JPH11255596A - Apparatus for handling single crystal ingot, jig for handling single crystal ingot and jig assembly for handling single crystal ingot and handling of single crystal ingot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To take out a large-sized single crystal ingot of a heavy weight from an apparatus for pulling up the single crystal and place the single crystal in a laterally turned state in a prescribed place. SOLUTION: A ceiling crane 60 and a prescribed jig 10 are used to hold a single crystal ingot 1 and a part of the prescribed jig 10 is rotataly engaged with a rotation fulcral jig 40 by operating the ceiling crane 60. The single crystal ingot 1 can laterally be turned and placed at a desired position for carrying. The center of gravity of the jig 10 for handling the single crystal ingot 1 can be designed to be coincident with the center of gravity of the single crystal ingot 1 to thereby keep a vertical state of the single crystal ingot 1 in a hung state thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single crystal ingot handling method in which a single crystal ingot manufactured by a single crystal pulling apparatus is taken out of the single crystal pulling apparatus and placed laterally at a predetermined place. The present invention relates to an apparatus, a jig for handling a single crystal ingot, and a method for handling a single crystal ingot.

[0002]

2. Description of the Related Art A single crystal ingot, which is a crystal rod grown by a single crystal pulling apparatus, is taken out of the single crystal pulling apparatus by a bogie having a predetermined handling function in a vertical state. That is, there is a pallet or a trolley for transporting a crystal in which a movable carriage is placed beside the single crystal pulling apparatus, the single crystal ingot is taken out from the single crystal pulling apparatus by gripping the single crystal ingot with its arm or the like, and the single crystal ingot is placed. The single crystal ingot is moved to a predetermined location, and the gripped single crystal ingot is rotated by 90 degrees, rolled over to a horizontal state, lowered, and placed at the predetermined location.

[0003]

However, when the weight and size of the single crystal ingot to be manufactured are increased and the weight exceeds 400 kg or the length exceeds 2000 mm, the conventional bogie having a handling function is used as it is. It will be difficult to do. In other words, the weight of the bogie itself is increased according to the weight and size of the single crystal ingot to be handled, and it is inevitable to prevent the bogie itself from overturning when gripping and rotating the single crystal ingot. The truck is extremely large. Further, if the weight of the single crystal ingot is so large, it is impossible to manually replace the single crystal ingot for which the rollover has been completed to the predetermined mounting position.

Accordingly, the present invention provides a single crystal ingot handling apparatus, a single crystal ingot handling jig, and a single crystal ingot handling apparatus capable of taking out a heavy and large single crystal ingot from a single crystal pulling apparatus and placing the single crystal ingot on a predetermined location in a rolled state. An object of the present invention is to provide a crystal ingot handling method.

[0005]

In order to achieve the above object, in the present invention, a single crystal ingot is gripped by using an overhead crane and a predetermined jig instead of a conventional bogie, and the single crystal is moved by operating the overhead crane. The ingot is turned over so that it can be mounted at a desired mounting position.

That is, according to the present invention, an overhead crane movably provided on the ceiling of a room, a main body extending along the single crystal ingot, and a tail supporting the single crystal ingot, A tail support portion attached to the main body, a straight body support portion supporting the straight body of the single crystal ingot, and a straight body support portion attached to the body portion; A crane member engaging portion for suspending a portion, and a floor member attached to a lower portion of the main body portion and capable of engaging with an engaging portion provided on the floor when the main body portion is suspended by the crane. And a jig for handling a single crystal ingot having a joining portion.

Further, according to the present invention, a main body extending along the single crystal ingot, a tail support for supporting the tail of the single crystal ingot, and attached to the main body, A straight body support portion that supports the straight body portion and is attached to the body portion; a crane member engaging portion that is attached to an upper portion of the body portion and that suspends the body portion with a crane; A jig for handling a single crystal ingot, the jig being attached to a lower portion of the single crystal ingot and having a floor engaging portion that can be engaged with an engaging portion provided on a floor when the main body portion is suspended by the crane. You.

Further, according to the present invention, the single crystal ingot can be supported, is structured to be suspended by the suspending means, and is attached to the lower end when the longitudinal direction is suspended substantially vertically. First having a provided rotation axis
A jig assembly for handling a single crystal ingot, comprising: a jig; and a second jig in which the rotation shaft is rotatably housed.

