JPH11106918A5 - - Google Patents

Info

Publication number
JPH11106918A5
JPH11106918A5 JP1997284642A JP28464297A JPH11106918A5 JP H11106918 A5 JPH11106918 A5 JP H11106918A5 JP 1997284642 A JP1997284642 A JP 1997284642A JP 28464297 A JP28464297 A JP 28464297A JP H11106918 A5 JPH11106918 A5 JP H11106918A5
Authority
JP
Japan
Prior art keywords
thin film
film forming
forming jig
jig
incorporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997284642A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11106918A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28464297A priority Critical patent/JPH11106918A/ja
Priority claimed from JP28464297A external-priority patent/JPH11106918A/ja
Publication of JPH11106918A publication Critical patent/JPH11106918A/ja
Publication of JPH11106918A5 publication Critical patent/JPH11106918A5/ja
Pending legal-status Critical Current

Links

JP28464297A 1997-10-01 1997-10-01 薄膜形成用治具 Pending JPH11106918A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28464297A JPH11106918A (ja) 1997-10-01 1997-10-01 薄膜形成用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28464297A JPH11106918A (ja) 1997-10-01 1997-10-01 薄膜形成用治具

Publications (2)

Publication Number Publication Date
JPH11106918A JPH11106918A (ja) 1999-04-20
JPH11106918A5 true JPH11106918A5 (2) 2005-06-09

Family

ID=17681117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28464297A Pending JPH11106918A (ja) 1997-10-01 1997-10-01 薄膜形成用治具

Country Status (1)

Country Link
JP (1) JPH11106918A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8097089B2 (en) * 2007-12-19 2012-01-17 Quantum Global Technologies LLC Methods for cleaning process kits and chambers, and for ruthenium recovery

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