JPH11248631A - Support of glow discharge tube and glow discharge emission spectral analyzer using it - Google Patents
Support of glow discharge tube and glow discharge emission spectral analyzer using itInfo
- Publication number
- JPH11248631A JPH11248631A JP10053078A JP5307898A JPH11248631A JP H11248631 A JPH11248631 A JP H11248631A JP 10053078 A JP10053078 A JP 10053078A JP 5307898 A JP5307898 A JP 5307898A JP H11248631 A JPH11248631 A JP H11248631A
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- Prior art keywords
- glow discharge
- sample
- tube
- anode
- discharge tube
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
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- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、試料をスパッタ
リングするためのグロー放電管において試料が当接され
る支持部、およびその支持部を有するグロー放電管を用
いて、発生した光を分光器で分析するグロー放電発光分
光分析装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support for contacting a sample in a glow discharge tube for sputtering a sample, and a glow discharge tube having the support for generating light by a spectroscope. The present invention relates to a glow discharge optical emission spectrometer for analysis.
【０００２】[0002]
【従来の技術】気体圧力が５００〜１３００Ｐａ程度の
アルゴン（Ａｒ）雰囲気中で、二つの電極間に直流また
は高周波の高電圧を印加すると、グロー放電が起こり、
Ａｒイオンが生成される。生成したＡｒイオンは高電界
で加速され、陰極表面に衝突し、そこに存在する物質を
たたき出す。この現象をスパッタリングと呼ぶが、スパ
ッタされた粒子（原子、分子、イオン）はプラズマ中で
励起され、基底状態に戻る際にその元素に固有の波長の
光を放出する。この発光を分光器で分光して元素を同定
する分析法が、グロー放電発光分光分析方法と呼ばれて
いる。2. Description of the Related Art When a DC or high-frequency high voltage is applied between two electrodes in an argon (Ar) atmosphere at a gas pressure of about 500 to 1300 Pa, a glow discharge occurs.
Ar ions are generated. The generated Ar ions are accelerated by a high electric field, collide with the surface of the cathode, and knock out substances existing there. This phenomenon is called sputtering, and the sputtered particles (atoms, molecules, and ions) are excited in the plasma and emit light having a wavelength specific to the element when returning to the ground state. An analysis method in which the emitted light is separated by a spectroscope to identify elements is called a glow discharge emission spectral analysis method.
【０００３】このグロー放電発光分光分析方法を具現化
した従来の分析装置では、グロー放電管として、例え
ば、図４に示すような中空陽極型のグリムグロー放電管
３１が用いられている。このグロー放電管３１は、支持
ブロック３２と陽極ブロック３とが、Ｏリングなどのシ
ール部材１１を介して接合されている。ここで、支持ブ
ロック３２は、試料６が当接される支持部であって、こ
の従来例では同時に絶縁部である。陽極ブロック３に
は、中空陽極管３ｄが一体形成されており、この陽極管
３ｄは、支持ブロック３２に設けられた貫通孔に挿入さ
れ、試料６の分析面（表面）６ａに近接している。試料
６は、その分析面６ａにおける分析すべき部位を囲む環
状形状となったＯリングなどのシール部材１１を介し
て、主に陰極ブロック４により支持ブロック３２に気密
状態で押し付けられる。In a conventional analyzer embodying this glow discharge emission spectroscopic analysis method, a hollow anode type grim glow discharge tube 31 as shown in FIG. 4, for example, is used as a glow discharge tube. In the glow discharge tube 31, a support block 32 and an anode block 3 are joined via a seal member 11 such as an O-ring. Here, the support block 32 is a support portion with which the sample 6 is brought into contact, and in this conventional example, it is also an insulating portion. The anode block 3 is integrally formed with a hollow anode tube 3d. The anode tube 3d is inserted into a through hole provided in the support block 32 and is close to the analysis surface (surface) 6a of the sample 6. . The sample 6 is pressed against the support block 32 mainly by the cathode block 4 in an airtight manner via a sealing member 11 such as an O-ring having an annular shape surrounding a portion to be analyzed on the analysis surface 6a.