Further, according to the present invention, an overhead crane movably provided on a ceiling of a room, a main body extending along a single crystal ingot, and a tail supporting the single crystal ingot, The tail support portion attached to the, support the straight body of the single crystal ingot, a straight body support portion attached to the main body, attached to the upper part of the main body, the main body with a crane A crane member engaging portion for suspending, and a floor engaging portion attached to a lower portion of the main body portion and capable of engaging with an engaging portion provided on the floor when the main body portion is suspended by the crane. And a jig for handling a single crystal ingot having a single crystal ingot using a single crystal ingot handling device having the single crystal ingot. The single crystal ingot is taken out of the single crystal pulling device and placed laterally at a predetermined location. A crystal ingot handling method, wherein the crane suspends the single crystal ingot handling jig, and operates the crane to pull up the single crystal ingot handling jig by a single crystal pulling apparatus. Step of following the side of the single crystal ingot, and the tail support,
The step of supporting the single crystal ingot by the straight body supporting portion, and the step of operating the crane to suspend the single crystal ingot handling jig in a state where the single crystal ingot is supported in the predetermined state while suspending the single crystal ingot handling jig. Moving the crane to a location, operating the crane to engage the floor engaging portion with the engaging portion provided on the floor, and operating the crane to support the single crystal ingot. Bringing the jig for handling single crystal ingot in the state into a substantially horizontal state.

Further, according to the present invention, the suspension means and the single crystal ingot can be supported, the structure is suspended by the suspension means, and the longitudinal direction thereof is suspended substantially vertically. A single crystal using a single crystal ingot handling jig assembly having a first jig having a rotation axis provided at a lower end portion at the time of the above and a second jig capable of rotatably storing the rotation axis. A single crystal ingot handling method for removing an ingot from a single crystal pulling apparatus and placing the ingot laterally at a predetermined location, wherein the suspending means suspends the first jig, and operating the suspending means. Moving the first jig along the side surface of the single crystal ingot pulled up by the single crystal pulling apparatus; and moving the single crystal ingot by the first jig. Operating the suspending means, moving the first jig supporting the single crystal ingot to the predetermined position in a suspended state, and operating the suspending means. Engaging the rotatable shaft provided on the second jig with a rotatable housing portion, and operating the hanging means to support the first crystal ingot in the first jig.
Bringing the jig into a substantially horizontal state.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of a preferred embodiment of a single crystal ingot handling apparatus according to the present invention. This single crystal ingot handling apparatus turns a ceiling crane 60 provided on a ceiling 52 such as a factory or a work place, a single crystal ingot handling jig 10 (first jig), and a single crystal ingot handling jig 10. It has a rotation fulcrum jig 40 (second jig) that sometimes provides a rotation fulcrum. The overhead crane 60 includes a rail 34 attached to the ceiling 52, a movable pulley 26 movable along the rail 34, a fixed fixed pulley 28, and a wire drive motor 30 via the movable pulley 26 and the fixed pulley 28. Wire 2 driven by
4. Hook 22 attached to one end of wire 24, counterweight 3 attached to the other end of wire 24
2. Motor for driving the moving pulley for moving the moving pulley 26
6. The wire drive motor 30 and the moving pulley drive motor 36 are controlled by a control device (not shown).

Single crystal ingot handling jig 10
Is a main body 12 extending along the single crystal ingot 1,
The tail portion 1C of the single crystal ingot 1 is supported, and the main body portion 1C is supported.
2, supporting the straight support 1C of the single crystal ingot 1 and the straight support 1 4A, 14B mounted on the main body 12, and the tail support 14C mounted on the main body 12. A crane member engaging portion 16 for engaging with the hook 22 of the overhead crane 60 and suspending the main body portion 12;
2 is suspended by the overhead traveling crane 60, the rotation fulcrum shaft 1 that can be engaged with the rotation fulcrum jig 40 provided on the floor 50.
9. 1A is an upper cone portion of the single crystal ingot 1.

