JPH11274060A5

JPH11274060A5 -

Info

Publication number: JPH11274060A5
Application number: JP1998090958A
Authority: JP
Filing date: 1998-03-19
Publication date: 2005-10-06

Claims

an illumination optical device comprising: a light source means for supplying a luminous flux; a first optical integrator for forming a first multiple light source consisting of a number of light sources based on the luminous flux from the light source means; a second optical integrator for forming a second multiple light source consisting of a greater number of light sources based on the luminous flux from the first multiple light source formed by the first optical integrator; and a condenser optical system for condensing the luminous flux from the second multiple light source formed by the second optical integrator to illuminate an illuminated surface,
a prism optical system is disposed in an optical path between the first optical integrator and the second optical integrator, the prism optical system forming a plurality of illumination areas decentered with respect to a reference optical axis with respect to an incident surface of the second optical integrator, based on light beams from a first multiple light source formed by the first optical integrator;
10. An illumination optical device according to claim 9, wherein the prism optical system is configured so that the positions of the plurality of irradiation areas can be adjusted.

the prism optical system includes, in order from the light source side, a first prism member and a second prism member;
the first prism member has an exit surface having a refractive surface formed in a concave shape toward the illuminated surface,
the second prism member has a plurality of angle-deviating prisms arranged around the reference optical axis and tiltable with respect to the reference optical axis,
2. The illumination optical device according to claim 1, wherein the angle-deviating prism has an entrance surface having a refractive surface on the light source side and an exit surface having a flat surface on the illuminated surface side.

an exit surface of the first prism member has four refracting surfaces formed by pyramidal surfaces of a regular quadrangular pyramid symmetrical with respect to the reference optical axis,
3. The illumination optical device according to claim 2, wherein four deflection prisms in the second prism member are configured to be tiltable so as to be symmetrical with respect to the reference optical axis, in order to form four illumination areas each decentered with respect to the reference optical axis at a predetermined position on the incident surface of the second optical integrator.

an exit surface of the first prism member has a refractive surface formed by a conical surface of a cone symmetrical with respect to the reference optical axis;
3. The illumination optical device according to claim 2, wherein at least four deflection prisms in the second prism member are configured to be tiltable so as to be symmetrical with respect to the reference optical axis, in order to align at least four illumination areas decentered with respect to the reference optical axis in a substantially annular shape on the incident surface of the second optical integrator.

a relay optical system that optically conjugates a first multiple light source formed by the first optical integrator with a second multiple light source formed by the second optical integrator is disposed in an optical path between the prism optical system and the second optical integrator;
at least one of the first optical integrator and the relay optical system is configured to have a variable focal length in order to change the sizes of the plurality of illumination areas formed on the incident surface of the second optical integrator;
5. The illumination optical device according to claim 1, wherein the prism optical system adjusts the positions of the plurality of irradiation areas in response to a change in a focal length of at least one of the first optical integrator and the relay optical system.

a driving means for driving the plurality of angle-deviating prisms of the second prism member so as to tilt each of the angle-deviating prisms;
6. The illumination optical device according to claim 2, wherein the driving means comprises a rod member arranged to extend along the reference optical axis, a pressing member attached to the rod member so as to be able to slide along the direction of the reference optical axis, and a plurality of arm members each having one end pivotally attached to the pressing member and the other end pivotally attached to each of the plurality of angle-deviating prisms, and wherein sliding of the pressing member tilts the plurality of angle-deviating prisms symmetrically with respect to the reference optical axis.

2. The illumination optical device according to claim 1, wherein a relay optical system with a variable focal length is disposed in the optical path between said prism optical system and said second optical integrator .

An illumination optical device comprising: a light source means for supplying a light beam; a first optical integrator; a second optical integrator; and a condenser optical system for condensing a light beam from a secondary light source formed via the first and second optical integrators to illuminate an illuminated surface,
a prism optical system that forms the secondary light source having a plurality of regions decentered with respect to a reference optical axis is disposed in an optical path between the first optical integrator and the second optical integrator;
10. An illumination optical device, comprising: a prism optical system configured so that the positions of the plurality of regions can be adjusted ;

9. The illumination optical device according to claim 8, wherein a relay optical system with a variable focal length is disposed in the optical path between the prism optical system and the second optical integrator .

10. An exposure apparatus comprising: an illumination optical apparatus according to claim 1; and a projection optical system for projecting and exposing a pattern of a mask arranged on the surface to be illuminated onto a photosensitive substrate.

10. A method for manufacturing a semiconductor device, comprising the step of exposing a pattern of a mask placed on the surface to be illuminated onto a photosensitive substrate using an illumination optical apparatus according to claim 1.