【０００４】こうして、試料６により陽極管３ｄを収納
する支持ブロック３２の内方空間（グロー放電空間）Ｖ
の開口部を密閉し、この内方空間Ｖを、図示しない真空
排気装置（減圧手段）により、第１および第２真空排気
孔３ｂ，３ｃから真空引きするようになっている。さら
に、陽極ブロック３は、アルゴンガス供給孔３ａを有し
ており、管内Ｖがアルゴンの希ガス雰囲気（５００〜１
３００Ｐａ）とされている。[0004] Thus, the inner space (glow discharge space) V of the support block 32 accommodating the anode tube 3 d by the sample 6.
The inner space V is evacuated from the first and second evacuation holes 3b and 3c by a not-shown evacuation device (decompression means). Further, the anode block 3 has an argon gas supply hole 3a, and the tube V has a rare gas atmosphere of argon (500 to 1).
300 Pa).
【０００５】このグロー放電管３１は、陽極管３ｄと試
料６との間に、それぞれ陽極ブロック３と陰極ブロック
４を介して、電源部（給電手段）１２により高電圧を印
加して、グロー放電の発生により生成されるアルゴンの
陽イオンを試料の分析面６ａに衝突させて、試料６をス
パッタリングするものである。このため、前記支持ブロ
ック３２は、絶縁性とともに耐熱性も要求され、ベスペ
ル、ポリイミド等の樹脂で作製される。The glow discharge tube 31 applies a high voltage between the anode tube 3d and the sample 6 through the anode block 3 and the cathode block 4 by the power supply section (feeding means) 12, thereby performing glow discharge. The sample 6 is sputtered by colliding argon cations generated by the generation of the sample with the analysis surface 6a of the sample. For this reason, the support block 32 is required to have heat resistance as well as insulation, and is made of a resin such as Vespel or polyimide.
【０００６】[0006]
【発明が解決しようとする課題】しかし、長時間を要す
る分析を繰り返す場合等においては、支持ブロック３２
の耐熱性が十分とはいえず、アルゴンイオンの衝突や、
スパッタされた試料汚れが付着しそれが高周波誘導加熱
されること等により、支持ブロック３２において貫通孔
が試料６に接するエッジ部が徐々に欠損し、グロー放電
の条件が変化して発光強度に影響が及ぶ。また、試料か
ら放出されるガスにより局部的に異常放電が起こり、欠
損を生じることもある。そのような支持ブロック３２を
さらに使用し続けると、欠損により陽極管３ｄとのギャ
ップがいわゆるダークスペース（暗領域）よりも大きく
なって付着物との間でアーク放電を起こし、一瞬のうち
に破損する（焼け焦げ、ひび割れ等）。However, when the analysis requiring a long time is repeated, the support block 32 may be used.
Is not sufficiently heat-resistant.
The sputtered sample stain adheres and is heated by high-frequency induction, so that the edge of the support block 32 where the through hole is in contact with the sample 6 is gradually lost, and the condition of the glow discharge changes to affect the emission intensity. Reach. Further, the gas discharged from the sample may cause an abnormal discharge locally and cause a defect. If such a support block 32 is further used, the gap with the anode tube 3d becomes larger than a so-called dark space (dark area) due to the loss, causing an arc discharge between the support block 32 and the attached matter, and the breakage occurs instantaneously. (Burn, crack, etc.)
【０００７】このように明確に破損した支持ブロック３
２は、もちろんその後使用できず、交換にあたっては、
支持ブロック３２において試料の分析面６ａが当接され
る面と陽極管先端面との間隙を調整しなければならず
（いわゆるギャップ調整）、作業に熟練と時間を要し、
さらには、交換によりグロー放電の条件が変化しうるこ
とから、分析装置全体の校正も必要となり、分析作業の
効率が低下する。また、破損に至るまでにおいても、徐
々に欠損により、グロー放電の条件が変化して発光強度
に影響が及んでいることから、どこまで正確な分析が行
えていたのかが不明で、それまでの分析結果が信頼性に
乏しいものとなる。さらに、ベスペル、ポリイミド等の
樹脂からなる支持ブロック３２は、高価であるため、寿
命が短いことは、分析経済の点においても問題がある。The support block 3 thus clearly broken
2, of course, can not be used afterwards,
It is necessary to adjust the gap between the surface of the support block 32 on which the analysis surface 6a of the sample comes into contact and the tip surface of the anode tube (so-called gap adjustment), which requires skill and time for the operation.
