JPH11277350A - Slide guiding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To maintain rigidity and damping performance and reduce surface pressure of a sliding surface of a movable body by supporting a part of dead weight by pressure oil supplied to a surface pressure reducing pocket and support-guiding the surface pressure of the sliding surface in a state where the surface pressure of the sliding surface is reduced. SOLUTION: When a table 3 is moved by the operation of a ball screw mechanism and a linear motor mechanism, the table 3 is guided and moved in a state where the table 3 is floated up to several μm as a whole by a dynamic pressure effect of a pressure oil. The pressure oil flowed to a surface pressure adjusting pocket 6 is passed from a gap formed between a guiding surface 2a and a sliding surface 3a through a land portion 12, and flowed to the outside of the sliding surface 3a via a discharge groove. At this time, the front side in the moving direction of the table 3 is further moved so as to be floated up. Therefore, a flow amount of pressure oil passing through the land portion 12 from the surface pressure adjusting pocket 6 in the front side and flowing to the outside is increased. However, the flow amount of pressure oil which flows into the surface pressure adjusting pocket 6 is limited by a restrictor 8 and, therefore, the pressure in the surface pressure adjusting pocket 6 is decreased as compared with that of the inaction time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sliding guide device for a moving body used in a machine tool or the like.

[0002]

2. Description of the Related Art Generally, guide devices such as tables, columns, and saddles of machine tools such as machining centers include:
A dynamic pressure sliding guide and a static pressure guide are typical. As shown in FIG. 9, the dynamic pressure sliding guide is a support 100 such as a bed.
The lubricating oil is interposed between the guide surface 101 of the moving member 102 and the sliding surface 103 of the moving member 102 such as a table, a column, and a saddle, and the guide surface 101 of the supporting member 100 and the sliding surface 10 of the moving member 102 are interposed.
3 for guiding and supporting it in a contact state. Although this dynamic pressure sliding guide has advantages such as high rigidity and high damping,
There are problems such as fluctuation of required feed force due to stick-slip, reduction of positioning accuracy, excessive required feed force due to direct contact between the guide surface and the sliding surface, and wear of the contact portion.

On the other hand, as shown in FIG. 10, a static pressure guide slides on a sliding surface 1 of a moving body 112 such as a table, a column, or a saddle.
13, a static pressure pocket 115 is formed, and a pressure fluid is forcibly supplied to the static pressure pocket 115 via a throttle 116 to move a guide surface 111 of a support 110 such as a bed and a table, a column, a saddle, and the like. Sliding surface 113 of body 112
Are guided and supported in a non-contact state. Although this static pressure guide has advantages such as a small required feed force and high positioning accuracy, it has problems such as insufficient rigidity and damping properties, high precision in processing and assembly, and high cost. .

As described above, each of the dynamic pressure sliding guide and the static pressure guide has a problem. As a technique for solving this problem, for example, as disclosed in Japanese Patent Application Laid-Open No. 2-95529, a non-contact method has been proposed. Based on the static pressure guide that is the guide support, the supply pressure of the pressure fluid is reduced according to the conditions, and a part of the load of the moving body is supported by direct contact with the guide surface,
There is a technique for supporting the rest by fluid pressure.

However, in general, as shown in FIG. 10, in the static pressure guide, the moving body 112 is caused by the restricting effect of the fluid when the pressure fluid supplied to the static pressure pocket 115 is restricted by the land portion 114 and flows out. Due to factors that affect the flow of the fluid, such as the shape error of the static pressure pocket 115 and the land portion 114 and the surface roughness of the guide surface 111 and the sliding surface 113, the performance (rigidity) of the static pressure guide is Etc.) may change significantly. Therefore, the guide surface 111 of the support 110 and the sliding surface 113 of the movable body 112 are precision finished surfaces having a surface roughness of 1 μm or less through a precision finishing process such as lap finishing which is a finishing more accurate than polishing finishing. That is common.

