JPH1098019A5 - - Google Patents
Info
- Publication number
- JPH1098019A5 JPH1098019A5 JP1996251434A JP25143496A JPH1098019A5 JP H1098019 A5 JPH1098019 A5 JP H1098019A5 JP 1996251434 A JP1996251434 A JP 1996251434A JP 25143496 A JP25143496 A JP 25143496A JP H1098019 A5 JPH1098019 A5 JP H1098019A5
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing equipment
- equipment system
- surface cleaning
- cleaning method
- process chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25143496A JPH1098019A (ja) | 1996-09-24 | 1996-09-24 | 表面清浄化方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25143496A JPH1098019A (ja) | 1996-09-24 | 1996-09-24 | 表面清浄化方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1098019A JPH1098019A (ja) | 1998-04-14 |
| JPH1098019A5 true JPH1098019A5 (de) | 2004-10-21 |
Family
ID=17222791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25143496A Pending JPH1098019A (ja) | 1996-09-24 | 1996-09-24 | 表面清浄化方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1098019A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6533952B2 (en) * | 1999-06-08 | 2003-03-18 | Euv Llc | Mitigation of radiation induced surface contamination |
| DE10008829B4 (de) * | 2000-02-25 | 2005-06-23 | Steag Rtp Systems Gmbh | Verfahren zum Entfernen von adsorbierten Molekülen aus einer Kammer |
| JP4773735B2 (ja) * | 2005-03-18 | 2011-09-14 | 東京エレクトロン株式会社 | 真空容器の水分除去方法、該方法を実行するためのプログラム、及び記憶媒体 |
| US7964039B2 (en) * | 2007-09-07 | 2011-06-21 | Imec | Cleaning of plasma chamber walls using noble gas cleaning step |
| JP2016092347A (ja) * | 2014-11-11 | 2016-05-23 | 株式会社ディスコ | エッチング方法 |
| JP2016100343A (ja) * | 2014-11-18 | 2016-05-30 | 株式会社ディスコ | エッチング方法 |
-
1996
- 1996-09-24 JP JP25143496A patent/JPH1098019A/ja active Pending
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