JPH11271966A - Photosensitive resin composition and photosensitive element using the same - Google Patents
Photosensitive resin composition and photosensitive element using the sameInfo
- Publication number
- JPH11271966A JPH11271966A JP7637798A JP7637798A JPH11271966A JP H11271966 A JPH11271966 A JP H11271966A JP 7637798 A JP7637798 A JP 7637798A JP 7637798 A JP7637798 A JP 7637798A JP H11271966 A JPH11271966 A JP H11271966A
- Authority
- JP
- Japan
- Prior art keywords
- component
- weight
- group
- resin composition
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 22
- 150000001875 compounds Chemical class 0.000 claims abstract description 34
- 229920000642 polymer Polymers 0.000 claims abstract description 13
- 239000011230 binding agent Substances 0.000 claims abstract description 12
- 125000002947 alkylene group Chemical group 0.000 claims abstract description 11
- 239000003999 initiator Substances 0.000 claims abstract description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 5
- 125000004432 carbon atom Chemical group C* 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 abstract description 9
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract description 6
- 230000036211 photosensitivity Effects 0.000 abstract description 6
- 238000007747 plating Methods 0.000 description 22
- -1 neopentylene group Chemical group 0.000 description 17
- 239000000243 solution Substances 0.000 description 13
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 12
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 6
- 239000001294 propane Substances 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 239000003513 alkali Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920006254 polymer film Polymers 0.000 description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910000365 copper sulfate Inorganic materials 0.000 description 3
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- 206010034960 Photophobia Diseases 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 125000005907 alkyl ester group Chemical group 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 208000013469 light sensitivity Diseases 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 125000004817 pentamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 2
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920005650 polypropylene glycol diacrylate Polymers 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 229910000027 potassium carbonate Inorganic materials 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- KWKAKUADMBZCLK-UHFFFAOYSA-N 1-octene Chemical group CCCCCCC=C KWKAKUADMBZCLK-UHFFFAOYSA-N 0.000 description 1
- VBHXIMACZBQHPX-UHFFFAOYSA-N 2,2,2-trifluoroethyl prop-2-enoate Chemical compound FC(F)(F)COC(=O)C=C VBHXIMACZBQHPX-UHFFFAOYSA-N 0.000 description 1
- VHJHZYSXJKREEE-UHFFFAOYSA-N 2,2,3,3-tetrafluoropropyl prop-2-enoate Chemical compound FC(F)C(F)(F)COC(=O)C=C VHJHZYSXJKREEE-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- GZBSIABKXVPBFY-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)CO GZBSIABKXVPBFY-UHFFFAOYSA-N 0.000 description 1
- MDKSQNHUHMMKPP-UHFFFAOYSA-N 2,5-bis(4-methoxyphenyl)-4-phenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC(OC)=CC=2)N1 MDKSQNHUHMMKPP-UHFFFAOYSA-N 0.000 description 1
- CTWRMVAKUSJNBK-UHFFFAOYSA-N 2-(2,4-dimethoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class COC1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 CTWRMVAKUSJNBK-UHFFFAOYSA-N 0.000 description 1
- NSWNXQGJAPQOID-UHFFFAOYSA-N 2-(2-chlorophenyl)-4,5-diphenyl-1h-imidazole Chemical class ClC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 NSWNXQGJAPQOID-UHFFFAOYSA-N 0.000 description 1
- UIHRWPYOTGCOJP-UHFFFAOYSA-N 2-(2-fluorophenyl)-4,5-diphenyl-1h-imidazole Chemical class FC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 UIHRWPYOTGCOJP-UHFFFAOYSA-N 0.000 description 1
- RHAXDUJFRIRFLY-UHFFFAOYSA-N 2-(3-methoxyphenyl)-1h-imidazole Chemical class COC1=CC=CC(C=2NC=CN=2)=C1 RHAXDUJFRIRFLY-UHFFFAOYSA-N 0.000 description 1
- SNFCQJAJPFWBDJ-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 SNFCQJAJPFWBDJ-UHFFFAOYSA-N 0.000 description 1
- QHVBLSNVXDSMEB-UHFFFAOYSA-N 2-(diethylamino)ethyl prop-2-enoate Chemical compound CCN(CC)CCOC(=O)C=C QHVBLSNVXDSMEB-UHFFFAOYSA-N 0.000 description 1
- DPBJAVGHACCNRL-UHFFFAOYSA-N 2-(dimethylamino)ethyl prop-2-enoate Chemical compound CN(C)CCOC(=O)C=C DPBJAVGHACCNRL-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
- NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical compound OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 1
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 1
- MTRFEWTWIPAXLG-UHFFFAOYSA-N 9-phenylacridine Chemical compound C1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MTRFEWTWIPAXLG-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229920002126 Acrylic acid copolymer Polymers 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical class OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000005058 Isophorone diisocyanate Substances 0.000 description 1
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- RVWADWOERKNWRY-UHFFFAOYSA-N [2-(dimethylamino)phenyl]-phenylmethanone Chemical compound CN(C)C1=CC=CC=C1C(=O)C1=CC=CC=C1 RVWADWOERKNWRY-UHFFFAOYSA-N 0.000 description 1
- TUOBEAZXHLTYLF-UHFFFAOYSA-N [2-(hydroxymethyl)-2-(prop-2-enoyloxymethyl)butyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(CC)COC(=O)C=C TUOBEAZXHLTYLF-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- ARNIZPSLPHFDED-UHFFFAOYSA-N [4-(dimethylamino)phenyl]-(4-methoxyphenyl)methanone Chemical compound C1=CC(OC)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 ARNIZPSLPHFDED-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910001854 alkali hydroxide Inorganic materials 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 229910000318 alkali metal phosphate Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical group C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 235000011180 diphosphates Nutrition 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920003145 methacrylic acid copolymer Polymers 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- RUELTTOHQODFPA-UHFFFAOYSA-N toluene 2,6-diisocyanate Chemical compound CC1=C(N=C=O)C=CC=C1N=C=O RUELTTOHQODFPA-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 150000007934 α,β-unsaturated carboxylic acids Chemical class 0.000 description 1
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Polymerisation Methods In General (AREA)
- Graft Or Block Polymers (AREA)
- Paints Or Removers (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、感光性樹脂組成物
及びこれを用いた感光性エレメントに関する。The present invention relates to a photosensitive resin composition and a photosensitive element using the same.
【0002】[0002]
【従来の技術】従来、プリント回路板の製造分野におい
て、エッチング、メッキ等に用いられるレジスト材料と
しては、感光性樹脂組成物及びそれに支持体と保護フィ
ルムを用いて得られる感光性エレメントが広く用いられ
ている。プリント回路板は、感光性フィルムを銅基板上
にラミネートして、パターン露光した後、未露光部を現
像液で除去し、エッチング又はメッキ処理を施して、パ
ターンを形成させた後、硬化部分を基板上から剥離除去
する方法によって製造されている。2. Description of the Related Art Conventionally, in the field of manufacturing printed circuit boards, a photosensitive resin composition and a photosensitive element obtained using a support and a protective film have been widely used as a resist material for etching, plating and the like. Have been. The printed circuit board is formed by laminating a photosensitive film on a copper substrate, exposing it to a pattern, removing the unexposed portion with a developing solution, etching or plating to form a pattern, and curing the cured portion. It is manufactured by a method of peeling off from the substrate.