Tail support 14C and straight body support 14
A and 14B have arms that can be opened and closed, and their opening and closing are controlled by an air cylinder (not shown). The main body 12 has a U-shaped frame structure as a whole, and is composed of two rigid members and bridge members 11A, 11B, 11C, 11D connecting between them, as shown in the rear view of FIG. Have been. It has an upper end portion 18A and a lower end portion 18B in a state where the single crystal ingot 1 of FIG. 1 is vertically lifted, and a spine portion which connects them and extends along the single crystal ingot 1. Counter balances 8A and 8B are attached near the top ends of the upper end 18A and the lower end 18B, respectively.

Due to the presence of the counter balances 8A and 8B, when only the single crystal ingot handling jig 10 is lifted by the overhead crane 60 (at a light load),
The single crystal ingot handling jig 10 is in a vertical state, and also in a state in which the single crystal ingot 1 is supported (at heavy load) as shown in FIG. 1. That is, the jig 1 for handling a single crystal ingot
0 is suspended by the overhead crane 60, and the center of gravity of the single crystal ingot 1 is supported by the tail support portion 14C and the straight body support portions 14A and 14B while being suspended by the overhead crane 60. The weight is distributed so that the line connecting the position of the center of gravity coincides with the direction of gravity. Also, the counterbalances 8A and 8B are adjusted so that the center of gravity of the single crystal ingot handling jig 10 is located at the center of the circular section of the single crystal ingot 1 supported by the straight body support portions 14A and 14B. Can be adjusted appropriately.

The rotation fulcrum shaft 19 is connected to the lower end 18 of the main body 12.
It is attached to the outside of B by welding or by a predetermined fastening member. As shown in FIG. 2, the rotation fulcrum shaft 19 projects outward from two frame members constituting the main body 12. The rotation fulcrum jig 40 is placed on the floor 50. The rotation fulcrum jig 40 has a plurality of casters 46A and 46B and handles 44A and 44B.
By operating B, the casters 46A and 46B can be taken in and out from the bottom surface of the rotation fulcrum jig 40. That is, the casters 46A and 46B are extended when the rotary fulcrum jig 40 is moved, and the casters 4A and 46B are used when the jig 10 is used together with the single crystal ingot handling jig 10.
The lower ends of the main body 42 of the rotation fulcrum jig 40 are fixed to the floor 50 with bolts (not shown). An openable and closable bearing is provided above the rotation fulcrum jig 40. The bearing portion has a substantially semicircular concave portion 47A provided at the upper part of the main body 42 and a similar substantially semicircular concave portion 47B, and is constituted by a lid portion 48 which can be opened and closed with a hinge. The fastener 49B is engaged with a fastener 49A provided on the upper portion of the main body 42 and can be mutually locked. The substantially semicircular concave portions 47A and 47B have a size such that the rotation fulcrum shaft 19 is rotatably supported therein when the lid portion 48 is closed.

The single crystal ingot handling apparatus of FIG. 1 operates as follows. First, the single crystal ingot handling jig 10 is suspended by the overhead crane 60, and the single crystal ingot handling jig 10 is pulled up by a single crystal pulling device (not shown) by operating the overhead crane 60. Follow one side. The single crystal ingot 1 is supported by the tail support portion 14C and the straight body portion support portions 14A and 14B. Overhead crane 60
Is operated to move the single crystal ingot handling jig 10 supporting the single crystal ingot 1 to a predetermined place in a suspended state.

FIGS. 3 (a) and 3 (b) and FIGS. 4 (a) and 4 (b)
FIG. 3 is a view showing a process until the single crystal ingot 1 is rolled over by a single crystal ingot handling device. By operating the overhead crane 60, the rotation fulcrum shaft 19 is positioned above the rotation fulcrum jig 40 in a state where the rotation fulcrum shaft 19 is placed and fixed at a predetermined position, and as shown in FIG. The jig 10 is positioned directly above the substantially semicircular recess 47A. Next, by operating the overhead crane 60,
The single crystal ingot handling jig 10 is lowered as shown by an arrow M1 so that the rotation fulcrum shaft 19 is received by 47A. When the rotation fulcrum shaft 19 is received by 47A, the lid 48 is closed as shown in FIG. 4A, and the fastener 49B is engaged with the fastener 49A to lock them together.

