JPH11101232A - Bearing device, spindle motor and rotary body device - Google Patents
Bearing device, spindle motor and rotary body deviceInfo
- Publication number
- JPH11101232A JPH11101232A JP9264514A JP26451497A JPH11101232A JP H11101232 A JPH11101232 A JP H11101232A JP 9264514 A JP9264514 A JP 9264514A JP 26451497 A JP26451497 A JP 26451497A JP H11101232 A JPH11101232 A JP H11101232A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- spindle
- thrust
- magnetic
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 6
- 238000005339 levitation Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Landscapes
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Rotational Drive Of Disk (AREA)
- Motor Or Generator Frames (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本願発明は、軸受寿命が飛躍
的に向上するとともに起動時負荷トルクが著しく小さく
回転振れが少ない高性能な軸受機能を有する軸受装置及
びスピンドルモータ及び回転体装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bearing device, a spindle motor, and a rotating body device having a high-performance bearing function that dramatically improves the bearing life, has a remarkably small starting load torque, and has a small rotational runout.
【０００２】[0002]
【従来の技術】従来のスピンドルモータに採用されてい
る軸受装置は玉軸受構造であり、寿命が小さく、回転振
れが大きい欠点があった。2. Description of the Related Art A bearing device employed in a conventional spindle motor has a ball bearing structure, and has shortcomings of short life and large rotational runout.
【０００３】[0003]
【発明が解決しようとする課題】本願発明は、軸受寿命
が飛躍的に向上するとともに起動時負荷トルクが著しく
小さく回転振れが少ない高性能な軸受機能を有する軸受
装置及びスピンドルモータ及び回転体装置を提供するこ
とにある。SUMMARY OF THE INVENTION The present invention provides a bearing device, a spindle motor, and a rotating body device having a high-performance bearing function that dramatically improves the bearing life and has a remarkably small starting load torque and a small rotational runout. To provide.
【０００４】[0004]
【課題を解決するための手段】本願発明は、スピンドル
が気体ラジアル軸受及びスラスト磁気軸受を介してスピ
ンドル支持部材に支持されていることを特徴とする軸受
装置を提供することにある。本願発明は、スピンドルが
気体動圧軸受及びスラスト磁気軸受を介してスピンドル
支持部材に支持されていることを特徴とする軸受装置を
提供することにある。本願発明は、スピンドルが気体動
圧軸受及びスラスト磁気軸受を介してスピンドル支持部
材に支持され、スピンドルのスラスト磁気軸受による浮
上時に、軸受可動部材が軸受固定部材に密着してスピン
ドルの浮上ストロークを制限するようになっていること
を特徴とする軸受装置を提供することにある。本願発明
は、スピンドルが気体動圧軸受及びスラスト磁気軸受を
介してスピンドル支持部材に支持され、スピンドルのス
ラスト磁気軸受による浮上時に、軸受可動部材が軸受固
定部材に密着してスピンドルの浮上ストロークを制限す
るようになっていて、スピンドルの浮上ストロークを検
出するギャップセンサの信号に基づいて軸受可動部材と
軸受固定部材の間のギャップがスラスト動圧を発生し得
る微小寸法となるように構成されていることを特徴とす
る軸受装置を提供することにある。本願発明は、スピン
ドルが気体スラスト軸受及びラジアル磁気軸受を介して
スピンドル支持部材に支持されかつ気体スラスト軸受の
軸受可動部材または軸受固定部材のいずれか一方が一
つ、他方が二つ有し、二つ有する方が一つ有する方を挟
んでいることを特徴とする軸受装置を提供することにあ
る。本願発明は、スピンドルが気体スラスト軸受及びラ
ジアル磁気軸受を介してスピンドル支持部材に支持され
かつ気体スラスト軸受の軸受可動部材または軸受固定部
材のいずれか一方が一つ、他方が二つ有し、二つ有する
方が一つ有する方を挟んでいて、スピンドルの偏心を検
出するギャップセンサの信号に基づいてラジアル磁気軸
受が自動調心を行うように構成されていることを特徴と
する軸受装置を提供することにある。本願発明は、軸受
装置のラジアル磁気軸受のコイルにモータコイルが重ね
られ、同ラジアル磁気軸受の永久磁石がモータコイルの
永久磁石として兼用されていることを特徴とするスピン
ドルモータを提供することにある。本願発明は、スピン
ドルモータのスピンドルにポリゴンミラー、磁気ディス
クあるいは光ディスク等の被回転体が取り付けられてい
ることを特徴とする回転体装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a bearing device characterized in that a spindle is supported by a spindle support member via a gas radial bearing and a thrust magnetic bearing. An object of the present invention is to provide a bearing device in which a spindle is supported by a spindle support member via a gas dynamic pressure bearing and a thrust magnetic bearing. According to the present invention, the spindle is supported on the spindle support member via the gas dynamic pressure bearing and the thrust magnetic bearing, and when the spindle floats by the thrust magnetic bearing, the bearing movable member is in close contact with the bearing fixing member to limit the floating stroke of the spindle. It is another object of the present invention to provide a bearing device characterized in that: According to the present invention, the spindle is supported on the spindle support member via the gas dynamic pressure bearing and the thrust magnetic bearing, and when the spindle floats by the thrust magnetic bearing, the bearing movable member is in close contact with the bearing fixing member to limit the floating stroke of the spindle. The gap between the bearing movable member and the bearing fixing member has a small dimension capable of generating a thrust dynamic pressure based on a signal from a gap sensor that detects a floating stroke of the spindle. It is another object of the present invention to provide a bearing device. In the present invention, a spindle is supported on a spindle support member via a gas thrust bearing and a radial magnetic bearing, and one of a movable member and a fixed member of the gas thrust bearing has one, and the other has two, It is an object of the present invention to provide a bearing device characterized in that two bearing members sandwich one bearing member. In the present invention, a spindle is supported on a spindle support member via a gas thrust bearing and a radial magnetic bearing, and one of a movable member and a fixed member of the gas thrust bearing has one, and the other has two, A radial magnetic bearing configured to perform self-alignment based on a signal from a gap sensor that detects eccentricity of a spindle, with one bearing between two bearings. Is to do. The present invention provides a spindle motor characterized in that a motor coil is superimposed on a coil of a radial magnetic bearing of a bearing device, and a permanent magnet of the radial magnetic bearing is also used as a permanent magnet of the motor coil. . It is an object of the present invention to provide a rotating device in which a rotating object such as a polygon mirror, a magnetic disk or an optical disk is attached to a spindle of a spindle motor.