【0003】この未露光部の除去を行う現像液として
は、炭酸水素ナトリウム溶液等を使用するアルカリ現像
型が主流になっており、現像液は、通常、ある程度感光
層を溶解する能力がある限り使用され、使用時には現像
液中に感光性樹脂組成物が溶解又は分散される。近年の
印刷配線板の高密度化に伴い、銅基板とパターン形成さ
れた感光層との接触面積が小さくなる為、現像、エッチ
ング又はメッキ処理工程で優れた接着力、機械強度、耐
薬品性、柔軟性等が要求される。この種の特性のうち、
耐薬品性を向上させるのにビスフェノールA骨格をもつ
光重合性化合物を使用する方法が、特公平7−2720
5号公報に記載されているが、硬化膜が脆くなる傾向が
ある。また、耐薬品性と柔軟性を両立させた光重合性組
成物が、特開平8−286372に記載されているが、
解像度が若干劣るり高密度化対応が必ずしも充分ではな
いという問題がある。[0003] As a developing solution for removing the unexposed portion, an alkali developing type using a sodium hydrogen carbonate solution or the like is mainly used, and the developing solution usually has a capacity to dissolve the photosensitive layer to some extent. It is used, and at the time of use, the photosensitive resin composition is dissolved or dispersed in the developer. Due to the recent increase in the density of printed wiring boards, the contact area between the copper substrate and the patterned photosensitive layer has become smaller, so that excellent adhesive strength, mechanical strength, chemical resistance, Flexibility is required. Of this kind of property,
A method using a photopolymerizable compound having a bisphenol A skeleton to improve chemical resistance is disclosed in Japanese Patent Publication No. 7-2720.
Although described in Japanese Patent Publication No. 5 (KOKAI) No. 5, the cured film tends to be brittle. Further, a photopolymerizable composition having both chemical resistance and flexibility is described in JP-A-8-286372.
There is a problem in that the resolution is slightly inferior and the high density correspondence is not always sufficient.
【0004】[0004]
【発明が解決しようとする課題】請求項1、2及び3記
載の発明は、光感度、解像性、耐薬品性(耐メッキ
性)、密着性、機械強度、柔軟性等に優れた感光性樹脂
組成物を提供するものである。請求項4記載の発明は、
光感度、解像性、耐薬品性(耐メッキ性)、密着性、機
械強度、柔軟性、環境性、作業性等に優れた感光性エレ
メントを提供するものである。SUMMARY OF THE INVENTION The inventions according to claims 1, 2 and 3 provide a photosensitive material having excellent photosensitivity, resolution, chemical resistance (plating resistance), adhesion, mechanical strength, flexibility and the like. The present invention provides a conductive resin composition. The invention according to claim 4 is
An object of the present invention is to provide a photosensitive element excellent in photosensitivity, resolution, chemical resistance (plating resistance), adhesion, mechanical strength, flexibility, environment, workability, and the like.
【0005】[0005]
【課題を解決するための手段】本発明は、(A)バイン
ダーポリマ、(B)分子内に重合可能なエチレン性不飽
和基を有する化合物及び(C)光重合開始剤を含み、前
記(B)成分が一般式(I)The present invention comprises (A) a binder polymer, (B) a compound having a polymerizable ethylenically unsaturated group in a molecule, and (C) a photopolymerization initiator. ) Component of the general formula (I)
【化4】 (式中、R1は炭素数1〜10のアルキレン基を示し、
3個のR1は同一であっても相異してもよく、R2は次の
一般式Embedded image (Wherein, R 1 represents an alkylene group having 1 to 10 carbon atoms;
The three R 1 s may be the same or different, and R 2 has the following general formula
【化5】 (式中、R3は水素原子又はメチル基を示し、X1は炭素
数2〜6のアルキレン基を示し、nは1〜14の整数で
ある)で表される基を示し、3個のR2は同一であって
も相異してもよい)で示される化合物及び一般式(II)Embedded image (Wherein, R 3 represents a hydrogen atom or a methyl group, X 1 represents an alkylene group having 2 to 6 carbon atoms, and n is an integer of 1 to 14), and 3 R 2 may be the same or different) and a compound represented by the general formula (II)
【化6】 (式中R4及びR5は各々独立して水素原子又はメチル基
を示し、X2及びX3は各々独立して炭素数2〜6のアル
キレン基を示し、k及びmはk+m=8〜40となるよ
うに選ばれる正の整数である)で表される化合物を必須
成分として含む感光性樹脂組成物に関する。Embedded image (Wherein R 4 and R 5 each independently represent a hydrogen atom or a methyl group, X 2 and X 3 each independently represent an alkylene group having 2 to 6 carbon atoms, and k and m represent k + m = 8 to A positive integer selected to be 40) as an essential component.
【0006】また、本発明は、(A)バインダーポリマ
が、酸価が100〜500であり、重量平均分子量が2
0,000〜300,000である前記の感光性樹脂組
成物に関する。また、本発明は、(A)成分、(B)成
分及び(C)成分の使用割合が、(A)成分及び(B)
成分の総量100重量部に対し、(A)成分が40〜8
0重量部、(B)成分が20〜60重量部及び(C)成
分が0.1〜20重量部であり、(B)成分中の上記一
般式(I)で表される化合物及び一般式(II)で表され
る化合物が各々3〜50重量部以上含まれる前記の感光
性樹脂組成物に関する。また、本発明は、前記感光性樹
脂組成物を支持体上に塗布、乾燥してなる感光性エレメ
ントに関する。In the present invention, the binder polymer (A) preferably has an acid value of 100 to 500 and a weight average molecular weight of 2
The present invention relates to the photosensitive resin composition having a molecular weight of from 0.000 to 300,000. Further, in the present invention, the use ratios of the component (A), the component (B) and the component (C) are as follows.
Component (A) is 40 to 8 with respect to 100 parts by weight of the total amount of components.
0 parts by weight, 20 to 60 parts by weight of the component (B) and 0.1 to 20 parts by weight of the component (C), and the compound represented by the general formula (I) in the component (B) and the general formula The present invention relates to the above-mentioned photosensitive resin composition containing the compound represented by (II) in an amount of 3 to 50 parts by weight or more. The present invention also relates to a photosensitive element obtained by applying the photosensitive resin composition on a support and drying the composition.
【0007】[0007]
【発明の実施の形態】本発明の感光性樹脂組成物は、
(A)バインダーポリマ、(B)分子内に重合可能なエ
チレン性不飽和基を有する化合物及び(C)光重合開始
剤を含み、前記(B)成分が、上記一般式(I)及び一
般式(II)で表される化合物を必須成分として含むもの
である。BEST MODE FOR CARRYING OUT THE INVENTION The photosensitive resin composition of the present invention comprises
(A) a binder polymer, (B) a compound having a polymerizable ethylenically unsaturated group in a molecule, and (C) a photopolymerization initiator, wherein the component (B) is represented by the general formula (I) or the general formula It contains the compound represented by (II) as an essential component.
【0008】本発明における(A)バインダーポリマと
しては、例えば、アクリル酸、メタクリル酸、これらと
共重合しうるビニルモノマ等を共重合させて得られるの
ビニル共重合体等が挙げられ、これらの共重合体は、単
独で又は2種類以上を組み合わせて使用される。前記ビ
ニルモノマとしては、特に制限はなく、例えばアクリル
酸メチルエステル、アクリル酸エチルエステル、アクリ
ル酸ブチルエステル、アクリル酸2−エチルヘキシルエ
ステル、アクリル酸テトラヒドロフルフリルエステル、
アクリル酸ジメチルアミノエチルエステル、アクリル酸
ジエチルアミノエチルエステル、メタクリル酸グリシジ
ルエステル、2,2,2−トリフルオロエチルアクリレ
ート、2,2,3,3−テトラフルオロプロピルアクリ
レート、以上に対応するメタクリル酸エステル、アクリ
ルアミド、ジアセトンアクリルアミド、スチレン、ビニ
ルトルエン等が挙げられる。Examples of the binder polymer (A) in the present invention include acrylic acid, methacrylic acid, and vinyl copolymers obtained by copolymerizing vinyl monomers copolymerizable therewith. The polymers are used alone or in combination of two or more. The vinyl monomer is not particularly limited, for example, methyl acrylate, ethyl acrylate, butyl acrylate, 2-ethylhexyl acrylate, tetrahydrofurfuryl acrylate,
Dimethylaminoethyl acrylate, diethylaminoethyl acrylate, glycidyl methacrylate, 2,2,2-trifluoroethyl acrylate, 2,2,3,3-tetrafluoropropyl acrylate, methacrylic acid esters corresponding to the above, Acrylamide, diacetone acrylamide, styrene, vinyltoluene and the like can be mentioned.