Although the guide surface 111 and the sliding surface 113 of the static pressure guide are required to be finished with high precision as described above, the required accuracy is satisfied if the guide surface 111 and the sliding surface 113 are metal surfaces. Although high-precision processing can be performed, high-precision processing that satisfies required accuracy cannot be performed in the case of a resin-treated surface or the like. Therefore, the sliding surface 113
It is impossible to take measures against seizure such as sticking of a fluororesin sliding material.

Therefore, the static pressure guide is disclosed in Japanese Patent Application Laid-Open No. 2-95529.
As disclosed in the above publication, the supply pressure of the pressurized fluid is reduced according to conditions, a part of the load of the moving body 112 is supported by direct contact with the guide surface 111, and the rest is supported by the fluid pressure. When used, the guide surface 111 and the sliding surface 113 have less unevenness due to the high accuracy of the finished surface, and the contact area between them becomes large. This increases the required feed force and overloads the feed motor, etc. Therefore, there is a high possibility that the guide surface 111 and the sliding surface 113 are seized. That is, the technique disclosed in Japanese Patent Application Laid-Open No. 2-95529 has a problem in use when the moving body 112 is moving, regardless of whether the moving body 112 is stationary. In actual processing, there is a processing in which the cutting tool and the work are stationary, but there are many processings in which the cutting tool and the work relatively move. Therefore, the technology disclosed in Japanese Patent Application Laid-Open No. 2-95529 is not practical. It is difficult to adopt.

Therefore, as a technique for solving the above-mentioned problems, a surface pressure adjusting pocket is provided on a sliding surface of a moving body of a dynamic pressure sliding guide, and pressure oil is supplied to the surface pressure adjusting pocket to reduce the weight of the moving body. A part of the guide surface is supported by hydraulic pressure, and the rest is supported by direct contact between the guide surface of the support and the sliding surface of the moving body, so that the contact surface pressure between the guide surface and the sliding surface is reduced. Technology that guides and supports the sliding surface and the sliding surface in contact with each other to reduce the required feed force and suppress fluctuations in the required feed force while maintaining rigidity and damping properties.

[0009]

SUMMARY OF THE INVENTION A dynamic sliding guide is provided in a moving direction of a moving body by a dynamic pressure effect due to a viscosity of lubricating oil interposed between a guide surface and a sliding surface when the moving body is moved. The front part may be lifted, and the posture of the moving body may become unstable. In this case, if the surface pressure reducing pocket is provided on the sliding surface to reduce the contact surface pressure between the guide surface and the sliding surface as described above, the lifting of the front portion during the movement of the moving body becomes more remarkable, and the processing accuracy is increased. Had the problem of affecting

[0010]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. According to the first aspect of the present invention, lubricating oil is interposed between a guide surface of a support and a sliding surface of a moving body. In the sliding guide device for guiding and supporting the moving body in a state where the guide surface and the sliding surface are in contact with each other, a surface pressure reducing pocket formed on the sliding surface, and a pressure oil supply for supplying pressure oil to the surface pressure reducing pocket A throttle provided in the road to reduce the pressure of the pressure oil supplied to the surface pressure reduction pocket, wherein the movable body partially supports its own weight by the pressure oil supplied to the surface pressure reduction pocket. The sliding guide is supported and guided in a state where the surface pressure of the sliding surface is reduced.

According to a second aspect of the present invention, in the sliding guide device according to the first aspect, the surface pressure of the sliding surface is set to 0.1.
It is characterized by being adjusted to 02 MPa to 0.08 MPa. In the invention of claim 3, claim 1
Or in the slide guide device according to claim 2, the sliding surface is subjected to a fluororesin treatment for reducing sliding resistance, and the guide surface and the sliding surface to which the fluororesin treatment is applied are provided. It has a surface roughness of 1 μm to 7 μm.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, guide portions 2 are formed on both sides of an upper portion of a bed 1 of a machine tool as a support so as to extend in a direction perpendicular to the plane of FIG. 2a is formed.