【０００５】[0005]
【発明の実施の形態】図１は本願発明の軸受装置の第一
の実施の形態を示す。この軸受装置は、スピンドル２が
気体ラジアル軸受Ａ及びスラスト磁気軸受Ｄを介してス
ピンドル支持部材１に支持されていることを特徴とする
ものである。詳述すると、取付けネジ孔１ｃを有するフ
ランジ１ｄを備えかつ中央孔１ａを形成する円筒部１ｂ
を有する概略円板状のスピンドル支持部材１に、下端に
鍔部２ａを有しかつ円筒部上面が閉じてかつ上面部中央
より軸孔２ｂを形成する連結筒２ｃが垂下しているスピ
ンドル２が被さって、連結筒２ｃが中央孔１ａ内に通さ
れ、気体ラジアル軸受の軸受固定部材３がスピンドル支
持部材１の円筒部１ｂに外嵌固定されているとともに軸
受可動部材４がスピンドル２の円筒部に内嵌固定され、
軸受固定部材３または軸受可動部材４のいずれかの密着
面に図示しない動圧発生溝が刻設されており、スピンド
ル支持部材１の外周部に浮上用磁気コイル５が設けられ
ているとともに、これに対応して、スピンドル２の鍔部
２ａの下面に周方向にＮ極とＳ極とが交互に並ぶように
分極された円環板状の永久磁石６が設けられていて、浮
上用磁気コイル５に通電すると永久磁石６との間で磁力
の反発が起きて軸受可動部材４の下面がスピンドル支持
部材１の上面から浮くようになっており、連結筒２ｃに
モータの出力軸あるいは他の回転軸を嵌入固定するよう
になっている。特に、この実施の態様では、永久磁石６
の外径が浮上用磁気コイル５の外径よりも大きくて、ス
ピンドル支持部材１の外周部に取り付けたギャップセン
サ７が永久磁石６の外周部に対向していて永久磁石６の
下面までの距離ｃ1 を検出して浮上用磁気コイル５の磁
力を制御することにより、スピンドル２の浮上ストロー
クを制御できるようになっている。従って、軸受可動部
材と軸受固定部材との摩擦がなく回転抵抗は空気摩擦抵
抗のみであり軸受寿命が飛躍的に向上するとともに起動
時負荷トルクが著しく小さく回転振れが少ない高性能な
軸受機能を有する。ギャップセンサ７は、永久磁石６の
磁力によって変化する誘起電力を検出するタイプが使用
され、スピンドル２の浮上ストロークを高精密に検出で
きる。なお、浮上用磁気コイル５に通電されないとき
は、軸受可動部材４の下面がスピンドル支持部材１の上
面に密着するようになっているが他の箇所が密着しても
良い。軸受固定部材３と軸受可動部材４は、いずれもセ
ラミック、その他の高耐摩耗材料から形成されている。FIG. 1 shows a first embodiment of a bearing device according to the present invention. This bearing device is characterized in that a spindle 2 is supported by a spindle support member 1 via a gas radial bearing A and a thrust magnetic bearing D. More specifically, a cylindrical portion 1b having a flange 1d having a mounting screw hole 1c and forming a central hole 1a.
A spindle 2 having a flange 2a at the lower end, a closed upper surface of the cylindrical portion, and a connecting tube 2c which forms a shaft hole 2b from the center of the upper surface of the spindle support member 1 has a substantially disk shape. The connection cylinder 2c is passed through the central hole 1a, the bearing fixing member 3 of the gas radial bearing is externally fixed to the cylindrical portion 1b of the spindle support member 1, and the bearing movable member 4 is fixed to the cylindrical portion of the spindle 2. Is fixed inside
A dynamic pressure generating groove (not shown) is formed on the contact surface of either the bearing fixing member 3 or the bearing movable member 4, and a floating magnetic coil 5 is provided on the outer periphery of the spindle support member 1. In correspondence with the above, an annular disk-shaped permanent magnet 6 is provided on the lower surface of the flange portion 2a of the spindle 2 so that N poles and S poles are alternately arranged in the circumferential direction. When a current is applied to the magnet 5, a magnetic repulsion occurs between the permanent magnet 6 and the permanent magnet 6, so that the lower surface of the bearing movable member 4 floats from the upper surface of the spindle support member 1. The shaft is fitted and fixed. In particular, in this embodiment, the permanent magnet 6
Is larger than the outer diameter of the magnetic coil for levitating 5, and the gap sensor 7 attached to the outer peripheral portion of the spindle support member 1 is opposed to the outer peripheral portion of the permanent magnet 6 and the distance to the lower surface of the permanent magnet 6. By detecting c 1 and controlling the magnetic force of the magnetic coil 5 for floating, the floating stroke of the spindle 2 can be controlled. Therefore, there is no friction between the bearing movable member and the bearing fixing member, and the rotation resistance is only air friction resistance, so that the life of the bearing is remarkably improved, and a high-performance bearing function is provided in which the load torque at the time of starting is extremely small, and the run-out is small and the rotation is small. . The gap sensor 7 is of a type that detects an induced power that changes due to the magnetic force of the permanent magnet 6, and can detect the floating stroke of the spindle 2 with high precision. When no current is supplied to the floating magnetic coil 5, the lower surface of the bearing movable member 4 is in close contact with the upper surface of the spindle support member 1, but other portions may be in close contact. Both the bearing fixing member 3 and the bearing movable member 4 are formed of ceramic or other high wear-resistant materials.
【０００６】図２は本願発明の軸受装置の第二の実施の
形態を示す。この軸受装置は、スピンドル２が気体動圧
軸受Ｃ（本願明細書において気体動圧軸受とは気体ラジ
アル軸受と気体スラスト軸受の両方を含む用語である）
及びスラスト磁気軸受Ｄを介してスピンドル支持部材１
に支持され、スピンドル２のスラスト磁気軸受Ｄによる
浮上時に、軸受可動部材４が軸受固定部材８に密着して
スピンドル２の浮上ストロークを制限するようになって
いることを特徴とするものである。詳述すると、第一の
実施の形態の軸受装置に軸受固定部材８を追加して、軸
受固定部材８と軸受可動部材３の密着面のいずれかに動
圧発生溝を設けた構成である。図２において図１と対比
して同一の構成要素に同一の符号を付してある。軸受固
定部材８を追加して設けたことで以下の制御ができる。
すなわち、起動回転時にギャップセンサ７で永久磁石６
との距離ｃ1 を検出しつつ浮上用磁気コイル５の磁力を
制御して軸受可動部材４の上面と軸受固定部材８の下面
との隙間ｃ2 がエア動圧が発生し得るギャップよりも大
きく確保し、僅少時間が経過して定常回転になったらギ
ャップセンサ７で永久磁石６との距離ｃ 1 を検出しつつ
浮上用磁気コイル５の磁力を強めてスピンドル２の浮上
ストロークを大きくしてやると、軸受可動部材４の上面
と軸受固定部材８の下面との隙間ｃ2 が狭まってエア動
圧が発生し、スピンドル２の浮上ストローク制御が容易
でありスピンドル２の浮上が安定する。軸受可動部材と
軸受固定部材との摩擦がなく軸受寿命が飛躍的に向上す
るとともに起動時負荷トルクが著しく小さく回転振れが
少ない高性能な軸受機能を有する。FIG. 2 shows a second embodiment of the bearing device of the present invention.
The form is shown. In this bearing device, the spindle 2 has a gas dynamic pressure.
Bearing C (In this specification, a gas dynamic pressure bearing is a gas
(This is a term that includes both Al bearings and gas thrust bearings.)
Spindle support member 1 via a thrust magnetic bearing D
Supported by the thrust magnetic bearing D of the spindle 2
During floating, the bearing movable member 4 comes into close contact with the bearing fixing member 8 and
The floating stroke of the spindle 2 is now limited
It is characterized by having. To elaborate, the first
By adding a bearing fixing member 8 to the bearing device of the embodiment,
It moves to any one of the contact surfaces between the receiving and fixing member 8 and the bearing movable member 3.
This is a configuration in which a pressure generating groove is provided. FIG. 2 compares with FIG.
The same components are denoted by the same reference numerals. Bearing solid
The following control can be performed by additionally providing the fixing member 8.
That is, the gap sensor 7 detects the permanent magnet 6
Distance c1While detecting the magnetic force of the levitation magnetic coil 5
Controlling the upper surface of the bearing movable member 4 and the lower surface of the bearing fixing member 8
Gap cTwoIs larger than the gap where air dynamic pressure can occur.
