JPH11199345A - Method for producing porous laminate - Google Patents
Method for producing porous laminateInfo
- Publication number
- JPH11199345A JPH11199345A JP10007637A JP763798A JPH11199345A JP H11199345 A JPH11199345 A JP H11199345A JP 10007637 A JP10007637 A JP 10007637A JP 763798 A JP763798 A JP 763798A JP H11199345 A JPH11199345 A JP H11199345A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- organic binder
- laminate
- porous
- binder component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laminated Bodies (AREA)
- Ceramic Capacitors (AREA)
Abstract
(57)【要約】
【課題】 多孔質フィルムまたはシートを、加圧及び加
熱による変形を生ぜしめることなく空孔を効率的に除去
し、緻密化された多孔質積層体の製造方法を提供するこ
と。
【解決手段】 無機物質成分及び有機結合材成分からな
り、かつ空孔率が体積の１〜８０％を占める多孔質フィ
ルムまたはシートの複数枚を、金属板に挟んだ状態で、
減圧下、弾性体を介して圧縮しながら、もしくは圧縮後
該有機結合材成分の融点以上に昇温し加熱することを特
徴とする多孔質積層体の製造方法である。PROBLEM TO BE SOLVED: To provide a method for producing a densified porous laminate by efficiently removing pores from a porous film or sheet without causing deformation by pressurization and heating. thing. SOLUTION: A plurality of porous films or sheets comprising an inorganic substance component and an organic binder component and having a porosity of 1 to 80% of the volume are sandwiched between metal plates,
A method for producing a porous laminate, characterized in that the material is heated to a temperature equal to or higher than the melting point of the organic binder component while being compressed, or after compression under reduced pressure, through an elastic body, and then heated.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は多孔質積層体の製造
方法に関し、さらに詳しくは多孔質フィルムまたはシー
トを、加圧及び加熱により変形することなく空孔を効率
的に除去し、緻密化された多孔質積層体の製造方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a porous laminate, and more particularly, to a method for efficiently removing pores from a porous film or sheet without deforming it by pressurizing and heating, and densifying the porous film or sheet. And a method for producing a porous laminate.
【０００２】[0002]
【従来技術】積層セラミックコンデンサー等の厚膜電子
部品の製造は、主としてグリーンシートと呼ばれるセラ
ミックスと有機バインダー成分からなるシートを用いて
行われる。このシートに電極を印刷し、積層して、脱バ
インダー、焼成を行なって厚膜電子部品が製造される
が、脱バインダー、焼成前の段階でグリーンシートの積
層体を加圧して緻密化することは緻密なセラミックスの
焼結体を得る上で重要であり、こうしたグリーンシート
の緻密化方法については「セラミック誘電体工学（学献
社）」、「セラミックスのプロセステクノロジー（学献
社）」等の成書に記載されている。2. Description of the Related Art Thick film electronic components such as multilayer ceramic capacitors are mainly manufactured using a sheet called a green sheet made of ceramics and an organic binder component. Electrodes are printed on this sheet, laminated, debindered, and fired to produce a thick-film electronic component.However, the green sheet laminate is pressed and densified before debinding and firing. Is important in obtaining a dense ceramic sintered body. For the method of densifying such green sheets, refer to “Ceramic Dielectric Engineering (Gakudensha)”, “Ceramic Process Technology (Gakudensha)”, etc. It is described in the compendium.
【０００３】一方、グリーンシートに対しても種々の公
知技術がある。特表平４−５００８３５号公報には薄い
自立性無機未加工圧縮物が開示されており、フィルムの
積層により積層セラミックコンデンサーの製造が可能で
あることが知られている。ところで、該公表公報に記載
されているようなシートのようにその製造において延伸
プロセスを経ているものは、十分な熱緩和がなされてい
ない場合には加熱時に収縮するという問題がある。従っ
て、こうしたグリーンシートあるいはその積層体を脱バ
インダー、焼成する場合そのままでは良好な製造物を得
ることができない。しかも、該シートのように多孔質の
ものに対しては、空孔を除去することも必要である。On the other hand, there are various known techniques for green sheets. Japanese Unexamined Patent Publication (Kokai) No. 4-500835 discloses a thin self-supporting inorganic unprocessed compact, and it is known that a laminated ceramic capacitor can be manufactured by laminating films. By the way, a sheet that has undergone a stretching process in its manufacture, such as a sheet as described in the publication, has a problem that it shrinks when heated unless sufficient thermal relaxation is performed. Therefore, when such a green sheet or a laminate thereof is debindered and fired, a good product cannot be obtained as it is. In addition, it is necessary to remove pores from a porous material such as the sheet.