A table 3, which is a moving body, is placed on the bed 1. On both sides of a lower surface 9 of the table 3,
A sliding surface 3a is formed at a position protruding downward from FIG. A side plate 4 is fixed to the lower surface 9 of the table 3 further outside the sliding surface 3a, and a back plate 5 is fixed to the lower surface of the side plate 4. The guide portion 2 of the bed 1 includes the table 3, the side plate 4, and the back plate. 5 surrounds the U-shape. The side plate 4 and the back plate 5 are provided with a gap of about 10 μm between the side surface and the lower surface of the guide portion 2, and the posture of the table 3 changes due to the dynamic pressure effect of the pressure oil when the table 3 moves. The side plate 4 and the back plate 5 abut against the side and lower surfaces of the guide portion 2, thereby suppressing an excessive change in the attitude of the table 3 and reducing the influence on the processing accuracy.

The shape of the lower surface 9 of the table 3 is as shown in FIG. That is, the lower surface 9 of the table 3 is located at a position facing the guide surface 2a of the bed 1 in FIG.
(In the vertical direction), a belt-shaped sliding surface 3a is formed toward the traveling direction of the table 3. On the surface of the sliding surface 3a, a turquite 16 (trade name) having a thickness of about 1 mm, which is a fluororesin sliding material for preventing seizure due to solid contact between the sliding surface 3a and the guide surface 2a, is attached. Note that the sliding surface 3a is adhered to the turquite 16 which is a fluororesin sliding material, but is not limited to being adhered, and the surface may be treated with a fluororesin by coating or the like.

The sliding surface 3a is provided with a surface pressure adjusting portion 11 whose both ends are separated by a discharge groove 10 formed in a direction perpendicular to the moving direction of the table 3.
Is formed with a rectangular concave surface pressure adjusting pocket 6 while leaving a land portion 12 of an appropriate width around. In the present embodiment, the surface pressure adjusting portions 11 are formed at two places at both ends in the moving direction along the moving direction of the table 3.
If the weight is heavy and the length is long, the surface pressure
What is necessary is just to increase the number of 1s.

An intermediate sliding surface 3 between the two surface pressure adjusting portions 11, 11 formed at both ends of the table 3 in the moving direction.
As shown in FIG. 2, an N-shaped concave oil groove 13 is formed in a. Since the oil groove 13 is appropriately formed in order to improve the lubricity of the sliding surface 3a, it may not be formed when the length of the table 3 in the moving direction is short.

As shown in FIG. 1, the table 3 is provided with a pressure oil supply passage 7 through which pressure oil supplied to the surface pressure adjusting pocket 6 by a pressure oil supply source such as a pump (not shown) flows. I have. The pressure oil supply path 7 has an opening 14 as an opening 14 in the surface pressure adjustment pocket 6 via a throttle 8, and the pressure supplied from the pressure oil supply path 7 to the surface pressure adjustment pocket 6 by the throttle 8. It is designed to reduce oil pressure.
Then, a part of the weight of the table 3 is supported by the pressure oil supplied to the surface pressure adjusting pocket 6, so that the surface pressure acting between the guide surface 2a of the bed 1 and the sliding surface 3a of the table 3 is reduced. Has become.

Here, the surface pressure P is the pressure per unit area of the sliding surface 3a, and the force acting on the sliding surface 3a is F,
Assuming that the area of the sliding surface 3a is S, P = F / S... The force F acting on the sliding surface 3a is represented by F = W−Pr × A (2) where W is the weight of the table 3, Pr is the supply pressure of the pressurized oil, and A is the area of the surface pressure reducing pocket. Therefore, the expression (1) is as follows: P = (W−Pr × A) / S (3) Therefore, by changing the supply pressure Pr of the pressurized oil and the area A of the surface pressure reducing pocket, the sliding surface 3
The surface pressure of a can be adjusted.

In the present specification, the term "surface pressure" refers to equation (3). Although not shown, a supply path for supplying lubricating oil to the oil groove 13 is formed separately from the pressure oil supply path 7 on the table 3. It is open as. In the guide device of the present invention, the contact pressure between the guide surface 2a and the sliding surface 3a is small and the possibility of seizure is small because the contact pressure is smaller than that of the conventional dynamic pressure sliding guide. The pressure oil supplied is of a viscosity less than or equal to that of the oil used in the conventional dynamic pressure sliding guide. Further, in the guide device of the present invention, since the guide surface 2a and the sliding surface 3a are guided in a contact state, the pressure oil used includes the guide surface 2a and the sliding surface 3a.
An extreme pressure additive for reducing the sliding resistance by forming an oil film on the surface is added.