Next, the moving pulley 26 of FIG. 1 is moved leftward in the figure, and the wire 24 is moved as shown by an arrow M2 in FIG. 4 (a). In this state, the single crystal ingot handling jig 10 is tilted leftward in the drawing as shown by the arrow M3. When the inclination of the single crystal ingot handling jig 10 increases, the lower end portion 18B of the main body 12 rotates into the internal space 41 (see FIG. 2) of the rotation fulcrum jig 40 around the rotation fulcrum shaft 19. Since the rotary fulcrum jig 40 penetrates, any part of the rotary fulcrum jig 40 does not become an obstacle. That is, it has a bifurcated structure or U-shape so that the rotation fulcrum jig 40 can provide a space in which the lower end portion 18B can enter.

By operating the overhead crane 60, the wire 24
As shown by arrow M4, as the descent is further lowered, the single crystal ingot handling jig 10 and the single crystal ingot 1 gradually increase in inclination, and roll over to the horizontal position as shown in FIG. 4 (b). When the single crystal ingot handling jig 10 supporting the single crystal ingot 1 is in a horizontal state, the straight body support 14A,
The single crystal ingot 1 can be placed on a predetermined pallet, crystal carrier, or the like (not shown) by opening the arm of the tail support 14 and the tail support portion 14B. In addition, single crystal ingot 1
When the overhead crane 60 hangs the jig 10 for handling a single crystal ingot while supporting the single crystal ingot, the center of gravity is set as described above. The tool and the single crystal ingot 1 are held vertically without tilting.

[0020]

As described above, according to the present invention, since the overhead crane and the predetermined single crystal ingot handling jig are used in combination, there are the following advantages. In other words, there is no need to use a conventional truck with a large size, and thus there is no risk of the truck falling over. Further, it is advantageous in terms of the weight of the entire apparatus, the installation area, and the setting place, as compared with the case of using a cart. Further, since the path for moving the single crystal ingot is a free space, it is not necessary to secure a special passage for the transport trolley as in the case of using the conventional trolley. Furthermore, when placing the single crystal ingot at a desired location,
The single crystal ingot can be rolled over only by the operation of the crane, and there is no need to drive the bogie or perform the placing operation by human power, and the series of operations from the removal of the single crystal ingot to the predetermined place is simplified.

[Brief description of the drawings]

FIG. 1 is a schematic view of a preferred embodiment of a single crystal ingot handling apparatus according to the present invention.

FIG. 2 is a rear view of a main part of the single crystal ingot handling apparatus of FIG.

FIG. 3 is a first half of an explanatory view showing a process from operating the crane to turning over the single crystal ingot from the state of FIG. 1;

FIG. 4 is a latter half of an explanatory diagram showing a process from the state of FIG. 1 to the operation of the crane to roll over the single crystal ingot.

[Explanation of symbols]

Reference Signs List 1 Single crystal ingot 8A, 8B Counter balance 10 Single crystal ingot handling jig (first jig) 12 Main body 14A, 14B Straight body support 14C Tail support 16 Crane member engaging part 18A Upper end 18B Lower end DESCRIPTION OF SYMBOLS 19 Rotation fulcrum shaft (floor engagement part) 22 Hook 24 Wire 26 Moving pulley 28 Fixed pulley 30 Wire drive motor 32 Counter weight 34 Rail 36 Moving pulley drive motor 40 Rotation fulcrum jig (engagement part / second jig) 41 Internal space of rotary fulcrum jig 48 Lid 49A, 49B Fastener 60 Overhead crane (hanging means)

Claims (11)

