JPH11116280A - Transparent base having transparent low-resistance coating - Google Patents

Transparent base having transparent low-resistance coating

Info

Publication number
JPH11116280A
JPH11116280A JP10215429A JP21542998A JPH11116280A JP H11116280 A JPH11116280 A JP H11116280A JP 10215429 A JP10215429 A JP 10215429A JP 21542998 A JP21542998 A JP 21542998A JP H11116280 A JPH11116280 A JP H11116280A
Authority
JP
Japan
Prior art keywords
layer
oxide layer
transparent
thickness
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10215429A
Other languages
Japanese (ja)
Inventor
Johannes Dr Stollenwerk
シュトレンヴェルク ヨハネス
Karl-Heinz Dr Kretschmer
クレチュマー カール−ハインツ
Berthold Ocker
オッカー ベルトルト
Bernd Heinz
ハインツ ベルント
Marcus Bender
ベンダー マルクス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Balzers und Leybold Deutschland Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG filed Critical Leybold AG
Publication of JPH11116280A publication Critical patent/JPH11116280A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639Multilayers containing at least two functional metal layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948Layers comprising indium tin oxide [ITO]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a transparent base having a coating of the possible constant transmittance and to avoid the impression of red rays by providing the surface of a second oxide layer with another thin transparent oxide layer, further providing the surface thereof with an oxide layer as a coating layer. SOLUTION: The oxide layer 2 of a thickness 30 to 70 nm consisting of ITO is first formed by sputtering on a glassy base 1. A thin metallic layer 3 of a thickness 6 to 12 nm consisting of silver contg. slight copper as an alloy component extends thereon. Further, the surface thereof is provided with the oxide layer 4 of a thickness 30 to 70 nm consisting of ITO. The surface of the oxide layer is provided with another metallic layer 5 and the oxide layer 6 as the coating layer. The thickness is equal to that of the oxide layer 2 and the metallic layer 3. The transmittance of the glassy base 1 is slightly lower than that of the existing bases at a wavelength up to 600 nm according to this constitution but maintains the value exceeding 80% thereof at a wavelength up to 700 nm. The transmittance does not decrease within the range of the red rays.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、支持体上に直接に
施こされた酸化物層、この酸化物層上の薄手の透明な金
属層およびこの金属層上の第2の酸化物層を有する透明
の低抵抗被覆を有する透明支持体に関する。
The invention relates to an oxide layer applied directly on a support, a thin transparent metal layer on this oxide layer and a second oxide layer on this metal layer. And a transparent support having a transparent low-resistance coating.

【0002】[0002]

【従来の技術】このような透明支持体は、例えばドイツ
連邦共和国特許出願公開第4239355号明細書に記
載されており、かつ大面積のディスプレー(モニター)
に使用することができる。この支持体は、400〜60
0nmの波長範囲に亘って80%を超える透過率を有
し、このことは、モニターの使用にとって好ましいこと
である。しかし、波長がよりいっそう大きい場合には、
透過率は、明らかに80%以下に減少し、それによって
反射の結果として赤色の色印象が生じ、この色印象は、
種々の使用の場合、殊に大面積のディスプレーの場合に
は、差し障りがあるものとして感じられる。被覆は、僅
かな電気抵抗を有しなければならないので、透過率の減
少を阻止するために、金属層の層厚の減少の可能性があ
ってはならない。
2. Description of the Related Art Such transparent supports are described, for example, in DE-A-4 239 355 and have a large-area display (monitor).
Can be used for This support is 400-60
It has a transmission of more than 80% over the wavelength range of 0 nm, which is favorable for monitor use. But if the wavelength is even larger,
The transmission is clearly reduced to less than 80%, whereby a red color impression results as a result of the reflection,
In various applications, particularly in the case of large-area displays, they are perceived as disturbing. Since the coating must have a small electrical resistance, there must be no potential for a reduction in the thickness of the metal layer in order to prevent a reduction in the transmission.

【0003】[0003]

【発明が解決しようとする課題】本発明は、400〜7
00nmの波長範囲内でできるだけ一定の高い透過率を
有するような被覆を有し、したがって赤色光線の印象を
回避することができる支持体を開発するという問題に基
づくものである。
SUMMARY OF THE INVENTION
It is based on the problem of developing a support which has a coating which has as high a transmission as possible in the wavelength range of 00 nm and which can thus avoid the impression of red light.

【0004】[0004]

【課題を解決するための手段】この問題は、本発明によ
れば、第2の酸化物層上にもう1つの薄手の透明な酸化
物層が設けられており、この酸化物層上に被覆層として
さらに酸化物層が設けられていることによって解決され
る。
According to the present invention, there is provided, in accordance with the present invention, another thin, transparent oxide layer provided on a second oxide layer, and having a coating thereon. The problem is solved by providing an oxide layer as a layer.

