JPH11166477A5 - - Google Patents

Info

Publication number
JPH11166477A5
JPH11166477A5 JP1997331898A JP33189897A JPH11166477A5 JP H11166477 A5 JPH11166477 A5 JP H11166477A5 JP 1997331898 A JP1997331898 A JP 1997331898A JP 33189897 A JP33189897 A JP 33189897A JP H11166477 A5 JPH11166477 A5 JP H11166477A5
Authority
JP
Japan
Prior art keywords
shield
baffle
pumping
gap
furthermore
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997331898A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11166477A (ja
JP3966370B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP33189897A priority Critical patent/JP3966370B2/ja
Priority claimed from JP33189897A external-priority patent/JP3966370B2/ja
Publication of JPH11166477A publication Critical patent/JPH11166477A/ja
Publication of JPH11166477A5 publication Critical patent/JPH11166477A5/ja
Application granted granted Critical
Publication of JP3966370B2 publication Critical patent/JP3966370B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP33189897A 1997-12-02 1997-12-02 クライオポンプ Expired - Lifetime JP3966370B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33189897A JP3966370B2 (ja) 1997-12-02 1997-12-02 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33189897A JP3966370B2 (ja) 1997-12-02 1997-12-02 クライオポンプ

Publications (3)

Publication Number Publication Date
JPH11166477A JPH11166477A (ja) 1999-06-22
JPH11166477A5 true JPH11166477A5 (fr) 2005-05-19
JP3966370B2 JP3966370B2 (ja) 2007-08-29

Family

ID=18248871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33189897A Expired - Lifetime JP3966370B2 (ja) 1997-12-02 1997-12-02 クライオポンプ

Country Status (1)

Country Link
JP (1) JP3966370B2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001194018A (ja) * 1999-10-19 2001-07-17 Aisin Seiki Co Ltd 極低温冷凍装置
JP5090200B2 (ja) * 2007-08-08 2012-12-05 住友重機械工業株式会社 クライオパネル及びこれを用いたクライオポンプ
JP6053552B2 (ja) * 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ及びクライオポンプ取付構造
JP6348094B2 (ja) 2015-11-11 2018-06-27 アルバック・クライオ株式会社 冷却装置、および、真空処理装置
GB2592375A (en) 2020-02-25 2021-09-01 Edwards Vacuum Llc Flange for a vacuum apparatus
US20240337265A1 (en) * 2023-04-06 2024-10-10 Taiwan Semiconductor Manufacturing Company, Ltd. Cryogenic pump for semiconductor processing

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