【０００４】こうしたグリーンシートあるいはその積層
体の緻密化処理においては、グリーンシートの緻密化と
同時に熱緩和が必要であるが、上記成書等に記載されて
いる等方的なプレス方法では加熱時にグリーンシートが
収縮してしまい目的とする成形体を得ることが極めて難
しい。[0004] In the densification treatment of such a green sheet or a laminate thereof, heat relaxation is required at the same time as the densification of the green sheet. The green sheet shrinks, and it is extremely difficult to obtain a desired molded body.
【０００５】[0005]
【発明が解決しようとする課題】本発明の目的は、多孔
質フィルムまたはシートから、加圧及び加熱による変形
を生ぜしめることなく空孔を効率的に除去し、緻密化さ
れた多孔質積層体を製造する方法を提供することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to efficiently remove pores from a porous film or sheet without causing deformation due to pressure and heating, and to obtain a dense porous laminate. It is to provide a method of manufacturing the.
【０００６】[0006]
【課題を解決するための手段】本発明者らは上記の課題
を解決すべく鋭意検討した結果、特定の有機結合材成分
を含有する多孔質フィルムまたはシートを加圧かつ加熱
する際、該フィルムまたはシートを金属板に挟み面方向
を固定した状態でラバープレスすることが有効なことを
見出し本発明に至った。Means for Solving the Problems The inventors of the present invention have made intensive studies to solve the above-mentioned problems, and as a result, when a porous film or sheet containing a specific organic binder component is pressed and heated, the film is heated. Alternatively, the present inventors have found that it is effective to rubber-press the sheet while holding the sheet in a metal plate and fixing the direction of the surface.
【０００７】すなわち本発明は、無機物質成分及び有機
結合材成分からなり、かつ空孔率が体積の１〜８０％を
占める多孔質フィルムまたはシートの複数枚を、金属板
に挟んだ状態で減圧下、弾性体を介して圧縮しながらも
しくは圧縮した後、該有機結合材成分の融点以上に昇温
し加熱することを特徴とする多孔質積層体の製造方法で
ある。That is, according to the present invention, a plurality of porous films or sheets comprising an inorganic substance component and an organic binder component and having a porosity of 1 to 80% of the volume are decompressed while being sandwiched between metal plates. A method for producing a porous laminate, characterized in that a temperature is raised to or above the melting point of the organic binder material while heating or after being compressed via an elastic body.
【０００８】多孔質フィルムまたはシートを構成する無
機物質成分としては金属やセラミックスの粉やフィラー
といった焼結可能な無機物質をあげることができる。金
属としては、金、銀、銅、ニッケル、亜鉛、セラミック
スとしては、チタン、アルミ、バリウム、鉛、ジルコニ
ウム、珪素、イットリウム等からなる酸化物セラミック
スを例示することができる。[0008] Examples of the inorganic substance component constituting the porous film or sheet include inorganic substances that can be sintered, such as powders and fillers of metals and ceramics. Examples of the metal include gold, silver, copper, nickel, and zinc, and examples of the ceramic include oxide ceramics including titanium, aluminum, barium, lead, zirconium, silicon, and yttrium.
【０００９】有機結合材成分としては、ポリオレフィ
ン、アクリル系樹脂、各種セルロース誘導体、ポリエス
テル樹脂、ポリアミド樹脂、ウレタン樹脂等の高分子物
質を挙げることができるが、こうした高分子物質のうち
後述のように、特表平４−５００８３５号公報に記載さ
れているようなポリオレフィンが好ましく適用できる。Examples of the organic binder component include high molecular substances such as polyolefin, acrylic resin, various cellulose derivatives, polyester resin, polyamide resin and urethane resin. Polyolefins described in JP-A-4-500835 can be preferably used.