Furthermore, since the conditions of the glow discharge can be changed by the replacement, the calibration of the entire analyzer is required, and the efficiency of the analysis operation is reduced. In addition, even before the breakage, the condition of the glow discharge gradually changed due to the loss, affecting the emission intensity, so it was not clear how accurate the analysis was. The result is unreliable. Further, since the support block 32 made of a resin such as Vespel or polyimide is expensive, its short life is problematic in terms of analytical economy.
【０００８】そこで本発明は、長寿命で、効率と信頼性
の高い分析を可能にするグロー放電管の支持部およびそ
れを用いたグロー放電発光分光分析装置を提供すること
を目的とするものである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a glow discharge tube support and a glow discharge optical emission spectrometer using the same, which enable long-life, highly efficient and highly reliable analysis. is there.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するため
に、本発明の請求項１に係るグロー放電管の支持部は、
試料が当接される面に向けて前記陽極管が挿入される貫
通孔を設けられた絶縁材からなる本体と、その本体の貫
通孔に少なくとも試料が当接される側において挿入さ
れ、内面が陽極管の外周に対向する筒状の金属またはセ
ラミックスからなる耐熱部材とを有する。In order to achieve the above object, a glow discharge tube support according to claim 1 of the present invention comprises:
A main body made of an insulating material provided with a through-hole into which the anode tube is inserted toward a surface where the sample comes into contact, and inserted at least on the side where the sample comes into contact with the through-hole of the main body, and the inner surface is A cylindrical heat-resistant member made of metal or ceramic facing the outer periphery of the anode tube;
【００１０】請求項１のグロー放電管の支持部によれ
ば、耐熱性が要求され、消耗が問題となる、支持部にお
ける陽極管先端の周辺を、金属またはセラミックスから
なる耐熱部材で構成するので、長寿命であり、効率と信
頼性の高い分析が可能になる。また、耐熱部材以外の本
体は、特に耐熱性を要求されず、絶縁性が十分であれば
足りるので、安価なベークライト、ジュラコン、テフロ
ン等の樹脂を用いることができ、長寿命化と相まって、
分析のランニングコストをいっそう低減できる。さら
に、試料に対し高周波の電圧が印加される高周波グロー
放電発光分光分析装置においては、高周波電力のロスを
抑制するよう、支持部には耐熱性、絶縁性の他に誘電率
の低さも要求されるが、請求項１のグロー放電管の支持
部によれば、耐熱部材以外の本体は、特に耐熱性を要求
されないことから、絶縁性が十分なもののうち、誘電率
のより低いテフロン等の樹脂を用いることができ、高周
波電力のロスを十分低減させることもできる。According to the supporting portion of the glow discharge tube of the first aspect, heat resistance is required and wear is a problem. The periphery of the tip of the anode tube in the supporting portion is made of a heat-resistant member made of metal or ceramics. It has a long service life and enables efficient and reliable analysis. In addition, since the main body other than the heat-resistant member does not particularly require heat resistance and has sufficient insulation properties, inexpensive bakelite, Duracon, Teflon, and other resins can be used.
The running cost of the analysis can be further reduced. Furthermore, in a high-frequency glow discharge optical emission spectrometer in which a high-frequency voltage is applied to a sample, the supporting portion is required to have a low dielectric constant in addition to heat resistance and insulation so as to suppress loss of high-frequency power. However, according to the supporting portion of the glow discharge tube according to claim 1, since the main body other than the heat-resistant member does not particularly require heat resistance, a resin such as Teflon having a lower dielectric constant among those having sufficient insulation properties. , And the loss of high frequency power can be sufficiently reduced.