When the rotation is steady after a short time,
Distance c from the permanent magnet 6 by the gap sensor 7 1While detecting
The magnetic force of the levitation magnetic coil 5 is increased to raise the spindle 2
When the stroke is increased, the upper surface of the bearing movable member 4
C between the bearing and the lower surface of the bearing fixing member 8TwoAir movement
Pressure is generated, and the floating stroke control of the spindle 2 is easy.
Thus, the floating of the spindle 2 is stabilized. With moving bearing members
There is no friction with the bearing fixing member, and the bearing life is dramatically improved
And the start-up load torque is extremely small,
Has a low performance bearing function.
【０００７】図３は本願発明の軸受装置の第三の実施の
形態を示す。この軸受装置は、スピンドル２が気体動圧
軸受Ｃ及びスラスト磁気軸受Ｄを介してスピンドル支持
部材１に支持され、スピンドル２のスラスト磁気軸受に
よる浮上時に、軸受可動部材４が軸受固定部材８に密着
してスピンドル２の浮上ストロークを制限するようにな
っていることを特徴とするものである。詳述すると、第
一の実施の形態の軸受装置に軸受固定部材８，９を追加
して、軸受固定部材８と軸受可動部材４の密着面のいず
れかに動圧発生溝を設けるとともに、軸受固定部材９と
軸受可動部材４の密着面のいずれかに動圧発生溝を設
け、回転停止時に軸受可動部材４が軸受固定部材９に密
着した状態で軸受固定部材８と軸受可動部材４との間の
隙間寸法が動圧を発生し得る寸法の二倍となるように構
成されている。図３において図１と対比して同一の構成
要素に同一の符号を付してある。軸受固定部材８，９を
追加して設けたことで以下の制御ができる。すなわち、
起動回転時にギャップセンサ７で永久磁石６との距離ｃ
1 を検出しつつ浮上用磁気コイル５の磁力を制御してス
ピンドル２の微小寸法浮上させれば、僅少時間が経過し
て定常回転になると、軸受可動部材４の上面と軸受固定
部材８の下面との隙間ｃ2 にエア動圧が発生するととも
に、軸受可動部材４の下面と軸受固定部材９の上面との
隙間ｃ3 にエア動圧が発生する。回転停止時も浮上用磁
気コイル５の磁力を制御してスピンドル２の微小寸法浮
上させて軸受可動部材４と軸受固定部材９との摩擦を避
ける。従って、軸受可動部材と軸受固定部材との摩擦が
なく軸受寿命が飛躍的に向上するとともに起動時負荷ト
ルクが著しく小さく回転振れが少ない高性能な軸受機能
を有する。また、定常回転時には浮上用磁気コイル５へ
の通電を遮断しても良く省エネルギーとなる。FIG. 3 shows a third embodiment of the bearing device of the present invention. In this bearing device, the spindle 2 is supported by the spindle support member 1 via the gas dynamic pressure bearing C and the thrust magnetic bearing D, and the bearing movable member 4 comes into close contact with the bearing fixing member 8 when the spindle 2 floats by the thrust magnetic bearing. Thus, the floating stroke of the spindle 2 is limited. More specifically, bearing fixing members 8 and 9 are added to the bearing device of the first embodiment, and a dynamic pressure generating groove is provided on one of the contact surfaces between the bearing fixing member 8 and the bearing movable member 4. A dynamic pressure generating groove is provided on one of the contact surfaces of the fixed member 9 and the bearing movable member 4, and the bearing fixed member 8 and the bearing movable member 4 are brought into contact with each other when the bearing movable member 4 is in close contact with the bearing fixed member 9 when rotation is stopped. The gap between them is configured to be twice as large as the dimension that can generate dynamic pressure. 3, the same components as those in FIG. 1 are denoted by the same reference numerals. The following control can be performed by additionally providing the bearing fixing members 8 and 9. That is,
Distance c between the gap sensor 7 and the permanent magnet 6 at the start rotation
If the magnetic force of the levitation magnetic coil 5 is controlled while detecting 1 to cause the spindle 2 to float by a very small size, when a short time elapses and steady rotation occurs, the upper surface of the bearing movable member 4 and the lower surface of the bearing fixing member 8 with the clearance c 2 air dynamic pressure generated in the air dynamic pressure is generated in the gap c 3 and the upper surface of the lower surface of the bearing movable member 4 and the bearing fixing member 9. Even when the rotation is stopped, the magnetic force of the floating magnetic coil 5 is controlled to cause the spindle 2 to float by a very small size to avoid friction between the bearing movable member 4 and the bearing fixing member 9. Therefore, there is no friction between the bearing movable member and the bearing fixing member, so that the life of the bearing is remarkably improved, and the bearing has a high-performance bearing function in which the starting load torque is extremely small and the rotational runout is small. In addition, the power supply to the levitation magnetic coil 5 may be interrupted at the time of steady rotation to save energy.
【０００８】図４は本願発明の軸受装置の第四の実施の
形態を示す。この軸受装置は、スピンドル２が気体動圧
軸受Ｃ及びスラスト磁気軸受Ｄを介してスピンドル支持
部材１に支持され、スピンドル２のスラスト磁気軸受Ｄ
による浮上時に、軸受可動部材１２が軸受固定部材１０
に密着してスピンドル２の浮上ストロークを制限するよ
うになっていることを特徴とするものである。詳述する
と、取付けネジ孔１ｃを有するフランジ１ｄを備えかつ
円筒部１ｅを有する概略円板状のスピンドル支持部材１
に、下端に鍔部２ａを有しかつ円筒部上面が閉じてかつ
上面部中央より連結筒２ｃが垂下しているスピンドル２
が被さり、円筒状の軸受固定部材１０がスピンドル支持
部材１の円筒部１ｅに内嵌固定されている一方、軸受固
定部材１０の内側に収容される円筒状の軸受可動部材１
１がスピンドル２の円筒部２ｃに外嵌固定されていると
ともに、該円筒部２ｃに円環板状の軸受可動部材１２が
外嵌固定され、軸受固定部材１０と軸受可動部材１１の
いずれかの密着面に図示しない動圧発生溝が刻設されて
いるとともに、軸受固定部材１０の下面と軸受可動部材
１２の上面のいずれかの密着面に図示しない動圧発生溝
が刻設されており、さらに、スピンドル支持部材１の外
周部に浮上用磁気コイル５が設けられているとともに、
これに対応して、スピンドル２の鍔部２ａの下面に円環
状の永久磁石６が設けられていて、浮上用磁気コイル５
に通電すると永久磁石６との間で磁力の反発が起きて軸
受可動部材１２の下面がスピンドル支持部材１の上面か
ら浮くようになっており、さらに永久磁石６の外径が浮
上用磁気コイル５の外径よりも大きくて、スピンドル支
持部材１の外周部に取り付けたギャップセンサ７が永久
磁石６の外周部に対向していて永久磁石６の下面までの
距離ｃ1 を検出して浮上用磁気コイル５の磁力を制御す
ることにより、スピンドル２の浮上ストロークを制御で
きるようになっている。なお、スピンドル支持部材１の
動圧軸受収容空間の下端を蓋板１３で塞いでいる。この
軸受装置は、スピンドル２の円筒部２ｃにモータの出力
軸あるいは他の回転軸を嵌入固定して軸承する。この軸
受装置は、起動回転時にギャップセンサ７で永久磁石６
との距離ｃ1 を検出しつつ浮上用磁気コイル５の磁力を
制御してスピンドル２を微小寸法浮上させて軸受可動部
材１２の上面と軸受固定部材１０の下面との隙間ｃ3 が
エア動圧が発生し得るギャップよりも大きく確保し、僅
少時間が経過して定常回転になったらギャップセンサ７
で永久磁石６との距離ｃ1 を検出しつつ浮上用磁気コイ
ル５の磁力を強めてスピンドル２の浮上ストロークを大
きくしてやると、軸受可動部材１２の上面と軸受固定部
材１０の下面との隙間ｃ3 が狭まってエア動圧が発生
し、スピンドル２の浮上ストローク制御が容易でありス
ピンドル２の浮上が安定する。従って、軸受可動部材と
軸受固定部材との摩擦がなく軸受寿命が飛躍的に向上す
るとともに起動時負荷トルクが著しく小さく回転振れが
少ない高性能な軸受機能を有する。FIG. 4 shows a fourth embodiment of the bearing device of the present invention. In this bearing device, a spindle 2 is supported by a spindle support member 1 via a gas dynamic pressure bearing C and a thrust magnetic bearing D, and a thrust magnetic bearing D of the spindle 2 is provided.
