JPH11200045A5 - - Google Patents
Info
- Publication number
- JPH11200045A5 JPH11200045A5 JP1998017906A JP1790698A JPH11200045A5 JP H11200045 A5 JPH11200045 A5 JP H11200045A5 JP 1998017906 A JP1998017906 A JP 1998017906A JP 1790698 A JP1790698 A JP 1790698A JP H11200045 A5 JPH11200045 A5 JP H11200045A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790698A JPH11200045A (ja) | 1998-01-13 | 1998-01-13 | 蒸着装置のクリーニング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790698A JPH11200045A (ja) | 1998-01-13 | 1998-01-13 | 蒸着装置のクリーニング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11200045A JPH11200045A (ja) | 1999-07-27 |
| JPH11200045A5 true JPH11200045A5 (2) | 2005-08-18 |
Family
ID=11956797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790698A Pending JPH11200045A (ja) | 1998-01-13 | 1998-01-13 | 蒸着装置のクリーニング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11200045A (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2107132B1 (en) * | 2006-11-28 | 2011-09-14 | Ulvac, Inc. | Winding vacuum film forming process and apparatus |
| JP5157935B2 (ja) * | 2009-01-22 | 2013-03-06 | 住友金属鉱山株式会社 | ロール・ツー・ロール真空成膜装置による成膜方法及びそのロール清掃方法 |
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1998
- 1998-01-13 JP JP1790698A patent/JPH11200045A/ja active Pending