The table 3 is guided and moved on the guide surface 2a of the bed 1 by a ball screw mechanism or a linear motor mechanism (not shown). Next, the operation principle of the guide device in the above configuration will be described. In the guide device of the present embodiment, when stationary, pressure oil is supplied to the surface pressure adjusting pocket 6 by a pressure oil supply source (not shown) to support a part of the weight of the table 3 and reduce the surface pressure of the sliding surface 3a. It is in a state of having done. At this time, the surface pressure of the sliding surface 3a is reduced, but the sliding surface 3a and the guide surface 2a are in contact. When the table 3 is moved by the operation of a ball screw mechanism or a linear motor mechanism (not shown), the table 3 is guided and moved in a state of floating a few μm as a whole by the dynamic pressure effect of the pressure oil. The pressure oil that has flowed into the guide surface 2a and the sliding surface 3
a, passes through the land portion 12 and flows out of the sliding surface 3a through the discharge groove 10.

At this time, the front of the moving direction of the table 3 tends to further rise. That is, when viewed microscopically, the distance to the guide surface 2a is longer at the front surface pressure adjustment pocket 6 in the moving direction of the table 3, and the distance to the guide surface 2a is shorter at the rear surface pressure adjustment pocket 6. As a result, the flow rate of the pressure oil flowing from the front surface pressure adjustment pocket 6 to the outside through the land portion 12 increases, but the flow rate of the pressure oil flowing into the surface pressure adjustment pocket 6 is restricted by the throttle 8. Therefore, as a result, the pressure in the surface pressure adjusting pocket 6 is reduced as compared with the case of the stationary state.

On the other hand, since the flow rate of the pressure oil flowing from the rear surface pressure adjusting pocket 6 to the outside through the land portion 12 is reduced, the pressure in the surface pressure adjusting pocket 6 is increased as compared with the stationary state. As a result, the internal pressure of the front surface pressure adjusting pocket 6 decreases, and the internal pressure of the rear surface pressure adjusting pocket 6 increases, so that the table 3 receives a force that sinks forward and lifts up the rear, thereby maintaining a horizontal posture. Dripping.

Next, the inventor made an experimental device based on the guide device of the present embodiment, and the surface pressure of the slide surface 3a, the surface roughness of the guide surface 2a and the slide surface 3a, and the width of the land 12 The optimum values of the diameter of the throttle 8 and the pressure ratio were examined. First, the surface pressure of the sliding surface 3a of the table 3 will be examined. In the present experimental apparatus, the weight of the table 3 is 978 kgf, the area of each surface pressure reduction pocket 6 is 48 cm ² , the number of surface pressure reduction pockets is 4, and the area of the sliding surface 3a is 420 cm ² .

FIG. 3 shows the table 3 shown in FIG. 1 in which the side plate 4 and the back plate 5 are removed, and the surface pressure of the sliding surface 3a is changed by changing the supply pressure of the pressurized oil in a state where the throttle 8 is not provided. 9 is a graph showing a relationship among a surface pressure, a required feed force, and a lift when the table 3 is at rest. FIG. 4 is a graph showing the relationship between the surface pressure, the required feed force, and the damping ratio under the same conditions as in the experiment of FIG.

From these graphs, it can be seen that high surface pressure is advantageous in terms of rigidity and damping, but disadvantageous in terms of required feed force, and conversely, low surface pressure is advantageous in terms of required feed force. Is disadvantageous in terms of rigidity and damping properties, and the lifting is remarkable, leading to a deterioration in posture. The surface pressure is set to 0.08 MPa to 0.02 MPa in consideration of the fact that the damping ratio is empirically 0.2 or less and that the conventional slide guide is set to a surface pressure of 0.1 MPa or more. It is desirable. Preferably, it is around 0.05 MPa.

Next, the guide surface 2a of the bed 1 and the table 3
The surface roughness of the sliding surface 3a will be discussed. In this experimental apparatus, the guide surface 2a was left as a metal surface, and the sliding surface 3a was coated with a fluororesin sliding material of about 1 mm thick turquite 16 as a measure against seizure.
Finished to a surface roughness of μm.