During floating by the bearing, the bearing movable member 12 is
The floating stroke of the spindle 2 is restricted in close contact with the spindle. More specifically, a substantially disk-shaped spindle support member 1 having a flange 1d having a mounting screw hole 1c and having a cylindrical portion 1e.
A spindle 2 having a flange 2a at the lower end, a closed upper surface of the cylindrical portion, and a connecting tube 2c hanging down from the center of the upper surface.
While the cylindrical bearing fixing member 10 is fitted and fixed in the cylindrical portion 1 e of the spindle support member 1, while the cylindrical bearing movable member 1 is accommodated inside the bearing fixing member 10.
1 is externally fitted and fixed to the cylindrical portion 2c of the spindle 2, and an annular plate-shaped bearing movable member 12 is externally fitted and fixed to the cylindrical portion 2c, and one of the bearing fixed member 10 and the bearing movable member 11 is fixed. A dynamic pressure generating groove (not shown) is engraved on the contact surface, and a dynamic pressure generating groove (not shown) is engraved on either the lower surface of the bearing fixing member 10 or the upper surface of the movable member 12. Further, a floating magnetic coil 5 is provided on the outer peripheral portion of the spindle support member 1, and
Correspondingly, an annular permanent magnet 6 is provided on the lower surface of the flange 2a of the spindle 2, and the floating magnetic coil 5
When power is supplied to the permanent magnet 6, magnetic repulsion occurs between the permanent magnet 6 and the lower surface of the bearing movable member 12 so as to float above the upper surface of the spindle support member 1. Further, the outer diameter of the permanent magnet 6 is reduced by the magnetic coil 5 for floating. of larger than the outer diameter, magnetically for levitation by detecting the distance c 1 of the gap sensor 7 mounted on the outer periphery of the spindle support member 1 is located opposite the outer periphery of the permanent magnet 6 to the lower surface of the permanent magnet 6 By controlling the magnetic force of the coil 5, the floating stroke of the spindle 2 can be controlled. The lower end of the space for accommodating the dynamic pressure bearing of the spindle support member 1 is closed by a cover plate 13. In this bearing device, an output shaft of a motor or another rotating shaft is fitted and fixed to a cylindrical portion 2c of the spindle 2 and is supported. In this bearing device, the permanent magnet 6 is detected by the gap sensor 7 during startup rotation.
Clearance c 3 air dynamic pressure of the distance c 1 by controlling the magnetic force of flying the magnetic coil 5 while detecting the spindle 2 and the lower surface of the upper surface and the bearing fixing member 10 of the bearing movable member 12 by floating small size of the Is larger than the gap that can generate the gap sensor 7 when the rotation becomes steady after a short time.
If the distance between the permanent magnet 6 and the distance c 1 is detected to increase the magnetic force of the magnetic coil for floating 5 to increase the floating stroke of the spindle 2, the gap c between the upper surface of the bearing movable member 12 and the lower surface of the bearing fixing member 10 is increased. 3 , the air dynamic pressure is generated, and the floating stroke control of the spindle 2 is easy, and the floating of the spindle 2 is stabilized. Therefore, there is no friction between the bearing movable member and the bearing fixing member, so that the life of the bearing is remarkably improved, and the bearing has a high-performance bearing function in which the starting load torque is extremely small and the rotational runout is small.
【０００９】図５は本願発明の軸受装置の第五の実施の
形態を示す。この軸受装置は、スピンドル２が気体動圧
軸受Ｃ及びスラスト磁気軸受Ｄを介してスピンドル支持
部材１に支持され、スピンドル２のスラスト磁気軸受Ｄ
による浮上時に、軸受可動部材１２が軸受固定部材１０
に密着してスピンドル２の浮上ストロークを制限するよ
うになっていることを特徴とするものである。詳述する
と、第四の実施の形態の軸受装置に軸受回転部材１４を
追加して、軸受固定部材１０と軸受可動部材１４の密着
面のいずれかに動圧発生溝を設けるとともに、軸受固定
部材１０と軸受可動部材１２の密着面のいずれかに動圧
発生溝を設け、回転停止時に軸受可動部材１４が軸受固
定部材１０に密着した状態で軸受固定部材１０と軸受可
動部材１２との間の隙間寸法が動圧を発生し得る寸法の
二倍となるように構成されている。図５において図４と
対比して同一の構成要素に同一の符号を付してある。軸
受固定部材１４を追加して設けたことで図３に示す第三
の実施の形態の軸受装置と同様の制御ができ、軸受可動
部材と軸受固定部材との摩擦がなく軸受寿命が飛躍的に
向上するとともに起動時負荷トルクが著しく小さく回転
振れが少ない高性能な軸受機能を有し、定常回転時には
浮上用磁気コイル５への通電を遮断しても良く省エネル
ギーとなる。FIG. 5 shows a fifth embodiment of the bearing device of the present invention. In this bearing device, a spindle 2 is supported by a spindle support member 1 via a gas dynamic pressure bearing C and a thrust magnetic bearing D, and a thrust magnetic bearing D of the spindle 2 is provided.
During floating by the bearing, the bearing movable member 12 is
The floating stroke of the spindle 2 is restricted in close contact with the spindle. More specifically, a bearing rotating member 14 is added to the bearing device of the fourth embodiment to provide a dynamic pressure generating groove on one of the contact surfaces between the bearing fixing member 10 and the bearing movable member 14, and a bearing fixing member. A dynamic pressure generating groove is provided on one of the contact surfaces of the bearing movable member 10 and the bearing movable member 12, and between the bearing fixed member 10 and the bearing movable member 12 when the bearing movable member 14 is in close contact with the bearing fixed member 10 when rotation is stopped. The gap size is configured to be twice as large as the size that can generate dynamic pressure. 5, the same components as those in FIG. 4 are denoted by the same reference numerals. By additionally providing the bearing fixing member 14, the same control as that of the bearing device of the third embodiment shown in FIG. 3 can be performed, and there is no friction between the movable bearing member and the bearing fixing member, so that the life of the bearing is dramatically improved. It has a high-performance bearing function that has a small load torque at start-up and a small run-out, and can cut off the power supply to the levitation magnetic coil 5 during a steady rotation to save energy.