【００１１】請求項２に係るグロー放電発光分光分析装
置は、請求項１のグロー放電管の支持部を用いる。請求
項２の装置によっても、効率と信頼性が高く、ランニン
グコストの低い分析が可能となる。A glow discharge optical emission spectrometer according to a second aspect uses the support portion of the glow discharge tube according to the first aspect. According to the apparatus of the second aspect, analysis with high efficiency and high reliability and low running cost is possible.
【００１２】[0012]
【発明の実施の形態】以下、本発明の一実施形態のグロ
ー放電発光分光分析装置を図面にしたがって説明する。
まず、この装置の構成について説明する。この装置で
は、図２に示すように、グロー放電を利用したスパッタ
リングにより元素に固有の波長の光を発生するグリムグ
ロー放電管１から放出されて、その窓板１３を透過した
光Ｓが、分光器２２に入射する。分光器２２は、入射ス
リット２４、この入射スリット２４から入射した光Ｓを
波長に応じて異った回折角度で回折する回折格子２６、
回折光を通過させる出射スリット２７および回折光の強
度を測定する光電子増倍管２８を備えている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A glow discharge optical emission spectrometer according to one embodiment of the present invention will be described below with reference to the drawings.
First, the configuration of this device will be described. In this apparatus, as shown in FIG. 2, light S emitted from a grim glow discharge tube 1 that generates light having a wavelength specific to an element by sputtering using a glow discharge and transmitted through a window plate 13 is spectrally separated. Incident on the vessel 22. The spectroscope 22 includes an entrance slit 24, a diffraction grating 26 that diffracts the light S incident from the entrance slit 24 at different diffraction angles according to the wavelength,
An output slit 27 for passing the diffracted light and a photomultiplier tube 28 for measuring the intensity of the diffracted light are provided.
【００１３】また、この装置は、グロー放電管として、
図１に示すような中空陽極型のグリムグロー放電管１を
用いている。このグロー放電管１は、支持ブロック２
と、中空陽極管３ｄが一体形成された陽極ブロック３と
が、Ｏリングなどのシール部材１１を介してボルト９に
より締結、接合されている。支持ブロック２は、グロー
放電管１において、試料６が当接される支持部であっ
て、同時に絶縁部である。Further, this device is used as a glow discharge tube,
A hollow anode type grim glow discharge tube 1 as shown in FIG. 1 is used. The glow discharge tube 1 includes a support block 2
And an anode block 3 integrally formed with a hollow anode tube 3d are fastened and joined by bolts 9 via a sealing member 11 such as an O-ring. The support block 2 is a support portion of the glow discharge tube 1 with which the sample 6 is brought into contact, and is also an insulating portion.
【００１４】ここで、支持ブロック２は、試料６が当接
される面に向けて陽極管３ｄが挿入される貫通孔５ａを
設けられた本体５と、その本体の貫通孔５ａに試料６が
当接される側において挿入例えば圧入され、内面が陽極
管３ｄの外周に対向する筒状の耐熱部材７とを有する。
より具体的には、貫通孔５ａは試料６が当接される側で
径大となり、その部分に耐熱部材７が圧入され、径小部
分の貫通孔５ａの内面と、耐熱部材７の内面とが面一に
なっている。本体５は、ベークライト、ジュラコン、テ
フロン、ベスペル、ポリイミド等の樹脂である絶縁材か
らなり、耐熱部材７は、ステンレス、無酸素銅等の金
属、またはマコール、ローテック−ＴＭ等の高温使用に
耐え高精度加工のできるマシナブルセラミックスからな
る。Here, the support block 2 has a main body 5 provided with a through hole 5a into which the anode tube 3d is inserted toward a surface to which the sample 6 comes into contact, and the sample 6 is inserted into the through hole 5a of the main body. It has a tubular heat-resistant member 7 which is inserted, for example, press-fitted on the side to be abutted and whose inner surface faces the outer periphery of the anode tube 3d.