In the guide device of the present invention, the guide surface 2a and the sliding surface 3a are guided while maintaining the contact state, instead of the complete floating like the static pressure guide. Excessive contact causes an increase in the required feed force and wear on both surfaces, and in the stationary state of the table 3, the posture of the table 3 may be deteriorated depending on the contact state on both surfaces.
Further, in the guide device of the present invention, since the surface pressure is reduced by the pressure oil supplied to the surface pressure reduction pocket 6, the table 3
Lifting becomes remarkable when moving. Therefore, normally, the table 3 is processed after the posture change due to the movement becomes stable, such as when the table 3 is stationary or in a constant speed region.
Depending on the relationship between the moving stroke and the machining range, machining may be performed in the acceleration / deceleration region of the table 3, and in this case, the lifting of the table 3 also changes due to a change in the feed speed. When the maximum value of the lift is large, the change of the lift with respect to the speed change is also large. Therefore, when the maximum value of the lift (at the time of rapid traverse) exceeds about 12 μm, there is a high possibility that a problem occurs in processing accuracy. Therefore, it is desirable that the total surface roughness of both surfaces is about 12 μm or less, so that the upper limit of the surface roughness of each of the guide surface 2a and the sliding surface 3a is preferably 7 μm.

As for the lower limit, the surface roughness is less than 1 μm in the case of the static pressure guide, but if the surface roughness is smaller than 1 μm as in the case of the static pressure guide, the required accuracy is required in ordinary polishing. Therefore, there is a problem that special processing such as lapping is required, and processing cost is increased. In addition, if the surface roughness is too good, the supplied oil becomes difficult to be held on the surface of the sliding surface 3a, and there is no problem in the non-contact state guide such as the static pressure guide. However, in this embodiment, the guide surface is not provided. Since the sliding surface 2a and the sliding surface 3a are guided in a contact state, in the present embodiment, the lower limit is desirably 1 μm in consideration of the possibility that lubricity may be a problem.

Next, the width of the land 12 will be discussed.
In this experimental device, the width of the land 12 is set to 10 mm. In the guide device of the present invention, the guide surface 2a and the sliding surface 3a are guided in contact with each other, and when the table 3 is at rest, a part of the weight of the table 3 is supported by the direct contact between the sliding surface 3a and the guide surface 2a. In consideration of this, if the width of the land portion 12 is made too small, the possibility of the land portion 12 being deformed increases, so the width of the land portion 12 cannot be made too small. The width of the land portion 12 is generally set to about 5 mm in the case of the static pressure guide. However, the present invention is different from the static pressure in that the guide surface 2a and the sliding surface 3a are guided in contact with each other. Also need to be set wide. In the present invention, the turquite 16 made of a fluororesin sliding material is adhered to the sliding surface 3a as a measure against seizure.
The width of the land 12 is desirably set to 10 mm or more in consideration of the possibility of the peeling of the land 6 increasing.

Next, the diameter of the stop 8 will be discussed. In addition,
In this experimental apparatus, the diameter of the stop 8 is set to 0.4 mm. FIG. 5 shows a state in which the side plate 4 and the back plate 5 are removed from the table 3 shown in FIG. 1 and the diameter of the throttle 8 and the supply pressure of the pressure oil are changed in a state where the throttle 8 is provided. 6 is a graph showing the relationship between the supply pressure and the lifting of the diaphragm 8 for each diameter of the diaphragm 8. From this graph, when there is no diaphragm and when the diaphragm diameter is 1.0 mm to 0.8 mm, the pressure oil supply pressure suddenly rises around 5 kgf / cm ² , which is effective for stabilizing the posture of the table 3. It turns out that there is almost no. Also, if the diameter of the throttle 8 is too small, there is a high possibility that dust or the like in the pressurized oil becomes clogged, which causes a problem in the reliability of the guide device. Therefore, the diameter of the throttle 8 is set to 0.4 mm to 0.6 mm. It is desirable.