【００１０】図６は本願発明の軸受装置の第六の実施の
形態を示す。この軸受装置は、スピンドル２が気体スラ
スト軸受Ｂ及びラジアル磁気軸受Ｅを介してスピンドル
支持部材１に支持されかつ気体スラスト軸受の軸受可動
部材または軸受固定部材のいずれか一方が一つ、他方が
二つ有し、二つ有する方が一つ有する方を挟んでいて、
スピンドル２の偏心を検出するギャップセンサの信号に
基づいてラジアル磁気軸受Ｅが自動調心を行うように構
成されている特徴とするものである。詳述すると、取付
けネジ孔１ｃを有するフランジ１ｄを備えかつ軸孔１ａ
を形成する円筒部１ｂを有する概略円板状のスピンドル
支持部材１に、円筒部上面が閉じかつ上面部中央より連
結筒２ｃが垂下しているスピンドル２が被さって、連結
筒２ｂが中央孔１ａ内に通され、気体スラスト軸受の円
筒状の軸受可動部材１５がスピンドル２の円筒部に内嵌
固定されているとともに軸受可動部材１５の下端面と上
端面を挟むように円板状の軸受固定部材１６，１７がス
ピンドル支持部材１の円筒部１ｂに外嵌固定されてお
り、さらに、該円筒部１ｂにステ−タ１８が外嵌固定さ
れている一方、軸受可動部材１５の内周面に円筒状の永
久磁石１９が内嵌固定され、かつステ−タ１８にラジア
ル方向自動調心コイル２０ａ，２０ｂ，２０ｃ，２０ｄ
が巻かれている。永久磁石１９は、周方向にＮ極とＳ極
とが交互に並ぶように分極されている一方、ラジアル方
向自動調心コイル２０ａ，２０ｂ，２０ｃ，２０ｄは、
ステータ１８の磁極部１８ａ，１８ｂ，１８ｃ，１８ｄ
の磁極が永久磁石１９のＮ極またはＳ極に正面に対向し
たときに永久磁石１９の磁極と最大値の同極となるよう
に三相交流電流が流れるようになっており、もって基本
的に自動調心機能を有している。好ましい磁気軸受構造
は、ステータ１８の磁極部１８ａ，１８ｂ，１８ｃ，１
８ｄに対応してスピンドル支持部材１の円筒部１ｂに固
定された四つのギャップセンサ２１ａ，２１ｂ，２１
ｃ，２１ｄの永久磁石１９に対するギャップｇ1 ，
ｇ2 ，ｇ3 ，ｇ4 を検出してギャップが同一となるよう
にラジアル方向自動調心コイル２０ａ，２０ｂ，２０
ｃ，２０ｄに通流する電流を微妙に制御する回路を付設
するのが良い。符号３６はセンサ取付けリングである。
例えば、ギャップｇ1 とｇ3 を検出するセンサ２１ａと
２１ｃの信号を差動増幅器に入力してギャップが小さく
なる方のセンサに次々に対応位置する各ラジアル方向自
動調心コイルに前記三相交流電流に電流を瞬時にプラス
して磁力を瞬時に大きくするともに、ギャップｇ2 とｇ
4 を検出するギャップセンサ２１ｂと２１ｄの信号を差
動増幅器に入力してギャップが小さくなる方のギャップ
センサに次々に対応位置する各ラジアル方向自動調心コ
イルに前記三相交流電流に電流を瞬時にプラスして磁力
を瞬時に大きくする電流制御回路を付設するのが良い。
従って、この軸受装置は、起動回転時にギャップセンサ
２１ａ，２１ｂ，２１ｃ，２１ｄで永久磁石１９との距
離ｇ1 ，ｇ2 ，ｇ3 ，ｇ4 を検出しつつラジアル方向自
動調心コイル２０ａ，２０ｂ，２０ｃ，２０ｄに流す電
流を制御することにより、ステータ１８の磁極部１８
ａ，１８ｂ，１８ｃ，１８ｄの磁力を制御してスピンド
ル２を高精密に自動調心することができる。そして、僅
少時間が経過して定常回転になると、軸受可動部材１５
の下面と軸受固定部材１６の上面との隙間ｃ5 にエア動
圧が発生してスピンドル２が微小寸法浮上すると、軸受
可動部材１５の上面と軸受固定部材１７の下面との隙間
ｃ6も狭まってエア動圧が発生し、もってスピンドル２
の浮上が安定する。従って、定常回転時に軸受可動部材
と軸受固定部材の摩擦がなく軸受寿命が飛躍的に向上す
るとともに回転振れが少ない高性能な軸受機能を有す
る。FIG. 6 shows a sixth embodiment of the bearing device of the present invention. In this bearing device, a spindle 2 is supported by a spindle support member 1 via a gas thrust bearing B and a radial magnetic bearing E, and one of a movable member and a fixed member of the gas thrust bearing is one, and the other is two. One having, one having two sandwiching one having
It is characterized in that the radial magnetic bearing E is configured to perform self-alignment based on a signal from a gap sensor that detects eccentricity of the spindle 2. More specifically, a flange 1d having a mounting screw hole 1c is provided and a shaft hole 1a is provided.
Is covered with a spindle 2 having a cylindrical portion 1b and a spindle 2 having a closed upper surface and a connecting tube 2c hanging down from the center of the upper surface, so that the connecting tube 2b has a central hole 1a. A cylindrical bearing movable member 15 of the gas thrust bearing is fixedly fitted in the cylindrical portion of the spindle 2 and a disk-shaped bearing fixed so as to sandwich the lower end surface and the upper end surface of the bearing movable member 15. The members 16 and 17 are externally fitted and fixed to the cylindrical portion 1b of the spindle support member 1, and the stator 18 is externally fitted and fixed to the cylindrical portion 1b. A cylindrical permanent magnet 19 is internally fitted and fixed, and a radially self-aligning coil 20a, 20b, 20c, 20d is mounted on the stator 18.
Is wound. The permanent magnet 19 is polarized so that N poles and S poles are alternately arranged in the circumferential direction, while the radial self-centering coils 20a, 20b, 20c, and 20d are
Magnetic pole portions 18a, 18b, 18c, 18d of stator 18
When the magnetic pole of the permanent magnet 19 faces the N pole or the S pole of the permanent magnet 19 in front, a three-phase AC current flows so that the magnetic pole of the permanent magnet 19 has the same maximum value as the magnetic pole of the permanent magnet 19. It has a self-centering function. A preferred magnetic bearing structure is the magnetic pole portions 18a, 18b, 18c, 1 of the stator 18.
8d, four gap sensors 21a, 21b, 21 fixed to the cylindrical portion 1b of the spindle support member 1 corresponding to 8d.
c, the gap g 1 for the permanent magnet 19 of 21d,
g 2, g 3, g 4 of the detected gap is identical manner radial self-aligning coils 20a, 20b, 20
It is preferable to provide a circuit for finely controlling the current flowing through c and 20d. Reference numeral 36 denotes a sensor mounting ring.
For example, the three-phase alternating current to each radial self-aligning coils corresponding positions one after another in the sensor towards the gap to input signals of the sensors 21a and 21c for detecting a gap g 1 and g 3 of the differential amplifier decreases The magnetic force is instantaneously increased by instantaneously adding the current to the current, and the gaps g 2 and g
The signals of the gap sensors 21b and 21d for detecting 4 are input to a differential amplifier, and the current is instantaneously applied to the three-phase alternating current to each of the radial self-aligning coils positioned one after another corresponding to the gap sensor having the smaller gap. And a current control circuit for instantaneously increasing the magnetic force.