[Claims] An overhead crane movably provided on a ceiling of a room, a main body extending along a single crystal ingot, a tail supporting the tail of the single crystal ingot, and a tail attached to the main body. A support portion, for supporting a straight body portion of the single crystal ingot, and a straight body portion support portion attached to the body portion, and attached to an upper portion of the body portion, for suspending the body portion with the overhead crane. And a floor engaging portion attached to a lower portion of the main body portion and capable of engaging with an engaging portion provided on the floor when the main body portion is suspended by the crane. A single crystal ingot handling apparatus, comprising: a jig for handling a single crystal ingot. 2. A main body extending along the single crystal ingot, a tail supporting the single crystal ingot, and a tail support attached to the main body, and supporting a straight body of the single crystal ingot. A straight body support portion attached to the main body portion; a crane member engaging portion attached to an upper portion of the main body portion for suspending the main body portion with a crane; and a crane member engaging portion attached to a lower portion of the main body portion. A single crystal ingot handling jig comprising: an engaging portion provided on a floor; and a floor engaging portion engageable with the engaging portion when the main body portion is suspended by the crane. 3. The single crystal ingot handling device according to claim 2, wherein the engaging portion provided on the floor is a concave portion, and the floor engaging portion is a protrusion insertable into the concave portion. jig. 4. The jig for handling a single crystal ingot according to claim 2, wherein said straight body portion support portion has an arm which can be opened and closed. 5. A position of a center of gravity in a state where only the single crystal ingot handling jig is suspended by the crane, the single crystal ingot is supported by the tail support portion and the straight body portion support portion, and 3. The jig for handling a single crystal ingot according to claim 2, wherein weights are distributed such that a line connecting the position of the center of gravity in a state of being suspended by the crane coincides with the direction of gravity. 6. A center of gravity of the jig for handling a single crystal ingot is located at a center of a circular section in which the single crystal ingot is supported by the straight body support. The described jig for handling a single crystal ingot. 7. A rotating shaft which can support a single crystal ingot, is suspended by suspending means, and is provided at a lower end portion when the longitudinal direction is suspended substantially vertically. A jig assembly for handling a single crystal ingot, comprising: a first jig having a first jig; and a second jig capable of rotatably housing the rotation shaft. 8. The single crystal according to claim 7, wherein said second jig further comprises means for locking said rotating shaft so as not to come off from a position where said rotating shaft can be rotatably stored. Jig assembly for ingot handling. 9. The unit according to claim 7, wherein the second jig has a U-shaped portion to provide a space through which a part of the first jig rotates when the first jig rotates. Jig assembly for crystal ingot handling. 10. A ceiling crane movably provided on a ceiling of a room, a main body extending along the single crystal ingot, a tail supporting the tail of the single crystal ingot, and a tail attached to the main body. A support portion, a straight body support portion supporting the straight body portion of the single crystal ingot, and a straight body support portion attached to the body portion; and a crane attached to an upper portion of the body portion for suspending the body portion by a crane. A single crystal having a member engaging portion and a floor engaging portion attached to a lower portion of the main body portion and capable of engaging with an engaging portion provided on a floor when the main body portion is suspended by the crane. A jig for ingot handling, a single crystal ingot which is taken out of the single crystal pulling device using a single crystal ingot handling device having the jig, and placed laterally at a predetermined place. A step of suspending the single crystal ingot handling jig by the crane; and operating the crane to pull the single crystal ingot handling jig up by a single crystal pulling apparatus. The step of following the side surface of the ingot; the step of supporting the single crystal ingot by the tail support portion and the straight body portion support portion; and operating the crane to support the single crystal ingot. Moving the jig for single crystal ingot handling to the predetermined place in a suspended state; and operating the crane to engage the floor engaging portion with the engaging portion provided on the floor. Operating the crane to handle the single crystal ingot in a state of supporting the single crystal ingot; Single crystal ingot handling methods and steps have to use jig substantially horizontal state. 11. A suspending means and a single crystal ingot which can be supported and have a structure which can be suspended by said suspending means, and a lower end thereof when suspended in a substantially vertical direction. A single crystal ingot is pulled up by using a single crystal ingot handling jig assembly having a first jig having a rotation axis provided in a first jig and a second jig capable of rotatably storing the rotation axis. A method for handling a single crystal ingot, which is taken out of an apparatus and placed laterally at a predetermined location, wherein the first jig is suspended by the suspending means, and the first jig is operated by operating the suspending means. Aligning the tool along the side surface of the single crystal ingot pulled up by the single crystal pulling device; and supporting the single crystal ingot by the first jig. Operating the suspending means to move the first jig supporting the single crystal ingot to the predetermined location in a suspended state; and operating the suspending means, Engaging the rotating shaft provided on the second jig with a portion rotatably accommodated; operating the suspending means to move the first jig in a state of supporting the single crystal ingot; A single crystal ingot handling method comprising the steps of: bringing a substantially horizontal state.