JPH11223638A5 - - Google Patents

Info

Publication number
JPH11223638A5
JPH11223638A5 JP1998024801A JP2480198A JPH11223638A5 JP H11223638 A5 JPH11223638 A5 JP H11223638A5 JP 1998024801 A JP1998024801 A JP 1998024801A JP 2480198 A JP2480198 A JP 2480198A JP H11223638 A5 JPH11223638 A5 JP H11223638A5
Authority
JP
Japan
Prior art keywords
mirror
microlens
light
transmitting material
zone plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998024801A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11223638A (ja
JP3862845B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP02480198A external-priority patent/JP3862845B2/ja
Priority to JP02480198A priority Critical patent/JP3862845B2/ja
Priority to US09/402,382 priority patent/US6528780B1/en
Priority to EP99902848A priority patent/EP0981051B1/en
Priority to DE69928474T priority patent/DE69928474T2/de
Priority to PCT/JP1999/000514 priority patent/WO1999040445A1/ja
Publication of JPH11223638A publication Critical patent/JPH11223638A/ja
Priority to US10/339,074 priority patent/US6881947B2/en
Priority to US11/093,618 priority patent/US7015455B2/en
Publication of JPH11223638A5 publication Critical patent/JPH11223638A5/ja
Publication of JP3862845B2 publication Critical patent/JP3862845B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP02480198A 1998-02-05 1998-02-05 近接場用光プローブ Expired - Fee Related JP3862845B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP02480198A JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ
PCT/JP1999/000514 WO1999040445A1 (fr) 1998-02-05 1999-02-05 Sonde optique pour champ de proximite
EP99902848A EP0981051B1 (en) 1998-02-05 1999-02-05 Optical probe for proximity field measurements
DE69928474T DE69928474T2 (de) 1998-02-05 1999-02-05 Optiche sonde für nahfeld-messungen
US09/402,382 US6528780B1 (en) 1998-02-05 1999-02-05 Optical probe for proximity field
US10/339,074 US6881947B2 (en) 1998-02-05 2003-01-09 Near-field optical probe
US11/093,618 US7015455B2 (en) 1998-02-05 2005-03-30 Near-field optical probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02480198A JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ

Publications (3)

Publication Number Publication Date
JPH11223638A JPH11223638A (ja) 1999-08-17
JPH11223638A5 true JPH11223638A5 (2) 2005-08-18
JP3862845B2 JP3862845B2 (ja) 2006-12-27

Family

ID=12148310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02480198A Expired - Fee Related JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ

Country Status (5)

Country Link
US (3) US6528780B1 (2)
EP (1) EP0981051B1 (2)
JP (1) JP3862845B2 (2)
DE (1) DE69928474T2 (2)
WO (1) WO1999040445A1 (2)

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US6951846B2 (en) * 2002-03-07 2005-10-04 The United States Of America As Represented By The Secretary Of The Army Artemisinins with improved stability and bioavailability for therapeutic drug development and application
JP2003294857A (ja) * 2002-03-29 2003-10-15 Mitsubishi Electric Corp 乗員検出装置
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
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US6861856B2 (en) * 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
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US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
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US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
JP2005144561A (ja) * 2003-11-11 2005-06-09 Seiko Epson Corp 近接場光プローブ、近接場光の取出し方法並びに近接場光を用いた加工方法
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
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KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
US7170050B2 (en) * 2004-09-17 2007-01-30 Pacific Biosciences Of California, Inc. Apparatus and methods for optical analysis of molecules
US7315019B2 (en) * 2004-09-17 2008-01-01 Pacific Biosciences Of California, Inc. Arrays of optical confinements and uses thereof
JP2006107584A (ja) * 2004-10-01 2006-04-20 Konica Minolta Opto Inc 光学素子及び光スポット位置調整方法
US7616987B2 (en) * 2004-10-05 2009-11-10 Agency For Science, Technology And Research Microprobe for 3D bio-imaging, method for fabricating the same and use thereof
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US8601608B2 (en) * 2005-03-31 2013-12-03 Japan Science And Technology Agency Cantilever for scanning probe microscope and scanning probe microscope equipped with it
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US20070294047A1 (en) * 2005-06-11 2007-12-20 Leonard Hayden Calibration system
EP1932003A2 (en) 2005-06-13 2008-06-18 Cascade Microtech, Inc. Wideband active-passive differential signal probe
JP5199116B2 (ja) 2005-12-22 2013-05-15 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 反射モードで動作するルミネス・センサ
DE102006002461B8 (de) * 2006-01-18 2008-07-24 Max Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Spiegeloptik für nahfeldoptische Messungen
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US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
JP5814942B2 (ja) * 2010-01-25 2015-11-17 アクサン・テクノロジーズ・インコーポレーテッドＡｘｓｕｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ，Ｉｎｃ． 光プローブ、光プローブの製造方法、およびレンズ構造体の製造方法
US8675293B2 (en) * 2010-01-25 2014-03-18 Axsun Technologies, Inc. SOI lens structure for medical probe
DE202010013458U1 (de) 2010-09-23 2010-12-30 Eberhard-Karls-Universität Tübingen Sonde für aperturlose Nahfeldmikroskopie und/oder für Ramanspektroskopie
TWI427250B (zh) 2011-07-12 2014-02-21 國立屏東科技大學 浮力式太陽集熱動力裝置
JP6341634B2 (ja) * 2013-05-28 2018-06-13 新光電気工業株式会社 プローブガイド板及びその製造方法、半導体検査装置
US9696498B2 (en) * 2015-05-04 2017-07-04 Huawei Technologies Co., Ltd. Three-dimensional (3D) photonic chip-to-fiber interposer
JP6706076B2 (ja) * 2016-01-14 2020-06-03 新光電気工業株式会社 プローブガイド板及びその製造方法とプローブ装置
KR20230175045A (ko) 2022-06-22 2023-12-29 삼성전자주식회사 캔틸레버

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JPH0534129A (ja) * 1991-07-31 1993-02-09 Satoshi Kawada 光学プローブ
JP3268797B2 (ja) 1991-10-09 2002-03-25 オリンパス光学工業株式会社 光導入装置
JP3213436B2 (ja) * 1993-05-24 2001-10-02 シャープ株式会社 光プローブ素子、光プローブ素子を用いた記録再生装置、および光プローブ素子の製造方法
US5354985A (en) * 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
WO1996003641A1 (en) * 1994-07-28 1996-02-08 Kley Victor B Scanning probe microscope assembly
JPH0954101A (ja) * 1995-08-14 1997-02-25 Nikon Corp 走査型近接場光学顕微鏡
JP3618896B2 (ja) * 1996-03-29 2005-02-09 キヤノン株式会社 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置
JP3327112B2 (ja) * 1996-04-19 2002-09-24 松下電器産業株式会社 異方性黒鉛薄膜基板及びそれを利用した応用装置
JPH1186364A (ja) * 1997-09-11 1999-03-30 Canon Inc 微小開口の形成方法、微小開口を含んでなるメンブレンと該メンブレンによるプローブ、及び該プローブによる表面観察装置、露光装置、情報処理装置
JPH11166935A (ja) * 1997-09-25 1999-06-22 Canon Inc 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ

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