【0009】(A)バインダーポリマは、アルカリ水溶
液(例えば、1〜3重量%の炭酸ナトリウム又は炭酸カ
リウム水溶液等)に可溶又は膨潤可能であることが、現
像性、環境保全性等の点で好ましく、そのような性質を
具備するためにカルボキシル基を有していることが好ま
しい。また、(A)バインダーポリマを、アルカリ水溶
液(例えば、1〜3重量%の炭酸ナトリウム又は炭酸カ
リウム水溶液等)に可溶又は膨潤可能なものとする場
合、その酸価は、100〜500であることが好まし
い。酸価が100未満では、現像時間が遅くなる傾向が
あり、500を超えると、光硬化したレジストの耐現像
液性が低下する傾向がある。また、(A)バインダーポ
リマの重量平均分子量(ゲルパーミエーションクロマト
グラフィーにより測定し、標準ポリスチレン換算したも
の)は、20,000〜300,000であることが好
ましい。重量平均分子量が、30,000未満では、耐
現像液性が低下する傾向があり、300,000を超え
ると、現像時間が長くなる傾向がある。(A) The binder polymer must be soluble or swellable in an aqueous alkaline solution (for example, an aqueous solution of 1 to 3% by weight of sodium carbonate or potassium carbonate) from the viewpoints of developability and environmental preservation. Preferably, it has a carboxyl group in order to have such properties. When the binder polymer (A) is soluble or swellable in an aqueous alkaline solution (for example, an aqueous solution of 1 to 3% by weight of sodium carbonate or potassium carbonate), its acid value is 100 to 500. Is preferred. If the acid value is less than 100, the developing time tends to be slow, and if it exceeds 500, the developer resistance of the photocured resist tends to decrease. Further, the weight average molecular weight (measured by gel permeation chromatography and converted to standard polystyrene) of the binder polymer (A) is preferably from 20,000 to 300,000. If the weight average molecular weight is less than 30,000, the developer resistance tends to decrease, and if it exceeds 300,000, the development time tends to be long.
【0010】本発明における(B)分子内に少なくとも
一つの重合可能なエチレン性不飽和基を有する光重合化
合物に、必須成分として含まれる上記一般式(I)で表
される化合物において、上記一般式(I)中、R1であ
る炭素数1〜10のアルキレン基としては、例えば、メ
チレン基、エチレン基、プロピレン基、イソプロピレン
基、ブチレン基、イソブチレン基、ペンチレン基、ネオ
ペンチレン基、ヘキシレン基、ヘプチレン基、オクチレ
ン基、2−エチル−ヘキシレン基、ノニレン基、デシレ
ン基等が挙げられる。また、X1である炭素数2〜6の
アルキレン基としては、例えば、エチレン基、プロピレ
ン基、イソプロピレン基、ブチレン基、イソブチレン
基、ペンチレン基、ネオペンチレン基、ヘキシレン基等
が挙げられ、解像性、耐メッキ性の点からエチレン基が
好ましい。また、R2である上記一般式中のnは、1〜
14の整数であり、2〜14であることが好ましい。n
が14を超えると耐薬品性が低下する。In the compound (B) of the present invention, the photopolymerizable compound having at least one polymerizable ethylenically unsaturated group in the molecule, the compound represented by the above general formula (I) contained as an essential component, In the formula (I), examples of the alkylene group having 1 to 10 carbon atoms represented by R 1 include a methylene group, an ethylene group, a propylene group, an isopropylene group, a butylene group, an isobutylene group, a pentylene group, a neopentylene group, and a hexylene group. , A heptylene group, an octylene group, a 2-ethyl-hexylene group, a nonylene group, a decylene group and the like. Examples of the alkylene group having 2 to 6 carbon atoms represented by X 1 include an ethylene group, a propylene group, an isopropylene group, a butylene group, an isobutylene group, a pentylene group, a neopentylene group, and a hexylene group. An ethylene group is preferred from the viewpoints of properties and plating resistance. Further, n in the above general formula as R 2 is 1 to
It is an integer of 14 and preferably 2 to 14. n
Exceeds 14, the chemical resistance decreases.
【0011】上記一般式(I)で示される化合物の市販
品としては例えば、UA−21(上記一般式(I)でR
1が−C6H12−、R2におけるnが4、X1が−CH2C
H2−、R3が−CH3の化合物、新中村化学工業(株)商
品名)がある。一般式(I)で表される化合物は、単独
で又は2種類以上を組み合わせて使用される。As a commercially available product of the compound represented by the above general formula (I), for example, UA-21 (R in the above general formula (I))
1 is -C 6 H 12 -, n in R 2 is 4, X 1 is -CH 2 C
H 2 —, R 3 is —CH 3, a product of Shin-Nakamura Chemical Co., Ltd.). The compounds represented by formula (I) are used alone or in combination of two or more.
【0012】また、本発明における(B)成分中に、必
須成分として含まれる上記一般式(II)で表される化合
物において、上記一般式(II)中、X2、X3である炭素
数2〜6のアルキレン基としては、上記X1について例
示したのと同様のものが挙げられ、解像性、耐メッキ性
の点からエチレン基が好ましい。上記一般式(II)中、
k+mは8〜40であるが、k+mが7以下の場合は、
(A)バインダポリマとの相溶性が低下し、基板に感光
性エレメントをラミネートした際はがれ易い。又はk+
mが41以上の場合、親水性が増加し、現像時にレジス
ト像がはがれやすく、耐メッキ性(特に半田メッキ)も
低下する。Further, in the compound represented by the general formula (II) contained as an essential component in the component (B) in the present invention, the number of carbon atoms represented by X 2 and X 3 in the general formula (II) the 2-6 alkylene group, include the same ones as exemplified for the above X 1, resolution, ethylene group is preferable from the viewpoint of plating resistance. In the above general formula (II),
k + m is 8 to 40, but when k + m is 7 or less,
(A) The compatibility with the binder polymer decreases, and the photosensitive element is easily peeled off when the photosensitive element is laminated on the substrate. Or k +
When m is 41 or more, the hydrophilicity increases, the resist image tends to peel off during development, and the plating resistance (particularly, solder plating) decreases.