【0005】[0005]

【発明の実施の形態】意外なことに、第2の金属層およ
び被覆層によって赤色光線の範囲内で透過率の減少を回
避することができ、この場合、透過率は、残りの目視可
能なスペクトル範囲内で本質的に減少されることがな
い。これら2つの金属層は、それぞれドイツ連邦共和国
特許出願公開第4239355号明細書に記載の金属層
に等しい層厚を有することができ、したがって全体的に
厚手の金属被覆のために電気抵抗は回避され、かつ80
%を超える透過率の際に約5.5Ω/□の層系の電気抵
抗を達成することができ、かつ70%の透過率の際に
2.5Ω/□のみの電気抵抗を達成することができる。
本発明による支持体の製造は、僅かな付加的な費用でス
パッター装置中で行なうことができる。それというの
も、このスパッター装置中には、さらに第1の3つの層
を調節するために金属酸化物を有するターゲットおよび
純粋な金属を有するターゲットが存在していなければな
らないからである。
Surprisingly, it is possible, by means of a second metal layer and a coating layer, to avoid a decrease in transmission in the range of red light, in which case the transmission is reduced by the remaining visible light. There is essentially no reduction in the spectral range. These two metal layers can each have a layer thickness equal to the metal layers described in DE-A-4 239 355, so that an electrical resistance is avoided due to the overall thick metal coating. And 80
% Of the layer system can be achieved at a transmittance of more than about 5.5%, and only 2.5Ω / □ can be achieved at a transmittance of 70%. it can.
The production of the support according to the invention can be carried out in a sputter apparatus with little additional expense. This is because a target having a metal oxide and a target having a pure metal must be present in the sputtering apparatus in order to further adjust the first three layers.

【0006】本発明のもう1つの実施態様によれば、酸
化物層がITO層(インジウム−錫−酸化物)である場
合には、支持体は、その被覆に基づいて特に良好な光学
的性質を有する。
According to another embodiment of the invention, when the oxide layer is an ITO layer (indium-tin-oxide), the support has particularly good optical properties based on its coating. Having.

【0007】純粋な銀は、白色の外観のために光学的理
由から金属層に最も好適である。しかし、金属層の十分
な硬度を達成するために、金属層が僅かな合金成分の銅
を有する銀からなることは、好ましい。
Pure silver is most suitable for metal layers for optical reasons due to its white appearance. However, in order to achieve a sufficient hardness of the metal layer, it is preferred that the metal layer be made of silver with a low alloying component of copper.

【0008】本発明による支持体のモニターとしての使
用のために、酸化物層が30〜70nmの層厚を有しか
つ金属層が6〜12nmの層厚を有する場合には、層厚
は、最適に定められている。
For use as a monitor of a support according to the invention, if the oxide layer has a layer thickness of 30 to 70 nm and the metal layer has a layer thickness of 6 to 12 nm, the layer thickness is: It is optimally determined.

【0009】本発明は、種々の実施態様を可能にする。
次に、本発明の基本原理をさらに明らかにするために、
図面を参照することにする。
The present invention allows for various embodiments.
Next, in order to further clarify the basic principle of the present invention,
Reference is made to the drawings.

【0010】[0010]

【実施例】図1は、ガラス状支持体1の部分領域を示
し、この部分領域上には、最初にインジウム−錫−酸化
物(ITO)からなる厚さ30〜70nmの酸化物層2
がスパッタリングによって施こされていた。その上に
は、僅かな銅成分を合金成分として有する、銀からなる
厚さ6〜12nmの薄手の金属層3が延在している。更
に、インジウム−錫−酸化物からなる厚さ30〜70n
mの酸化物層4が続いており、もう1つの金属層5およ
び被覆層としてさらに酸化物層6が引き続いている。2
つの外側層5および6は、等しく得られ、かつ酸化物層
2および金属層3と等しい厚さを有している。
1 shows a partial region of a glassy support 1 on which an oxide layer 2 of indium-tin-oxide (ITO) having a thickness of 30 to 70 nm is initially formed.
Was applied by sputtering. A thin metal layer 3 made of silver and having a thickness of 6 to 12 nm and having a slight copper component as an alloy component extends thereon. Further, a thickness of 30 to 70 n made of indium-tin-oxide
m is followed by an oxide layer 4, followed by another metal layer 5 and a further oxide layer 6 as a covering layer. 2
The two outer layers 5 and 6 are obtained equally and have the same thickness as the oxide layer 2 and the metal layer 3.

【0011】図2には、2つのガラス状の被覆された支
持体に関連して、光線の波長に関連する透過率が記載さ
れている。点線で記載された線により、ITO、金属お
よびITOからなる層系を有する公知の支持体について
透過率が記載されている。この透過率は、ほぼ600n
mを上廻る波長で80%を超えており、さらに700n
mの波長で明らかに65%に減少している。この減少に
より、このような支持体を有するモニターの場合には、
赤色光線の印象が生じる。
FIG. 2 describes the transmission as a function of the wavelength of the light in relation to two glassy coated supports. The dotted line describes the transmittance for a known support having a layer system consisting of ITO, metal and ITO. This transmittance is approximately 600 n
over 80% at wavelengths above m and 700n
It clearly decreases to 65% at the wavelength of m. Due to this reduction, in the case of monitors with such supports,
A red light impression results.

