JPH11238901A5 - - Google Patents
Info
- Publication number
- JPH11238901A5 JPH11238901A5 JP1998040818A JP4081898A JPH11238901A5 JP H11238901 A5 JPH11238901 A5 JP H11238901A5 JP 1998040818 A JP1998040818 A JP 1998040818A JP 4081898 A JP4081898 A JP 4081898A JP H11238901 A5 JPH11238901 A5 JP H11238901A5
- Authority
- JP
- Japan
- Prior art keywords
- conductivity type
- impurity region
- type impurity
- oxide film
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04081898A JP3992817B2 (ja) | 1998-02-23 | 1998-02-23 | 半導体光電変換装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04081898A JP3992817B2 (ja) | 1998-02-23 | 1998-02-23 | 半導体光電変換装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11238901A JPH11238901A (ja) | 1999-08-31 |
| JPH11238901A5 true JPH11238901A5 (2) | 2005-07-14 |
| JP3992817B2 JP3992817B2 (ja) | 2007-10-17 |
Family
ID=12591248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04081898A Expired - Fee Related JP3992817B2 (ja) | 1998-02-23 | 1998-02-23 | 半導体光電変換装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3992817B2 (2) |
-
1998
- 1998-02-23 JP JP04081898A patent/JP3992817B2/ja not_active Expired - Fee Related
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