【0013】上記一般式(II)で表される化合物として
は、例えば、2,2−ビス〔4−(メタクリロキシペン
タエトキシ)フェニル〕プロパン、2,2−ビス〔4−
(アクリロキシペンタエトキシ)フェニル〕プロパン、
2,2−ビス〔4−(メタクリロキシペンタデカエトキ
シ)フェニル〕プロパン、2,2−ビス〔4−(アクリ
ロキシペンタデカエトキシ)フェニル〕プロパン、2,
2−ビス〔4−(メタクリロキシジエトキシ)フェニ
ル〕プロパン、2,2−ビス〔4−(アクリロキシジエ
トキシ)フェニル〕プロパン等が挙げられ、市販品とし
ては例えばBPE−500、BPE−1300(いずれ
も新中村化学工業(株)商品名)がある。一般式(II)で
表される化合物は、単独で又は2種類以上を組み合わせ
て使用される。The compound represented by the general formula (II) includes, for example, 2,2-bis [4- (methacryloxypentaethoxy) phenyl] propane and 2,2-bis [4-
(Acryloxypentaethoxy) phenyl] propane,
2,2-bis [4- (methacryloxypentadecaethoxy) phenyl] propane, 2,2-bis [4- (acryloxypentadecaethoxy) phenyl] propane,
2-bis [4- (methacryloxydiethoxy) phenyl] propane, 2,2-bis [4- (acryloxydiethoxy) phenyl] propane, and the like, and commercially available products such as BPE-500 and BPE-1300 (All are trade names of Shin-Nakamura Chemical Co., Ltd.). The compounds represented by the general formula (II) are used alone or in combination of two or more.
【0014】また、本発明において(B)成分には、
(B)成分中の必須成分である上記の一般式(I)で表
される化合物及び一般式(II)で表される化合物以外の
化合物を使用でき、そのような化合物としては、例え
ば、多価アルコールにα,β−不飽和カルボン酸を反応
させて得られる化合物(ポリエチレングリコールジアク
リレート(エチレン基の数が2〜14のもの)、トリメ
チロールプロパンジアクリレート、トリメチロールプロ
パントリアクリレート、テトラメチロールメタントリア
クリレート、テトラメチロールメタンテトラアクリレー
ト、ポリプロピレングリコールジアクリレート(プロピ
レン基の数が2〜14のもの)、ジペンタエリスリトー
ルペンタアクリレート、ジペンタエリスリトールヘキサ
アクリレート等)、グリシジル基含有化合物に、α,β
−不飽和カルボン酸を付加して得られる化合物(トリメ
チロールプロパントリグリシジルエーテルトリアクリレ
ート、ビスフェノールAジグリシジルエーテルアクリレ
ート等)、ウレタンアクリレート(β位にOH基を有す
るアクリルモノマ又はメタクリルモノマとイソホロンジ
イソシアネート、2,6−トルエンジイソシアネート、
2,4−トルエンジイソシアネート、又は、1,6−メ
キサメチレンジイソシアネートの付加反応物)、ノニル
フェニルジオキシレンアクリレート、γ−クロロ−β−
ヒドロキシプロピル−β′−アクリロイルオキシエチル
−o−フタレート、β−ヒドロキシエチル−β′−アク
リロイルオキシエチル−o−フタレート、以上に対応す
るメタクリレート、アクリル酸のアルキルエステル(ア
クリル酸メチルエステル、アクリル酸エチルエステル、
アクリル酸ブチルエステル、アクリル酸2−エチルヘキ
シルエステル等)、以上に対応するメタリル酸のアルキ
ルエステル等が挙げられる。In the present invention, the component (B) includes:
Compounds other than the compounds represented by the above general formula (I) and the general formula (II), which are essential components in the component (B), can be used. Compounds obtained by reacting an α, β-unsaturated carboxylic acid with a polyhydric alcohol (polyethylene glycol diacrylate (having 2 to 14 ethylene groups), trimethylolpropane diacrylate, trimethylolpropane triacrylate, tetramethylol Methane triacrylate, tetramethylol methane tetraacrylate, polypropylene glycol diacrylate (having 2 to 14 propylene groups), dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, etc.), glycidyl group-containing compounds, α, β
-A compound obtained by adding an unsaturated carboxylic acid (trimethylolpropane triglycidyl ether triacrylate, bisphenol A diglycidyl ether acrylate, etc.), urethane acrylate (acrylic or methacrylic monomer having an OH group at the β-position and isophorone diisocyanate, 2,6-toluene diisocyanate,
2,4-toluene diisocyanate or addition reaction product of 1,6-mexamethylene diisocyanate), nonylphenyldioxylene acrylate, γ-chloro-β-
Hydroxypropyl-β′-acryloyloxyethyl-o-phthalate, β-hydroxyethyl-β′-acryloyloxyethyl-o-phthalate, methacrylates corresponding thereto, alkyl esters of acrylic acid (methyl acrylate, ethyl acrylate) ester,
Butyl acrylate, 2-ethylhexyl acrylate, etc.), and the corresponding alkyl esters of methallylic acid.
【0015】本発明における(C)光重合開始剤として
は、例えば、芳香族ケトン(ベンゾフェノン、4,4′
−ビス(ジメチルアミノ)ベンゾフェノン、4,4′−
ビス(ジエチルアミノ)ベンゾフェノン、4−メトキシ
−4′−ジメチルアミノベンゾフェノン、2−エチルア
ントラキノン、フェナントレンキノン等)、ベンゾイン
(ベンゾインメチルエーテル、ベンゾインエチルエーテ
ル、ベンゾインフェニルエーテル等のベンゾインエーテ
ル、メチルベンゾイン、エチルベンゾイン等)、ベンジ
ル誘導体(ベンジルジメチルケタール等)、2,4,5
−トリアリールイミダゾール二量体(2−o−クロロフ
ェニル)−4,5−ジフェニルイミダゾール二量体、2
−(o−クロロフェニル)−4,5−ジ(m−メトキシ
フェニル)イミダゾール二量体、2−(o−フルオロフ
ェニル)−4,5−ジフェニルイミダゾール二量体、2
−(o−メトキシフェニル)−4,5−ジフェニルイミ
ダゾール二量体、2−(p−メトキシフェニル)−4,
5−ジフェニルイミダゾール二量体、2,4−ジ(p−
メトキシフェニル)−5−フェニルイミダゾール二量
体、2−(2,4−ジメトキシフェニル)−4,5−ジ
フェニルイミダゾール二量体、2−(p−メチルメルカ
プトフェニル)−4,5−ジフェニルイミダゾール二量
体等)、アクリジン誘導体(9−フェニルアクリジン、
1,7−ビス(9,9′−アクリジニル)ヘプタン等)
などが挙げられる。これらは単独で又は2種類以上を組
み合わせて使用される。As the photopolymerization initiator (C) in the present invention, for example, aromatic ketones (benzophenone, 4,4 ')
-Bis (dimethylamino) benzophenone, 4,4'-
Bis (diethylamino) benzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 2-ethylanthraquinone, phenanthrenequinone, etc., benzoin (benzoin ether such as benzoin methyl ether, benzoin ethyl ether, benzoin phenyl ether, etc., methyl benzoin, ethyl benzoin Benzyl derivatives (benzyldimethyl ketal, etc.), 2,4,5
-Triarylimidazole dimer (2-o-chlorophenyl) -4,5-diphenylimidazole dimer, 2
-(O-chlorophenyl) -4,5-di (m-methoxyphenyl) imidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer,
-(O-methoxyphenyl) -4,5-diphenylimidazole dimer, 2- (p-methoxyphenyl) -4,
5-diphenylimidazole dimer, 2,4-di (p-
Methoxyphenyl) -5-phenylimidazole dimer, 2- (2,4-dimethoxyphenyl) -4,5-diphenylimidazole dimer, 2- (p-methylmercaptophenyl) -4,5-diphenylimidazole dimer Acridine derivative (9-phenylacridine,
1,7-bis (9,9'-acridinyl) heptane and the like
And the like. These are used alone or in combination of two or more.
