中に入れて、３０℃で２４時間撹拌し
た。その後、溶液中の粉末をろ別し、２日間風乾した。
該試料のＸＲＤを測定したところ、大部分が酸化ネオジ
ムのピークであり、微量のフッ化ネオジムのピークが認
められた。このことから、該試料は表面にフッ化ネオジ
ム被膜を有する酸化ネオジム粉末であることが確認され
た。Example 2 1.5 g of neodymium oxide powder was placed in 400 ml of a 46% by weight aqueous solution of hydrofluoric acid and stirred at 30 ° C. for 24 hours. Thereafter, the powder in the solution was separated by filtration and air-dried for 2 days.
When the XRD of the sample was measured, the peak was mostly neodymium oxide and a trace of neodymium fluoride was observed. From this, it was confirmed that the sample was a neodymium oxide powder having a neodymium fluoride coating on the surface.
【００２２】このようにして得られた試料０．７５ｇを
蒸留水２００ml中に入れて、３０℃で２４時間撹拌し
た。その後、粉末をろ別し、１日間風乾した。ついで、
粉末のＸＲＤを測定したところ、フッ化ネオジム被膜を
形成した直後の試料のＸＲＤと変わらず、大部分が酸化
ネオジムのピークで、微量のフッ化ネオジムのピークが
あり、水酸化ネオジムのピークは認められず、実施例１
の場合と同様の効果が確認された。0.75 g of the sample thus obtained was placed in 200 ml of distilled water and stirred at 30 ° C. for 24 hours. Thereafter, the powder was filtered off and air-dried for one day. Then
When the XRD of the powder was measured, it was the same as the XRD of the sample immediately after the neodymium fluoride coating was formed, most of which was a neodymium oxide peak, a trace of neodymium fluoride was present, and a neodymium hydroxide peak was observed. Example 1
The same effect as in the case of was confirmed.
【００２３】比較例３ 酸化ネオジム粉末１．５ｇを蒸留水４００ml中に入れ
て、３０℃で２４時間撹拌した。その後、粉末をろ別
し、２日間風乾した。得られた試料のＸＲＤを測定した
ところ、酸化ネオジムのピークとともに、多量の水酸化
ネオジムのピークが観察された。すなわち、酸化ネオジ
ムは一部が水と反応して、水酸化ネオジムになってい
た。Comparative Example 3 1.5 g of neodymium oxide powder was placed in 400 ml of distilled water and stirred at 30 ° C. for 24 hours. Thereafter, the powder was filtered off and air-dried for 2 days. When the XRD of the obtained sample was measured, a large amount of neodymium hydroxide was observed together with the peak of neodymium oxide. That is, neodymium oxide was partially reacted with water to become neodymium hydroxide.
