JPH11261100A5 - - Google Patents
Info
- Publication number
- JPH11261100A5 JPH11261100A5 JP1998056446A JP5644698A JPH11261100A5 JP H11261100 A5 JPH11261100 A5 JP H11261100A5 JP 1998056446 A JP1998056446 A JP 1998056446A JP 5644698 A JP5644698 A JP 5644698A JP H11261100 A5 JPH11261100 A5 JP H11261100A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing
- optical semiconductor
- chlorine
- mesa structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10056446A JPH11261100A (ja) | 1998-03-09 | 1998-03-09 | 光半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10056446A JPH11261100A (ja) | 1998-03-09 | 1998-03-09 | 光半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11261100A JPH11261100A (ja) | 1999-09-24 |
| JPH11261100A5 true JPH11261100A5 (2) | 2004-11-25 |
Family
ID=13027331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10056446A Pending JPH11261100A (ja) | 1998-03-09 | 1998-03-09 | 光半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11261100A (2) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3544352B2 (ja) | 2000-10-30 | 2004-07-21 | 日本電気株式会社 | 半導体受光素子 |
| JP2006066488A (ja) * | 2004-08-25 | 2006-03-09 | Mitsubishi Electric Corp | 半導体受光素子およびその製造方法 |
| JP4770645B2 (ja) * | 2006-08-28 | 2011-09-14 | 三菱電機株式会社 | 半導体レーザ素子の製造方法 |
| JP4899755B2 (ja) * | 2006-09-28 | 2012-03-21 | 住友電気工業株式会社 | 半導体光素子を作製する方法 |
| US20210313772A1 (en) * | 2018-11-01 | 2021-10-07 | Mitsubishi Electric Corporation | Optical semiconductor device and method for manufacturing optical semiconductor device |
| CN111541149B (zh) * | 2020-05-15 | 2021-06-08 | 陕西源杰半导体技术有限公司 | 一种10g抗反射激光器及其制备工艺 |
-
1998
- 1998-03-09 JP JP10056446A patent/JPH11261100A/ja active Pending
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