More specifically, the diameter of the through-hole 5a is large on the side where the sample 6 is in contact, and the heat-resistant member 7 is press-fitted into that portion, and the inner surface of the through-hole 5a of the small-diameter portion and the inner surface of the heat-resistant member 7 Is flush. The main body 5 is made of an insulating material such as a resin such as Bakelite, Duracon, Teflon, Vespel, or polyimide. It is made of machinable ceramics that can be processed with precision.
【００１５】陽極管３ｄは、支持ブロック本体の貫通孔
５ａおよび耐熱部材７の内側に挿入され、試料６の分析
面（表面）６ａに近接している。試料６は、その分析面
６ａにおける分析すべき部位を囲む環状形状となったＯ
リングなどのシール部材１１を介して、主に陰極ブロッ
ク４により支持ブロック２に気密状態で押し付けられ
る。なお、試料６は、打ち抜きサンプリングされた塗装
鋼板のような略円板状として図示したが、このようなも
のに限定されない。The anode tube 3 d is inserted into the through hole 5 a of the support block body and the inside of the heat-resistant member 7, and is close to the analysis surface (surface) 6 a of the sample 6. The sample 6 has an annular O shape surrounding a portion to be analyzed on the analysis surface 6a.
The cathode block 4 mainly presses the support block 2 in an airtight state via a seal member 11 such as a ring. In addition, although the sample 6 is illustrated as a substantially disk shape such as a stamped and sampled painted steel plate, the invention is not limited to this.
【００１６】こうして、試料６により陽極管３ｄを収納
する支持ブロック２の内方空間（グロー放電空間）Ｖの
開口部を密閉し、この内方空間Ｖを、図示しない真空排
気装置（減圧手段）により、第１および第２真空排気孔
３ｂ，３ｃから真空引きするようになっている。さら
に、陽極ブロック３は、アルゴンガス供給孔３ａを有し
ており、管内Ｖがアルゴンの希ガス雰囲気（５００〜１
３００Ｐａ）とされている。In this manner, the opening of the inner space (glow discharge space) V of the support block 2 accommodating the anode tube 3d is sealed by the sample 6, and this inner space V is evacuated by a vacuum evacuation device (not shown). Thereby, the first and second evacuation holes 3b and 3c are evacuated. Further, the anode block 3 has an argon gas supply hole 3a, and the tube V has a rare gas atmosphere of argon (500 to 1).
300 Pa).
【００１７】このグロー放電管１は、陽極管３ｄと試料
６との間に、それぞれ陽極ブロック３と陰極ブロック４
を介して、電源部（給電手段）１２により高電圧を印加
して、グロー放電の発生により生成されるアルゴンの陽
イオンを試料の分析面６ａに衝突させて、試料６をスパ
ッタリングするものである。また、冷却液を、陰極ブロ
ック４の図示しない冷却液導入路からジャケット内に導
入して冷却液排出路まで送給することにより、陰極ブロ
ック４を介し試料６を冷却している。さらに、冷却液
を、陽極ブロック３の図示しない冷却液導入路からジャ
ケット内に導入して冷却液排出路まで送給することによ
り、陽極管３ｄを冷却している。The glow discharge tube 1 has an anode block 3 and a cathode block 4 between an anode tube 3d and a sample 6, respectively.
A high voltage is applied by a power supply unit (power supply means) 12 through the interface to cause argon cations generated by the occurrence of glow discharge to collide with the analysis surface 6a of the sample, thereby sputtering the sample 6. . Further, the sample 6 is cooled through the cathode block 4 by introducing the coolant into the jacket from a coolant introduction passage (not shown) of the cathode block 4 and feeding it to the coolant discharge passage. Further, the anode tube 3d is cooled by introducing a coolant from a coolant inlet passage (not shown) of the anode block 3 into the jacket and feeding the coolant to a coolant outlet passage.