【0012】図2には、本発明による被膜を有するガラ
ス状支持体の透過率が実線で示されている。この透過率
は、600nmまでの波長で公知技術水準による支持体
の場合よりも極く僅かに少ないが、しかし、700nm
までの波長で80%を超えた値に留まり、ひいては赤色
光線の範囲内で減少しない。
FIG. 2 shows by solid lines the transmittance of a glassy support having a coating according to the invention. This transmission is only slightly less than for supports according to the prior art at wavelengths up to 600 nm, but 700 nm.
It remains above 80% at wavelengths up to and thus does not decrease within the red light range.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による被膜を有する支持体を示す略示断
面図。
FIG. 1 is a schematic sectional view showing a support having a coating according to the present invention.

【図2】波長領域に亘って2つの支持体の透過率が記載
されている線図。
FIG. 2 is a diagram showing the transmittance of two supports over a wavelength range.

【符号の説明】[Explanation of symbols]

1 ガラス状支持体、 2 酸化物層、 3 薄手の酸
化物層、 4 酸化物層、 5 金属層、 6 酸化物
Reference Signs List 1 glassy support, 2 oxide layer, 3 thin oxide layer, 4 oxide layer, 5 metal layer, 6 oxide layer

───────────────────────────────────────────────────── フロントページの続き (72)発明者 ヨハネス シュトレンヴェルク ドイツ連邦共和国 ゲルンハウゼン ヴィ ルヘルム−シェフアー−シュトラーセ 4 (72)発明者 カール−ハインツ クレチュマー ドイツ連邦共和国 ロ−トガウ コブレン ツァ− ヴェーク 3 (72)発明者 ベルトルト オッカー ドイツ連邦共和国 ハーナウ カスターニ エンアレー 67 (72)発明者 ベルント ハインツ ドイツ連邦共和国 アーヘン ブライベル クシュトラーセ 168 (72)発明者 マルクス ベンダー ドイツ連邦共和国 ダルムシュタット ヴ ィルヘルム−グレッシング−シュトラーセ 20 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Johannes Strenwerk, Germany Gernhausen-Wilhelm-Schäfer-Strasse 4 (72) Inventor Karl-Heinz Kretschmer, Germany Rot-gau Koblenz-Werk 3 (72) Inventor Berthold Ocker Hanau-Kaustani En-Allee 67 (72) Inventor Bernd Heinz Aachen-Breibel Kustlersee 168 (72) Inventor Marx Bender Darmstadt Wilhelm-Glessing-Strasse 20 Germany

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 支持体上に直接に施こされた酸化物層、
この酸化物層上の薄手の透明な金属層およびこの金属層
上の第2の酸化物層を有する透明の低抵抗被覆を有する
透明支持体において、第2の酸化物層(4)上にもう1
つの薄手の透明な酸化物層(5)が設けられており、こ
の酸化物層上に被覆層としてさらに酸化物層(6)が設
けられていることを特徴とする、透明の低抵抗被覆を有
する透明支持体。
An oxide layer applied directly on a support,
In a transparent support having a thin transparent metal layer on this oxide layer and a transparent low-resistance coating with a second oxide layer on this metal layer, a second layer is formed on the second oxide layer (4). 1
A transparent low-resistance coating, characterized in that one thin transparent oxide layer (5) is provided, on which another oxide layer (6) is provided as a coating layer. Having a transparent support.
【請求項2】 酸化物層(2,4,6)がITO層(イ
ンジウム−錫−酸化物)である、請求項1記載の透明支
持体。
2. The transparent support according to claim 1, wherein the oxide layer (2, 4, 6) is an ITO layer (indium-tin-oxide).
【請求項3】 金属層(3,5)が僅かな合金成分の銅
を有する銀からなる、請求項2記載の透明支持体。
3. The transparent support according to claim 2, wherein the metal layer (3, 5) is made of silver with a slight alloying component of copper.
【請求項4】 酸化物層(2,4,6)が30〜70n
mの層厚を有し、かつ金属層(3,5)が6〜12nm
の層厚を有する、請求項1から3までのいずれか1項に
記載の透明支持体。
4. The oxide layer (2, 4, 6) has a thickness of 30 to 70 n.
m, and the metal layer (3, 5) has a thickness of 6 to 12 nm.
The transparent support according to any one of claims 1 to 3, having a layer thickness of:
JP10215429A 1997-07-31 1998-07-30 Transparent base having transparent low-resistance coating Pending JPH11116280A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19733053A DE19733053A1 (en) 1997-07-31 1997-07-31 Oxide and metal coated transparent substrate useful for monitor
DE19733053.3 1997-07-31

Publications (1)

Publication Number Publication Date
JPH11116280A true JPH11116280A (en) 1999-04-27

Family

ID=7837529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10215429A Pending JPH11116280A (en) 1997-07-31 1998-07-30 Transparent base having transparent low-resistance coating

Country Status (3)

Country Link
JP (1) JPH11116280A (en)
KR (1) KR19990014165A (en)
DE (1) DE19733053A1 (en)

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