【0016】本発明における(A)成分の配合量は、
(A)成分及び(B)成分の総量100重量部に対し
て、40〜80重量部とすることが好ましい。この配合
量が、40重量部未満では、光硬化物が脆くなり易く、
感光性エレメントとして用いた場合に、塗膜性が劣る傾
向があり、80重量部を超えると、感度が不充分となる
傾向がある。The amount of the component (A) in the present invention is as follows:
Preferably, the amount is 40 to 80 parts by weight based on 100 parts by weight of the total of the components (A) and (B). When the compounding amount is less than 40 parts by weight, the photocured product is apt to become brittle,
When used as a photosensitive element, the coating properties tend to be poor, and if it exceeds 80 parts by weight, the sensitivity tends to be insufficient.
【0017】本発明における(B)成分の配合量は、
(A)成分及び(B)成分の総量100重量部に対し
て、20〜60重量部とすることが好ましい。この配合
量が、20重量部未満では、感度が不充分となる傾向が
あり、60重量部を超えると、光硬化物が脆くなる傾向
がある。The amount of the component (B) in the present invention is as follows:
The amount is preferably 20 to 60 parts by weight based on 100 parts by weight of the total of the components (A) and (B). If the amount is less than 20 parts by weight, the sensitivity tends to be insufficient, and if it exceeds 60 parts by weight, the photocured product tends to be brittle.
【0018】また、本発明における(B)成分中の必須
成分である一般式(I)で表される化合物の配合量は、
(A)成分及び(B)成分の総量100重量部に対し
て、3〜50重量部であることが好ましく、5〜40重
量部であることがより好ましい。この配合量が、3重量
部未満では、感度、密着性、耐メッキ性等が劣る傾向が
あり、50重量部を超えると、レジストの剥離時間が長
くなりすぎる傾向がある。The compounding amount of the compound represented by the general formula (I), which is an essential component in the component (B) in the present invention, is as follows:
It is preferably from 3 to 50 parts by weight, more preferably from 5 to 40 parts by weight, based on 100 parts by weight of the total amount of the components (A) and (B). When the amount is less than 3 parts by weight, sensitivity, adhesion, plating resistance and the like tend to be inferior. When the amount exceeds 50 parts by weight, the stripping time of the resist tends to be too long.
【0019】また、本発明における(B)成分中の必須
成分である一般式(II)で表される化合物の配合量は
(A)成分及び(B)成分の総量100重量部に対し
て、3〜50重量部であることが好ましく、5〜40重
量部であることが好ましい。この配合量が、3重量部未
満では解像性が劣る傾向があり、50重量部を超える
と、レジストの剥離時間が長くなりすぎる傾向がある。In the present invention, the compounding amount of the compound represented by the general formula (II), which is an essential component in the component (B), is based on 100 parts by weight of the total of the components (A) and (B). It is preferably from 3 to 50 parts by weight, more preferably from 5 to 40 parts by weight. If the amount is less than 3 parts by weight, the resolution tends to be poor, and if it exceeds 50 parts by weight, the stripping time of the resist tends to be too long.
【0020】本発明における(C)成分の配合量は、
(A)成分及び(B)成分の総量100重量部に対し
て、0.1〜20重量部であることが好ましい。この配
合量が、0.1重量部未満では、感度が不充分となる傾
向があり、20重量部を超えると、露光の際に組成物の
表面での吸収が増大して内部の光硬化が不充分となる傾
向がある。The amount of the component (C) in the present invention is as follows:
The amount is preferably 0.1 to 20 parts by weight based on 100 parts by weight of the total of the components (A) and (B). If the amount is less than 0.1 part by weight, the sensitivity tends to be insufficient. If the amount exceeds 20 parts by weight, the absorption on the surface of the composition during exposure increases, and the internal photo-curing increases. It tends to be insufficient.
【0021】本発明の感光性樹脂組成物には、必要に応
じて、マラカイトグリーン等の染料、ロイコクリスタル
バイオレット等の発色剤、p−トルエンスルホン酸等の
可塑剤、顔料、難燃剤、熱重合禁止剤、密着性付与剤等
を添加することができる。The photosensitive resin composition of the present invention may contain, if necessary, a dye such as malachite green, a coloring agent such as leuco crystal violet, a plasticizer such as p-toluenesulfonic acid, a pigment, a flame retardant, and a thermal polymerization. Inhibitors, adhesion promoters and the like can be added.
【0022】本発明の感光性樹脂組成物は、前記各成分
を、これらを溶解する溶剤、例えば、トルエン、アセト
ン、メチルエチルケトン(MEK)、メチルイソブチル
ケトン、メチルセロソルブ、エチルセロソルブ、クロロ
ホルム、塩化メチレン、メタノール、エタノール等に溶
解、混合させることにより、均一な溶液とすることがで
きる。In the photosensitive resin composition of the present invention, each of the above components is dissolved in a solvent dissolving them, for example, toluene, acetone, methyl ethyl ketone (MEK), methyl isobutyl ketone, methyl cellosolve, ethyl cellosolve, chloroform, methylene chloride, By dissolving and mixing in methanol, ethanol, or the like, a uniform solution can be obtained.
【0023】本発明の感光性エレメントは、前記本発明
の感光性樹脂組成物を、支持体上に塗布、乾燥し、支持
体上に厚さ5〜100μm程度の感光層を形成すること
により作製できる。上記塗布は、公知の方法で行える
が、例えば、ロールコータ、コンマコータ、グラビアコ
ータ、エアーナイフコータ、ダイコータ、バーコータ等
により行える。乾燥は、80〜150℃、5〜30分程
度とされる。The photosensitive element of the present invention is prepared by applying the above-described photosensitive resin composition of the present invention on a support and drying the same to form a photosensitive layer having a thickness of about 5 to 100 μm on the support. it can. The coating can be performed by a known method, for example, a roll coater, a comma coater, a gravure coater, an air knife coater, a die coater, a bar coater, or the like. Drying is performed at 80 to 150 ° C. for about 5 to 30 minutes.
【0024】支持体としては、厚さ5〜100μm、好
ましくは10〜30μm程度の重合体フィルム、例え
ば、ポリエチレンテレフタレート、ポリプロピレン、ポ
リエチレン等からなるフィルムが挙げられ、なかでも、
ポリエチレンテレフタレートフィルムが好ましい。ま
た、これらの重合体フィルムは、感光層の保護フィルム
として感光層の上に積層することができる。As the support, a polymer film having a thickness of 5 to 100 μm, preferably about 10 to 30 μm, for example, a film made of polyethylene terephthalate, polypropylene, polyethylene or the like can be mentioned.
Polyethylene terephthalate films are preferred. Further, these polymer films can be laminated on the photosensitive layer as a protective film for the photosensitive layer.
【0025】本発明の感光性エレメントを用いてフォト
レジスト画像を製造する方法としては、前記の保護フィ
ルムが存在している場合には、保護フィルムを除去後、
感光層を加熱しながら基板に圧着させることにより積層
する方法等が挙げられる。積層される表面は、通常、金
属面であるが、特に制限はない。As a method for producing a photoresist image using the photosensitive element of the present invention, when the above-mentioned protective film is present, after removing the protective film,
A method of laminating by pressing the photosensitive layer on the substrate while heating the photosensitive layer may, for example, be mentioned. The surface to be laminated is usually a metal surface, but is not particularly limited.
【0026】感光層の加熱温度は、特に制限はなく、9
0〜130℃とすることが好ましい。また、感光層の圧
着圧力は、特に制限はなく、1〜10kgf/cm2とするこ
とが好ましい。なお、感光層を前記のように加熱すれ
ば、予め基板を予熱処理することは必要ではないが、積
層性をさらに向上させるために、基板の予熱処理を行う
こともできる。The heating temperature of the photosensitive layer is not particularly limited.