Accordingly, this bearing device detects radial distances g 1 , g 2 , g 3 , and g 4 from the permanent magnet 19 by the gap sensors 21 a, 21 b, 21 c, and 21 d at the time of start-up rotation, while radially aligning coils 20 a, 20 b. , 20c, 20d, the magnetic pole portions 18 of the stator 18 are controlled.
By controlling the magnetic forces of a, 18b, 18c and 18d, the spindle 2 can be self-aligned with high precision. Then, when a short period of time elapses and steady rotation occurs, the bearing movable member 15
Gap air dynamic pressure is generated in the c 5 when the spindle 2 is floated critical dimensions, narrows even gap c 6 between the lower surface of the upper surface and the bearing fixing member 17 of the bearing movable member 15 of the upper surface of the lower surface and the bearing fixing member 16 The air dynamic pressure is generated and the spindle 2
Stabilization of the surface. Therefore, there is no friction between the bearing movable member and the bearing fixing member during steady rotation, so that the life of the bearing is remarkably improved, and the bearing has a high-performance bearing function with less rotational runout.
【００１１】図７は本願発明の軸受装置の第七の実施の
形態を示す。この軸受装置も、図６に示す第六の実施の
形態の軸受装置と同様に、スピンドル２が気体スラスト
軸受Ｂ及びラジアル磁気軸受Ｅを介してスピンドル支持
部材１に支持されかつ気体スラスト軸受の軸受可動部材
または軸受固定部材のいずれか一方が一つ、他方が二つ
有し、二つ有する方が一つ有する方を挟んでいて、スピ
ンドル２の偏心を検出するギャップセンサの信号に基づ
いてラジアル磁気軸受Ｅが自動調心を行うように構成さ
れている特徴とするものである。詳述すると、円筒部１
ｃを有する概略円板状のスピンドル支持部材１に、円筒
部上面が閉じかつ上面部中央より連結筒２ｃが垂下して
いるスピンドル２が被さり、気体スラスト軸受を構成す
る円筒状の軸受可動部材２２がスピンドル２の連結筒２
ｃに外嵌固定されているとともに軸受固定部材２２の下
端面と上端面を挟むように気体スラスト軸受を構成する
円板状の軸受固定部材２３，２４がスピンドル支持部材
１の円筒部１ｃに内嵌固定されており、さらに、該円筒
部１ｃにステ−タ２５が外嵌固定されている一方、軸受
固定部材２２の外周面に円筒状の永久磁石２６が外嵌固
定され、かつステ−タ２５にラジアル方向自動調心コイ
ル２７ａ，２７ｂ，２７ｃ，２７ｄが巻かれており、ス
テータ２５の磁極部２５ａ，２５ｂ，２５ｃ，２５ｄに
対応してスピンドル支持部材１の円筒部１ｅに固定され
た四つのギャップセンサ２８ａ，２８ｂ，２８ｃ，２８
ｄの永久磁石２６に対するギャップｇ5 ，ｇ6 ，ｇ7 ，
ｇ8 を検出してギャップが同一となるようにラジアル方
向自動調心コイル２７ａ，２７ｂ，２７ｃ，２７ｄに通
流する電流を微妙に制御する図示しない電流制御回路が
付設されている。従って、この軸受装置は、図６に示し
た第六の実施の態様の軸受装置と同様の作用効果を有す
る。FIG. 7 shows a bearing device according to a seventh embodiment of the present invention. In this bearing device, similarly to the bearing device of the sixth embodiment shown in FIG. 6, the spindle 2 is supported by the spindle support member 1 via the gas thrust bearing B and the radial magnetic bearing E, and the bearing of the gas thrust bearing is used. One of the movable member and the bearing fixing member has one, the other has two, and the other has two, and the one having one is sandwiched, and based on the signal of the gap sensor for detecting the eccentricity of the spindle 2, The magnetic bearing E is characterized in that it is configured to perform self-alignment. Specifically, the cylindrical portion 1
The cylindrical bearing movable member 22 which constitutes a gas thrust bearing is covered by a spindle support member 1 having a substantially circular disk-shaped spindle support member 1 having a closed upper surface and a connecting tube 2c hanging down from the center of the upper surface portion. Is the connecting cylinder 2 of the spindle 2
c, and disk-shaped bearing fixing members 23 and 24 which constitute a gas thrust bearing so as to sandwich the lower end surface and the upper end surface of the bearing fixing member 22 are fitted inside the cylindrical portion 1c of the spindle support member 1. The stator 25 is externally fitted and fixed to the cylindrical portion 1c, while the cylindrical permanent magnet 26 is externally fitted and fixed to the outer peripheral surface of the bearing fixing member 22. A radially self-aligning coil 27a, 27b, 27c, 27d is wound around 25, and is fixed to the cylindrical portion 1e of the spindle support member 1 corresponding to the magnetic pole portions 25a, 25b, 25c, 25d of the stator 25. Gap sensors 28a, 28b, 28c, 28
d with respect to the gaps g 5 , g 6 , g 7 ,
radial self-centering coil 27a so that the gap to detect g 8 are the same, 27b, 27c, the current control circuit (not shown) for finely controlling the current Tsuryu to 27d is attached. Therefore, this bearing device has the same function and effect as the bearing device of the sixth embodiment shown in FIG.
【００１２】図８は本願発明のスピンドルモータの第一
の実施の形態を示す。このスピンドルモータＳＭ1 は、
図３に示した軸受装置の浮上用磁気コイル５に重ねるよ
うに、スピンドル２を回転するように励磁するモータコ
イル２９を付加し、モータコイル２９に対応するモータ
用の永久磁石は浮上用磁気コイル５に対応して設けた永
久磁石６を兼用している一方、図３の円筒部２ｂと中央
孔１ａを除いた構成である。従って、このスピンドルモ
ータＳＭ1 は、図３に示した軸受装置の機能、作用、効
果の全てを備えている。図８において図３と対比して同
一の構成要素に同一の符号を付してある。FIG. 8 shows a first embodiment of the spindle motor of the present invention. This spindle motor SM 1
A motor coil 29 for exciting the spindle 2 to rotate is added so as to overlap the magnetic coil 5 for levitating of the bearing device shown in FIG. 3, and a permanent magnet for the motor corresponding to the motor coil 29 is a magnetic coil for levitating. 5, while the cylindrical portion 2b and the central hole 1a in FIG. 3 are omitted. Therefore, the spindle motor SM 1 is provided with the function of the bearing device shown in FIG. 3, the action, all the effects. 8, the same components as those in FIG. 3 are denoted by the same reference numerals.
【００１３】図９は本願発明のスピンドルモータの第二
の実施の形態を示す。このスピンドルモータＳＭ2 は、
図５に示した軸受装置の浮上用磁気コイル５に重ねるよ
うに、スピンドル２を回転するように励磁するモータコ
イル３０を付加し、モータコイル３０に対応するモータ
用の永久磁石は浮上用磁気コイル５に対応して設けた永
久磁石６を兼用している一方、図５のスピンドル２の中
心孔を除いた構成である。従って、このスピンドルモー
タＳＭ2 は、図５に示した軸受装置の機能、作用、効果
の全てを備えている。図９において図５と対比して同一
の構成要素に同一の符号を付してある。FIG. 9 shows a second embodiment of the spindle motor according to the present invention. This spindle motor SM 2
A motor coil 30 for exciting the spindle 2 to rotate is added so as to be superimposed on the levitating magnetic coil 5 of the bearing device shown in FIG. 5, and a motor permanent magnet corresponding to the motor coil 30 is a levitating magnetic coil. 5, while the central hole of the spindle 2 in FIG. 5 is removed. Therefore, the spindle motor SM 2 has the function of a bearing apparatus shown in FIG. 5, the action, all the effects. 9, the same components as those in FIG. 5 are denoted by the same reference numerals.