Next, the pressure ratio will be discussed. Generally, the pressure ratio is a term used in the static pressure guide, and is a ratio of the internal pressure of the pocket to the supply pressure of the pressurized fluid. In the present embodiment, when the table 3 is at rest, the table 3 completely floats. The pressure oil supplied to the surface pressure reducing pocket 6 does not leak to the outside, so that the internal pressure of the surface pressure reducing pocket 6 does not decrease. Therefore, in the present embodiment, the pressure ratio in a state where the table 3 rises by several μm during the movement of the table 3 and the pressure oil supplied into the surface pressure reduction pocket 6 leaks out of the surface pressure reduction pocket 6 is described. Shall be represented.

The pressure ratio is determined by the lifting of the moving body during movement (determined by the weight of the table 3, the area and number of the surface pressure reducing pockets 6, the supply pressure of the pressure oil, and the type of the pressure oil), and the surface pressure adjusting unit 11. Dimensions (surface pressure reduction pocket 6 and land 12
Can be calculated from the capillary constant of the throttle 8 (determined by the length and the diameter of the throttle 8). When this pressure ratio is calculated according to the above-mentioned set values of the surface pressure, the throttle diameter, and the like for the experimental apparatus, 0 .95. Note that 0.6
When a stop having a diameter of mm is used, the value is 0.98.

In general, the relationship between the pressure ratio and the rigidity of the static pressure guide is as shown in FIG. 6 (described on page 141 of the static pressure bearing, written by Toshiro Aoyama, published in February 1990). Note that the capillaries, orifices, constant flow valves, and diaphragm valves in the figures represent the types of restrictors viewed from the shape, and the restrictor 8 used in the present embodiment is classified as a capillary restrictor according to the shape. Therefore, the description will be made based on the graph of the capillary in FIG. In the case of static pressure guidance using a capillary restrictor,
From FIG. 6, it can be seen that the rigidity is highest when the pressure ratio is around 0.6 to 0.7.
It is often designed to be about 6 to 0.7. The same can be said for the present experimental device, but the pressure ratio of this experimental device is 0.95, which is out of the question for static pressure guidance. This is one of the major features.

As described above, the pressure ratio represents the ratio of the internal pressure of the pocket to the supply pressure of the pressure fluid. Therefore, to adjust the pressure ratio, the flow rate of the pressure fluid supplied to the pocket and the flow out of the pocket are adjusted. What is necessary is just to adjust the difference between the flow rates of the pressure fluids. In the present embodiment, the guide surface 2 adjusts the diameter of the aperture 8, adjusts the width of the land portion 12,
For example, a measure such as adjusting the surface pressure acting between the sliding surface 3a and the sliding surface 3a (the floating amount changes so that the outflow amount of the fluid changes) can be considered.

However, regarding the diameter of the throttle 8, the width of the land portion 12, and the surface pressure of the sliding surface 3a, there is almost a limit in setting design numerical values in the direction of reducing the current pressure ratio of 0.95 to a small value. Conceivable. With this in mind,
It is desirable to determine the design value of each element constituting the guide device so that the pressure ratio becomes 0.9 to 0.98. Next, an experiment performed by the present inventor to confirm the effect of the aperture 8 will be described.

FIG. 7 shows the case where the side plate 4 and the back plate 5 shown in FIG. 1 are attached and the diaphragm having a diameter of 0.4 mm is used. It is a graph showing the relationship. In this experiment, by setting the supply pressure of the pressurized oil to 4 kgf / cm ² , the surface pressure of the sliding surface 3 a was 0.049 MPa (0.5
kgf / cm ² ). By the way, in this case, from the area and the number of the above-mentioned surface pressure reducing pockets 6, 4 × 48 cm ² × 4 kgf / c is calculated by the hydraulic pressure.
A force of m ² = 768 kgf is generated, supporting about 79% of the table 3's own weight of 978 kgf.

According to FIG. 7, the guide device according to the present embodiment has a lift less than half that of the conventional guide device without a throttle, and cannot be considered with a static pressure guide having a pressure ratio of 0.95. It was confirmed that the effect of stabilizing the posture was obtained even with the pressure ratio. FIG. 8 shows the relationship between the feed speed and the required feed force for the case where a 0.4 mm diameter diaphragm is used with the side plate 4 and the back plate 5 shown in FIG. It is a graph represented.