The temperature is preferably set to 0 to 130 ° C. The pressure for pressing the photosensitive layer is not particularly limited, and is preferably 1 to 10 kgf / cm 2 . If the photosensitive layer is heated as described above, it is not necessary to pre-heat the substrate in advance, but the substrate may be pre-heated to further improve the lamination property.
【0027】このようにして積層が完了した感光層は、
次いで、ネガフィルム又はポジフィルムを用いて、活性
光に画像的に露光される。この際、感光層上に存在する
支持体が透明の場合には、そのまま露光してもよく、ま
た、不透明の場合には、当然除去する必要がある。The photosensitive layer thus completed in lamination is
It is then imagewise exposed to actinic light using a negative or positive film. At this time, if the support existing on the photosensitive layer is transparent, it may be exposed as it is, and if it is opaque, it is necessary to remove it.
【0028】感光層の保護という点からは、支持体は透
明で、この支持体を残存させたまま、それを通して露光
することが好ましい。From the viewpoint of protecting the photosensitive layer, the support is transparent, and it is preferable to expose the support while leaving the support.
【0029】活性光は、公知の活性光源、例えば、カー
ボンアーク、水銀蒸気アーク、キセノンアーク、写真用
フラッド電球、太陽ランプ等から発生する光が用いられ
る。As the activating light, a known activating light source, for example, light generated from a carbon arc, a mercury vapor arc, a xenon arc, a flood lamp for photography, a sun lamp or the like is used.
【0030】次いで、露光後、感光層上に重合体フィル
ム等が存在している場合には、これを除去した後、アル
カリ水溶液を用いて、例えば、スプレー、揺動浸漬、ブ
ラッシング、スクラッピング等の公知方法により未露光
部を除去して現像する。アルカリ性水溶液の塩基として
は、水酸化アルカリ(リチウム、ナトリウム又はカリウ
ムの水酸化物等)、炭酸アルカリ(リチウム、ナトリウ
ム若しくはカリウムの炭酸塩又は重炭酸塩等)、アルカ
リ金属リン酸塩(リン酸カリウム、リン酸ナトリウム
等)、アルカリ金属ピロリン酸塩(ピロリン酸ナトリウ
ム、ピロリン酸カリウム等)などが挙げられ、炭酸ナト
リウムの水溶液が好ましい。現像に用いるアルカリ水溶
液のpHは、9〜11の範囲とすることが好ましく、その
温度は、感光層の現像性に合わせて調節される。また、
アルカリ水溶液中には、表面活性剤、消泡剤、現像を促
進させるための少量の有機溶剤等を混入させることもで
きる。現像性の点等から、0.1〜5重量%の炭酸ナト
リウム水溶液が好ましい。Next, after the exposure, if a polymer film or the like is present on the photosensitive layer, the polymer film is removed, and then, using an aqueous alkali solution, for example, spraying, rocking immersion, brushing, scraping, etc. The unexposed portion is removed by a known method described above, and development is performed. Examples of the base of the alkaline aqueous solution include alkali hydroxides (such as hydroxides of lithium, sodium or potassium), alkali carbonates (such as carbonates or bicarbonates of lithium, sodium or potassium), and alkali metal phosphates (such as potassium phosphate). , Sodium phosphate, etc.), and alkali metal pyrophosphates (sodium pyrophosphate, potassium pyrophosphate, etc.), and an aqueous solution of sodium carbonate is preferable. The pH of the aqueous alkali solution used for development is preferably in the range of 9 to 11, and the temperature is adjusted according to the developability of the photosensitive layer. Also,
A surfactant, an antifoaming agent, a small amount of an organic solvent for accelerating the development, and the like can be mixed in the alkaline aqueous solution. From the viewpoint of developability and the like, a 0.1 to 5% by weight aqueous sodium carbonate solution is preferred.
【0031】さらに、印刷配線板を製造する方法として
は、現像されたフォトレジスト画像をマスクとして基板
の表面を、エッチング、メッキ等の公知方法で処理する
方法等が挙げられる。次いで、フォトレジスト画像は、
通常、現像に用いたアルカリ水溶液よりさらに強アルカ
リ性の水溶液で剥離することができる。この強アルカリ
性の水溶液としては、例えば、1〜5重量%の水酸化ナ
トリウム水溶液等が用いられる。Further, as a method of manufacturing a printed wiring board, there is a method of treating the surface of the substrate by a known method such as etching and plating using the developed photoresist image as a mask. The photoresist image is then:
Usually, it can be peeled off with an aqueous solution having a stronger alkalinity than the aqueous alkali solution used for development. As the strong alkaline aqueous solution, for example, an aqueous solution of 1 to 5% by weight of sodium hydroxide is used.
【0032】[0032]
【実施例】以下、本発明を実施例により説明する。 実施例1〜4及び比較例1〜3 表1及び表2に示す材料を配合し、溶液を得た。The present invention will be described below with reference to examples. Examples 1 to 4 and Comparative Examples 1 to 3 The materials shown in Tables 1 and 2 were blended to obtain solutions.
【0033】[0033]
【表1】 [Table 1]
【0034】[0034]
【表2】 [Table 2]
【0035】得られた溶液に、表3に示す(B)成分を
溶解させて、感光性樹脂組成物の溶液を得た。The component (B) shown in Table 3 was dissolved in the obtained solution to obtain a solution of the photosensitive resin composition.
【0036】[0036]
【表3】 [Table 3]
【0037】なお、表3中、使用した化合物を下記に示
す。 *1:一般式(I)で、R1が−C6H12−、R3が−C
H3、X1が−CH2CH2−、nが4(平均値)の化合
物、新中村化学工業(株)製 *2:一般式(II)で、R4及びR5が−CH3、X2及びX
3が−CH2CH2−、k+m=10(平均値)の化合
物、新中村化学工業(株)製 *3:一般式(II)で、R4及びR5が−CH3、X2及びX
3が−CH2CH2−、k+m=30(平均値)の化合
物、新中村化学工業(株)製 *4:ポリプロピレングリコールジアクリレート(新中村
化学工業(株)製) *5:γ−クロロ−β−ヒドロキシプロピル−β′−メタ
クリロイルオキシエチル−o−フタレートThe compounds used in Table 3 are shown below. * 1: In the general formula (I), R 1 is —C 6 H 12 — and R 3 is —C
A compound in which H 3 and X 1 are —CH 2 CH 2 — and n is 4 (average value), manufactured by Shin-Nakamura Chemical Co., Ltd. * 2: In the general formula (II), R 4 and R 5 are each —CH 3 , X 2 and X
3 is -CH 2 CH 2 -, compounds of k + m = 10 (average value), Shin-Nakamura Chemical Co., Ltd. * 3: General formula (II), R 4 and R 5 are -CH 3, X 2 and X
3 is —CH 2 CH 2 —, k + m = 30 (average value), manufactured by Shin-Nakamura Chemical Co., Ltd. * 4: Polypropylene glycol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd.) * 5: γ-chloro -Β-hydroxypropyl-β′-methacryloyloxyethyl-o-phthalate
【0038】次いで、得られた感光性樹脂組成物の溶液
を、25μm厚のポリエチレンテレフタレートフィルム
上に均一に塗布し、100℃の熱風対流式乾燥機で約1
0分間乾燥して、感光性エレメントを得た。感光性樹脂
組成物層の乾燥後の膜厚は、50μmであった。Next, the obtained solution of the photosensitive resin composition was uniformly coated on a 25 μm-thick polyethylene terephthalate film, and was dried for about 1 hour with a hot air convection dryer at 100 ° C.
After drying for 0 minutes, a photosensitive element was obtained. The dried film thickness of the photosensitive resin composition layer was 50 μm.