【００１４】図１０は本願発明のスピンドルモータの第
三の実施の形態を示す。このスピンドルモータＳＭ
3 は、図６に示した軸受装置のステータ１８のスロット
に、スピンドル２を回転するように励磁するモータコイ
ル３１を付加し、モータコイル３１に対応するモータ用
の永久磁石はステータ１８及びラジアル方向自動調心コ
イルに対応して設けた永久磁石１９を兼用している一
方、図６のスピンドル２の中心孔を除いた構成である。
従って、このスピンドルモータＳＭ3 は、図６に示した
軸受装置の機能、作用、効果の全てを備えている。図１
０において図６と対比して同一の構成要素に同一の符号
を付してある。FIG. 10 shows a third embodiment of the spindle motor according to the present invention. This spindle motor SM
3 , a motor coil 31 for exciting the spindle 2 to rotate is added to a slot of the stator 18 of the bearing device shown in FIG. 6, and a permanent magnet for a motor corresponding to the motor coil 31 is provided in the stator 18 and the radial direction. While the permanent magnet 19 provided corresponding to the self-aligning coil is also used, the spindle 2 shown in FIG.
Therefore, the spindle motor SM 3 has the function of a bearing apparatus shown in FIG. 6, the action, all the effects. FIG.
At 0, the same components as those in FIG. 6 are denoted by the same reference numerals.
【００１５】図１１は本願発明のスピンドルモータの第
四の実施の形態を示す。このスピンドルモータＳＭ
4 は、図７に示した軸受装置のステータ２５のスロット
に、スピンドル２を回転するように励磁するモータコイ
ル３２を付加し、モータコイル３２に対応するモータ用
の永久磁石はステータ２５及び心出しコイルに対応して
設けた永久磁石２６を兼用している一方、図７のスピン
ドル２の中心孔を除いた構成である。従って、このスピ
ンドルモータＳＭ4 は、図６に示した軸受装置の機能、
作用、効果の全てを備えている。図１１において図７と
対比して同一の構成要素に同一の符号を付してある。FIG. 11 shows a fourth embodiment of the spindle motor according to the present invention. This spindle motor SM
4 , a motor coil 32 for exciting the spindle 2 so as to rotate the spindle 2 is added to a slot of the stator 25 of the bearing device shown in FIG. 7, and a permanent magnet for the motor corresponding to the motor coil 32 includes the stator 25 and the centering. The configuration is such that the permanent magnet 26 provided corresponding to the coil is also used, while the center hole of the spindle 2 in FIG. 7 is removed. Therefore, the spindle motor SM 4 has the functions of the bearing device shown in FIG.
It has all the functions and effects. 11, the same components as those in FIG. 7 are denoted by the same reference numerals.
【００１６】図１２は、スピンドルモータを採用した回
転体装置を示す。この回転体装置は、図８のスピンドル
モータＳＭ1 のスピンドル２にポリゴンミラー３３が被
着され、ミラーケース３４の底面板にスピンドルモータ
ＳＭ1 のスピンドル支持部材１が固定されている構成で
ある。図１３は、図８ないし図１１のいずれかのスピン
ドルモータを採用した回転体装置を示す。この回転体装
置は、ディスク装置であり、スピンドルモータＳＭ1〜
ＳＭ4 のスピンドルに、磁気ディスクまたは光ディスク
等の被回転円盤３５を複数枚被着してなる。図１２及び
図１３に示す回転体装置は、本願発明の軸受装置の機能
・作用・効果を有する。FIG. 12 shows a rotating device employing a spindle motor. The rotator apparatus, the spindle motor SM 1 of the polygon mirror 33 to the spindle 2 in Fig. 8 is deposited, the spindle support member 1 of the spindle motor SM 1 to the bottom plate of the mirror case 34 is configured to be fixed. FIG. 13 shows a rotator device employing any one of the spindle motors shown in FIGS. This rotator device is a disk device and includes spindle motors SM 1 to SM 1 .
The spindle SM 4, comprising a driven rotating disk 35 such as a magnetic disk or optical disk and a plurality deposited. The rotating body device shown in FIGS. 12 and 13 has the function, operation, and effect of the bearing device of the present invention.
【００１７】[0017]
【発明の効果】以上説明してきたように、本願発明の軸
受装置及びスピンドルモータ及び回転体装置は、いずれ
も、軸受寿命が飛躍的に向上するとともに起動時負荷ト
ルクが著しく小さく回転振れが少ない高性能な軸受機能
を有する。As described above, the bearing device, the spindle motor, and the rotating body device of the present invention have significantly improved bearing life, significantly reduced starting load torque, and reduced rotational runout. Has a high-performance bearing function.
【図１】本願発明の軸受装置の第一の実施の形態を示す
中央縦断面図。FIG. 1 is a central longitudinal sectional view showing a first embodiment of a bearing device of the present invention.
【図２】本願発明の軸受装置の第二の実施の形態を示す
中央縦断面図。FIG. 2 is a central longitudinal sectional view showing a second embodiment of the bearing device of the present invention.
【図３】本願発明の軸受装置の第三の実施の形態を示す
中央縦断面図。FIG. 3 is a central longitudinal sectional view showing a third embodiment of the bearing device of the present invention.
【図４】本願発明の軸受装置の第四の実施の形態を示す
中央縦断面図。FIG. 4 is a central longitudinal sectional view showing a fourth embodiment of the bearing device of the present invention.
【図５】本願発明の軸受装置の第五の実施の形態を示す
中央縦断面図。FIG. 5 is a central longitudinal sectional view showing a fifth embodiment of the bearing device of the present invention.
【図６】本願発明の軸受装置の第六の実施の形態を示す
もので、（ａ）は中央縦断面図、（ｂ）はVIb − VIb断
面図。6A and 6B show a sixth embodiment of the bearing device of the present invention, wherein FIG. 6A is a longitudinal sectional view at the center, and FIG. 6B is a sectional view taken along VIb-VIb.
【図７】本願発明の軸受装置の第七の実施の形態を示す
もので、（ａ）は中央縦断面図、（ｂ）はVIIb−VIIb断
面図。FIGS. 7A and 7B show a seventh embodiment of the bearing device of the present invention, wherein FIG. 7A is a longitudinal sectional view at the center, and FIG.
【図８】本願発明のスピンドルモータの第一の実施の形
態を示す中央縦断面図。FIG. 8 is a central longitudinal sectional view showing the first embodiment of the spindle motor of the present invention.
【図９】本願発明のスピンドルモータの第二の実施の形
態を示す中央縦断面図。FIG. 9 is a central longitudinal sectional view showing a second embodiment of the spindle motor of the present invention.
【図１０】本願発明のスピンドルモータの第三の実施の
形態を示す中央縦断面図。FIG. 10 is a central longitudinal sectional view showing a third embodiment of the spindle motor of the present invention.
【図１１】本願発明のスピンドルモータの第四の実施の
形態を示す中央縦断面図。FIG. 11 is a central longitudinal sectional view showing a fourth embodiment of the spindle motor of the present invention.