【００１８】次に、この装置の動作について説明する。
試料６の分析したい所望の部位が陽極管３ｄに対向する
よう位置させて、試料の分析面６ａを支持ブロック２に
当接させ、試料の背面６ｅに図示しないロボットハンド
等により陰極ブロック４を押しつけ導通接触させるとと
もに、試料６を保持する。また、図示しない減圧手段に
より支持ブロック２の内方空間Ｖが真空引きされ、アル
ゴンの希ガス雰囲気（５００〜１３００Ｐａ）にされる
と、試料の分析面６ａは、背面６ｅにかかる大気圧によ
っても、シール部材１１を介して支持ブロック２に押し
付けられ、密着する。Next, the operation of this device will be described.
The desired portion of the sample 6 to be analyzed is positioned so as to face the anode tube 3d, the analysis surface 6a of the sample is brought into contact with the support block 2, and the cathode block 4 is pressed against the back surface 6e of the sample by a robot hand (not shown) or the like. The sample 6 is held while making conductive contact. Further, when the inner space V of the support block 2 is evacuated by a depressurizing means (not shown) to be in a rare gas atmosphere of argon (500 to 1300 Pa), the analysis surface 6a of the sample is also affected by the atmospheric pressure applied to the back surface 6e. , Is pressed against the support block 2 via the seal member 11 and is brought into close contact therewith.
【００１９】そして、陽極ブロック３と陰極ブロック４
を通して、陽極管３ｄと試料６との間に、電源部（給電
手段）１２により数百〜数千ボルトの高電圧を印加する
と、グロー放電を生じ、アルゴンの陽イオンが生成され
る。このＡｒイオンにより試料６がスパッタリングさ
れ、発生した光Ｓは、窓板１３を透過し、図２の入射ス
リット２４を通して、分光器２２の回析格子２６に向か
う。この回析格子２６は、所定の波長の光を回析させ、
出射スリット２７を通して、光電子増倍管２８に入射さ
せる。光電子増倍管２８は入射した光の強度を測定す
る。すなわち、試料６の所望の部位の分析がなされる。The anode block 3 and the cathode block 4
When a high voltage of several hundreds to several thousand volts is applied between the anode tube 3d and the sample 6 by the power supply unit (power supply means) 12, glow discharge is generated, and cations of argon are generated. The sample 6 is sputtered by the Ar ions, and the generated light S passes through the window plate 13 and travels through the entrance slit 24 of FIG. 2 to the diffraction grating 26 of the spectroscope 22. The diffraction grating 26 diffracts light of a predetermined wavelength,
The light enters the photomultiplier tube 28 through the exit slit 27. The photomultiplier tube 28 measures the intensity of the incident light. That is, a desired portion of the sample 6 is analyzed.
【００２０】ここで、例えば、試料６が鋼板上に塗膜を
有するものであり、その塗膜を分析する場合等において
は、遅いスパッタ速度で分析が３０分程度の長時間に及
び、、図１において、特に支持ブロック２における陽極
管３ｄの先端周辺が、高温となるが、本実施形態におい
ては、その部分を金属またはセラミックスからなる耐熱
部材７で構成するので、十分高温に耐え、まれにアルゴ
ンイオンが衝突してもスパッタされにくく、支持ブロッ
ク２が長寿命である。したがって、支持ブロック２の頻
繁な交換を要さず、効率の高い分析が可能であり、ま
た、グロー放電の条件が長期間にわたって安定すること
から、信頼性の高い分析が可能になる。さらに、耐熱部
材７以外の本体５は、特に耐熱性を要求されず、絶縁性
が十分であれば足りるので、安価なベークライト、ジュ
ラコン、テフロン等の樹脂を用いることができ、長寿命
化と相まって、分析のランニングコストをいっそう低減
できる。Here, for example, when the sample 6 has a coating film on a steel plate and the coating film is analyzed, the analysis is performed at a low sputter rate for a long time of about 30 minutes. In 1, the temperature around the tip of the anode tube 3 d in the support block 2 is particularly high. In the present embodiment, the portion is made of a heat-resistant member 7 made of metal or ceramics. Even if argon ions collide, it is difficult to be sputtered, and the support block 2 has a long life. Therefore, high-efficiency analysis is possible without requiring frequent replacement of the support block 2, and the glow discharge conditions are stable for a long period of time, so that highly reliable analysis is possible. Further, since the main body 5 other than the heat-resistant member 7 does not particularly need to have heat resistance and only needs to have sufficient insulation properties, it is possible to use inexpensive resins such as bakelite, Duracon, Teflon, and the like, and to extend the life. In addition, the running cost of the analysis can be further reduced.