FIG. 8 confirms that the guide device provided with the throttle according to the present embodiment has the effect of reducing the required feed force in all speed ranges as compared with the conventional guide device having no throttle. .

[0039]

According to the present invention, a sliding guide device for guiding and supporting a moving body with lubricating oil interposed between the guide surface of the support and the sliding surface of the moving body with the guide surface and the sliding surface being in contact with each other. In, a surface pressure reducing pocket formed on the sliding surface,
A throttle provided in a pressure oil supply path for supplying pressure oil to the surface pressure reduction pocket, and a throttle for reducing the pressure of the pressure oil supplied to the surface pressure reduction pocket; Part of its own weight is supported by the pressure oil supplied to the pocket, and the surface pressure of the sliding surface is 0.02 MPa to 0.08 M
Since it is supported and guided in a state reduced to Pa, the surface pressure of the sliding surface of the moving body is reduced while maintaining rigidity and damping properties,
The required feed force can be reduced and the required feed force fluctuation can be suppressed, and a change in the posture of the moving body during movement can be suppressed by the effect of the aperture.

The sliding surface of the moving body is treated with a fluororesin to reduce sliding resistance.
Since the guide surface of the support and the sliding surface of the moving body subjected to the fluororesin treatment have a surface roughness of 1 μm to 7 μm, lubrication can be maintained and sliding resistance can be reduced, and smooth feeding can be achieved. I can guide you.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a slide guide device according to an embodiment of the present invention.

FIG. 2 is a plan view and a partial cross-sectional view illustrating a structure of a lower surface of a moving body of the slide guide device according to the embodiment of the present invention.

FIG. 3 is a graph showing the relationship between the surface pressure, the required feed force and the lifting of the sliding guide device of the present invention.

FIG. 4 is a graph showing the relationship between the surface pressure, the required feed force, and the damping ratio of the slide guide device of the present invention.

FIG. 5 is a graph showing the relationship between the supply pressure of pressurized oil and the lifting of the sliding guide device of the present invention for each of the aperture diameters.

FIG. 6 is a graph showing a relationship between a pressure ratio and rigidity in a static pressure guide.

FIG. 7 is a graph comparing the relationship between the feed speed and the lifting of the sliding guide device of the present invention with and without a throttle.

FIG. 8 is a graph comparing the relationship between the feed speed and the required feed force of the slide guide device of the present invention with and without a throttle.

FIG. 9 is a schematic explanatory view of a dynamic pressure sliding guide.

FIG. 10 is a schematic explanatory view of a static pressure guide.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Bed 2 Guide part 2a Guide surface 3 Table 3a Sliding surface 5 Back plate 6 Surface pressure adjustment pocket 7 Pressure oil supply path 8 Restrictor 11 Surface pressure adjustment part 12 Land part 16 Turkite (fluorine resin treatment)

Claims (3)

[Claims] 1. A sliding guide device for guiding and supporting a moving body in a state in which lubricating oil is interposed between a guide surface of a support and a sliding surface of the moving body and the guide surface and the sliding surface are in contact with each other. A formed surface pressure reduction pocket, and a throttle provided in a pressure oil supply path that supplies pressure oil to the surface pressure reduction pocket, and a throttle that reduces the pressure of the pressure oil supplied to the surface pressure reduction pocket, A sliding guide device, wherein the movable body is supported and guided with a part of its own weight supported by pressure oil supplied to the surface pressure reducing pocket and in a state where the surface pressure of the sliding surface is reduced. 2. The sliding guide device according to claim 1, wherein the surface pressure of the sliding surface is 0.02 MPa to 0.08 MPa.
(a) a slide guide device which is adjusted to a. 3. The sliding guide device according to claim 1, wherein the sliding surface is subjected to a fluororesin treatment for reducing sliding resistance, and the sliding surface is treated with the guide surface and the fluororesin treatment. The sliding surface provided with 1 μm
A sliding guide device having a surface roughness of m to 7 µm.