JPH1114692A - Ion migration measuring equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform an inspection reliably through a small and simple arrangement by connecting an object, i.e., a sample having electrodes, with a series protective resistor and connecting a voltage measuring apparatus with the series protective resistor. SOLUTION: The ion migration measuring equipment 11 measures a sample 12 having electrodes formed on the surface and backside of an insulating substrate. The sample 12 is connected in series with a protective resistor 18 which is connected in parallel with a voltage measuring apparatus 20. Ion migration takes place between the electrodes of the sample 12, i.e., ions migrate from one electrode to the other electrode, and it can be measured under a state where the electrodes are short-circuited. Since the sample 12 is connected in series with the protective resistor 18, the ion migration does not disappear due to heat generated through short circuit and generation of the ion migration can be detected by measuring the voltage across the protective resistor 18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an ion migration measuring apparatus for detecting the occurrence of ion migration occurring between a circuit pattern formed on a substrate and electrodes.

[0002]

2. Description of the Related Art In recent years, due to miniaturization of electronic devices, patterns on a circuit board and the distance between electrodes have become extremely small. In addition, dew condensation has occurred due to diversification of the use environment of electronic devices. This causes a problem of ion migration. Conventionally, as shown in FIGS. 3 and 4, the ion migration occurrence test is performed by connecting the electrodes 3 and 4 of the sample 2 to be measured to the power source 6 and connecting the insulation resistance measuring device 8 in parallel with each sample 2. Then, the state of the ion migration 10 was inspected by measuring the insulation resistance value R between the electrodes 3 and 4.

[0003]

In the case of the above-mentioned prior art, the insulation resistance R is measured, so that it is easily affected by humidity, temperature, and wind in the measurement environment, and the measured value of the insulation resistance is unstable due to these noises. It was easy to be. In addition, the measurement cost is high because an insulation meter, a scanner for the insulation meter, shield wiring, and the like must be used for a plurality of measurements.

The present invention has been made in view of the above-mentioned conventional problems, and has as its object to provide an ion migration measuring apparatus which is small in size, has a simple configuration, and is capable of reliably performing a migration inspection.

[0005]

SUMMARY OF THE INVENTION The present invention relates to a measuring apparatus for inspecting the occurrence of ion migration, in which a protective resistor is connected in series to a sample on which an electrode to be measured is formed, and a voltage is applied to the protective resistor. This is an ion migration measurement device connected to a measurement device. Further, a plurality of sets of the sample, the protective resistor, and the voltage measuring device are provided in parallel.

According to the ion migration measuring apparatus of the present invention, even when ion migration occurs between the electrodes of the sample and the electrodes are short-circuited, the short-circuited portion due to the ion migration does not disappear due to heat due to the protective resistance. The ion migration can be inspected by measuring the voltage.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. FIGS. 1 and 2 show an embodiment of the present invention. An ion migration measuring apparatus 11 of this embodiment has an
The sample 12 on which the electrodes 13 and 14 are formed is measured.
The sample 12 has a protective resistor 18 connected in series, and a voltage measuring device 20 is connected to the protective resistor 18 in parallel. A plurality of sets of the sample 12, the protection resistor 18, and the voltage measuring device 20 are connected in parallel, and the voltage of the voltage measuring device 20 is detected by a scanner (not shown).

This ion migration measuring device 11
Is the ion migration 1 between the electrodes of the sample 12.
0 is generated, the ion migration 10 extends from the electrode 13 to the electrode 14, and the measurement can be performed in a state where the electrodes 13 and 14 are short-circuited. At the time of measurement, since the protective resistor 18 is connected in series to the sample 2, the electrodes 13, 1
The ion migration 10 between the four does not disappear due to heat generation due to a short circuit, and the occurrence of ion migration can be detected by measuring the voltage of the protection resistor 18.

The ion migration measurement device 11 of this embodiment has a simple measurement device, can be manufactured at low cost, and can be easily measured.
In addition, a plurality of measurements can be arbitrarily performed using a scanner, and the measurement can be easily automated.

The ion migration measuring apparatus of the present invention can measure a plurality of samples arbitrarily. To automate the measurement, a voltage measuring apparatus is connected to a personal computer, and a plurality of samples are automatically measured. The measurement may be enabled. In addition, the ion migration measurement device of the present invention cannot be detected unless ion migration causes a short circuit between the electrodes, and the voltage of the voltage measurement device is automatically and periodically inspected by a personal computer, so that accurate measurement can be easily performed. Is possible.

[0011]

According to the ion migration measuring apparatus of the present invention, the ion migration can be accurately inspected with a simple apparatus, and the cost is low.

[Brief description of the drawings]

FIG. 1 is a circuit diagram of a first embodiment of an ion migration measuring device of the present invention.

FIG. 2 is a schematic diagram of an ion migration measurement device of the present invention.

FIG. 3 is a circuit diagram of a conventional ion migration measurement device.

FIG. 4 is a schematic view showing a conventional ion migration measurement.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Ion migration 11 Ion migration measuring device 12 Sample 13, 14 Electrode 18 Protection resistance 20 Voltage measuring device

Claims (2)

[Claims] 1. A measuring device for inspecting the occurrence of ion migration, wherein a protection resistor is connected in series to a sample on which an electrode to be measured is formed, and a voltage measuring device is connected to the protection resistor. Migration measurement device. 2. The ion migration measurement device according to claim 1, wherein a plurality of sets of the sample, the protection resistance, and the voltage measurement device are provided in parallel.