【００２１】さらにまた、本実施形態の装置が、試料６
に対し高周波の電圧が印加される高周波グロー放電発光
分光分析装置である場合には、高周波電力のロスを抑制
するよう、支持ブロック２には耐熱性、絶縁性の他に誘
電率の低さも要求されるが、本実施形態においては、耐
熱部材７以外の本体５は、特に耐熱性を要求されないこ
とから、絶縁性が十分なもののうち、誘電率のより低い
テフロン等の樹脂を用いることができ、高周波電力のロ
スを十分低減させることもできる。Further, the apparatus according to the present embodiment is configured so that the sample 6
In the case of a high-frequency glow discharge optical emission spectrometer to which a high-frequency voltage is applied, the support block 2 is required to have low dielectric constant in addition to heat resistance and insulation so as to suppress loss of high-frequency power. However, in the present embodiment, since the main body 5 other than the heat-resistant member 7 does not particularly need to have heat resistance, a resin such as Teflon having a lower dielectric constant can be used among those having sufficient insulating properties. In addition, the loss of high-frequency power can be sufficiently reduced.
【００２２】なお、図３に示すように、耐熱部材７は、
本体の貫通孔５ａの全長にわたって挿入されるものでも
よい。この場合でも、金属またはセラミックスからなる
耐熱部材７と図１の陽極ブロック３との間には、第２真
空排気孔３ｃによるギャップが形成されるので、試料６
および陰極ブロック４と陽極ブロック３との間の絶縁は
維持される。As shown in FIG. 3, the heat-resistant member 7 is
It may be inserted over the entire length of the through hole 5a of the main body. In this case as well, a gap is formed between the heat-resistant member 7 made of metal or ceramics and the anode block 3 of FIG.
And the insulation between the cathode block 4 and the anode block 3 is maintained.
【００２３】[0023]
【発明の効果】以上説明したように、本発明のグロー放
電管の支持部等によれば、耐熱性が要求され、消耗が問
題となる、支持部における陽極管先端の周辺を、金属ま
たはセラミックスからなる耐熱部材で構成するので、長
寿命であり、効率と信頼性の高い分析が可能になる。ま
た、耐熱部材以外の支持部の本体は、特に耐熱性を要求
されず、絶縁性が十分であれば足りるので、安価なベー
クライト、ジュラコン、テフロン等の樹脂を用いること
ができ、長寿命化と相まって、分析のランニングコスト
をいっそう低減できる。さらに、試料に対し高周波の電
圧が印加される高周波グロー放電発光分光分析装置にお
いては、高周波電力のロスを抑制するよう、支持部には
耐熱性、絶縁性の他に誘電率の低さも要求されるが、本
発明のグロー放電管の支持部によれば、耐熱部材以外の
本体は、特に耐熱性を要求されないことから、絶縁性が
十分なもののうち、誘電率のより低いテフロン等の樹脂
を用いることができ、高周波電力のロスを十分低減させ
ることもできる。As described above, according to the glow discharge tube support of the present invention, heat resistance is required and wear is a problem. Since it is composed of a heat-resistant member made of, it has a long life and enables highly efficient and reliable analysis. In addition, since the main body of the supporting portion other than the heat-resistant member does not particularly require heat resistance and has only sufficient insulation properties, it is possible to use an inexpensive resin such as bakelite, Duracon, and Teflon, and to extend the life. Together, the running costs of the analysis can be further reduced. Furthermore, in a high-frequency glow discharge optical emission spectrometer in which a high-frequency voltage is applied to a sample, the supporting portion is required to have a low dielectric constant in addition to heat resistance and insulation so as to suppress loss of high-frequency power. However, according to the support portion of the glow discharge tube of the present invention, the main body other than the heat-resistant member is not particularly required to have heat resistance. It can be used, and the loss of high frequency power can be sufficiently reduced.
