JPH11124689A5 - - Google Patents

Info

Publication number
JPH11124689A5
JPH11124689A5 JP1997285864A JP28586497A JPH11124689A5 JP H11124689 A5 JPH11124689 A5 JP H11124689A5 JP 1997285864 A JP1997285864 A JP 1997285864A JP 28586497 A JP28586497 A JP 28586497A JP H11124689 A5 JPH11124689 A5 JP H11124689A5
Authority
JP
Japan
Prior art keywords
low
emissivity
manufacturing
oxide
laminate according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997285864A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11124689A (ja
JP4066101B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28586497A priority Critical patent/JP4066101B2/ja
Priority claimed from JP28586497A external-priority patent/JP4066101B2/ja
Publication of JPH11124689A publication Critical patent/JPH11124689A/ja
Publication of JPH11124689A5 publication Critical patent/JPH11124689A5/ja
Application granted granted Critical
Publication of JP4066101B2 publication Critical patent/JP4066101B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP28586497A 1997-10-17 1997-10-17 低放射率積層体の製造方法 Expired - Fee Related JP4066101B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28586497A JP4066101B2 (ja) 1997-10-17 1997-10-17 低放射率積層体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28586497A JP4066101B2 (ja) 1997-10-17 1997-10-17 低放射率積層体の製造方法

Publications (3)

Publication Number Publication Date
JPH11124689A JPH11124689A (ja) 1999-05-11
JPH11124689A5 true JPH11124689A5 (de) 2004-08-19
JP4066101B2 JP4066101B2 (ja) 2008-03-26

Family

ID=17697037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28586497A Expired - Fee Related JP4066101B2 (ja) 1997-10-17 1997-10-17 低放射率積層体の製造方法

Country Status (1)

Country Link
JP (1) JP4066101B2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100667637B1 (ko) 1998-12-28 2007-01-12 아사히 가라스 가부시키가이샤 적층체 및 그의 제조 방법
EP2352042B1 (de) 2010-01-29 2017-05-17 Dexerials Corporation Optisches Element und Verfahren zu dessen Herstellung
JP6282142B2 (ja) 2014-03-03 2018-02-21 日東電工株式会社 赤外線反射基板およびその製造方法
JP7436409B2 (ja) * 2021-02-26 2024-02-21 Ｊｘ金属株式会社 酸化物スパッタリングターゲット及びその製造方法並びに酸化物薄膜

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