【００１０】本発明に用いる多孔質フィルムまたはシー
トはいわゆるグリーンシートと呼ばれるもので、空孔率
が体積の１〜８０％を占める。通常は空孔率６０〜７０
％のグリーンシートを好ましく用いることができる。こ
うした空孔は、湿式、あるいは乾式の成形法によりグリ
ーンシートの製造の際に形成される。こうした空孔のあ
るグリーンシートの例としては特表平４−５００８３５
号公報に記載のフィルムを挙げることができる。The porous film or sheet used in the present invention is a so-called green sheet and has a porosity of 1 to 80% of the volume. Normally porosity 60-70
% Green sheets can be preferably used. These holes are formed by a wet or dry molding method during the production of the green sheet. An example of such a green sheet having holes is disclosed in JP-T-Hei 4-500835.
Can be mentioned.
【００１１】この多孔質フィルムまたはシートは無機成
分５０〜９５重量％、有機結合材成分が５〜５０重量％
からなるものが好適である。無機成分の含有量は多いほ
ど好ましいが、有機結合材成分が少なすぎるとシート、
その積層体および成形体の強度が不足して好ましくな
い。より好ましい範囲としては無機成分６０〜９４重量
％、有機結合材成分が６〜４０重量％、より好ましくは
無機成分７０〜９３重量％、有機結合材成分が７〜３０
重量％程度である。The porous film or sheet contains 50 to 95% by weight of an inorganic component and 5 to 50% by weight of an organic binder component.
What consists of is suitable. The higher the content of the inorganic component, the better, but if the organic binder component is too small, the sheet,
The strength of the laminate and the molded body is insufficient, which is not preferable. A more preferred range is 60 to 94% by weight of the inorganic component, 6 to 40% by weight of the organic binder component, more preferably 70 to 93% by weight of the inorganic component, and 7 to 30% by weight of the organic binder component.
% By weight.
【００１２】この多孔質フィルムまたはシートの厚さは
特に制限はないが、１〜１００μｍが好ましい。The thickness of the porous film or sheet is not particularly limited, but is preferably 1 to 100 μm.
【００１３】上記多孔質フィルムまたはシートは上記グ
リーンシートのみからなる物でも良いが、電極パターン
が表面に印刷されたものでもよい。かかる電極パターン
は当業者にとって公知の電極ペーストをグリーンシート
に印刷したものが挙げられる。電極の形成方法として
は、例えばスクリーン印刷、転写法等の公知の方法によ
って形成される。The above-mentioned porous film or sheet may be composed of only the above-mentioned green sheet, or may be one having an electrode pattern printed on its surface. Examples of such an electrode pattern include those obtained by printing an electrode paste known to those skilled in the art on a green sheet. The electrode is formed by a known method such as screen printing or a transfer method.
【００１４】本発明においては、グリーンシートと呼ば
れる上記多孔質フィルムまたはシートを複数、例えば５
層以上積層し、この積層体を金属板に挟んだ状態で加圧
圧縮する。圧縮方法としては弾性体を介して被圧縮体に
圧力を伝達する構造のいわゆる乾式ラバープレス機を用
いた加工方法を挙げることができる。乾式ラバープレス
機は、プレス面の少なくとも一方の側が耐熱性ゴムなど
の弾性体からなっており、プレス面は被プレス体の反対
側の面から液圧加圧する構造となっている。高圧容器内
の形状は積層したグリーンシートの圧縮に適した構造で
あることが好ましい。また、こうした高圧容器内は真空
に脱気できることが好ましい。脱気できない場合には積
層体を真空パックすることが必要である。これ以外の設
備であっても、本発明の要件を満たす設備の場合には本
方法は適用可能である。In the present invention, a plurality of porous films or sheets called green sheets, for example, 5
More than one layer is laminated, and the laminate is pressed and compressed while being sandwiched between metal plates. Examples of the compression method include a processing method using a so-called dry rubber press having a structure in which pressure is transmitted to an object to be compressed via an elastic body. The dry rubber press machine has a structure in which at least one side of the press surface is made of an elastic body such as heat-resistant rubber, and the press surface is hydraulically pressed from the opposite surface of the pressed body. The shape in the high-pressure container is preferably a structure suitable for compressing the laminated green sheets. Further, it is preferable that the inside of such a high-pressure vessel can be evacuated to a vacuum. If degassing is not possible, it is necessary to vacuum pack the laminate. The present method can be applied to equipment other than the above if the equipment satisfies the requirements of the present invention.