【図１】本発明の一実施形態のグロー放電発光分光分析
装置のグロー放電管を示す部分縦断面図である。FIG. 1 is a partial longitudinal sectional view showing a glow discharge tube of a glow discharge optical emission spectrometer according to one embodiment of the present invention.
【図２】同上の分析装置を示す正面図である。FIG. 2 is a front view showing the analyzer according to the first embodiment;
【図３】本発明の他の実施形態のグロー放電管の支持部
を示す縦断面図である。FIG. 3 is a longitudinal sectional view showing a support portion of a glow discharge tube according to another embodiment of the present invention.
【図４】従来のグロー放電発光分光分析装置のグロー放
電管を示す部分縦断面図である。FIG. 4 is a partial longitudinal sectional view showing a glow discharge tube of a conventional glow discharge emission spectrometer.
１…グロー放電管、２…支持部（支持ブロック）、３ｄ
…陽極管、５…支持部本体、５ａ…貫通孔、６…試料、
７…耐熱部材、１２…給電手段。DESCRIPTION OF SYMBOLS 1 ... Glow discharge tube, 2 ... Support part (support block), 3d
... Anode tube, 5 ... Support part body, 5a ... Through hole, 6 ... Sample,
7: heat-resistant member, 12: power supply means.
Claims (2)
するグロー放電管と、 前記陽極管と試料との間に電圧を印加してグロー放電を
発生させる給電手段とを備えたグロー放電発光分光分析
装置のグロー放電管に用いられ、試料が当接される支持
部において、 試料が当接される面に向けて前記陽極管が挿入される貫
通孔を設けられた絶縁材からなる本体と、 その本体の貫通孔に少なくとも試料が当接される側にお
いて挿入され、内面が陽極管の外周に対向する筒状の金
属またはセラミックスからなる耐熱部材とを有すること
を特徴とするグロー放電管の支持部。1. A glow discharge tube comprising: a glow discharge tube having an anode tube for applying a voltage to a sample; and a power supply means for generating a glow discharge by applying a voltage between the anode tube and the sample. A body made of an insulating material, which is used for a glow discharge tube of an emission spectrometer and is provided with a through hole through which the anode tube is inserted toward a surface where the sample comes into contact, at a support portion where the sample comes into contact. A glow discharge tube, comprising: a heat-resistant member made of a metal or ceramic having a cylindrical shape, which is inserted at least on the side of the main body through which the sample comes into contact, and whose inner surface faces the outer periphery of the anode tube. Support.
のグロー放電管の支持部を用い、 試料に対し電圧が引加される陽極管を有するグロー放電
管と、 前記陽極管と試料との間に電圧を印加してグロー放電を
発生させる給電手段とを備えたグロー放電発光分光分析
装置。2. The method according to claim 1, wherein the supporting portion is configured to contact the sample.
A glow discharge tube having an anode tube to which a voltage is applied to a sample, using a supporting portion of the glow discharge tube, and a power supply unit for generating a glow discharge by applying a voltage between the anode tube and the sample. A glow discharge optical emission spectrometer equipped with:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05307898A JP3603121B2 (en) | 1998-03-05 | 1998-03-05 | Glow discharge tube support and glow discharge emission spectrometer using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05307898A JP3603121B2 (en) | 1998-03-05 | 1998-03-05 | Glow discharge tube support and glow discharge emission spectrometer using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11248631A true JPH11248631A (en) | 1999-09-17 |
| JP3603121B2 JP3603121B2 (en) | 2004-12-22 |
Family
ID=12932778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05307898A Expired - Fee Related JP3603121B2 (en) | 1998-03-05 | 1998-03-05 | Glow discharge tube support and glow discharge emission spectrometer using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3603121B2 (en) |
-
1998
- 1998-03-05 JP JP05307898A patent/JP3603121B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3603121B2 (en) | 2004-12-22 |
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