【0039】一方、銅箔(厚さ35μm)を両面に積層
したガラスエポキシ材である銅張り積層板(日立化成工
業(株)製、商品名MCL−E−61)の銅表面を、#6
00相当のブラシを持つ研磨機(三啓(株)製)を用いて
研磨し、水洗後、空気流で乾燥し、得られた銅張り積層
板を80℃に加温し、その銅表面上に前記感光性樹脂組
成物層を120℃に加熱しながらラミネートした。On the other hand, the copper surface of a copper-clad laminate (manufactured by Hitachi Chemical Co., Ltd., trade name: MCL-E-61), which is a glass epoxy material having a copper foil (thickness: 35 μm) laminated on both sides, is # 6
Polishing using a polishing machine with a brush equivalent to 00 (manufactured by Sankei Co., Ltd.), washing with water, drying with an air stream, heating the obtained copper-clad laminate to 80 ° C. Was laminated while heating the photosensitive resin composition layer at 120 ° C.
【0040】次に、高圧水銀灯ランプを有する露光機
(オーク(株)製)HMW−201Bを用いて、ネガとし
てストーファー21段ステップタブレットを試験片の上
に置いて、60mJ/cm2で露光した。次に、ポリエチレン
テレフタレートフィルムを剥離し、30℃で1重量%炭
酸ナトリウム水溶液を60秒間スプレーし、未露光部分
を除去した後、銅張り積層板上に形成された光硬化膜の
ステップタブレットの段数を測定することにより、感光
性樹脂組成物の光感度を評価し、その結果を表4に示し
た。光感度は、ステップタブレットの段数で示され、こ
のステップタブレットの段数が高いほど、光感度が高い
ことを示す。Next, using an exposure machine (manufactured by Oak Co., Ltd.) HMW-201B having a high-pressure mercury lamp, a 21-step stofer tablet as a negative was placed on the test piece and exposed at 60 mJ / cm 2 . did. Next, the polyethylene terephthalate film was peeled off, and a 1% by weight aqueous solution of sodium carbonate was sprayed at 30 ° C. for 60 seconds to remove unexposed portions, and then the number of step tablets of the photocured film formed on the copper-clad laminate was measured. Was measured to evaluate the photosensitivity of the photosensitive resin composition. The results are shown in Table 4. The light sensitivity is indicated by the number of steps of the step tablet. The higher the number of steps of the step tablet, the higher the light sensitivity.
【0041】また、解像性は、ライン/スペース=1で
段階的にライン幅が狭くなるネガを用い、21段ステッ
プタブレットで8段を示す露光量で露光し、上記条件で
現像後、ラインのかぶり(ラインとラインのつながり)
がない部分の線幅を測定し、その結果を表4に示した。
この解像性の数字が小さい程、細いラインを解像できる
ことを示し、解像性が高いことを示す。The resolution was determined by using a negative having a line / space = 1 and gradually reducing the line width, using a 21-step tablet at an exposure amount of 8 steps, and developing the film under the above conditions. Cover (connection between lines)
The line width of the portion without the mark was measured, and the results are shown in Table 4.
The smaller the numerical value of the resolution, the higher the resolution of a thin line, and the higher the resolution.
【0042】耐メッキ性は、上記のようにラミネート
し、所定の露光量により露光を行い、次いで、上記現像
液により現像後、脱脂(PC−455(メルテックス社
製)25重量%)5分浸漬→水洗→ソフトエッチ(過硫
酸アンモニウム150g/リットル)2分浸漬→水洗→
10重量%硫酸1分浸漬の順に前処理を行い、硫酸銅メ
ッキ浴(硫酸銅75g/リットル、硫酸190g/リッ
トル、塩素イオン50ppm、カパーグリームPCM(メ
ルテックス社製)5ml/リットル)に入れ、硫酸銅メッ
キを室温下、3A/dm2で40分間行った。その後、水洗
して、10重量%ホウフッ化水素酸に1分浸漬し、ハン
ダメッキ浴(45重量%ホウフッ化スズ64ml/リット
ル、45重量%ホウフッ化鉛22ml/リットル、42重
量%ホウフッ化水素酸200ml/リットル、プルティン
LAコンダクティビティーソルト(メルテックス社製)
20g/リットル、プルティンLAスターター(メルテ
ックス社製)41ml/リットル)に入れ、半田メッキを
室温下、1.5A/dm2で15分間行った。The plating resistance was evaluated by laminating as described above, exposing at a predetermined exposure amount, developing with the above developer, and then degreased (PC-455 (manufactured by Meltex) 25% by weight) for 5 minutes. Immersion → Rinse → Soft etch (ammonium persulfate 150g / L) for 2 minutes → Rinse →
Pretreatment was performed in the order of immersion in 10% by weight of sulfuric acid for 1 minute, and the resultant was placed in a copper sulfate plating bath (75 g / liter of copper sulfate, 190 g / liter of sulfuric acid, 50 ppm of chloride ion, 5 ml / liter of Copperglyme PCM (manufactured by Meltex Corporation)). Copper sulfate plating was performed at room temperature at 3 A / dm 2 for 40 minutes. After that, it was washed with water, immersed in 10% by weight of borofluoric acid for 1 minute, and subjected to a solder plating bath (45% by weight of tin borofluoride 64 ml / l, 45% by weight of lead borofluoride 22 ml / l, 42% by weight of borofluoric acid) 200ml / liter, Plutin LA Conductivity Salt (Meltex)
20 g / liter, 41 ml / liter of Plutin LA starter (manufactured by Meltex Co., Ltd.), and subjected to solder plating at room temperature and 1.5 A / dm 2 for 15 minutes.
【0043】水洗、乾燥後耐メッキ性を調べるために、
直ちにセロテープを貼り、これを垂直方向に引き剥がし
て(90°ピールオーフ試験)、レジストの剥がれの有
無を観察し、結果を表4に示した。また、レジスト剥離
後、上方から光学顕微鏡で、半田メッキのもぐりの有無
を観察し、結果を表4に示した。半田メッキのもぐりを
生じた場合、透明なレジストを介して、その下部にメッ
キにより析出した半田が観察される。In order to examine the plating resistance after washing and drying,
Immediately, a cellophane tape was applied and peeled off in the vertical direction (90 ° peel-off test). The presence or absence of peeling of the resist was observed, and the results are shown in Table 4. In addition, after the resist was peeled off, the presence or absence of undercut of the solder plating was observed from above by an optical microscope, and the results are shown in Table 4. In the case where the solder plating is buried, solder deposited by plating is observed below the transparent resist via the transparent resist.
【0044】また、別の試験片を、ストーファー21段
ステップタブレットで8段を示す露光量で、露光、現像
後、クロスカット試験(JIS−K−5400)を行
い、結果を表4に示した。Further, another test piece was subjected to a cross cut test (JIS-K-5400) after exposure and development with an exposure amount indicating eight steps using a 21-step stepper tablet, and the results are shown in Table 4. Was.
【0045】[0045]
【表4】 [Table 4]
【0046】表4から明らかなように、本発明の範囲内
の実施例1〜4は、耐メッキ性が良好であり、解像性及
びクロスカット性も優れている。As is clear from Table 4, Examples 1 to 4 within the scope of the present invention have good plating resistance, and excellent resolution and cross-cutting properties.
【0047】[0047]
【発明の効果】請求項1、2及び3記載の感光性樹脂組
成物は、光感度、解像性、耐薬品性(耐メッキ性)、密
着性、機械強度、柔軟性等に優れたものである。請求項
4記載の感光性エレメントは、光感度、解像性、耐薬品
性(耐メッキ性)、密着性、機械強度、柔軟性、環境
性、作業性等に優れたものである。The photosensitive resin compositions according to claims 1, 2 and 3 are excellent in photosensitivity, resolution, chemical resistance (plating resistance), adhesion, mechanical strength, flexibility and the like. It is. The photosensitive element according to claim 4 is excellent in photosensitivity, resolution, chemical resistance (plating resistance), adhesion, mechanical strength, flexibility, environment, workability, and the like.