【図１】酸化ランタンおよびフッ化ランタン被膜を有す
る酸化ランタンのＸＲＤチャートの比較図である。 （ａ）実施例１により、フッ化ランタン被膜を形成した
酸化ランタン （ｂ）実施例１により、フッ化ランタン被膜を有する酸
化ランタンを蒸留水に浸漬したもの （ｃ）比較例２により、非処理酸化ランタンを蒸留水に
浸漬したものFIG. 1 is a comparison diagram of XRD charts of lanthanum oxide and lanthanum oxide having a lanthanum fluoride coating. (A) Lanthanum oxide having a lanthanum fluoride film formed thereon according to Example 1 (b) Lanthanum oxide having a lanthanum fluoride film formed according to Example 1 immersed in distilled water (c) Untreated according to Comparative Example 2 Lanthanum oxide immersed in distilled water
１ 酸化ランタンのピーク ２ フッ化ランタンのピーク ３ 水酸化ランタンのピーク 1 Peak of lanthanum oxide 2 Peak of lanthanum fluoride 3 Peak of lanthanum hydroxide
Claims (1)
らを主成分として含む希土類酸化物固溶体からなる群よ
り選ばれた希土類酸化物であって、希土類フッ化物から
なる被膜を有する希土類酸化物。1. A rare earth oxide selected from the group consisting of lanthanum oxide, neodymium oxide or a rare earth oxide solid solution containing these as a main component, wherein the rare earth oxide has a coating made of a rare earth fluoride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8243341A JPH1087326A (en) | 1996-09-13 | 1996-09-13 | Rare earth metal oxide with coating film of rare earth metal fluoride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8243341A JPH1087326A (en) | 1996-09-13 | 1996-09-13 | Rare earth metal oxide with coating film of rare earth metal fluoride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1087326A true JPH1087326A (en) | 1998-04-07 |
Family
ID=17102391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8243341A Pending JPH1087326A (en) | 1996-09-13 | 1996-09-13 | Rare earth metal oxide with coating film of rare earth metal fluoride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1087326A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6679996B1 (en) * | 1999-10-05 | 2004-01-20 | Hoya Corporation | Metal oxide pattern forming method |
| US7175888B2 (en) | 2004-03-03 | 2007-02-13 | General Electric Company | Mischmetal oxide TBC |
| WO2011062003A1 (en) | 2009-11-17 | 2011-05-26 | Jx日鉱日石金属株式会社 | Method for storing lanthanum oxide target, and vacuum-packed lanthanum oxide target |
| WO2012117834A1 (en) | 2011-03-01 | 2012-09-07 | Jx日鉱日石金属株式会社 | Method for storing metallic lanthanum target, vacuum-sealed metallic lanthanum target, and thin film formed by sputtering using metallic lanthanum target |
-
1996
- 1996-09-13 JP JP8243341A patent/JPH1087326A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6679996B1 (en) * | 1999-10-05 | 2004-01-20 | Hoya Corporation | Metal oxide pattern forming method |
| US7175888B2 (en) | 2004-03-03 | 2007-02-13 | General Electric Company | Mischmetal oxide TBC |
| US7229705B1 (en) | 2004-03-03 | 2007-06-12 | General Electric Company | Mischmetal oxide TBC |
| WO2011062003A1 (en) | 2009-11-17 | 2011-05-26 | Jx日鉱日石金属株式会社 | Method for storing lanthanum oxide target, and vacuum-packed lanthanum oxide target |
| JP5234860B2 (en) * | 2009-11-17 | 2013-07-10 | Ｊｘ日鉱日石金属株式会社 | Method for storing lanthanum oxide target, sputtering target comprising lanthanum oxide, and method for forming lanthanum oxide thin film |
| US8911600B2 (en) | 2009-11-17 | 2014-12-16 | Jx Nippon Mining & Metals Corporation | Method of storing lanthanum oxide target, and vacuum-sealed lanthanum oxide target |
| WO2012117834A1 (en) | 2011-03-01 | 2012-09-07 | Jx日鉱日石金属株式会社 | Method for storing metallic lanthanum target, vacuum-sealed metallic lanthanum target, and thin film formed by sputtering using metallic lanthanum target |
| EP2682497A4 (en) * | 2011-03-01 | 2014-08-13 | Jx Nippon Mining & Metals Corp | METHOD FOR STORING A METAL LANTHANE TARGET, TARGET VACUUM SEALED METAL LANTHANE AND THIN FILM FORMED BY CATHODIC SPUTATION USING A METAL LANTHANE TARGET |
| JP5583777B2 (en) * | 2011-03-01 | 2014-09-03 | Ｊｘ日鉱日石金属株式会社 | Method for storing metallic lanthanum target and vacuum sealed metallic lanthanum target |
| JP2014167167A (en) * | 2011-03-01 | 2014-09-11 | Jx Nippon Mining & Metals Corp | Storage method of metal lanthanum target, vacuum-sealed metal lanthanum target, and thin film formed by sputtering using metal lanthanum target |
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