【００１５】本発明は、上記多孔質フィルムまたはシー
トを複数枚積層し、この積層体を好ましくは厚さ１〜２
０ｍｍの金属板に挟んだ状態で、好ましくは５０ｍｍＨ
ｇ以下の真空下、弾性体を介し、例えば１０〜５００ｋ
ｇ／ｃｍ2の圧力をかけて圧縮し、該圧縮と同時又は圧
縮後に、加熱することにより該積層体を有機結合材成分
の融点以上に昇温し緩和熱処理を行なう。１〜２０ｍｍ
の金属板はかかる積層体の収縮を抑制する目的で使用さ
れる。これは弾性体を介してプレスする際にかかる積層
体は面内方向は固定され実質的に一方方向からのみ圧力
を受け、熱が伝達してもかかる積層体が面内で収縮しな
いようにする効果と、十分な圧力がかかる前にかかる積
層体の温度が上昇して収縮することを防ぐ効果がある。
この金属板がない場合には、弾性体から等方的な圧力を
受けるために熱が伝わった際にかかる積層体が収縮して
しまう。金属板としてはかかる積層体を保持できる程度
の剛性を有するものであればどんな材質でも良く、ステ
ンレス、スチール、真鍮、等の金属、合金を例示でき
る。また、金属板との離れをよくするためにかかる積層
体と金属板との間に、ポリエステル、ポリアミド、ポリ
イミド等の耐熱性フィルムあるいは、耐熱性の良い平滑
な紙を使用しても良い。According to the present invention, a plurality of the above porous films or sheets are laminated, and the laminate is preferably formed to have a thickness of 1-2.
0mm metal plate, preferably 50mmH
g, through an elastic body under a vacuum of not more than 10 g
The laminate is heated at a temperature equal to or higher than the melting point of the organic binder component by heating at the same time as or after the compression while applying a pressure of g / cm 2 to perform relaxation heat treatment. 1-20mm
Is used for the purpose of suppressing the shrinkage of the laminate. This is such that when pressed through an elastic body, the laminate is fixed in the in-plane direction and receives pressure from substantially only one direction, so that even when heat is transmitted, the laminate does not shrink in the plane. This has an effect and an effect of preventing the temperature of the laminated body before the sufficient pressure is applied from increasing and contracting.
If the metal plate is not provided, the laminate is contracted when heat is transmitted due to isotropic pressure from the elastic body. As the metal plate, any material may be used as long as it has rigidity enough to hold the laminate, and examples thereof include metals and alloys such as stainless steel, steel and brass. Further, a heat-resistant film of polyester, polyamide, polyimide or the like, or smooth paper having good heat resistance may be used between the laminate and the metal plate in order to improve the separation from the metal plate.
【００１６】本発明におけるプレスは好ましくは５０ｍ
ｍＨｇ以下の真空下行われる。５０ｍｍＨｇより大きい
と気孔の消失が十分ではなく、緻密な成形体を得ること
が困難である。真空度は高いほうが好ましく、４０ｍｍ
Ｈｇ以下であることがより好ましく、３０ｍｍＨｇ以下
がさらに好ましい。The press in the present invention is preferably 50 m
It is performed under a vacuum of mHg or less. If it is larger than 50 mmHg, pores are not sufficiently eliminated, and it is difficult to obtain a dense molded body. The higher the degree of vacuum, the better, 40mm
Hg or less, more preferably 30 mmHg or less.
【００１７】本発明においては、液圧等の流体加圧によ
り弾性体を介して例えば１０〜５００ｋｇ／ｃｍ2の圧
力で上記多孔質フィルムまたはシートからなる積層体を
金属板を介して加熱する。圧力が１０ｋｇ／ｃｍ2より
低いと該積層体の固定が十分ではなく収縮する可能性が
高い。また、５００ｋｇ／ｃｍ2を超えると圧力が高す
ぎるために積層体のずれや変形が起こりやすくなり好ま
しくない。圧力としては２０〜４００ｋｇ／ｃｍ2であ
ることがより好ましく、３０〜３００ｋｇ／ｃｍ2がさ
らに好ましい。In the present invention, the laminate comprising the porous film or sheet is heated via a metal plate at a pressure of, for example, 10 to 500 kg / cm 2 through an elastic body by pressurizing a fluid such as a liquid pressure. If the pressure is lower than 10 kg / cm 2 , the laminate is not sufficiently fixed and is likely to contract. On the other hand, if it exceeds 500 kg / cm 2 , the pressure is too high and the laminate is likely to shift or deform, which is not preferable. More preferably a pressure is 20~400kg / cm 2, more preferably 30~300kg / cm 2.