フロントページの続き (51)Int.Cl.6 識別記号 FI G03F 7/004 512 G03F 7/004 512 7/028 7/028 7/033 7/033 // C09D 4/06 C09D 4/06 171/00 171/00 B H05K 3/06 H05K 3/06 H 3/18 3/18 D Continued on the front page (51) Int.Cl. 6 Identification code FI G03F 7/004 512 G03F 7/004 512 7/028 7/028 7/033 7/033 // C09D 4/06 C09D 4/06 171/00 171/00 B H05K 3/06 H05K 3/06 H 3/18 3/18 D
Claims (4)
に重合可能なエチレン性不飽和基を有する化合物及び
(C)光重合開始剤を含み、前記(B)成分が一般式
(I) 【化1】 (式中、R1は炭素数1〜10のアルキレン基を示し、
3個のR1は同一であっても相異してもよく、R2は次の
一般式 【化2】 (式中、R3は水素原子又はメチル基を示し、X1は炭素
数2〜6のアルキレン基を示し、nは1〜14の整数で
ある)で表される基を示し、3個のR2は同一であって
も相異してもよい)で示される化合物及び一般式(II) 【化3】 (式中R4及びR5は各々独立して水素原子又はメチル基
を示し、X2及びX3は各々独立して炭素数2〜6のアル
キレン基を示し、k及びmはk+m=8〜40となるよ
うに選ばれる正の整数である)で表される化合物を必須
成分として含む感光性樹脂組成物。1. A composition comprising (A) a binder polymer, (B) a compound having a polymerizable ethylenically unsaturated group in a molecule and (C) a photopolymerization initiator, wherein the component (B) is represented by the general formula (I): Embedded image (Wherein, R 1 represents an alkylene group having 1 to 10 carbon atoms;
The three R 1 s may be the same or different, and R 2 has the following general formula: (Wherein, R 3 represents a hydrogen atom or a methyl group, X 1 represents an alkylene group having 2 to 6 carbon atoms, and n is an integer of 1 to 14), and 3 R 2 may be the same or different), and a compound represented by the general formula (II): (Wherein R 4 and R 5 each independently represent a hydrogen atom or a methyl group, X 2 and X 3 each independently represent an alkylene group having 2 to 6 carbon atoms, and k and m represent k + m = 8 to A positive integer selected to be 40) as an essential component.
0〜500であり、重量平均分子量が20,000〜3
00,000である請求項1記載の感光性樹脂組成物。2. The method according to claim 1, wherein (A) the binder polymer has an acid value of 10
0 to 500, and a weight average molecular weight of 20,000 to 3
2. The photosensitive resin composition according to claim 1, wherein the ratio is 0.00000.
の使用割合が、(A)成分及び(B)成分の総量100
重量部に対し、(A)成分が40〜80重量部、(B)
成分が20〜60重量部及び(C)成分が0.1〜20
重量部であり、(B)成分中の上記一般式(I)で表さ
れる化合物及び一般式(II)で表される化合物が各々3
〜50重量部以上含まれる請求項1又は2記載の感光性
樹脂組成物。3. The use ratio of the component (A), the component (B) and the component (C) is 100 in total of the component (A) and the component (B).
Component (A) is 40 to 80 parts by weight, and (B)
20 to 60 parts by weight of component and 0.1 to 20 of component (C)
Parts by weight of the compound represented by formula (I) and the compound represented by formula (II) in component (B).
The photosensitive resin composition according to claim 1, which is contained in an amount of 50 to 50 parts by weight or more.
成物を支持体上に塗布、乾燥してなる感光性エレメン
ト。4. A photosensitive element obtained by applying the photosensitive resin composition according to claim 1, 2 or 3 on a support and drying.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7637798A JPH11271966A (en) | 1998-03-25 | 1998-03-25 | Photosensitive resin composition and photosensitive element using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7637798A JPH11271966A (en) | 1998-03-25 | 1998-03-25 | Photosensitive resin composition and photosensitive element using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11271966A true JPH11271966A (en) | 1999-10-08 |
Family
ID=13603658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7637798A Pending JPH11271966A (en) | 1998-03-25 | 1998-03-25 | Photosensitive resin composition and photosensitive element using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11271966A (en) |
-
1998
- 1998-03-25 JP JP7637798A patent/JPH11271966A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0738927B1 (en) | Photosensitive resin composition and photosensitive element using the same | |
| JP2004317851A (en) | Photosensitive resin composition and photosensitive element, method for manufacturing resist pattern and method for manufacturing printed wiring board using the same | |
| JP3199600B2 (en) | Photosensitive resin composition and photosensitive element using the same | |
| JP3849641B2 (en) | Manufacturing method of photosensitive film for circuit formation and printed wiring board | |
| JP4524844B2 (en) | Photosensitive resin composition, photosensitive element using the same, resist pattern manufacturing method, and printed wiring board manufacturing method | |
| JP3692197B2 (en) | Photosensitive resin composition and photosensitive element using the same | |
| JP3859934B2 (en) | Photosensitive resin composition, photosensitive element, method for producing resist pattern, and method for producing printed wiring board | |
| JP2003005364A (en) | Photosensitive film for forming circuit and method for producing printed wiring board | |
| JP2788921B2 (en) | Radiation-polymerizable composition and radiation-sensitive recording material | |
| JP3281307B2 (en) | Photosensitive resin composition, photosensitive element using the same, method of laminating layers of photosensitive resin composition, layered substrate of photosensitive resin composition layer, and method of curing layer of photosensitive resin composition | |
| JP2004004546A (en) | Photosensitive resin composition, photosensitive element using the same, method for manufacturing resist pattern, and method for manufacturing printed wiring board | |
| JP2001174992A (en) | Photosensitive resin composition, photosensitive element using same, method for producing resist pattern and method for producing printed wiring board | |
| JP2004020726A (en) | Photosensitive resin composition, photosensitive element using the same, resist pattern forming method and method for manufacturing printed wiring board | |
| JP2002268215A (en) | Photosensitive resin composition and its utilization | |
| JPH11271966A (en) | Photosensitive resin composition and photosensitive element using the same | |
| JP3173191B2 (en) | Photosensitive resin composition and photosensitive element using the same | |
| JP2002207292A (en) | Photosensitive resin composition and photosensitive element which uses the same | |
| JP3199607B2 (en) | Photosensitive resin composition and photosensitive element using the same | |
| JP3634216B2 (en) | Photosensitive resin composition, photosensitive element using the same, resist pattern manufacturing method, and printed wiring board manufacturing method | |
| JP2003107695A (en) | Photosensitive resin composition, photosensitive element, method for manufacturing resist pattern and method for manufacturing printed wiring board | |
| JP3944971B2 (en) | Photosensitive resin composition and photosensitive element using the same | |
| JP2002156756A (en) | Photosensitive resin composition, photosensitive element using the same, method for producing resist pattern and method for producing printed wiring board | |
| JP4529289B2 (en) | Photosensitive resin composition, photosensitive element using the same, resist pattern manufacturing method, and printed wiring board manufacturing method | |
| JP3750755B2 (en) | Photosensitive resin composition and photosensitive element using the same | |
| JPH11160868A (en) | Photosensitive resin composition and photosensitive element using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Effective date: 20050323 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070615 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20070621 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20071105 |