【図１２】本願発明の回転体装置の第一の実施の形態を
示す中央縦断面図。FIG. 12 is a central longitudinal sectional view showing a first embodiment of the rotating body device of the present invention.
【図１３】本願発明の回転体装置の第二の実施の形態を
示す斜視図。FIG. 13 is a perspective view showing a second embodiment of the rotating body device of the present invention.
１ スピンドル支持部材 ２ スピンドル Ａ 気体ラジアル軸受 Ｂ 気体スラスト軸受 Ｃ 気体動圧軸受 Ｄ スラスト磁気軸受 Ｅ ラジアル磁気軸受 ３ 軸受固定部材 ４ 軸受可動部材 ９ 軸受固定部材 １０ 軸受固定部材 １１ 軸受可動部材 １２ 軸受可動部材 １５ 軸受可動部材 １６ 軸受固定部材 １７ 軸受固定部材 ２２ 軸受可動部材 ２３ 軸受固定部材 ２４ 軸受固定部材 ＳＭ1 ，ＳＭ2 ，ＳＭ3 ，ＳＭ4 スピンドルモータ ３３ ポリゴンミラー ３５ 被回転円盤DESCRIPTION OF SYMBOLS 1 Spindle support member 2 Spindle A Gas radial bearing B Gas thrust bearing C Gas dynamic pressure bearing D Thrust magnetic bearing E Radial magnetic bearing 3 Bearing fixing member 4 Bearing movable member 9 Bearing fixing member 10 Bearing fixing member 11 Bearing movable member 12 Bearing movable Member 15 Bearing moving member 16 Bearing fixing member 17 Bearing fixing member 22 Bearing moving member 23 Bearing fixing member 24 Bearing fixing member SM 1 , SM 2 , SM 3 , SM 4 Spindle motor 33 Polygon mirror 35 Rotating disk
Claims (8)
スト磁気軸受を介してスピンドル支持部材に支持されて
いることを特徴とする軸受装置。1. A bearing device wherein a spindle is supported by a spindle support member via a gas radial bearing and a thrust magnetic bearing.
磁気軸受を介してスピンドル支持部材に支持されている
ことを特徴とする軸受装置。2. A bearing device wherein a spindle is supported by a spindle support member via a gas dynamic pressure bearing and a thrust magnetic bearing.
磁気軸受を介してスピンドル支持部材に支持され、スピ
ンドルのスラスト磁気軸受による浮上時に、軸受可動部
材が軸受固定部材に密着してスピンドルの浮上ストロー
クを制限するようになっていることを特徴とする軸受装
置。3. A spindle is supported by a spindle support member via a gas dynamic pressure bearing and a thrust magnetic bearing. When the spindle is floated by the thrust magnetic bearing, the bearing movable member is in close contact with the bearing fixing member to reduce the spindle lifting stroke. A bearing device characterized by being restricted.
磁気軸受を介してスピンドル支持部材に支持され、スピ
ンドルのスラスト磁気軸受による浮上時に、軸受可動部
材が軸受固定部材に密着してスピンドルの浮上ストロー
クを制限するようになっていて、スピンドルの浮上スト
ロークを検出するギャップセンサの信号に基づいて軸受
可動部材と軸受固定部材の間のギャップがスラスト動圧
を発生し得る微小寸法となるように構成されていること
を特徴とする軸受装置。4. A spindle is supported by a spindle support member via a gas dynamic pressure bearing and a thrust magnetic bearing. When the spindle floats by the thrust magnetic bearing, the bearing movable member is in close contact with the bearing fixing member to reduce the spindle lifting stroke. The gap between the bearing movable member and the bearing fixing member is configured to have a small dimension capable of generating a thrust dynamic pressure based on a signal from a gap sensor that detects a floating stroke of the spindle. A bearing device.
アル磁気軸受を介してスピンドル支持部材に支持されか
つ気体スラスト軸受の軸受可動部材または軸受固定部材
のいずれか一方が一つ、他方が二つ有し、二つ有する方
が一つ有する方を挟んでいることを特徴とする軸受装
置。5. A spindle is supported by a spindle support member via a gas thrust bearing and a radial magnetic bearing, and one of a movable bearing member and a fixed bearing member of the gas thrust bearing has one, and the other has two. A bearing device, wherein two bearing members sandwich one bearing member.
アル磁気軸受を介してスピンドル支持部材に支持されか
つ気体スラスト軸受の軸受可動部材または軸受固定部材
のいずれか一方が一つ、他方が二つ有し、二つ有する方
が一つ有する方を挟んでいて、スピンドルの偏心を検出
するギャップセンサの信号に基づいてラジアル磁気軸受
が自動調心を行うように構成されていることを特徴とす
る軸受装置。6. A spindle is supported on a spindle support member via a gas thrust bearing and a radial magnetic bearing, and one of a movable member and a fixed member of the gas thrust bearing has one and the other has two. A bearing device, characterized in that the radial magnetic bearing is configured to perform self-alignment based on a signal from a gap sensor that detects eccentricity of a spindle, with the one having the two sandwiching the one having the two.
れか一項に記載の軸受装置のラジアル磁気軸受のコイル
にモータコイルが重ねられ、同ラジアル磁気軸受の永久
磁石がモータコイルの永久磁石として兼用されているこ
とを特徴とするスピンドルモータ。7. A motor coil is superimposed on a coil of the radial magnetic bearing of the bearing device according to any one of claims 1 to 6, and a permanent magnet of the radial magnetic bearing is used for the motor coil. A spindle motor, which is also used as a permanent magnet.
ンドルにポリゴンミラー、磁気ディスクあるいは光ディ
スク等の被回転体が取り付けられていることを特徴とす
る回転体装置。8. A rotating device according to claim 7, wherein a rotating object such as a polygon mirror, a magnetic disk, or an optical disk is attached to a spindle of the spindle motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9264514A JPH11101232A (en) | 1997-09-29 | 1997-09-29 | Bearing device, spindle motor and rotary body device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9264514A JPH11101232A (en) | 1997-09-29 | 1997-09-29 | Bearing device, spindle motor and rotary body device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11101232A true JPH11101232A (en) | 1999-04-13 |
Family
ID=17404311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9264514A Pending JPH11101232A (en) | 1997-09-29 | 1997-09-29 | Bearing device, spindle motor and rotary body device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11101232A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109307008A (en) * | 2017-07-28 | 2019-02-05 | 松下知识产权经营株式会社 | Bearing structure |
| CN109488689A (en) * | 2018-11-26 | 2019-03-19 | 杭州电子科技大学 | Air-floating main shaft carries compensation device and method |
| CN114688156A (en) * | 2020-12-25 | 2022-07-01 | 珠海格力电器股份有限公司 | Hybrid bearing device, control method and centrifugal compressor |
-
1997
- 1997-09-29 JP JP9264514A patent/JPH11101232A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109307008A (en) * | 2017-07-28 | 2019-02-05 | 松下知识产权经营株式会社 | Bearing structure |
| CN109488689A (en) * | 2018-11-26 | 2019-03-19 | 杭州电子科技大学 | Air-floating main shaft carries compensation device and method |
| CN109488689B (en) * | 2018-11-26 | 2024-02-02 | 杭州电子科技大学 | Air flotation spindle load compensation device and method |
| CN114688156A (en) * | 2020-12-25 | 2022-07-01 | 珠海格力电器股份有限公司 | Hybrid bearing device, control method and centrifugal compressor |
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