【００１８】また上記加圧の際、かかる積層体を挟む金
属板の温度は６０℃以下とすることが、かかる積層体が
収縮しにくいので好適である。It is preferable that the temperature of the metal plate sandwiching the laminate during the above-mentioned pressurization is 60 ° C. or less, since the laminate is unlikely to shrink.
【００１９】本発明は、上述のように有機結合材成分と
して重量平均分子量４０万以上のポリオレフィンを用い
ることにより好ましく実施される。重量平均分子量が４
０万を超えると溶融時に有機成分の流動が起こり、形が
変形してしまうし、ポリオレフィン以外では好ましい分
子量の重合体を得ることが困難なためである。ポリオレ
フィンとしてはポリエチレン、ポリビニルアルコール、
それらの共重合体、またはそれらの１種以上から選ば
れ、分子量が４０万以上のものが好ましく、例えばポリ
エチレンの場合には超高分子量ポリエチレン（UHMWPE)
と呼ばれるものである。The present invention is preferably carried out by using a polyolefin having a weight average molecular weight of 400,000 or more as the organic binder component as described above. Weight average molecular weight of 4
If it exceeds 10,000, the organic components flow during melting and the shape is deformed, and it is difficult to obtain a polymer having a preferable molecular weight other than polyolefin. Polyolefins such as polyethylene, polyvinyl alcohol,
Those copolymers or one or more of them are selected, and those having a molecular weight of 400,000 or more are preferable. For example, in the case of polyethylene, ultra high molecular weight polyethylene (UHMWPE)
It is called.
【００２０】上記積層体を加熱する温度としては有機結
合材成分の融点以上に昇温する必要がある。融点以上に
昇温しない場合には有機結合材成分の熱緩和が十分では
なく、有機結合材成分の脱バインダーの際にかかる積層
体が収縮し好ましくない。超高分子量ポリエチレンを有
機結合材成分として用いた場合には加工方法にも多少依
存するが、１４０〜１７０℃程度に昇温することが好ま
しい。The temperature at which the laminate is heated must be raised to a temperature equal to or higher than the melting point of the organic binder component. If the temperature is not raised above the melting point, the thermal relaxation of the organic binder component is not sufficient, and the laminate is undesirably shrunk when the binder is removed from the organic binder component. When ultra-high molecular weight polyethylene is used as the organic binder component, the temperature is preferably raised to about 140 to 170 ° C., although it depends somewhat on the processing method.
【００２１】[0021]
【発明の効果】本発明によれば、特定の多孔質フィルム
またはシートを用い、これを積層し、積層体を変形させ
ることなく十分な熱緩和と緻密化を実施することが可能
であり、各種厚膜電子部品等の製造に有用な成形体を得
ることが可能である。According to the present invention, it is possible to use a specific porous film or sheet, laminate them, and carry out sufficient thermal relaxation and densification without deforming the laminate. It is possible to obtain a molded article useful for manufacturing a thick-film electronic component or the like.
【００２２】[0022]
【実施例】以下実施例を挙げて本発明の好ましい態様に
ついて記載するが、本発明は実施例のみに限定されるも
のではない。EXAMPLES Preferred embodiments of the present invention will be described below with reference to examples, but the present invention is not limited to the examples.
【００２３】［実施例１］チタン酸バリウムを主成分と
するセラミックス９１重量％、超高分子量ポリエチレン
９重量％、空孔率６０％、１５５℃での収縮率が縦方向
で１３％、横方向で４５％、厚み２３μｍのシートを、
サイズが１２ｃｍ＊１２ｃｍの大きさに切り揃え４０層
積み重ねた。それを、５ｍｍ厚のステンレス板で挟みこ
み、両方のプレス面がラバーであるプレス機に挿入し、
積層体の雰囲気を２５ｍｍＨｇとした。その後、積層体
を１００ｋｇ／ｃｍ2に加圧した。それと同時に昇温を
開始し２０分後には１５４℃とした。その後、圧力を開
放した。得られた成形体は密度３．３ｇ／ｃｍ3で、面
内での収縮率は縦方向、横方向とも０．２％であった。
この成形体を１ｃｍ四方に切断し、６００℃まで昇温し
て脱バインダーを行なっても、収縮は０．１％未満であ
った。Example 1 91% by weight of ceramics containing barium titanate as a main component, 9% by weight of ultra-high molecular weight polyethylene, porosity of 60%, shrinkage at 155 ° C. of 13% in vertical direction, horizontal direction 45%, 23μm thick sheet,
The pieces were cut into a size of 12 cm * 12 cm and stacked in 40 layers. Insert it into a 5 mm thick stainless steel plate, insert it into a pressing machine where both pressing surfaces are rubber,
The atmosphere of the laminate was 25 mmHg. Thereafter, the laminate was pressurized to 100 kg / cm 2 . At the same time, the temperature was raised to 154 ° C. 20 minutes later. Thereafter, the pressure was released. The obtained molded body had a density of 3.3 g / cm 3 and an in-plane shrinkage of 0.2% in both the vertical and horizontal directions.
Even if this molded body was cut into a square of 1 cm and heated to 600 ° C. to remove the binder, the shrinkage was less than 0.1%.
【００２４】［比較例１］ステンレス板を使用すること
なく実施例１と同様の操作を行ない１５４℃まで加熱し
たところ、得られた成形体は明らかに変形し、面内での
縦・横方向とも収縮率は５％以上であった。[Comparative Example 1] When the same operation as in Example 1 was performed without using a stainless steel plate and heating was performed to 154 ° C, the obtained molded body was clearly deformed, and the in-plane vertical and horizontal directions were obtained. In both cases, the shrinkage was 5% or more.
Claims (5)
り、かつ空孔率が体積の１〜８０％を占める多孔質フィ
ルムまたはシートの複数枚を、金属板に挟んだ状態で減
圧下、弾性体を介して圧縮しながらもしくは圧縮した
後、該有機結合材成分の融点以上に昇温し加熱すること
を特徴とする多孔質積層体の製造方法。A porous film or sheet comprising an inorganic substance component and an organic binder component and having a porosity of 1 to 80% of the volume under elasticity under reduced pressure in a state sandwiched between metal plates. A method for producing a porous laminate, wherein the temperature is increased to or above the melting point of the organic binder component while heating or after compression through a body.
分５０〜９５重量％、有機結合材成分５〜５０重量％か
らなる請求項１記載の多孔質積層体の製造方法。2. The method for producing a porous laminate according to claim 1, wherein the porous film or sheet comprises 50 to 95% by weight of an inorganic component and 5 to 50% by weight of an organic binder component.
電極パターンが印刷されている請求項１または２記載の
多孔質積層体の製造方法。3. The method according to claim 1, wherein the electrode pattern is printed on the surface of the porous film or sheet.
以上のポリオレフィンである請求項１〜３のいずれかに
記載の多孔質積層体の製造方法。4. The method for producing a porous laminate according to claim 1, wherein the organic binder component is a polyolefin having a weight average molecular weight of 400,000 or more.
ニルアルコールおよびそれらの共重合体からなる群より
選ばれる少なくとも一種のポリオレフィンであるである
請求項４記載の多孔質積層体の製造方法。5. The method for producing a porous laminate according to claim 4, wherein the polyolefin is at least one polyolefin selected from the group consisting of polyethylene, polyvinyl alcohol and a copolymer thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00763798A JP4007665B2 (en) | 1998-01-19 | 1998-01-19 | Method for producing porous laminate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00763798A JP4007665B2 (en) | 1998-01-19 | 1998-01-19 | Method for producing porous laminate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11199345A true JPH11199345A (en) | 1999-07-27 |
| JP4007665B2 JP4007665B2 (en) | 2007-11-14 |
Family
ID=11671356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00763798A Expired - Fee Related JP4007665B2 (en) | 1998-01-19 | 1998-01-19 | Method for producing porous laminate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4007665B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003045737A (en) * | 2001-07-31 | 2003-02-14 | Tdk Corp | Method of manufacturing laminated component, and sheet for manufacturing the laminated component |
| EP1139355A4 (en) * | 1999-09-22 | 2007-02-21 | Matsushita Electric Industrial Co Ltd | ELECTRONIC CERAMIC DEVICE |
-
1998
- 1998-01-19 JP JP00763798A patent/JP4007665B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1139355A4 (en) * | 1999-09-22 | 2007-02-21 | Matsushita Electric Industrial Co Ltd | ELECTRONIC CERAMIC DEVICE |
| JP2003045737A (en) * | 2001-07-31 | 2003-02-14 | Tdk Corp | Method of manufacturing laminated component, and sheet for manufacturing the laminated component |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4007665B2 (en) | 2007-11-14 |
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